ENTEGRIS INC Form 10-K Annual Report Filed 2023-02-23

Table of Contents

UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

WASHINGTON, D.C. 20549

________________________________________

FORM 10-K

________________________________________

(Mark One)


☒			ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the fiscal year ended December 31, 2022


☐			TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the transition period from to

Commission file number: 001-32598

_______________________________________

Entegris, Inc.

(Exact name of registrant as specified in its charter)

_______________________________________


Delaware			41-1941551
(State or Other Jurisdiction of Incorporation or Organization)			(I.R.S. Employer Identification No.)

129 Concord Road, Billerica, Massachusetts 01821

(Address of principal executive offices and zip code)

(978) 436-6500

(Registrant’s telephone number, including area code)

Securities registered pursuant to Section 12(b) of the Act:


Title of Each Class	Trading Symbol(s)	Name of Exchange on which Registered
Common Stock, $0.01 Par Value	ENTG	The Nasdaq Global Select Market

Securities registered pursuant to Section 12(g) of the Act: None

_______________________________________________________

Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. ☒ Yes ☐ No

Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or 15(d) of the Act. ☐ Yes ☒ No

Indicate by check mark whether the registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days. Yes ☒ No ☐

Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T (§232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit such files). Yes ☒ No ☐

Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smaller reporting company, or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smaller reporting company,” and “emerging growth company” in Rule 12b-2 of the Exchange Act.


Large Accelerated Filer	☒	Accelerated Filer	☐
Non-Accelerated Filer	☐	Smaller reporting company	☐
		Emerging growth company	☐

If an emerging growth company, indicate by check mark if registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. ¨

Table of Contents

Indicate by check mark whether the registrant has filed a report on and attestation to its management’s assessment of the effectiveness of its internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b)) by the registered public accounting firm that prepared or issued its audit report. ☒

If securities are registered pursuant to Section 12(b) of the Act, indicate by check mark whether the financial statements of the registrant included in the filing reflect

the correction of an error to previously issued financial statements. ☐

Indicate by check mark whether any of those error corrections are restatements that required a recovery analysis of incentive-based compensation received by any of the

registrant’s executive officers during the relevant recovery period pursuant to § 240.10D-1(b). ☐

Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act). Yes ☐ No ☒

The aggregate market value of voting stock held by non-affiliates of the registrant, based on the last sale price of the Common Stock on July 2, 2022, the last business day of registrant’s most recently completed second fiscal quarter, was $9,345,493,438. Shares held by each officer and director of the registrant and by each person who owned 10 percent or more of the outstanding Common Stock have been excluded from this computation in that such persons may be deemed to be affiliates of the registrant. The determination of affiliate status for this purpose is not necessarily a conclusive determination for other purposes.

As of February 13, 2023, 149,381,222 shares of the registrant’s Common Stock were outstanding.

DOCUMENTS INCORPORATED BY REFERENCE

Portions of the registrant’s Definitive Proxy Statement for its 2023 Annual Meeting of Stockholders scheduled to be held on April 26, 2023, or the 2023 Proxy Statement, which is scheduled to be filed with the Securities and Exchange Commission, or SEC, not later than 120 days after December 31, 2022, are incorporated by reference into Part III of this Annual Report on Form 10-K. With the exception of the portions of the 2023 Proxy Statement expressly incorporated into this Annual Report on Form 10-K by reference, such document shall not be deemed to constitute part of this Annual Report on Form 10-K.


Auditor Name	Auditor Location	Auditor Firm ID
KPMG LLP	Minneapolis, Minnesota	185

Table of Contents

ENTEGRIS, INC.

INDEX TO ANNUAL REPORT ON FORM 10-K

FOR THE FISCAL YEAR ENDED DECEMBER 31, 2022



	Caption	Page
PART I
Item 1.	Business	1
Item 1A.	Risk Factors	15
Item 1B.	Unresolved Staff Comments	29
Item 2.	Properties	30
Item 3.	Legal Proceedings	30
Item 4.	Mine Safety Disclosures	31

PART II
Item 5.	Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities	32
Item 6.	Reserved	33
Item 7.	Management’s Discussion and Analysis of Financial Condition and Results of Operations	34
Item 7A.	Quantitative and Qualitative Disclosures About Market Risk	47
Item 8.	Financial Statements and Supplementary Data	47
Item 9.	Changes in and Disagreements with Accountants on Accounting and Financial Disclosure	47
Item 9A.	Controls and Procedures	47
Item 9B.	Other Information	50
Item 9C.	Disclosure Regarding Foreign Jurisdictions that Prevent Inspections	50

PART III
Item 10.	Directors, Executive Officers and Corporate Governance	50
Item 11.	Executive Compensation	52
Item 12.	Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters	52
Item 13.	Certain Relationships and Related Transactions, and Director Independence	52
Item 14.	Principal Accountant Fees and Services	53

PART IV
Item 15.	Exhibit and Financial Statement Schedules	54
Item 16.	Form 10-K Summary	58
	Signatures	59
	Index to Financial Statements	F-1

Table of Contents

PART I

Item 1. Business.

OUR COMPANY

Entegris, Inc. (“Entegris”, “the Company”, “us”, “we”, or “our”) is a leading supplier of advanced materials and process solutions for the semiconductor and other high-technology industries. We help our customers maximize manufacturing yields, reduce manufacturing costs and enable higher device performance by leveraging our unique breadth of capabilities to provide mission critical enhanced materials and process solutions for the most advanced manufacturing environments.

Semiconductors, or integrated circuits, are key components in electronic devices that have changed, and that we believe will continue to change, the way we live, communicate and work. Products and emerging applications such as smartphones, 5G wireless technology, cloud computing, the Internet of Things, machine learning, artificial intelligence, high performance computing, smart transportation, smart healthcare, gaming and virtual reality will require faster, more powerful and more energy efficient semiconductors. We believe these new trends, combined with existing applications, will drive long-term secular growth for semiconductors. We expect that demand for semiconductors will reach $1 trillion by 2030, which would create significant new opportunities for our products.

To meet requirements for improved chip performance and density, semiconductor manufacturing processes have rapidly become increasingly complex by moving to smaller geometries and adopting new device architectures. These complex processes are enabled by new and innovative materials; and higher materials purity, quality and stability are critical to improving and maximizing yields. We believe Entegris offers the industry’s most comprehensive electronic materials portfolio, operating squarely at the crossroads of material science and materials purity. These two core capabilities are quickly becoming critical enablers of our customers’ technology roadmaps. These trends are expected to translate to a higher served addressable market and expanding Entegris content per wafer and, by extension, growth above the market for Entegris.

Our business is organized and operated in four operating segments, which align with the key elements of the advanced semiconductor manufacturing ecosystem.

•The Specialty Chemicals and Engineered Materials segment, or SCEM, provides high-performance and high-purity process chemistries, gases and materials, and safe and efficient materials delivery systems to support semiconductor and other advanced manufacturing processes.

•The Advanced Planarization Solutions segment, or APS, provides complementary chemical mechanical planarization solutions, advanced materials and high-purity wet chemicals; including chemical mechanical planarization (“CMP”) slurries, pads, formulated cleans and other electronic chemicals.

•The Microcontamination Control segment, or MC, offers solutions to filter and purify critical liquid and gaseous chemistries used in semiconductor manufacturing processes and other high-technology industries.

•The Advanced Materials Handling segment, or AMH, develops solutions to monitor, protect, transport and deliver critical liquid chemistries, wafers and other substrates for a broad set of applications in the semiconductor industry, life sciences and other high-technology industries.

These segments share common business systems and processes, technology centers and technology roadmaps. With the complementary capabilities across these segments, we believe we are uniquely positioned to create new, co-optimized and increasingly integrated solutions for our customers. For example, after the acquisition of CMC Materials, Inc. (“CMC Materials”), we now offer an end-to-end offering for our customers consisting of advanced deposition materials from our SCEM segment, CMP slurries, pads and post-CMP cleaning chemistries from our APS segment, CMP slurry filters from our MC segment, and CMP slurry high-purity packaging and fluid monitoring systems from our AMH segment.

RECENT EVENTS

On July 6, 2022 (the “Closing Date”), we completed the acquisition of CMC Materials. We acquired all of the issued and outstanding common shares of CMC Materials for $133.00 in cash and 0.4506 shares of our common stock per share, representing a total purchase price (inclusive of debt retired and cash assumed) of $6.0 billion (based on our closing price on June 30, 2022), including $3.8 billion in cash paid to CMC Materials’ shareholders, the issuance of 12.9 million shares of our common stock (excluding unvested CMC stock options and unvested CMC restricted stock units, restricted shares and performance share units equity awards assumed), $0.9 billion of debt retired and approximately $0.3 billion of acquired cash. We financed the cash portion of the purchase price through debt financing. See Note 10 to our consolidated financial statements included in Item 8 of Part II of this Annual Report on Form 10-K for further discussion of the debt financing that occurred prior to and on the Closing Date.

On October 11, 2022, the Company announced a definitive agreement to sell the Pipeline and Industrial Materials (“PIM”) business, which became part of the Company with the recent acquisition of CMC Materials, to Infineum USA L.P. for $240.0

Table of Contents

million, subject to customary purchase price adjustments. The PIM business consists of drag-reducing agents (“DRAs”), valve greases, cleaners and sealants, and related equipment supporting pipeline and adjacent industries. Effective February 10, 2023, the Company terminated the definitive agreement in accordance with its terms. At the time of the termination, the transaction had not received clearance under the Hart-Scott-Rodino Antitrust Improvements Act of 1976 (the “HSR Act”).

On January 20, 2023, the Company announced a definitive agreement to sell QED Technologies International, Inc. (“QED”), which became part of the Company with the recent acquisition of CMC Materials, to an affiliate of Quad-C Management, Inc. for approximately $135.0 million, subject to customary purchase price adjustments. QED offers magnetorheological finishing (“MRF”) polishing and subaperture stitching interferometry (“SSI”) metrology manufacturing solutions.

THE SEMICONDUCTOR ECOSYSTEM

The manufacture of semiconductors requires hundreds of highly complex and sensitive manufacturing steps, during which a variety of materials are repeatedly applied to a silicon wafer to build integrated circuits on the wafer surface. The areas of the semiconductor ecosystem that rely most heavily on our products and solutions are described below.

Etch and Resist Strip. During the etch process, specific areas of thin film that have been deposited on the surface of a wafer are removed to leave a desired circuit pattern. After the etch process, the hardened resist must be completely removed and the etched area must be cleaned, which requires the use of high purity chemicals. Several of our products are utilized during and after the etch process, including:

•Selective etch chemistries to enable high aspect ratio structures, such as 3D-NAND;

•Formulated cleaning solutions and high-purity wet chemicals to remove photoresists and post-etch residues;

•Filters and purifiers, which help to ensure the purity of formulated cleaning chemistries and to achieve desired yields in the etch processing steps; and

•Precision-engineered coatings to provide barriers to corrosive chemistries in the etch environment, protect surfaces of equipment components from erosion and minimize particle generation.

Deposition. Deposition is a process during which certain materials are transferred to the surface of a wafer. Deposition processes include physical vapor deposition, or PVD, chemical vapor deposition, or CVD, atomic-layer deposition, or ALD, and electro-plating. We provide products that can be used during most of these deposition processes that are critical to enabling new device architectures, which are deigned to ensure device performance and achieve the targeted manufacturing yields of semiconductor manufacturers, including:

•Advanced precursor materials, such as AlCl3, MoO2Cl2, HfCl4, and ZrCl4, which are utilized to meet the semiconductor industry’s composition, uniformity and thickness requirements of deposited films; and

•Filtration and purification products, which are used to remove contaminants during the deposition process, consequently reducing defects on wafers.

Photolithography. Photolithography, a process repeated during semiconductor fabrication, is used to print complex circuit patterns onto the wafer. During this process, the wafer is coated with a thin film of light-sensitive material, called photoresist. Light is projected to expose the photoresist, which is then developed to create a pattern. Our product offerings that can be used throughout the photolithography process, include:

•Liquid filtration, high-purity packaging and high-precision dispense systems designed to ensure the pure, accurate and uniform dispense of contamination-free photoresists onto the wafer, enabling manufacturers to achieve acceptable yields in the manufacturing process; and

•Gas microcontamination control solutions designed to eliminate airborne contaminants that often disrupt effective photolithography processes.

Ion Implant. Ion implantation is a method repeated many times during semiconductor fabrication where dopants are introduced into a semiconductor wafer enhancing conductivity. Those of our products used during the ion implant process include:

•Safe Delivery Source®, or SDS®, and Vacuum Actuated Cylinders, or VAC®, gas delivery systems designed to ensure the safe, effective and efficient delivery of the necessary gases; and

•Electrostatic chucks and proprietary low temperature plasma coating processes for core components, which are critical elements of ion implantation equipment.

Chemical Mechanical Planarization. Chemical mechanical planarization, or CMP, is a polishing process used by semiconductor manufacturers to planarize, or flatten, many of the layers of material that have been deposited on silicon wafers.

Table of Contents

We expanded our offerings used during and immediately following the CMP process with the acquisition of CMC Materials. Our offerings include:

•CMP slurries for polishing a wide range of materials used in semiconductors, including tungsten, dielectric materials, copper, tantalum (commonly referred to as “barrier”), aluminum, silicon carbide, or SiC, and gallium nitride, or GaN;

•CMP polishing pads, which are used in conjunction with slurries in the CMP process, used on a variety of polishing tools and wafers, over a range of technology nodes and applications, including tungsten, copper, and dielectrics;

•Formulated cleaning chemistries, which remove residues from wafer surfaces after the CMP process;

•Filtration and purification solutions, which are used to remove select particles and contaminants from slurries and cleaning chemistries that can cause defects on a wafer’s surface;

•Roller brushes, which are used in conjunction with our formulated cleaning chemistries to clean the wafer after completion of the CMP process in order to prepare the wafer for subsequent operations;

•Pad conditioners, which are used to prepare the surface of the CMP polishing pad prior to every polishing cycle; and

•Process monitoring and control equipment, that maintain the integrity of the CMP slurries.

Wafer and Reticle Transport. Our wafer carriers are high-purity “micro-environments” that carry wafers between manufacturing process steps. These critical products protect wafers from damage or abrasion and minimize contamination during transportation and automated processing. Protection of processed wafers is essential to our customers because wafer processing involves hundreds of steps, can take several weeks and therefore scrapping damaged wafers is costly. Our extreme ultraviolet (EUV) reticle pod is designed to provide defect-free protection of EUV reticles during shipping, storage, handling, and vacuum-transferring operations.

Chemical Handling. Semiconductor manufacturing and other high-technology manufacturing processes utilize large volumes of high-purity and hazardous chemicals. We provide solutions for the handling of such chemicals, including:

•Ultra-high purity chemical container products, such as drums, flexible packaging and associated coded connection systems, which are designed to maintain chemical purity, maximize utilization and ensure safe transport, containment and dispense of valuable, ultra-clean process fluids, from bulk chemical manufacturing to point-of-use in the manufacturing process; and

•Ultra-pure valves, fittings, tubings and sensing and control products, which are used to distribute these chemicals around the fab and in wet process tools.

Wafer and Package Testing. In our ITS business, which was added to our platform as part of the CMC Materials acquisition, we develop and manufacture high-performance consumable products for cleaning advanced probe cards and test sockets at semiconductor manufacturing facilities. We also design innovative polymer products for semiconductor fabs that improve front-end tool uptime and reduce operating costs.

Other Markets. Many of the processes used to manufacture semiconductors are also used to manufacture flat panel displays, high-purity chemicals, solar cells, optical magnetic storage devices and light-emitting diodes, or LEDs, resulting in the need for similar filtration, purification, control and measurement capabilities. We seek to leverage our products, technologies, expertise and core capabilities to address these important market opportunities and pursue opportunities in certain life sciences applications.

INDUSTRY TRENDS

Emerging and Existing Applications. The market for semiconductors has grown significantly over the past few decades, and we expect this long-term trend to continue. We believe that smartphones, 5G wireless technology, cloud computing, the Internet of Things, machine learning, artificial intelligence, high performance computing, smart transportation, smart healthcare, gaming and virtual reality will drive growth in the demand for semiconductors, drive wafer starts and create significant opportunities for our products. Existing applications in data processing, wireless communications, broadband infrastructure, personal computers, handheld electronic devices and other consumer electronics are also expected to drive demand for semiconductors, and in turn, demand for our products.

Manufacturing Complexity and Architecture. Emerging applications require more powerful, faster and more energy-efficient semiconductors. In response, semiconductor architectures are changing, with transistor design increasing in complexity, the use of multilayered patterning (for example, extreme ultraviolet lithography), structures such as FinFET, 3D NAND and gate-all-around, and shrinking dimensions. These advanced architectures require more process steps, new, innovative materials and more sophisticated contamination control. For example, leading-edge semiconductor manufacturers are moving towards atomic layer scale, where the precision of the manufacturing process and purity of the materials used is vital to maintain device integrity. These materials need to be supplied and delivered at increasing levels of purity and control,

Table of Contents

from point-of-production to point-of-dispense on the wafer to improve and maximize yields. We believe that demand for our materials and consumable products will benefit from the increase in process steps in lithography, deposition, CMP and etch and clean required to manufacture leading-edge semiconductors.

Advanced Materials. New advanced materials have played a significant role in enabling improved device performance, and we expect this trend to continue. As dimensions get smaller, more novel materials will be required to enable transistor connectivity. We believe our portfolio of critical materials addresses the challenges our customers face as they introduce more complex architectures and search for new materials to improve the performance of their devices. These critical materials include advanced deposition materials, implant gases, CMP slurries, formulated cleaning chemistries, selective etch chemistries and high-purity wet chemicals.

Materials Purity. As feature size decreases and 3D structures proliferate, contamination control has become a critical enabler for our semiconductor customers in achieving acceptable device yields. Our advanced filtration and purification products and solutions for air, bulk or specialty gas, and wet chemicals are designed to reduce defects and enable higher yields for our customers. Our materials handling solutions protect critical materials throughout the fabrication process, allowing our customers to store, process and transport critical materials in ultra-pure environments, throughout the manufacturing process. We believe that the trend for greater materials purity will provide opportunities to utilize our capabilities to provide innovative materials management, filtration, purification, transport and process solutions to semiconductor customers.

Geopolitical Implications of the Semiconductor Industry. We have seen, and expect to continue to see, governments have an interest in fostering the development of a domestic or local semiconductor ecosystem. Examples include the CHIPS Act, EU CHIPS Act and similar initiatives in Japan and Korea. We have been proactive in light of these trends by developing a manufacturing strategy to better serve our customers as they build new fabs in various countries. Recent examples of this strategy include new facility located in Kaohsiung Science Park (“KSP”) in Taiwan and the recent announcement of our new facility in Colorado Springs, CO. Our KSP site will soon become our largest facility and will enhance our ability to serve our customers efficiently and effectively in Taiwan and other Asia-pacific locations. The Colorado Springs site is intended to increase our service levels to new fabs expected to be built in the United States and provide us with greater manufacturing resiliency in the form of enhanced business continuity plans.

Reliance on Trusted Suppliers. Our customers require that their key materials suppliers demonstrate greater capabilities and efficiencies in their processes, including sustainability, scalability, flexible manufacturing, quality control, supply chain management and the ability to effectively collaborate on solutions to problems. We believe that we will be able to leverage our manufacturing, operational and technical capabilities, along with our broad technology portfolio and expanding scale, to become an increasingly important strategic supplier to our customers. We have deployed technical and manufacturing resources in strategic locations to enable us to collaborate with our customers. Furthermore, we believe that the greater scale we achieved from the acquisition of CMC Materials will allow us to better serve our customers, invest more in ER&D and bring complementary, co-optimized solutions to market faster than ever before.

Continued Consolidation. Our customer base within the semiconductor industry has consolidated in recent years through mergers and acquisitions. As a result, the importance of maintaining and developing strong and close relationships with our customers becomes even more essential. We also seek to further broaden our customer base by leveraging our products, technologies, expertise and core capabilities in serving semiconductor applications to address adjacent market opportunities, including in manufacturing processes for flat panel displays, high-purity chemicals, solar cells, optical magnetic storage devices, LEDs and products for life sciences applications.

OUR COMPETITIVE STRENGTHS AND BUSINESS STRATEGY

We believe that our platform is well-positioned for several reasons.

•Following the acquisition of CMC Materials, approximately 80% of our revenue during 2022 was unit driven or recurring in nature, from products consumed as a result of the semiconductor manufacturing process. As a result, our revenue is generally more impacted by overall global semiconductor demand and global GDP growth, rather than the sales of semiconductor capital equipment, which has historically been more cyclical.

•Our solutions are increasingly specified and tailored to meet our customers’ unique process conditions. Therefore, switching away from our products may be costly and time consuming for our customers and may introduce risk to their manufacturing yields.

•Our product portfolio is broad and not overly concentrated on any single product or product platform. As of December 31, 2022, we offered over 30,000 standard and customized products, and in 2022 no single product platform represented more than 4% of our net sales.

Table of Contents

•Our customer base is diverse, and we are not overly dependent on any one single customer. As of December 31, 2022, our top ten customers make up 43% of our sales. Our customers include a broad cross-section of the semiconductor ecosystem, from chemical manufacturers, and equipment manufacturers, to semiconductor manufacturers.

•We believe the cash generated from our business will allow us to pay down our debt on the time frame we have publicly communicated, while also investing in the research and development and advanced manufacturing capabilities necessary to maintain and expand our technology leadership and to drive organic growth.

Customers Collaboration. We view the strong relationships we have with our customers, which include leading logic and memory semiconductor manufacturers, original equipment manufacturers (“OEMs”) and semiconductor materials suppliers, as critical to our long-term success. Our expansive global presence allows us to meet our customers where they operate, which has enabled us to build strong relationships with them. We intend to reinforce and further strengthen these relationships through, among other things, collaborations and joint development activity. These customer relationships provide us with collaboration opportunities at the early product design stage (in certain cases years ahead of commercialization), which facilitate our ability to introduce new products and applications that serve our customers’ needs. Due to the specialized nature of our products, complexity of our customers’ manufacturing processes, customer qualification requirements and costs associated with re-formulation and re-qualification, we believe we have a strong position with our customers.

Technology Leadership and Strong, Diverse Portfolio. Our customers need suppliers that can provide a broad range of advanced, customized, reliable and cost-effective products and materials, as well as the technological and application expertise necessary to enhance their productivity, quality and yield, especially as they drive towards more advanced technology nodes. We are committed to our strategy of providing customers with innovative technologies and solutions for their evolving manufacturing needs and we continuously seek to engage with leading logic and memory manufacturers to further advance their technology roadmaps. For example, we have introduced sub-5 nanometer filtration products, advanced deposition materials for next generation transistor and interconnect technologies, polishing slurry and pad solutions with post-cleaning formulations to meet the needs of advanced memory applications, advanced reticle pods for extreme ultra-violet, or EUV, photolithography applications, advanced 300 millimeter wafer carriers and advanced coatings to meet the rigorous defectivity specifications for the manufacturing of advanced technology nodes. We believe our comprehensive offering of materials and products creates a competitive advantage as it enables us to meet a broad range of customer needs and provide a single source of product offerings for semiconductor device and equipment manufacturers, which can often translate to shorter time-to-solution and time-to-market for our customers. Additionally, it allows us to serve many aspects of the semiconductor manufacturing ecosystem and to leverage our technology to develop co-optimized solutions.

To continue to advance our technology and product offerings, particularly to meet the needs of next generation technology nodes, we are committed to plans for significant investment in research and development initiatives, having spent approximately $229.0 million, $167.6 million and $136.1 million on such activities in 2022, 2021 and 2020, respectively, representing 7.0%, 7.3% and 7.3% of our net sales, in 2022, 2021 and 2020, respectively. Our research and development efforts have been increasingly directed towards innovation for advanced technology nodes. We plan to continue making substantial investments in research and development activities.

Global Infrastructure. We have a global infrastructure of design, manufacturing, logistics, distribution, service and technical support facilities to meet the needs of our global customers. We are further enhancing this footprint with the construction of a new manufacturing center of excellence in Taiwan, our KSP facility, which will be our largest manufacturing facility and is expected to start production in 2023. In addition, we have recently announced an investment in a new facility in Colorado Spring, CO and added new capacity in liquid filtration in the Billerica, MA and Yonezawa, Japan, in deposition materials in Toronto, and materials handling in Chaska, MN and JangAn, Korea. These investments are intended to better support our customers regionally and to be even more responsive to our customers’ future growth.

Operational Excellence. Our customers are increasingly focused on the effectiveness, dependability and consistency of their supply chains. Our strategy is to continue to develop our broad supply chain and manufacturing capabilities into a competitive advantage by driving operational excellence and operating in a manner that ensures the safety of our employees and the quality of our products. We are focused on the following priorities that we believe enable us to perform at the high level that our customers expect.

•Investing in and using manufacturing equipment and facilities incorporating leading-edge process technology, including advanced cleanroom and cleaning procedures.

•Implementing automated manufacturing, statistical process controls, quality and supply chain management systems.

•Maintaining a highly-skilled and agile organization, capable of rapid design, prototyping and ramping to high volume manufacturing while promptly responding to new customer requirements and feedback.

Leveraging Our Collective Expertise. We leverage our expertise across our four segments and across our broad portfolio of advanced materials, materials handling and purification capabilities to create innovative, new and co-optimized solutions to

Table of Contents

address unmet customer needs. For example, certain of our formulated cleaning chemistry products are developed and manufactured by our SCEM segment, with collaboration from our MC segment, packaged with our ultra-clean container and connector system made by our AMH segment, and delivered to the process tools through fluid handling systems also made by our AMH segment. In process tools, these chemistries may go through purification systems produced by our MC segment. Similarly, our advanced deposition materials business requires comprehensive capabilities across several disciplines, including the synthetization of unique molecules, specialized knowledge of how to purify these materials and the capability to safely transport and deliver them onto the wafer at a high throughput. With the addition of CMC Materials, we will seek to develop co-optimized, end-to-end solutions and bring them to market more quickly, such as polishing solutions for new deposition materials and optimized filtration solutions for new abrasive materials. Further, as the semiconductor industry looks to new interconnect metals like molybdenum, our portfolio of deposition precursors, CMP slurries and pads, post-CMP cleans, selective etch formulations, combined with our filtration, sensing, and delivery products will enable us to create end-to-end solutions and position our customers to enhance their device performance and yield.

Corporate Social Responsibility. We seek to embed our corporate social responsibility program into our business strategy. Our program is built around the four core pillars of Innovation, Safety, Personal Development and Inclusion and Sustainability. The program includes goals for each of the four pillars to guide us towards 2030. During 2022, we released our second annual corporate social responsibility report, which provided an update on our progress toward our 2030 goals and performance on our objectives from our 2020 baseline. Our recent corporate social responsibility accomplishments included achieving a “Silver” level from EcoVadis, an “A” rating from MSCI and receiving the ESG Supplier Award from Applied Materials, a major equipment customer. The annual corporate social responsibility report is published on our website at http://www.Entegris.com under “About Us - Corporate Social Responsibility.”

Adjacent Markets. We leverage the expertise that we have gained from serving the semiconductor industry, our core capabilities in material science and material purity to develop products for other industries that employ technologies and production processes that require materials integrity management, high-purity fluids and integrated dispense systems. For example, in only a few years, we brought to market our Aramus high-purity bag assemblies that are used in the production of biologics, including COVID-19 vaccines. We plan to expand the use of these solutions into non-COVID biologics, to provide ancillary solutions around our Aramus bags, and to expand our filter offerings for bioprocessing applications. In addition, our products are used in manufacturing processes for flat panel displays, high-purity chemicals, solar cells, optical magnetic storage devices, LEDs and for other life sciences and aerospace applications. We plan to continue to identify and selectively develop derivative products that address needs in adjacent markets, and in doing so, we expect to increase the total available market for our products and increase our return on R&D investments.

Strategic Acquisitions, Partnerships and Related Transactions. After we integrate CMC Materials and achieve our debt reduction targets, we will continue to pursue strategic acquisitions and business partnerships that enable us to address gaps in our product offerings, secure new customers, diversify into complementary product markets, broaden our technological capabilities and product offerings, access local or regional markets and achieve benefits of increased scale. We believe we have a strong track record of executing these transactions and their integration. Our acquisition of CMC Materials significantly broadened our product and technology capabilities and increased our scale. In the last several years, we have strengthened and expanded our product portfolio with the following acquisitions: BASF’s precision microchemicals business in 2021; Sinmat in 2020 (CMP slurries in hard substrate applications); and Global Measurement Technologies, Inc. in 2020 (analytical instruments for chemistry management and monitoring). Further, we will reevaluate our existing businesses from time to time and may decide to sell, restructure or replace one or more businesses, such as the pending sale of our QED business. Finally, we regularly evaluate opportunities for strategic alliances, joint development programs and other strategic investments to achieve a variety of objectives including expanding our manufacturing capacity, producing products closer to our customers, developing optimized products more quickly and developing new sources of supply to provide us with a competitive advantage.

OUR SEGMENTS

Our business is organized and operated in four segments which align with the key elements of the advanced semiconductor manufacturing ecosystem: Specialty Chemicals and Engineered Materials, or SCEM; Microcontamination Control, or MC; Advanced Materials Handling, or AMH and Advanced Planarization Solutions, or APS. We leverage our expertise from these four segments to create new and increasingly integrated solutions for our customers. The following is a detailed description of our four segments.

SPECIALTY CHEMICALS AND ENGINEERED MATERIALS SEGMENT

The SCEM segment provides high-performance and high-purity process chemistries, gases and materials that enhance our customers’ product performance. Advanced materials, delivered at high purity, are critical to enabling the performance of leading-edge logic and memory applications. We believe the growing long-term demand in the advanced logic and memory market, challenges with metallization schemes and the need for specialized cleaning solutions will drive demand in our SCEM segment. In conjunction with products from our MC and AMH segments, our SCEM segment provides unique solutions to

Table of Contents

safely and efficiently deliver critical materials to support semiconductor and other advanced manufacturing processes and we believe opportunities exist to create end-to-end solutions for our customers, for example, by co-optimizing CMP slurries, pads and cleans from our APS segment with advanced deposition materials from our SCEM segment.

Specialty Gas Products. Our specialty gas solutions provide advanced safety and process capabilities to semiconductor, display and solar panel manufacturers. Our SDS cylinders store and deliver hazardous gases, such as arsine, phosphine, germanium tetrafluoride and boron trifluoride, at sub-atmospheric pressure through the use of our proprietary carbon-based adsorbent materials. These products are designed to minimize potential leaks during transportation and use and allow more gas to be stored in the cylinder, features which provide significant safety, environmental and productivity benefits over traditional high-pressure cylinders. We also offer VAC, a complementary technology to SDS, where select implant gases and gas mixtures are stored under high pressure but are delivered sub-atmospherically.

Advanced Deposition Materials Products. Our advanced deposition materials include advanced liquid, gaseous and solid precursors, including organometallic precursors for the deposition of tungsten, titanium, cobalt, aluminum, molybdenum and ruthenium containing films and organosilane precursors for the deposition of silicon oxide and silicon nitride films. These precursors are designed in close collaboration with OEM process tool manufacturers and device makers to produce application specific solutions that are compatible with complex integrations of material solutions used to build the semiconductor device. We offer delivery systems and containers that allow for reliable storage and delivery of low volatility solid and liquid precursors required in atomic layer deposition processes. When combined with our proprietary corrosion-resistant coatings and filtration solutions from our MC segment, we believe our advanced deposition solutions enable the industry’s highest purity levels, resulting in improved device performance.

Surface Preparation and Integration Products. We offer a range of materials used to prepare the surface of a semiconductor wafer during the manufacturing process and to integrate with materials being used on the wafer. We offer a broad range of cleaning solutions for applications such as semiconductor post-etch residue removal, wafer etching, organics removal, negative resist removal, edge bead removal and corrosion prevention. In addition, we offer selective etch products designed to enable advanced architectures such as 3D-NAND. Our wet chemistry solutions, combined with filtration solutions from our MC segment and fluid handling solutions from our AMH segment, are designed to provide enhanced purity, which results in improvements in our customers’ processes. We also provide advanced plating solutions, such as our Viaform® product (a trademark of and exclusively licensed from Element Solutions, Inc.), which includes inorganic and proprietary organic molecules that provide the wiring for copper interconnects.

Specialty Materials Products. Our specialty materials include specialized graphite, silicon carbide and a variety of unique, high purity coatings for dry or plasma etch, chemical vapor deposition and ion implant applications. Our POCO® premium graphite is used to make precision consumable electrodes for electrical discharge machining, hot glass contact materials for glass product manufacturing and forming and other consumable products for various industrial applications, including aerospace, optical, medical devices, air bearings and printing. Our high-performance specialty coatings, such as our Pegasus™ and Cearus™ coatings, provide erosion resistance, minimize particle generation and prevent contamination on critical components in semiconductor environments and other high-technology manufacturing operations. Our specialty materials provide customized solutions for applications challenged with unique temperature, corrosive, chemical or process environments, such as electrostatic chucks used to hold wafers during processing, plasma etch chamber components, aircraft bearings and ultrasonic transducers.

Specialty Chemicals. Our specialty chemicals include advanced liquid and solid materials, which are used in a range of high-performance material applications ranging from medical devices to materials used in semiconductor applications. In addition, our specialty chemicals business provides materials to a number of our other businesses to enable advanced performance of product solutions.

Materials Technologies. In our ITS business, we develop and manufacture high-performance consumable products for cleaning advanced probe cards and test sockets at semiconductor manufacturing facilities. These engineered polymer solutions are designed to improve customer yields and throughput in wafer and package test operations at semiconductor device manufacturers, foundries, and outsourced semiconductor assembly and test (OSAT) facilities. We also design innovative polymer products for semiconductor fabs that improve front-end tool uptime and reduce operating costs.

In addition, our PIM business, which consists of DRAs, valve greases, cleaners and sealants, and related equipment supporting pipeline and adjacent industries, and our QED business, which offers MRF polishing and SSI metrology manufacturing solutions, report into our SCEM segment. The sale of the QED business, as further described above, is pending.

MICROCONTAMINATION CONTROL SEGMENT

The MC segment offers solutions to purify critical liquid chemistries and process gases used in semiconductor manufacturing processes and other high-technology industries. Our liquid and gas filtration and purification products are critical to the

Table of Contents

semiconductor manufacturing process because they remove contamination, directly reduce defects, improve manufacturing yield and enhance the long-term reliability of the semiconductor device. Our proprietary filters remove organic and inorganic nanometer-sized contaminants from various fluids and gases used in the manufacturing process, including photolithography, deposition, planarization and surface etching and cleaning. We believe demand for purification and filtration products is being driven by the continuous node shrink in logic semiconductors and the ramp in the 3D NAND market, as the risk and cost of yield loss grows with the incremental manufacturing steps needed for the production of these devices. We utilize expertise from the AMH segment in polymer science, from the SCEM segment in formulated cleaning chemistries and APS segment in slurry formulation to develop differentiated filtration and purification solutions for our customers.

Liquid Microcontamination Control Products. We offer a variety of products that control contaminants in our customers’ wet processes both in the fab environment and upstream at the chemical manufacturers. For example, our Torrento® series of filters is used for the filtration of aggressive acid and base chemistries for both semiconductor fabs as well as specialty chemical manufacturers, including our SCEM segment. Manufacturers of high purity chemicals and semiconductor fabs use our Trinzik® and Microgard™ products for the filtration of chemicals and ultra-pure water. Our Impact® series of filters are used in point-of-use photochemical dispense applications, including those provided by our AMH segment, where the delivery of superior flow rate performance and reduced microbubble formation is critical. Our Protego® series of liquid purifier/filter products are used to reduce metallic contamination in chemical manufacturing and in critical wafer rinsing and drying applications by our customers. In addition, we provide membrane and liquid filtration offerings serving semiconductor, pharmaceutical and medical applications.

Gas Microcontamination Control Products. We offer a broad portfolio of products designed to remove particulate and molecular contaminants from controlled environments and gas streams in semiconductor, flat panel display and LED fabs. Our Wafergard® gas filters reduce outgassing and remove particle contamination. Our GateKeeper® gas purifiers and large facility-wide gas purification systems provide continuous purified gas supply to customer fabs from the point of creation on the gas pads to the point-of-use at the wafer by chemically reacting and absorbing contaminants, effectively removing gaseous contaminants down to part-per-trillion levels. Our Chambergard™ gas diffusers provide semiconductor equipment manufacturers with the capability to rapidly vent their tools to atmosphere to dramatically reduce process cycle times without adding particles to the wafers. In addition, our Vaporsorb products are used to eliminate airborne molecular contamination from critical process tool areas or cleanrooms in the fab. These products are used in or alongside critical processing tools to improve yield and reduce tool downtime.

ADVANCED MATERIALS HANDLING SEGMENT

The AMH segment develops solutions to monitor, protect, transport and deliver critical liquid chemistries, wafers and substrates for a broad set of applications in the semiconductor and other high-technology industries. These systems and products improve our customers’ yields by protecting wafers from abrasion, degradation and contamination during manufacturing and transportation and by assuring the consistent, clean and safe delivery of advanced chemicals from the chemical manufacturer to the point-of-use in the semiconductor fab. The AMH segment collaborates closely with our SCEM and APS segments in developing products that are compatible with advanced chemistries to enhance yields and integrates liquid filtration technology from our MC segment to deliver consistent and pure chemistry.

Microenvironment Solutions. Our high-volume line of Ultrapak® products for wafers ranging from 100 to 200 millimeter ensure the clean and secure transport of wafers from the wafer manufacturers to the semiconductor fabs. We also offer a front-opening shipping box, or FOSB, for the transportation and automated interface of 300 millimeter wafers. We lead the market for 300 millimeter front-opening unified pods, or FOUPs, wafer transport and process carriers and standard mechanical interface pods, or SMIF pods, for 200 millimeter wafer applications. We are a leader in reticle protection products for photolithography, including products that protect the high-value EUV lithography masks during both the mask manufacturing process and their use in the semiconductor fab.

Fluid Management Products. Our broad portfolio of packaging and container products, from low-volume containers to transport high-value photoresist chemistries, such as our NOWPak® products, to large intermediate bulk containers, such as our FluoroPure® products, ensure the purity of the chemistries they contain. We are a leader in high-purity fluid handling products such as valves, fittings, tubing, piping and associated connection systems, such as our PrimeLock® connections, for high-purity chemical applications. Our proprietary digital flow control technology improves the uniformity of chemicals applied on wafers. For example, our IntelliGen® integrated, high-precision liquid dispense systems enable the uniform application of advanced chemistries during the wafer fabrication process, integrating our valve control expertise with filter device technologies from our MC segment, in order to conserve high-value chemistry and reduce defects on wafers. Further, we provide market-leading instrumentation solutions to ensure consistency and monitoring of complex blended chemistries, such as our on-tool Accusizer® system, which performs automated online particle size and count analysis with applications in both semiconductor and life science industries, and our SemiChem® systems and our Invue® products, which measure chemical concentration in CMP slurries and formulated cleaning chemistries.

Table of Contents

ADVANCED PLANARIZATION SOLUTIONS SEGMENT

The APS segment provides complementary CMP solutions including CMP slurries, pads, pad conditioners, post-CMP brushes and formulated cleaning chemistries, and high-purity wet electronic chemicals, that are critical to semiconductor and hard disk drive manufacturing processes and that enhance device yields. CMP enables semiconductor device manufacturers to produce smaller, faster, and more complex chips with a greater density of transistors and reduce defects, which increases yield. The APS segment designs and manufactures products and solutions to remove excess material that is deposited during the semiconductor manufacturing process and to level and smooth the surfaces of the layers of semiconductor devices via a combination of chemical reactions and mechanical abrasion, leaving minimal residue and defects on the surface, with only the material necessary for circuit integrity remaining. The APS segment collaborates with our SCEM segment to better understand the materials deposition process and film composition with a view to co-optimizing our CMP products to better meet our customers’ needs. Our APS segment also partners closely with our AMH segment to ensure that its products and solutions are transported and delivered in a way that ensures maximum purity and stability. In addition, as CMP slurries and cleans require advanced filtration both in manufacturing and at the point of use in the semiconductor manufacturing environment, the APS segment partners with our MC segment to optimize its products and processes in order to achieve industry-leading purity levels.

CMP Slurries. The APS segment develops, produces, and sells CMP slurries for polishing a wide range of materials used in semiconductor devices, including tungsten, dielectric materials, copper, barrier, aluminum, and other emerging materials used in semiconductor device fabrication and for polishing bare silicon wafers as well as disk substrates and magnetic heads used in hard disk drives. We also offer slurry products used for polishing ultra-hard surface materials, including SiC and GaN substrates, which are utilized in power electronics and advanced communications end-markets. We believe that we are uniquely positioned to be able to develop and optimize new slurries that can be utilized on emerging materials used in semiconductor device fabrication, such as molybdenum and ruthenium.

CMP Pads. CMP pads are critical in the CMP process to flatten and polish wafers and can have a significant impact on process performance. Our CMP Pads, such as our NexPlanar™, Medea™ and Ultra pad products are designed to provide the exact hardness, pore sizes, compressibility, and groove patterns needed to meet and exceed the requirements of various CMP applications. Our Epic Power™ CMP Pads are designed for SiC wafers and offer a balance of best-in-class performance, quality, and cost of ownership. In addition, our Planargem® pad conditioners, based on our silicon carbide capabilities, lengthen CMP pad life and protect against conditioner-induced defectivity.

Post-CMP Cleans. Our post-CMP clean chemistry products, such as PlanarClean® and ESC 784, are designed to efficiently remove the abrasive slurry particles and organic residue from the wafer after the CMP process, removing residue that might affect yield while not contributing to contamination. In addition, our consumable polyvinyl alcohol roller brush products are used to clean the wafer following the CMP process.

Electronic Chemicals. We offer semiconductor-grade wet chemicals with purities that extend to the parts-per-trillion (ppt) level. We produce and sell high-purity process chemicals through the formulation, purification, and blending of acids, solvents, and other wet chemicals primarily used to etch, clean, and dry silicon wafers during the production of semiconductors, hard disk drives, photovoltaics (solar cells), and flat panel displays. Our electronic chemicals products include sulfuric, phosphoric, nitric and hydrofluoric acids, ammonium hydroxide, hydrogen peroxide, isopropyl alcohol, other specialty organic solvents and various blends of chemicals. As the integrated circuit (“IC”) manufacturing process moves to more advanced technology nodes and the complexity of the process continues to increase, quality and purity of the materials become even more critical to the device yield. Increasing levels of purity and achieving lower levels of variation in our electronic chemicals business are required to enable next-generation IC technologies. Our advanced chemical purification technologies, including distillation, ion exchange, gas adsorption, and filtration, are designed to provide consistently low contaminant levels in a variety of high-purity process chemicals.

OUR CUSTOMERS AND MARKETS

Our customers include logic and memory semiconductor device manufacturers, semiconductor equipment makers, gas and chemical manufacturing companies and wafer grower companies serving the global semiconductor industry. We also sell our products to outsourced semiconductor assembly and test (OSAT) facilities, flat panel display equipment makers, panel manufacturers, manufacturers of hard disk drive components and devices and their related ecosystems.

Our other high-technology markets include manufacturers and suppliers in the solar and life science industries, electrical discharge machining customers, glass and glass container manufacturers, aerospace manufacturers and manufacturers of biomedical implantation devices.

Below is a table showing the percentage of our net sales to top customers and the percentage of our net sales that are international during the three most recent fiscal years.

Table of Contents


	2022		2021		2020
Percentage of net sales to top customers:
TSMC	12	%	12	%	11	%
Remaining top ten customers	31	%	31	%	35	%
Total top ten customers	43	%	43	%	46	%

Percentage of net sales by market:
Domestic/US	24	%	23	%	25	%
Foreign/International	76	%	77	%	75	%

We may enter into supply agreements with our customers. These agreements generally have a term of one to three years, but typically do not contain any long-term purchase commitments. Instead, we work closely with our customers to develop non-binding forecasts of the future volume of orders. However, customers may cancel their orders, change production quantities from forecasted volumes or delay production for reasons beyond our control.

SALES, MARKETING AND SUPPORT

We sell our products worldwide, primarily through our direct sales force and strategic independent distributors located in all major semiconductor markets. Independent distributors are also used in other market territories and for specific market segments. As of December 31, 2022, our sales and marketing force consisted of approximately 788 employees worldwide.

Our unique capabilities and long-standing industry relationships have provided us with the opportunity for significant collaboration with our customers at the product design stage, which has facilitated our ability to introduce new materials and new solutions that meet our customers’ needs. We continuously seek to identify for our customers a variety of materials, contamination and process control challenges that may be addressed by our product solutions. Our sales representatives provide our customers with worldwide technical support and information about our products and materials

We believe that our technical and application support services are important to our sales and marketing efforts. These services include assisting in defining a customer’s needs, evaluating alternative products and materials, designing a specific system to perform the desired operation, training users and assisting customers in compliance with relevant government regulations. Additionally, our field application engineers, located in major markets we serve, work directly with our customers on product qualification and process improvements in their facilities. We maintain a network of service centers, applications laboratories and technology centers located in key markets internationally and in the United States to support our products and our customers with their advanced development needs, provide local technical service, application support and help ensure fast turnaround time.

COMPETITION

The market for our products is highly competitive. While price is an important factor, we compete primarily on the basis of the following factors:


technical expertise;			time to solution;
product quality and performance;			supply chain resiliency;
advanced manufacturing capabilities;			breadth of geographic presence;
total cost of ownership;			customer collaboration, service and support; and
historical customer relationships;			after-sales service.
breadth of product line;

We believe that we compete favorably with respect to the factors listed above. We believe that our key competitive strengths include our broad product line, our strong research and development infrastructure and investment, our manufacturing excellence, our advanced quality control systems, the low total cost of ownership of our products, and our applications expertise in semiconductor manufacturing processes. However, our competitive position varies depending on the market segment and specific product areas within these segments. While we have longstanding relationships with a number of semiconductor and other electronic device manufacturers, we still face significant competition from companies that also have longstanding relationships with other semiconductor and electronic device manufacturers and, as a result, have been able to have their products specified by those customers for use in their fabrication facilities.

The competitive landscape is varied, ranging from business segments within large multinational companies to small regional or regionally-focused companies. While product quality and technology remain critical, overall, industry trends are indicating a

Table of Contents

shift to localized, cost-competitive and consolidated supply chains. Because of the unique breadth of our capabilities, we believe that there are no global competitors that compete with us across the full range of our product offerings. Notable competitors with respect to certain specific product areas include Pall Corporation (part of Danaher Corporation), Shin-Etsu Polymer Co., Ltd., the EMD Performance Materials division of Merck KGaA, the Electronics & Industrial division of DuPont de Nemours, Inc., the Electronics Advanced Materials division of Air Liquide, Linde plc, Anji Microelectronics (Shanghai) Co., Ltd., and Mersen.

ENGINEERING, RESEARCH AND DEVELOPMENT

We believe that technology is important to the success of our businesses, and we plan to continue to devote significant resources to engineering, research and development, or ER&D, balancing efforts between shorter-term market needs and longer-term investments. As of December 31, 2022, we had approximately 1,392 employees in ER&D. We have supplemented and may continue to supplement our internal research and development efforts by licensing technology from third parties and/or acquiring rights with respect to products incorporating externally owned technologies. Our R&D expenses consist of personnel and other direct and indirect costs for internally funded project development, including the use of outside service providers.

We believe we have a rich pipeline of development projects. Our ER&D efforts are directed toward developing and improving our technology platforms for semiconductor and advanced processing applications and identifying and developing products for new applications, often working directly with our customers to address their particular needs.

We have ER&D capabilities in the United States, Canada, China, Japan, South Korea, Taiwan, Singapore and Malaysia to meet the global needs of our customers. We use sophisticated methodologies to research, develop and characterize our materials and products. Our capabilities to test and characterize our materials and products are focused on continuously reducing risks and threats to the integrity of the critical materials that our customers use in their manufacturing processes.

In addition, we collaborate with leading universities and industry consortia, such as the University of California, Yale University, Pennsylvania State University, University of Illinois (Champaign Urbana), SUNY Albany, the Interuniversity Microelectronics Center (imec®) and CEA-LETI. We undertake this work to extend the reach of our internal R&D and to gain access to leadership ideas and concepts beyond the time horizon of our internal development activities.

PATENTS AND OTHER INTELLECTUAL PROPERTY RIGHTS

As of December 31, 2022, we owned approximately 4,400 active patents worldwide, of which about 850 were United States patents. Additionally, we owned about 2,000 pending patent applications globally. In addition, we license certain patents owned by third parties. We rely on a combination of patent, copyright, trademark and trade secret laws and license agreements to establish and protect our proprietary rights. We seek to refresh our intellectual property on an ongoing basis through continued innovation. While we license and expect to continue to license technology used in the manufacture and distribution of products from third parties, we do not consider any particular patent or license to be material to our business.

We vigorously protect and defend our intellectual property. We require each of our employees, including our executive officers, to enter into agreements with us pursuant to which the employee agrees to keep our proprietary information confidential and to assign to us inventions made during the course of employment. We also require outside scientific collaborators, sponsored researchers and other advisors and consultants who are provided confidential information to execute confidentiality agreements with us. These agreements generally provide that all confidential information developed or made known to the entity or individual during the course of the entity’s or individual’s relationship with the Company is to be kept confidential and not disclosed to third parties except in specific limited circumstances.

MANUFACTURING

Our customers rely on our products and materials to ensure the integrity of the critical materials used in their manufacturing processes by providing purity, cleanliness, consistent performance, dimensional precision and stability. Our ability to meet our customers’ expectations, combined with our substantial investments in worldwide manufacturing capacity and comprehensive supply chain strategy, position us well to respond to the increasing demands from our customers for yield-enhancing materials and solutions.

To meet our customers’ needs worldwide, we have established an extensive global manufacturing network with facilities in the United States, Canada, China, France, Italy, Japan, Malaysia, Singapore, South Korea, Taiwan and the United Kingdom. Because we work in an industry where contamination control is paramount, we maintain Class 100 to Class 10,000 cleanrooms for manufacturing and assembly. We believe that our worldwide advanced manufacturing capabilities are important competitive

Table of Contents

advantages. These include:


engineered polymer conversion and processing;			specialty coating capabilities;
advanced membrane modification and cleaning;			solids and powders compounding and handling;
chemical formulation, blending, distillation, synthesis and purification;			graphite synthesis;
gas delivery systems;			blow molding;
high-purity gas handling and transfilling;			rotational molding;
high-purity materials packaging;			machining; and
membrane casting;			assembly.
cartridge manufacturing and assembly;

We have made significant investments in systems and equipment to create innovative products and tool designs, including metrology and 3D printing capabilities for rapid analysis and prototype production. In addition, we use contract manufacturers for certain of our products both in the United States and Asia.

RAW MATERIALS

Our products are made from a wide variety of raw materials that are generally available from multiple sources of supply. Our strategy is to secure various sources of different raw materials, as appropriate, to enable the desired performance of our products, and monitor those sources as necessary to provide supply assurance. While we seek to have several sources of supply for raw materials, certain materials included in our products, such as certain filtration membranes in our MC segment, petroleum coke and specialty and commodity chemicals in our SCEM segment, certain polymer resins in our AMH segment, and certain engineered abrasive particles in our APS segment, are obtained from a single source or a limited group of suppliers or from suppliers in a single country. We have entered into multi-year supply agreements with certain suppliers for the purchase of raw materials in the interests of supply assurance and cost control.

GOVERNMENTAL REGULATION

Our operations are subject to federal, state and local regulatory requirements relating to export controls, environmental, waste management and health and safety matters, including measures relating to the release, use, storage, treatment, transportation, discharge, disposal and remediation of contaminants, hazardous substances and wastes, as well as practices and procedures applicable to the construction and operation of our plants. Although some risk of costs and liabilities related to these matters is inherent in our business, we believe that our business is operated in substantial compliance with applicable regulations. However, new, modified or more stringent requirements or enforcement policies could be adopted, which could adversely affect us. While we expect that capital expenditures will be necessary to ensure that any new manufacturing facility is in compliance with environmental and health and safety laws, we do not expect these expenditures to be material.

HUMAN CAPITAL RESOURCES

We believe that our employees are a critical asset in achieving our mission of helping our customers improve their productivity, performance and technology by providing enhanced materials and process solutions for the most advanced manufacturing environments. In order to attract and retain top talent, we are focused on creating a diverse, inclusive and safe workplace and are committed to our efforts to provide competitive total rewards and quality development and training opportunities for our employees.

As of December 31, 2022, we had approximately 10,000 employees, of whom approximately 52%, 16%, 9%, 7%, 6%, 6%, 3% and 1% are located in North America, Southeast Asia, Japan, Taiwan, South Korea, China, Europe and Canada, respectively. Given the variability of business cycles in the semiconductor industry and the rapid response time required by our customers, it is critical that we be able to quickly adjust the size of our production staff to meet our customers’ demands and maximize efficiency and we use skilled temporary labor when possible. Some of our full-time employees are represented by labor unions, works councils or comparable organizations, particularly in Europe. We believe that our labor relations have generally been good.

Culture. Our organization is built around what we refer to as our PACE values: our core values of treating people with respect and dignity, acting honestly and consistently, encouraging creativity and innovation and a dedication to excellence. We believe that by continuing to focus on these values, we provide our employees with a positive work environment that allows them to develop professionally and encourages them to continue innovating.

We regularly conduct surveys of our employees to understand their perspectives on a number of topics. During 2022, these topics included commitment to Entegris’ core values, safety and general employee satisfaction. Management uses the

Table of Contents

information gathered from these surveys to inform its decision making with respect to employee matters, aiming to continue to be an employer of choice.

Diversity and Inclusion. We believe that maintaining a culture of diversity and inclusion helps enable us to innovate more effectively and perform better overall. We are committed to making progress on our diversity and inclusion journey. To that end, we seek to promote diverse backgrounds and perspectives throughout our organization and strive to provide fair and equal opportunity for career development and advancement to all our employees. An example of our commitment to fostering diversity and inclusion at Entegris is our Employee Network groups, which are designed to advance diversity and inclusion and to promote our workplace as an environment where all individuals are valued for their talents and feel empowered to reach their fullest potential. As of December 31, 2022, our six Employee Networks included groups focused on gender identity, sexual orientation, age and veteran status.

Health and Safety. Our success depends on the well-being of our employees. We maintain a culture with an intense focus on safety and strive to identify, eliminate and control risk in the workplace in an effort to prevent injury and illness. Our employees have access to a global safety management system and are encouraged to report incidents, near misses or other observations in the system. The system has been widely adopted in our manufacturing locations across the globe, and management uses the information generated by it to set safety-related policies and to set goals for future performance.

We also design our products with the safety of the people who are using them in mind. Our Safe Delivery Source products are designed to minimize potential leaks during transportation and use of hazardous gases, features which provide significant safety, environmental and productivity benefits over traditional high-pressure cylinders. In addition, our fluid handling products, such as tubing, valve, fittings and drum products, are used to safely store, transport and dispense volatile and dangerous chemistries, protecting those who work with them.

Total Rewards. We are focused on enhancing our high-performance organization. To achieve this goal, we seek to attract and retain talented employees by providing compelling total rewards, encompassing pay, benefits and other programs, that enrich our employees, both personally and professionally. For example, we provide our employees with a comprehensive benefits package that includes health insurance and other resources that support their physical and mental well-being. Our total rewards program is designed to be attractive and competitive and to enable our employees to reach their highest potential by directly impacting their financial security, career growth opportunities and the health and well-being of them and their families.

Talent Development and Training. We are committed to the continued development and training of our employees. We conduct formal evaluations with each of our employees on an annual basis, and managers provide feedback directly to employees through informal review sessions periodically throughout the year. Our formal evaluation process requires employees to track whether they met certain development goals that are set at the beginning of the review period. While we continue to search for new perspectives and insights with external hires, we also seek to provide opportunities for our employees to grow their careers and regularly fill open vacancies with internal candidates. In addition, management periodically assesses succession planning for certain key positions and reviews our workforce to identify high potential employees for future growth and development.

We also provide formal and informal training opportunities for our employees covering a variety of professional, technical and leadership topics. Our training opportunities are designed to promote learning across all levels of our organization, and in 2022 our formal training offerings included management trainings and the development of both technical and soft skills.

Philanthropy. Recognizing our unique opportunity as a science-based company to effect positive change, the Entegris Foundation was established in 2020 to expand access to STEM (science, technology, engineering and math) education in underrepresented communities. The Entegris Foundation provides scholarship opportunities to underrepresented students pursuing a STEM major in colleges across the U.S. and in Korea, Taiwan and Japan. We have set a goal of investing more than $30 million in STEM scholarships and engineering internships for women and individuals from underrepresented communities by 2030.

Oversight. Our Board of Directors, through the Management Development and Compensation Committee, provides oversight on human capital matters through a variety of methods and processes. These include regular updates and discussion related to human capital management efforts and other initiatives impacting the workforce, health and safety matters, employee survey results, hiring and retention, employee demographics, labor relations, compensation and benefits, succession planning and employee training initiatives. We believe the Board’s oversight of these matters helps identify and mitigate exposure to labor and human capital management risks, and is part of the broader framework that guides how we attract, retain and develop a workforce that aligns with our values and strategies.

For additional information on these important initiatives, see our annual corporate social responsibility report on our website at http://www.Entegris.com under “About Us - Corporate Social Responsibility.”

Table of Contents

OUR HISTORY

The Company was incorporated in Delaware on March 17, 2005 in connection with a merger between Entegris, Inc., a Minnesota corporation, and Mykrolis Corporation, a Delaware corporation. On April 30, 2014, the Company acquired ATMI, based in Danbury, CT. On July 6, 2022, the Company acquired CMC Materials, based in Aurora, IL. Entegris has been helping its customers solve their critical materials challenges and enhance their manufacturing yields for over 55 years, tracing its corporate origins back to Fluoroware, Inc., which began operating in 1966.

AVAILABLE INFORMATION

Our Internet address is www.entegris.com. On this website, under the “About Us-Investor Relations-Financial Information” section, we post the following filings as soon as reasonably practicable after they are electronically filed with, or furnished to, the U.S. Securities and Exchange Commission, or SEC: our annual, quarterly, and current reports on Forms 10-K, 10-Q, and 8-K; our proxy statements; any amendments to those reports or statements, and Form SD. All such filings are available on our website free of charge. The SEC also maintains a website (www.sec.gov) that contains reports, proxy and information statements, and other information regarding issuers that file electronically with the SEC. The content on our website and any other website as referred to in this Form 10-K is not incorporated by reference into this Form 10-K unless expressly noted.

Table of Contents

Item 1A. Risk Factors.

In addition to the other information in this Annual Report on Form 10-K, the following risk factors should be carefully considered in evaluating us and our common stock. Any of the following risks, many of which are beyond our control, could materially and adversely affect our financial condition, results of operations or cash flows or cause our actual results to differ materially from those projected in any forward-looking statements. We may also face other risks and uncertainties that are not presently known, are not currently believed to be material or are not identified below because they are common to all businesses. Past financial performance may not be a reliable indicator of future performance and historical trends should not be used to anticipate results or trends in future periods. For more information, see “Cautionary Statement” in Item 7 of this Annual Report on Form 10-K.

Risk Factor Summary

Risks Related to Our Business and Industry

•The impact of declines in industry or worldwide economic conditions.

•Uncertain geopolitical conditions.

•Variability of revenues and operating results.

•The evolving nature of the industries we serve and the impact of changes in products and technology.

•Supply chain risks.

•The impact of the COVID-19 pandemic.

•Operation of a global business.

•The impact of tariffs, export controls and other trade laws and restrictions, especially with respect to China.

•Customer concentration.

•Continuing innovation and introduction of new products.

•Risks related to competition.

•Our ability to successfully acquire or integrate other businesses, form joint ventures or divest businesses.

•The impact of disruptions to our operations.

•The use of hazardous materials in our operations.

•Loss of key employees.

•Our ability to obtain, protect and enforce intellectual property rights.

•The impact of information technology system failures, network disruptions and breaches in data security.

•The impact of climate change.

•The costs and reputational risk associated with our environmental, social and governance initiatives.

Risks Related to Government Regulation

•The impact of environmental laws and regulations.

•Risks related to the regulatory environment.

•Changes in taxation or adverse tax rulings.

Risks Related to Our Merger with CMC Materials

•The integration of CMC Materials.

Risks Related to Our Indebtedness

•The impact of our indebtedness.

•Restrictions on our operations as a result of the terms of the Credit Agreements and the Indentures.

Risks Related to Owning our Common Stock

•The volatility of the price of our common stock.

•Changes in capital allocation strategy.

•Provisions in our charter documents and Delaware law may delay or prevent us from being acquired.

Risks Related to Our Business and Industry

Declines in the semiconductor industry or worldwide economic conditions may cause demand for our products to decrease and may adversely affect our business.

Declines in industry or worldwide economic conditions, including the prospect of a recession, rising inflation, fluctuating foreign currency exchange rates and interest rates or tightening credit markets, may adversely affect our business. Our revenue is primarily dependent upon demand from semiconductor manufacturers, which is largely driven by the current and anticipated demand for electronic products that utilize semiconductors. Despite secular trends of increasing demand for semiconductors in

Table of Contents

applications such as smartphones, 5G wireless technology, cloud computing, the Internet of Things, machine learning, artificial intelligence, high performance computing, smart transportation, smart healthcare, gaming and virtual reality, the semiconductor industry has historically been, and is likely to continue to be, cyclical with periodic significant downturns, resulting in significantly decreased demand for products such as ours. We have previously experienced significant revenue deterioration and operating losses due to severe downturns in the semiconductor industry, which often occur suddenly. The semiconductor industry is also affected by seasonal shifts in demand, and as a result, we expect short-term fluctuation of demand within several quarters. We are unable to predict the timing, duration or severity of any future downturns in the semiconductor industry.

During downturns and periods of soft demand, our revenue is reduced, and we typically experience greater pricing pressure and shifts in product and customer mix, which often adversely affect our gross margin and net income. Furthermore, to remain competitive, we must maintain our engineering, research and development activity, invest in our infrastructure and maintain flexibility to respond to any increases in demand. As a result, a lower volume of sales can have a large and disproportionate impact on our profitability. Even moderate seasonality can cause our operating results to fluctuate significantly from one period to the next. Uncertain and volatile economic, political, public health or business conditions in any of our key sales regions can cause or exacerbate negative trends in business and consumer spending and have historically impacted customer demand for our products. These conditions can cause material adverse changes in our results of operations and financial condition, including:

•a decline in demand for our products, which would have an immediate impact on our revenues;

•an increase in reserves for accounts receivable due to our customers’ inability to pay us;

•lower utilization of our manufacturing facilities, which could lead to lower margins;

•an increase in write-offs for excess or obsolete inventory that we cannot sell;

•potential impairment charges relating to goodwill, intangible assets, manufacturing equipment or other long-lived assets, to the extent that any downturn indicates that the carrying amount of the asset may not be recoverable;

•greater challenges in forecasting operating results, making business decisions and identifying and prioritizing business risks; and

•additional cost reduction efforts, including additional restructuring activities, which may adversely affect our ability to capitalize on opportunities.

Our revenues and operating results are variable.

Our revenues and operating results may fluctuate significantly from quarter-to-quarter or year-to-year due to a number of factors, many of which are outside our control. We manage our expenses based in part on our expectations of future revenues. Because some of our expenses are relatively fixed in the short term, a change in the timing of revenue or the amount of profit we generate from a small number of transactions can unfavorably affect operating results in a particular period. Factors that may cause our financial results to fluctuate unpredictably include:

•economic conditions in the semiconductor industry or in the other industries we serve;

•the size and timing of customer orders;

•consolidation of our customers, which could impact their purchasing decisions and negatively affect our revenues;

•procurement shortages, increased prices, the failure of suppliers to perform their obligations and additional expenses to respond promptly to any supply shortages or other supplier problems;

•decisions to increase or accelerate our purchasing of raw materials, components or other supplies in an effort to mitigate supply risk;

•changes in our capital expenditure requirements, such as our KSP facility in Taiwan and our newly announced planned facility in Colorado Springs, and the schedule and timing, including potential delays, thereof;

•manufacturing difficulties;

•customer decisions to decelerate orders in order to draw down their inventory;

•customer cancellations of or delays in shipments, installations or customer acceptances or, alternatively, acceleration of orders from customers to increase their inventory;

•our customers’ rate of replacement of our consumable products or decision to delay expansion projects;

•changes in average selling prices, customer mix and product mix;

•our ability to develop, introduce and market new, enhanced and competitive products in a timely manner;

•our competitors’ introduction of new products;

Table of Contents

•disruptions in transportation, communication, demand, information technology or supply, including strikes, acts of God, wars, terrorist activities and natural or man-made disasters;

•legal, tax, accounting or regulatory changes (including changes in import/export regulations and tariffs) or changes in the interpretation or enforcement of existing requirements;

•changes in our estimated tax rate; and

•foreign currency exchange rate fluctuations.

The COVID-19 pandemic has impacted, and could further impact, many of these factors.

We serve constantly evolving industries, and any failure to manage our business effectively during periods of rapid change may adversely affect our business performance and results of operations.

Intense competition in the semiconductor industry often leads to rapid changes in products and technology. These changes, along with shifts in demands for semiconductors, can significantly alter demand for our products; the amount and mix of customers’ spending on our products can significantly impact our results of operations. Changes in demand may arise from factors such as advances in fabrication processes, new and emerging technologies, end-user demand, customers’ production capacity and customers’ capacity utilization. We must accurately forecast demand for each of our products and effectively manage our resources and production capacity across our various businesses. Although we regularly reassess our allocation of resources in response to the changing business environment, we may incur unexpected or additional costs to align our operations with demand. If we do not adequately anticipate changes in our business environment, we may lack the infrastructure, manufacturing capacity and resources to scale up our business to meet customer expectations and compete successfully during a period of growth, or we may expand our capacity too rapidly, resulting in excess fixed costs.

Our ability to increase sales of our products, particularly our capital equipment products, depends in part upon our ability, in a very short timeframe, to ramp up our manufacturing capacity and to mobilize our supply chain. If we are unable to expand our manufacturing capacity on a timely basis, manage the expansion effectively and obtain larger quantities of raw materials, our customers could obtain products from our competitors, which would reduce our market share, harm our reputation as a trusted partner and impact our results of operations. These challenges have been and may continue to be exacerbated by the COVID-19 pandemic. In 2022, we continued to face instances where our manufacturing capacity or supply chain was constrained and the lead time to manufacture and deliver our customers’ products was extended. If we are unable to meet our customers’ demand for our products or deliver our products within our customers’ required lead times, our customers may seek to replace us with alternative suppliers. Additionally, in the last two years, we have seen increased inventory levels in a challenging supply chain environment. Failure to adjust our inventory to more normalized levels may lead to an increased risk of excess and obsolete inventory and harm our cash flow.

Interruptions in our supply chain, including our single and limited source suppliers, could affect our ability to manufacture our products, meet demand, increase costs and have an adverse effect on our revenue results of operations.

Our supply chain is critical to the supply of our products and solutions to meet the quality, demand and technology requirements our customers. We rely on the timely delivery of parts, materials and services, including components and subassemblies, from our suppliers and contract manufacturers. Alternative sources to mitigate the risk that the failure of any single provider or supplier will adversely affect our business are not feasible in all circumstances. For example, we rely on single or limited source suppliers for certain raw materials that are critical to the manufacturing of our products, such as plastic polymers, filtration membranes, abrasive particles, petroleum coke and other materials. If we were to lose any one of these or other critical sources, or there is as an industry-wide increase in demand for, or the discontinuation of, raw materials used in our products, it could be difficult for us, or we may be unable, to find an alternative supplier or raw material, in which case our operations could be adversely affected. When these events occur, we work proactively and collaboratively with the supplier to solve the manufacturing issue in order to reestablish the supply of these materials or find alternative materials and work with our customers through their vigorous qualification process.

Demand for semiconductors, electronic products, and other factors, such as the COVID-19 pandemic and the conflict in Ukraine, have resulted in, and may continue to result in, a shortage of raw materials and components needed to manufacture and deliver our products, as well as increased costs and risks associated with qualifying products that are manufactured using new raw materials and delays in and unpredictability of shipments due to transportation interruptions, all of which could harm our reputation or the competitiveness of our products. Such shortages, delays and unpredictability have adversely impacted, and may continue to adversely impact, our suppliers’ ability to meet our demand requirements, have adversely impacted, and may continue to adversely impact, our manufacturing operations and our ability to meet customer demand and have impacted in the past, and may impact in the future, our gross margins and our other operating results. Our actions to counteract adverse impacts

Table of Contents

to our gross margins and other operating results, could be unsuccessful, or could have the effect of reducing demand, which would adversely impact our revenue. Additionally, our suppliers may not have the capacity to meet increases in our demand for raw materials, in turn, making us unable to meet demand from our customers. If our suppliers or sub-suppliers are unable to maintain their operations, due to operational restrictions or financial hardship caused by an economic slowdown or recession, we may increase our safety stocks of raw materials or components or alter our payment terms with such suppliers, including prepaying for raw materials, which could put downward pressure on our cash flow.

The COVID-19 pandemic and continuing governmental responses has and could materially adversely affect our financial condition and results of operations.

The COVID-19 pandemic has had, and continues to have, an impact on the global economy and continues to cause macroeconomic uncertainty. Governmental authorities around the globe implemented, and may again in the future implement, numerous and evolving measures in response to the virus. Although countries around the world largely reopened in 2022, there remains significant uncertainty in certain jurisdictions, most notably, China. Any future constraints, limitations or modifications imposed on our operations or business practices, or those of our suppliers, may limit our ability to meet customer demand, cause us to increase our safety stock of certain materials, reduce our productivity, slow or diminish our research and development activities, make our products less competitive, or cause our customers to seek alternative suppliers and delay customer qualification activities, any of which could harm our business, reduce our profitability or have a material adverse effect on our financial condition and results of operations. The degree to which COVID-19 impacts our results will depend on future developments, which are highly uncertain and cannot be predicted, including, but not limited to, the duration and spread of any future outbreaks, their severity, potential additional waves of infection, the emergence of more virulent or more dangerous strains of the virus, the actions to mitigate the virus and its impact, the development, distribution, efficacy and acceptance of vaccines, and how quickly and to what extent normal economic and operating conditions can resume.

We are exposed to the risks of operating a global business, as a significant amount of our sales and manufacturing activity occur outside the United States.

Sales to customers outside the United States accounted for approximately 76%, 77% and 75% of our net sales in 2022, 2021 and 2020, respectively. We anticipate that international sales will continue to account for a majority of our net sales. In addition, a number of our key domestic customers derive a significant portion of their revenues from sales in international markets. We also manufacture a significant portion of our products outside the United States and depend on international suppliers for many of our parts and raw materials. We intend to continue to pursue opportunities in both sales and manufacturing internationally. Our international operations are subject to a number of risks and potential costs that could adversely affect our revenue and profitability, including:

•global trade issues and changes in and uncertainties with respect to trade and export regulations, trade policies and sanctions, tariffs, and international trade disputes, including new and changing export regulations for certain exports to China, where we have significant business, and any retaliatory measures, which could impose additional costs on our operations and limit our ability to operate our business and which could adversely impact us, our customers or our suppliers;

•positions taken by governmental agencies regarding possible national, commercial and/or security issues posed by the development, sale or export of certain products and technologies;

•geopolitical tensions or conflicts, such as Russia’s invasion of Ukraine or increasing tensions with China, political and economic instability and uncertainty, which may result in severely diminished liquidity and credit availability, rating downgrades of sovereign debt, declining valuation of certain investments, declines in consumer confidence, declines in economic growth, volatility in unemployment rates and uncertainty about economic stability;

•challenges in hiring and integrating workers in different countries;

•challenges in managing a diverse workforce with different experience levels, languages, cultures, customs, business practices and worker expectations, along with differing employment practices and labor issues;

•challenges of maintaining appropriate business processes, procedures and internal controls and complying with legal, environmental, health and safety, anti-bribery, anti-corruption and other regulatory requirements that vary by jurisdiction;

•challenges in developing relationships with local customers, suppliers and governments;

•fluctuating pricing and availability of raw materials and supply chain interruptions or slowdowns, including as a result of difficulties, financial or otherwise, faced by segments of the transportation industry;

Table of Contents

•public health crises, such as the COVID-19 pandemic, and related implications thereof;

•expense and complexity of complying with U.S. and foreign import and export regulations, including the ability to obtain required import and export licenses;

•fluctuations in interest rates and currency exchange rates, including the relative strength or weakness of the U.S. dollar against foreign currencies that are important to our business, including the Japanese yen, euro, Taiwanese dollar, Korean won, Chinese renminbi, Singapore dollar, Malaysian ringgit, Canadian dollar or Israeli shekel, which could cause our sales and profitability to decline;

•liability for foreign taxes assessed at rates higher than those applicable to our domestic operations;

•challenges and costs associated with the protection of our intellectual property throughout the world; and

•customer or government efforts to encourage operations and sourcing in a particular country, such as Korea or China, including efforts to develop and grow local competitors, require local manufacturing, and provide special incentives to government-backed local customers to buy from local competitors.

In the past, these factors have disrupted our operations and increased our costs, and we expect that these factors will continue to do so in the future. Furthermore, there is inherent risk, based on the complex relationships among China, Japan, Korea, Taiwan, and the United States, that political, diplomatic and national security influences could lead to trade disputes, impacts and/or disruptions, in particular those affecting the semiconductor industry. This can adversely affect our business with China, Japan, Korea, and/or Taiwan and perhaps the entire Asia Pacific region or global economy. A significant trade dispute, impact and/or disruption in any area where we do business could have a materially adverse impact on our future revenue and profits.

Tariffs, export controls and other trade laws and restrictions resulting from international trade disputes, strained international relations and changes to foreign and national security policy, especially as they relate to China, could have an adverse impact on our operations and reduce the competitiveness or availability of our products relative to local and global competitors.

Tariffs, additional taxes, trade barriers and other measures, particularly those arising out of relations between the United States and China, may increase costs of raw materials and our manufacturing costs, decrease margins, reduce the competitiveness of our products or inhibit our ability to sell products or purchase necessary equipment and supplies, any of which could have a material adverse effect on our business, results of operations or financial condition. For example, both the United States and China have implemented several rounds of tariffs and retaliations with respect to certain products imported from the other country, some of which have impacted certain raw materials we use. Our operational changes in an effort to mitigate the impact of these tariffs on our products may not be successful.

In addition, we are subject to export control and economic sanctions laws and regulations that restrict the delivery of some of our products and services to certain end users, countries and nationals of certain countries. In certain circumstances, these restrictions may prohibit the transfer of certain of our products, services and technologies, and in other circumstances they may require us to obtain a license from the U.S. government before delivering the controlled item or service. Obtaining export licenses may be difficult, costly and time-consuming, and there is no assurance that we will be issued licenses that we apply for on a timely basis or at all. We must also comply with export control and economic sanctions laws and regulations imposed by other countries. Our export and trade control compliance program may be ineffective or circumvented, exposing us to legal liabilities. Compliance with these laws could significantly limit our sales in the future. Changes in, and responses to, U.S. trade controls could reduce the competitiveness of our products and cause our sales to drop, which could have a material adverse effect on our business, financial condition and results of operations.

Over the last several years, the U.S. government has significantly expanded export controls on certain technologies and commodities to certain markets, particularly with respect to semiconductor and other high technology exports to China. For example, on October 7, 2022, the U.S. Commerce Department of Commerce, Bureau of Industry and Security (“BIS”) announced new export control regulations that restrict the sale of certain products and services to some companies and domestic fabs in China. Additionally, effective June 29, 2020, the U.S. Department of Commerce imposed new export controls on the transfer of many U.S. products and technologies, including many commercial-grade electronics, to “military end users” in China, a term which may include many Chinese commercial companies that sell products to or do business with the military. These and other regulations have reduced our ability to sell our products to customers in China and it is possible future regulation could further reduce demand for our products. As a result of these restrictive measures, certain of our customers have made efforts to source products domestically in order to mitigate perceived risks to their supply chain. If these efforts are successful, are widespread amongst our customers and expand to our products and solutions broadly, overall global demand for our customers’ products or for other products produced or manufactured in the United States or based on U.S. technology may

Table of Contents

be reduced, in turn reducing demand for our products, which could have a material adverse effect on our business, financial condition and results of operations. Furthermore, government authorities may take retaliatory actions, impose conditions that require the use of local suppliers or partnerships with local companies, or require the license or other transfer of intellectual property, which could have a significant adverse impact on our business. Such risks may be especially exacerbated as they relate to China, a market that is important to our business, representing approximately 15% of our sales in 2022.

A significant portion of our sales is concentrated on a limited number of key customers, and our net sales and profitability may materially decline if we were to lose one or more of these customers.

Sales to a limited number of large customers constitute a significant portion of our overall revenue, shipments, cash flows, collections and profitability. Our top ten customers accounted for 43%, 43% and 46% of our net sales in 2022, 2021 and 2020, respectively. Our customers could stop using our products in their manufacturing processes with limited advance notice to us, and we would have limited or no contractual recourse. The cancellation, reduction or deferral of purchases of our products by any one of these customers could significantly reduce our revenues in any particular quarter. If we were to lose any of our significant customers, if our products are not specified for our significant customers’ products or if we suffer a material reduction in their purchase orders, our revenue could decline and our business, financial condition and results of operations could be materially and adversely affected. Due to the long design and development cycle and lengthy customer product qualification periods required for most of our products, we may be unable to replace these customers quickly, if at all. In addition, our principal customers hold considerable purchasing power and may be able to negotiate sales terms that result in decreased pricing, increased costs, and/or lower margins for us, and limitations on our ability to share jointly developed technology with others. The semiconductor industry may continue to undergo consolidation, and if any of our customers merge or are acquired, we may experience lower overall sales to the merged or combined companies.

Our customer base is also geographically concentrated, particularly in Taiwan, Korea, Japan, China and the United States. As a result, export regulations or other trends that apply to customers in certain countries, such as those in China, have exposed and may further expose our business and results of operations to greater volatility. The geographic concentration of our customer base could shift over time as a result of government policy and incentives to develop regional semiconductor industries.

If we are unable to anticipate and respond to rapid technological change and customer requirements by continuing to innovate and introduce new and enhanced products and solutions, our business could be seriously harmed.

The semiconductor industry is subject to rapid technological change, changing customer requirements and frequent new product introductions. In our industry, the first company to introduce an innovative product that addresses an identified market need will often have a significant advantage over competing products. For this reason, we make significant expenditures to research, develop, engineer and market new products and make significant capital investments in technology and manufacturing capacity in anticipation of future business and without any purchase commitment from our customers. We incurred $229.0 million, $167.6 million and $136.1 million for engineering, research and development expense in 2022, 2021 and 2020, respectively, to support new product and technology development. In addition, we have been investing significantly in our manufacturing footprint, such as our KSP facility in Taiwan and our newly announced planned facility in Colorado Springs, to meet anticipated demand for our products. Following development, it may take several years for sales of a new product to reach a substantial level of sales, if ever. If a product concept does not progress beyond the development stage or only achieves limited acceptance in the marketplace, we may not receive a direct return on our expenditures, we may lose market share and our revenue and our profitability may decline. For example, in the past, we incurred significant impairment charges for capital expenditures related to developing the capability to manufacture shippers and FOUPs for 450 mm wafers, which major semiconductor manufacturers announced that they would not initiate manufacturing for in the foreseeable future.

We believe that our future success will depend upon our ability to continue to develop mission-critical solutions to maximize our customers’ manufacturing yields and enable higher performance semiconductor devices. A failure to successfully anticipate and respond to technological changes by developing, marketing and manufacturing new products or enhancements to our existing products could harm our business prospects and significantly reduce our sales. For example, as 3D NAND technology advances to higher densities, the conventional process used to etch critical features no longer works. Recognizing the need for a new chemistry, we developed a series of prototype formulations for highly selective nitride etch and developed a specialized liquid filter that removes contaminants while simultaneously maintaining the critical components that make the chemistry function. While we have achieved process-of-record for these specific etch processes with certain customers and we are preparing for rapid, high-volume ramp, we may not generate significant revenue from these solutions. We cannot assure you that the new products and technology we choose to develop and market will be successful. In addition, if new products have reliability or quality problems, we may experience reduced orders, higher manufacturing costs, delays in acceptance and payment, additional service and warranty expense and damage to our reputation.

Table of Contents

Competition from new or existing companies could harm our financial condition, results of operations and cash flow.

We operate in a highly competitive industry. We face many competitors, some of which have substantially greater manufacturing, financial, research and development and marketing resources than we do. In addition, some of our competitors may have better-established customer relationships than we do, which may enable them to have their products specified for use more frequently and more quickly by these customers. We also face competition from smaller, regional companies that focus on serving customers in their regions. Further, customers continually evaluate the benefits of internal manufacturing versus outsourcing, and a customer’s decision to internally manufacture products that we provide may negatively impact us. If we are unable to maintain our competitive position, we could experience downward pressure on prices, fewer customer orders, reduced margins, the inability to take advantage of new business opportunities and a loss of market share, any of which could have a material adverse effect on our results of operations. Further, we expect that existing and new competitors will improve their products and introduce new products with enhanced performance characteristics. The introduction of new products or more efficient production of existing products by competitors could diminish our market share and increase pricing pressure on our products.

We may acquire other businesses, form joint ventures or divest businesses, any of which could negatively affect our financial performance.

We intend to continue to engage in business combinations, acquisitions, joint ventures, investments, divestitures or other types of collaborations to address gaps in our product offerings, adjust our business and product portfolio to meet our ongoing strategic objectives, diversify into complementary markets, increase our scale or accomplish other strategic objectives. These transactions involve numerous risks to our business, financial condition and operating results, including but not limited to:

•experiencing difficulty in identifying suitable acquisition candidates and completing transactions at appropriate valuations, in a timely manner, on a cost-effective basis or at all, due to substantial competition for acquisition targets;

•inability to successfully integrate any acquired businesses into our business operations;

•failure to realize the anticipated synergies or other benefits of any such transaction;

•entering into markets in which we have limited or no prior experience;

•finding acquirors and obtaining adequate value for businesses that no longer meet our objectives;

•inability to complete proposed or pending transactions due to factors such as the failure or inability to obtain regulatory or other approvals;

•requirements imposed by government regulators in connection with their review of a transaction, which may include, among other things, divestitures and restrictions on the conduct of our existing business or the acquired business;

•undertaking multiple transactions at the same time in order to take advantage of acquisition or divestiture opportunities that do arise, which could strain our ability to effectively execute and integrate such transactions;

•diversion of management’s attention from our day-to-day business due to dedication of significant management resources to such transactions;

•employee uncertainty and lack of focus during the integration process that may also disrupt our business;

•the risk of litigation or claims associated with a proposed or completed transaction;

•challenges associated with managing new, more diverse and more widespread operations, projects and people, potentially located in regions where we have not historically conducted or operated our business;

•dependence on unfamiliar or less secure supply chains and inefficient scale of the acquired entity;

•increasing costs of performing due diligence to meet the expectations of investors and government regulators;

•despite our due diligence, we could assume unknown, underestimated or contingent liabilities, such as potential environmental, health and safety liabilities, any of which could lead to costly litigation or mitigation actions;

•an acquired technology or product may have inadequate or invalid intellectual property protection or may be subject to claims of infringement by a third party, which may result in claims for damages and lower than anticipated revenue;

•we could experience negative effects on our reported results of operations from dilutive results from operations and/or from future potential impairment of acquired assets, including goodwill, related to acquisitions;

•an acquired company may have inadequate or ineffective internal controls over financial reporting, disclosure controls and procedures, cybersecurity, privacy, environmental, health and safety, anti-bribery, anti-corruption, human resource or other policies or practices, which may require unexpected or additional integration, mitigation and remediation costs;

Table of Contents

•reductions in cash or increases in debt to finance transactions, which reduce the cash flow available for general corporate or other purposes, including share repurchases and dividends; and

•difficulties in retaining key employees or customers of an acquired business.

Manufacturing interruptions or delays, or other disruptions to our operations, could adversely affect our business, financial condition and results of operations.

Our manufacturing processes are complex and require the use of expensive and technologically sophisticated equipment and materials. These processes are frequently modified to improve manufacturing yields, process stability and product quality. We have, on occasion, experienced manufacturing difficulties, such as critical equipment breakdowns or the introduction of impurities in the manufacturing process. Any future difficulties could cause lower yields, make our products unmarketable and/or delay deliveries to customers. In addition, any modification to the manufacturing process of a product could require that the product be re-qualified by customers, which can increase our costs and delay our ability to sell this product to our customers. These and other manufacturing difficulties may result in the loss of sales and exposure to warranty and product liability claims.

Some of our products are manufactured at only one or two facilities in different countries, many of which are subject to severe weather events and natural catastrophes, such as typhoons in Taiwan, Malaysia and China, earthquakes in Japan and Taiwan, hurricanes in east Texas and Florida, severe winter weather in Texas, wildfires in California and Colorado and flooding in Arkansas. Our suppliers and customers face similar dangers. Our continuity plans designed to mitigate the impact of natural disasters on our operations may be insufficient, and any catastrophe may disrupt our ability to manufacture and deliver products to our customers, resulting in an adverse impact on our business and results of operations. A disruption at our manufacturing facilities could impact sales of the products manufactured at those facilities until another facility could commence or expand production of those products, and disruptions at our other facilities may similarly adversely affect our operations. In addition to natural disasters, disruptions may be caused by other factors, including civil unrest, outbreaks of disease, terrorist actions or other events outside our control. We have moved, and we may again move, the manufacture of certain products from one plant to another. If we fail to transfer and re-establish the manufacturing processes in the destination plant efficiently and effectively, we may not be able to meet customer demand, we may lose credibility with our customers and our business may be harmed. Even if we successfully move our manufacturing processes, we may not achieve the anticipated levels of cost savings or efficiencies, if any.

Our operations use hazardous materials that expose us to various risks, including potential liability for personal injury and potential remediation obligations.

Our operations involve, and we are exposed to the risks associated with, the use and manufacture of hazardous materials. In particular, we manufacture specialty chemicals, which is an inherently hazardous process that may result in accidents, and store and transport hazardous raw materials, products and waste in, to and from various facilities. Potential risks that may disrupt our operations or expose us to significant losses and liabilities include explosions and fires, chemical spills and other discharges, releases of toxic or hazardous substances or gases, and pipeline and storage tank leaks and ruptures. These and other hazards may result in liability for personal injury, death, damage to property and contamination of the environment; suspension of operations; the imposition of civil or criminal fines, penalties and other sanctions; cleanup costs; claims by governmental entities or third parties; reputational harm; increases in our insurance costs; and other adverse impacts on our results of operations. Moreover, a failure of one of our products at a customer site could interrupt the business operations of the customer. For example, while we believe that our SDS and VAC delivery systems are safe to transport, store and deliver toxic gases, any leakage could cause serious damage, including injury or death, to any person exposed to those toxic gases, potentially creating significant product liability exposure for us. Our insurance coverage may be inadequate to satisfy any such liabilities, and our financial results or financial condition could be adversely affected.

Loss of any of our key personnel could harm our business, and our inability to attract and retain new qualified personnel could inhibit our ability to operate and grow our business successfully.

Many of our key personnel have significant experience in the semiconductor industry and deep technical expertise. The loss of the services of any of our key employees or an inability to attract, train and retain qualified and skilled employees, particularly research and development and engineering personnel, could inhibit our ability to operate and grow our business. As the semiconductor industry has grown in recent years, competition for qualified talent, particularly those with significant industry experience, has intensified. During 2022, we experienced, and may in the future continue to experience, an increasingly competitive and constrained labor market, which may limit our ability to add headcount required to meet our customers’ demand, decrease our productivity due to an influx of inexperienced workers and cause our labor costs to increase and our

Table of Contents

profitability to decline. As a result, the difficulty and costs associated with attracting and retaining employees has risen and may continue to rise.

If we fail to obtain, protect and enforce intellectual property rights, our business and prospects could be harmed.

Our future success and competitive position depend in part upon our ability to obtain, maintain and enforce intellectual property rights. We rely on patent, trade secret and trademark laws to protect many of our major product platforms. Although we often file applications for additional patents, our pending applications may not be approved. Moreover, any patents that we own or obtain may not provide us with any competitive advantage, may be designed around and these patents may expire or be challenged, invalidated, circumvented, rendered unenforceable or otherwise compromised by third parties. In addition, any failure to obtain intellectual property protection in the international jurisdictions we serve could expose us to increased competition, which could limit our growth and future revenue. The confidentiality agreements we enter into with our employees and certain third parties to protect our proprietary information and technology may be inadequate to protect our interests, and the remedies available to us for any breach may not adequately mitigate any breach or our confidential and proprietary information and technology may be replicated or obtained through lawful means. Additionally, we may lose trade secret protection as a result of the actions or omissions by us, our employees or third parties. Any weakness in our ability to protect our intellectual property could adversely affect our business, financial condition and results of operations.

Third parties may misappropriate our intellectual property rights, and disputes regarding intellectual property rights may arise. We may bring litigation in order to enforce our patents, copyrights or other intellectual property rights, to protect our trade secrets, to determine the validity and scope of the proprietary rights of others or to defend against claims of infringement. Such litigation could result in substantial costs, diversion of resources, require us to pay damages or royalties, require us to alter our products or processes, or require us to obtain a license, which we may be unable to do on commercially acceptable terms, or at all, to continue selling the impacted product, and could negatively affect our sales, profitability and prospects. From 2015 until 2020, we were party to litigation to enforce our intellectual property rights against Gudeng Precision Industrial Co., Ltd. for their patent infringement. We settled this dispute in 2020 by licensing certain of our intellectual property rights to Gudeng. In 2021, Gudeng filed a patent lawsuit against us, and the lawsuit is pending. We are party to ongoing litigation with Dupont relating to claims that certain Dupont products infringe on certain of our CMP slurry patents. We continue to vigorously defend and enforce our patents and rights, which will cause us to incur costs. We may initiate other costly litigation against our competitors or other third parties in order to protect our intellectual property rights. We cannot predict how any existing or future litigation will be resolved or what impact it may have on us.

We may be subject to information technology system failures, network disruptions and breaches in data security, which could damage our reputation and adversely affect our financial condition, results of operations and cash flows, and new laws and regulations regarding data privacy may increase our costs.

We collect and store sensitive data, including our financial information, intellectual property, confidential information, proprietary business information and personally identifiable information of our employees and others, as well as similar information of our customers, suppliers and business partners. We maintain this information in our data centers, on our networks and on information technology, or IT, systems owned and maintained by third parties. The secure processing, maintenance and transmission of this information is critical to our operations. All IT systems are subject to disruption, breach or failure. Data breaches, including those sponsored by state actors, have become increasingly common in recent years. For example, during 2020, the United States government was hacked via third-party software applications by hackers suspected of being sponsored by a foreign intelligence agency. We and our third-party suppliers have experienced, and expect to continue to be subject to, cybersecurity threats and incidents ranging from employee error or misuse, to individual attempts to gain unauthorized access to systems, to sophisticated and targeted measures known as advanced persistent threats. Despite the precautions we and our third-party providers undertake, IT system failures, network disruptions and breaches of data security could cause disruption in our operations, issues with customer communication and order management, the unauthorized or unintentional disclosure of sensitive information, disruptions in our transaction processing or undermine the integrity of our disclosure controls and procedures and our internal control over financial reporting, which could affect our reputation, result in significant liabilities and expenses, adversely affect our ability to report our financial results in a timely manner and could have a material adverse effect on our financial condition, results of operations and cash flows. These risks may be further amplified by the increased reliance on remote access to IT systems by us and our customers, suppliers and other third parties as a result of employees working remotely in response to the COVID-19 pandemic.

Moreover, new laws and regulations, such as the European Union’s General Data Protection Regulation, the California Consumer Privacy Act and China’s Personal Information Protection Law, add to the complexity of our compliance obligations,

Table of Contents

which increases our compliance costs. Although we have established internal controls and procedures intended to achieve compliance with such laws and regulations, a failure to fully comply could result in significant penalties.

Climate change may have a long-term impact on our business.

There are inherent climate-related risks wherever our business is conducted. Changes in market dynamics, stakeholder expectations, local, national and international climate change policies, and the frequency and intensity of extreme weather events on critical infrastructure in the United States and abroad, all have the potential to disrupt our business and operations. Such events could result in a significant increase in our costs and expenses and harm our future revenue, cash flows and financial performance. Global climate change is resulting in, and may continue to result, in certain natural disasters and adverse weather events, such as drought, wildfires, storms, sea-level rise and flooding, occurring more frequently or with greater intensity, which could cause business disruptions and impact employees’ abilities to commute or to work from home effectively.

Our environmental, social and governance commitments could result in additional costs, and our inability to achieve them could have an adverse impact on our reputation and performance.

From time to time we communicate our strategies, commitments and targets related to sustainability, carbon emissions, diversity and inclusion, human rights, and other environmental, social and governance matters. These strategies, commitments and targets reflect our current plans and aspirations, and we may be unable to achieve them. Changing customer sustainability requirements, as well as our sustainability targets, could cause us from time to time to alter our manufacturing, operations or products, and incur substantial additional expense to meet such requirements and targets. Any failure to meet these sustainability requirements or targets could adversely impact the demand for our products and subject us to significant costs and liabilities and reputational risks that could adversely affect our business, financial condition and results of operations. In addition, standards and processes for measuring and reporting carbon emissions and other sustainability metrics may change over time, and may result in inconsistent data, or could result in significant revisions to our strategies, commitments and targets, or our ability to achieve them. Any scrutiny of our carbon emissions or other sustainability disclosures or our failure to achieve related strategies, commitments and targets could negatively impact our reputation or performance.

Risks Related to Our Acquisition of CMC Materials

Combining our businesses and those of CMC may be more difficult, costly or time-consuming than expected and we may fail to realize the anticipated benefits of the acquisition, which may adversely affect our business results and negatively affect the value of our common stock following the acquisition.

The success of the acquisition will depend, in part, on our ability to realize anticipated benefits from integrating CMC into the Company. To realize these anticipated benefits, our businesses and those of CMC must be successfully combined. If we are not able to achieve these objectives, the anticipated benefits of the acquisition may not be realized fully or at all, or may take longer to realize than expected. An inability to realize the full extent of the anticipated benefits of the acquisition and the other transactions contemplated by the merger agreement, as well as any delays encountered in the integration process, could have an adverse effect upon our revenues, level of expenses and operating results, which may adversely affect the value of our common stock. Moreover, the actual integration may result in additional and unforeseen expenses, and the anticipated benefits of the integration plan may not be realized. Actual growth and cost savings, if achieved, may be lower than what we expect and may take longer to achieve than anticipated.

It is possible that the integration process could result in the loss of customers, the disruption of either company’s or both companies’ ongoing businesses, inconsistencies in standards, controls, procedures and policies, unexpected integration issues, higher than expected integration costs and an overall integration process that take longer than originally anticipated. Specifically, the following issues, among others, must be addressed in integrating our operations and those of CMC in order to realize the anticipated benefits of the acquisition:

•combining the companies’ operations and corporate functions;

•combining the companies’ businesses and meeting our capital requirements following the acquisition, in a manner that permits us to achieve any cost savings or revenue synergies anticipated to result from the acquisition, the failure of which would result in the anticipated benefits of the acquisition not being realized in the time frame currently anticipated or at all;

•integrating personnel from the two companies;

Table of Contents

•integrating the companies’ technologies;

•integrating and unifying the offerings and services available to customers;

•identifying and eliminating redundant and underperforming functions and assets;

•harmonizing the companies’ operating practices, employee development and compensation programs, internal controls and other policies, procedures and processes;

•maintaining existing agreements with customers, distributors, providers and vendors and avoiding delays in entering into new agreements with prospective customers, distributors, providers and vendors;

•addressing possible differences in business backgrounds, corporate cultures and management philosophies;

•consolidating the companies’ administrative and information technology infrastructure;

•coordinating distribution and marketing efforts;

•managing the movement of certain positions to different locations; and

•coordinating geographically dispersed organizations.

In addition, at times, the attention of management and our resources may be focused on completion of business integration and diverted from day-to-day business operations or other opportunities that may have been beneficial to us, which may disrupt our ongoing business.

Risks Related to Government Regulation

We are subject to a variety of environmental laws and regulations that could cause us to incur significant liabilities and expenses.

Failure to comply with the wide variety of federal, state, local and non-U.S. regulatory requirements relating to the release, use, storage, treatment, transportation, discharge, disposal and remediation of, and human exposure to, hazardous chemicals could result in future liabilities or the suspension of production or shipment. These requirements have become stricter over time. These laws and regulations, among others, increase the complexity and costs of transporting our products from the country in which they are manufactured to our customers. Further changes to these and similar regulations could restrict our ability to expand, build or acquire new facilities, require us to acquire costly control equipment, cause us to incur expenses associated with remediation of contamination, cause us to modify our manufacturing or shipping processes or otherwise increase our cost of doing business and have a negative impact on our financial condition, results of operations and cash flows. In addition, the potential adoption of new laws, rules or regulations related to climate change poses risks that could harm our results of operations or affect the way we conduct our businesses. For example, new or modified regulations could require us to make substantial expenditures to enhance our environmental compliance efforts.

We are exposed to various risks from our regulatory environment.

We are subject to risks related to new, different, inconsistent, or even conflicting laws, rules, and regulations that may be enacted by legislative or executive bodies and/or regulatory agencies in the countries where we operate; disagreements or disputes related to international trade; and the interpretation and application of laws, rules, and regulations. As a public company with global operations, we are subject to the laws of multiple jurisdictions and the rules and regulations of various governing bodies, including those related to health and safety, export controls, financial and other disclosures, corporate governance, privacy, anti-corruption, such as the Foreign Corrupt Practices Act and other local laws prohibiting corrupt payments to governmental officials or customers, conflict minerals or other social responsibility legislation, employment practices, immigration or travel regulations and antitrust regulations, among others. Each of these laws, rules and regulations imposes costs on our business, including financial costs and potential diversion of our management’s attention, and may present risks to our business, including potential fines, restrictions on our actions and reputational damage if we do not fully comply. The volume of changes to such laws, rules and regulations may increase in the United States over the next several quarters as the Biden administration continues to implement its policies.

To maintain high standards of corporate governance and public disclosure, we intend to invest in appropriate resources to comply with evolving standards. Changes in or ambiguous interpretations of laws, regulations and standards may create uncertainty regarding compliance matters. Efforts to comply with new and changing regulations have resulted in, and are likely to continue to result in, increased administrative expenses and diversion of management’s time and attention from revenue-generating activities to compliance activities. If we are found by a court or regulatory agency not to be in compliance with laws and regulations, our reputation, business, financial condition and/or results of operations could be adversely affected, we may

Table of Contents

be disqualified or barred from participating in certain activities and we may be forced to modify our operations to achieve full compliance.

Changes in taxation or adverse tax rulings could adversely affect our results of operations.

We operate in many foreign countries and are subject to taxation at various rates and audit by multiple taxing authorities. Our results of operations could be affected by tax audits, changes in tax rates, changes in laws and regulations governing the calculation, location and taxation of earned profit, changes in laws and regulations affecting our ability to realize deferred tax assets on our balance sheet and changes in laws and regulations relating to the repatriation of cash into the United States. Each quarter we forecast our tax liability based on our forecast of our performance for the year in each tax jurisdiction. If our performance forecast changes, our forecasted tax liability would also likely change, perhaps materially.

We have undertaken and expect to continue to undertake a number of complex internal reorganizations of our foreign subsidiaries in order to rationalize and streamline our foreign operations, focus our management efforts on certain local opportunities and take advantage of favorable business conditions in certain localities. These or any future reorganizations could result in adverse tax consequences in one or more jurisdictions, which could adversely impact our profitability from foreign operations and result in a material reduction in our results of operations.

Various other jurisdictions, including members of the Organization for Economic Cooperation and Development, are considering changes to their tax laws, including provisions intended to address base erosion and profit shifting by taxpayers. Any tax reform adopted in these or other countries may exacerbate the risks described above.

Risks Related to Our Indebtedness

We have a substantial amount of indebtedness and may in the future incur substantially more debt, each of which could adversely affect our ability to obtain financing in the future and react to changes in our business.

As of December 31, 2022, we had an aggregate principal amount of $5.9 billion of indebtedness outstanding, including the $2,495 million from our senior secured term loan facility due 2029, or the Term Loan Facility, $1.6 billion aggregate principal amount of the 4.75% senior secured notes due April 15, 2029, $895 million aggregate principal amount of the 5.95% senior unsecured notes due June 15, 2030, our 4.375% senior unsecured notes due April 15, 2028, our 3.625% senior unsecured notes due May 1, 2029, or collectively the Notes, and our bridge credit facility due 2023, or the Bridge Credit Facility. In addition, we have approximately $575 million of unutilized capacity under our senior secured revolving credit facility due 2027, or the Revolving Facility. We refer to the Term Loan Facility, and the Revolving Facility as the Senior Secured Credit Facilities, the Senior Secured Credit Facilities and the Bridge Credit Facility as the Credit Facilities and the credit agreements that govern the Credit Facilities as the Credit Agreements. Further, we may incur significant additional secured and unsecured indebtedness in the future.

Although the indentures governing the Notes, or the Indentures, and the Credit Agreements restrict our ability to incur additional indebtedness, the restrictions have a number of significant qualifications and exceptions. For example, the credit agreement governing our Senior Secured Credit Facilities, or the Amended Credit Agreement, provides that we can request additional loans and commitments up to the greater of $1,100 million or 100% of our EBITDA, as well as additional amounts if our secured net leverage ratio is less than a specified ratio. Further, these restrictions do not prevent us from incurring monetary obligations that do not constitute indebtedness. If we add new indebtedness and other monetary obligations to our current debt levels, the related risks that we now face would intensify.

Our debt could have important consequences, including:

•limiting our ability to obtain additional financing to fund future working capital, capital expenditures, acquisitions or other general corporate purposes;

•requiring a substantial portion of our cash flow to be dedicated to debt service payments instead of other purposes;

•increasing our vulnerability to adverse changes in general economic, industry and competitive conditions;

•exposing us to increased interest expense for borrowings with variable interest rates, including borrowings under the Credit Facilities; and

•placing us at a disadvantage compared to other, less leveraged competitors or competitors with comparable debt having more favorable terms.

We may be unable to generate sufficient cash to service our indebtedness and may be forced to take other actions, which may not be successful, to satisfy our obligations under our indebtedness.

Table of Contents

We may be unable to maintain sufficient cash flow from operating activities to permit us to pay the principal of, premium, if any, and interest on our indebtedness. Our ability to make scheduled payments on or to refinance our debt obligations depends on our financial condition and operating performance and the condition of the capital markets, which are subject to prevailing economic, industry and competitive conditions, as well as many financial, business, legislative, political, regulatory and other factors beyond our control. If our cash flow and capital resources are insufficient to fund our debt service obligations, we could face substantial liquidity problems, be forced to reduce or delay investments and capital expenditures, dispose of material assets or operations, seek additional debt or equity capital or restructure or refinance our indebtedness, any of which could have a material adverse effect on our business, financial position and results of operations. In addition, the level and quality of our earnings, operations, business and management, among other things, will impact the determination of our credit ratings. A decrease in the ratings assigned to us by the ratings agencies may negatively impact our access to the debt capital markets and increase our cost of borrowing. There can be no assurance that we will be able to obtain any future required financing on acceptable terms or at all. In addition, there can be no assurance that we will be able to maintain the current credit worthiness or prospective credit rating of the Company. Any actual or anticipated changes or downgrades in such credit rating may have a negative impact on our liquidity, capital position or access to capital markets.

Any refinancing of our debt could be at higher interest rates and may require us to comply with more onerous covenants, which could further restrict our business operations. We may not be able to implement any refinancing on commercially reasonable terms or at all and, even if successful, a refinancing may not allow us to meet our scheduled debt service obligations. The agreements governing our indebtedness restrict our ability to dispose of assets and use the proceeds of such dispositions, and we may be unable to consummate any dispositions or generate proceeds sufficient to meet our debt service obligations.

If we cannot make scheduled payments on our debt, holders of the Notes and lenders under the Credit Facilities could declare all outstanding principal and interest to be due and payable, the lenders under the Revolving Facility could terminate their commitments to advance further loans, our secured lenders could foreclose against the assets securing their borrowings and we could be forced into bankruptcy or liquidation.

The terms of the Credit Agreements and the Indentures may restrict our operations, particularly our ability to respond to changes or raise additional funds.

The Amended Credit Agreement contains restrictive covenants that impose significant operating and financial restrictions that may limit our and our restricted subsidiaries’ ability to take actions that may be in our long-term best interest, including restrictions on our and our restricted subsidiaries’ ability to:

•incur additional indebtedness and guarantee indebtedness;

•pay dividends or make other distributions in respect of, or repurchase or redeem, capital stock;

•prepay, redeem or repurchase certain debt;

•make investments, loans, advances and acquisitions;

•engage in sale-leaseback or hedging transactions;

•create liens on, sell or otherwise dispose of assets, including capital stock of our subsidiaries;

•enter into transactions with affiliates;

•enter into agreements that restrict the ability to create liens, pay dividends or make loan repayments;

•alter the businesses we conduct; and

•merge or sell all or substantially all of our assets or incur a change of control in our capital stock ownership.

Also, the Indentures and the credit agreement governing our Bridge Credit Facility contain limited covenants, such as a

covenant restricting our ability and certain of our subsidiaries’ ability to incur certain debt secured by liens, engage in

sale-leaseback and incur additional indebtedness by any restricted subsidiary.

In addition, the restrictive covenants under the credit agreement governing the Revolving Facility may, depending on the amount of revolving borrowings, unreimbursed letter of credit drawings and undrawn letters of credit, require us to maintain a secured net leverage ratio, which we may be unable to meet. Our failure to comply with these covenants could result in the acceleration of some or all of our indebtedness, which could lead to bankruptcy, reorganization or insolvency.

Risks Related to Owning our Common Stock

The price of our common stock has been and may remain volatile.

Table of Contents

The price of our common stock has been volatile. In 2022, the closing price of our stock on The Nasdaq Global Select Market, or Nasdaq, ranged from a low of $62.71 to a high of $140.83, and, as in past years, the price of our common stock may show even greater volatility in the future. The trading price of our common stock is subject to significant volatility in response to numerous factors, many of which are beyond our control or may be unrelated to our operating results, including the following:

•the significant increase in volatility in the stock market as a result of the COVID-19 pandemic;

•any changes to our financial guidance, as well as potential decreased confidence in any guidance we do provide;

•changes in global economic conditions, including those resulting from trade tensions, rising inflation, and fluctuations in foreign currency exchange and interest rates;

•the failure to meet the expectations of securities analysts, which may vary significantly from our actual results;

•changes in financial estimates by securities analysts;

•press releases or announcements by, or changes in market values of, comparable companies;

•high volatility in price and volume in the markets for high-technology stocks;

•the public perception of equity values of publicly traded companies;

•fluctuations in our results of operations; and

•the other risks and uncertainties described in this Annual Report on Form 10-K and in our other filings with the SEC.

Fluctuations in our results of operations could cause our stock price to decline significantly. We believe that period-to-period comparisons of our results of operations may not be meaningful, and you should not rely upon them as indicators of our future performance. Future decreases in our stock price may adversely impact our ability to raise sufficient additional capital in the future, if needed.

There can be no assurance that we will continue to declare cash dividends or that we will recommence the repurchase of our shares in any particular amounts or at all.

Future payments of quarterly dividends and any future repurchases of shares of our common stock are subject to capital availability and periodic determinations by our board of directors that they are in the best interest of our stockholders and comply with all laws and applicable agreements. Future dividends and any future share repurchases may be affected by, among other factors, potential capital requirements for acquisitions and the funding of our research and development activities; legal risks; changes in federal and state income tax laws or corporate laws; contractual restrictions, such as financial or operating covenants in our debt arrangements; availability of domestic cash flow; and changes to our business model. The amounts of our dividend payments may change from time to time, and we may decide at any time to reduce, suspend or discontinue the payment of dividends or the repurchase of shares. A reduction, suspension or discontinuation of our dividend payments or the cessation of our share repurchase program could have a negative effect on the price of our common stock and may harm our reputation.

Provisions in our charter documents and Delaware law may delay or prevent an acquisition of us, which could decrease the value of our shares.

Our certificate of incorporation, our by-laws and Delaware law contain provisions that could make it harder for a third party to acquire us without the consent of our board of directors. These provisions include limitations on actions by written consent of our stockholders.

Our certificate of incorporation makes us subject to the anti-takeover provisions of Section 203 of the Delaware General Corporation Law. In general, Section 203 prohibits publicly held Delaware corporations from engaging in a “business combination” with an “interested stockholder” for a period of three years after the date of the transaction in which the person became an interested stockholder, unless the business combination is approved in a prescribed manner. This provision could discourage parties from bidding for our shares of common stock and could, as a result, reduce the likelihood of an increase in the price of our common stock that would otherwise occur if a bidder sought to buy our common stock.

Our certificate of incorporation authorizes our board of directors to issue, without further stockholder approval, up to 5,000,000 shares of preferred stock in one or more series and to fix and designate the rights, preferences, privileges and restrictions of the preferred stock, including dividend rights, conversion rights, voting rights, redemption rights and liquidation preferences. The holders of any shares of preferred stock could have preferences over the holders of our common stock with respect to dividends and liquidation rights. Any issuance of preferred stock may have the effect of delaying, deterring or preventing a change in control. Any issuance of preferred stock could decrease the amount of earnings and assets available for distribution to the holders of common stock and could adversely affect the rights and powers, including voting rights, of the holders of common stock. The issuance of preferred stock could have the effect of decreasing the market price of our common stock.

Table of Contents

Item 1B. Unresolved Staff Comments.

Not Applicable.

Table of Contents

Item 2. Properties.

Our principal executive offices are located in Billerica, Massachusetts. Information about our principal and certain other facilities is set forth below:

Location

Principal Function

Approximate

Square Feet

Leased/

Owned

Reporting Segment

Bedford, Massachusetts

Research & Manufacturing

80,000

Owned

MC & SCEM

Billerica, Massachusetts(1)

Executive Offices, Research & Manufacturing

175,000

Leased

MC, SCEM & AMH

Burnet, Texas

Research & Manufacturing

86,000

Owned

SCEM

Decatur, Texas

Manufacturing

359,000

Owned

SCEM

Waller, Texas

Manufacturing

210,000

Owned

APS

Chaska, Minnesota

Executive Offices, Research & Manufacturing

186,000

Owned

AMH

Colorado Springs, Colorado

Manufacturing

82,000

Owned

AMH

Pueblo, Colorado

Manufacturing

250,000

Owned

APS

Danbury, Connecticut

Research & Manufacturing

73,000

Leased

SCEM

San Luis Obispo, California

Manufacturing

57,867

Owned

San Luis Obispo, California

Manufacturing

59,124

Leased

Hollister, California

Manufacturing

49,139

Owned

APS

Aurora, Illinois

Manufacturing

414,000

Owned

APS

Hillsboro, Oregon

Manufacturing

112,344

Leased

APS

Saint Fromond, France

Manufacturing

182,296

Owned

APS

San Giuliano Milanese, Italy

Manufacturing

138,840

Owned

APS

Riddings, UK

Manufacturing

82,779

Leased

APS

Hsin-chu, Taiwan

Executive Offices, Sales Research & Manufacturing

146,330

Leased

MC, SCEM & AMH

Kaohsiung City,Taiwan

Manufacturing

105,874

Owned

APS

JangAn, South Korea

Manufacturing

127,000

Owned

MC, SCEM & AMH

Oseong, South Korea

Manufacturing

108,355

Owned

APS

Suwon, South Korea

Executive Offices & Research

42,000

Leased

MC & SCEM

Kulim, Malaysia

Manufacturing

195,000

Owned

SCEM & AMH

Yonezawa, Japan

Manufacturing

185,000

Owned

MC & AMH

Tsu, Mie, Japan

Manufacturing

160,259

Owned

APS

Singapore

Manufacturing

215,235

Owned

APS

(1) This lease has been extended through September 30, 2026 and is subject to one five-year renewal option.

In addition, we own and lease space for manufacturing, distribution, technical support, sales, service, repair, and general administrative purposes in the United States, Canada, China, Germany, France, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Leases for our facilities expire through October 2031. We currently expect to be able to extend the terms of expiring leases or to find suitable replacement facilities on reasonable terms. We believe that our facilities are well-maintained and suitable for their respective operations. We regularly assess the size, capability and location of our global infrastructure and periodically make adjustments based on these assessments.

Item 3. Legal Proceedings.

We are involved in certain legal actions. The outcomes of these legal actions are not within our complete control and may not be known for prolonged periods of time. In some actions, the claimants seek damages, as well as other relief, that could require significant expenditures or result in lost revenues. We record a liability for these legal actions when a loss is known or considered probable and the amount can be reasonably estimated. If the reasonable estimate of a known or probable loss is a range, and no amount within the range is a better estimate than any other, the minimum amount of the range is accrued. There is judgment required in the determination of the likelihood of outcome, and if necessary determination of the estimate or range of potential outcomes. Based on the current information, the Company does not believe any known matters have a reasonable possibility of a material amount for litigation or other contingencies related to legal proceedings.

Table of Contents

Item 4. Mine Safety Disclosures.

Not applicable.

Table of Contents

PART II

Item 5. Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities.

Market Information and Holders

Entegris’ common stock, $0.01 par value per share, trades on the Nasdaq Global Select Market under the symbol “ENTG”. As of February 13, 2023, there were 1,080 shareholders of record.

Dividend Policy

On January 18, 2023, the Company’s board of directors declared a quarterly cash dividend of $0.10 per share to be paid on February 22, 2023 to shareholders of record as of February 1, 2023.

Future dividend declarations, if any, as well as the record and payment dates for such dividends, are subject to the final determination of our board of directors. Furthermore, the credit agreement governing the Credit Facilities contains restrictions that may limit our ability to pay dividends.

Issuer Sales of Unregistered Securities During the Past Three Years

None.

Comparative Stock Performance

The following graph compares the cumulative total shareholder return on the common stock of Entegris, Inc. from December 31, 2017 through December 31, 2022 with the cumulative total return of (1) The Nasdaq Composite Index, and (2) The Philadelphia Semiconductor Index, assuming $100 was invested at the close of trading on December 31, 2017 in Entegris, Inc. common stock, the Nasdaq Composite Index and the Philadelphia Semiconductor Index and that all dividends are reinvested.

Table of Contents


	December 31, 2017	December 31, 2018	December 31, 2019	December 31, 2020	December 31, 2021	December 31, 2022
Entegris, Inc.	$100.00	$92.41	$167.12	$322.26	$465.93	$221.34
Nasdaq Composite	100.00	97.16	132.81	192.47	235.15	158.64
Philadelphia Semiconductor Index	100.00	93.95	153.38	235.69	336.68	219.25

Issuer Purchases of Equity Securities

The Company repurchased none of its common stock in 2022 under an authorized common stock repurchase plan.

The Company issues common stock awards under its equity incentive plans. In the consolidated financial statements, the Company treats shares of common stock withheld for tax purposes on behalf of its employees in connection with the vesting or exercise of the awards as common stock repurchases because they reduce the number of shares that would have been issued upon vesting or exercise. These withheld shares of common stock are not considered common stock repurchases under the Company’s authorized common stock repurchase plan.

Item 6. Reserved

Table of Contents

Item 7. Management’s Discussion and Analysis of Financial Condition and Results of Operations.

The following discussion and analysis of the Company’s consolidated financial condition and results of operations should be read along with the consolidated financial statements and the accompanying notes thereto included elsewhere in this Annual Report on Form 10-K. This discussion contains forward-looking statements that involve numerous risks and uncertainties, including, but not limited to, those described in Item 1A, “Risk Factors” and the “Cautionary Statements” section of this Item 7 below. You should review Item 1A “Risk Factors” of this Annual Report on Form 10-K for a discussion of important factors that could cause actual results to differ materially from the results described in or implied by the forward-looking statements contained in the following discussion and analysis. The Company has elected to omit discussion of the earliest of the three years covered by the consolidated financial statements presented except for the segment analysis. Information pertaining to fiscal year 2020 results of operations and the year-over-year comparison of changes in our Financial Condition and Results of Operations as of and for the year ended December 31, 2021 and 2020 can be found in Part II, Item 7, “Management’s Discussion and Analysis of Financial Condition and Results of Operations” of our Annual Report on Form 10-K for the year ended December 31, 2021, filed on February 4, 2022.

Cautionary Statements

This Annual Report on Form 10-K and the portions of the Company’s Definitive Proxy Statement incorporated by reference in this Annual Report on Form 10-K contain “forward-looking statements.” The words “believe,” “expect,” “anticipate,” “intend,” “estimate,” “forecast,” “project,” “should,” “may,” “will,” “would” or the negative thereof and similar expressions are intended to identify such forward-looking statements. These forward-looking statements may include statements about the ongoing impacts of the COVID-19 pandemic and the conflict in Ukraine on the Company’s operations and markets, including supply chain issues and inflationary pressures related thereto; future period guidance or projections; the Company’s performance relative to its markets, including the drivers of such performance; market and technology trends, including the duration and drivers of any growth trends; the development of new products and the success of their introductions; the focus of the Company’s engineering, research and development projects; the Company’s ability to execute on our business strategies, including with respect to Company’s expansion of its manufacturing presence in Taiwan and in Colorado Springs; the Company’s capital allocation strategy, which may be modified at any time for any reason, including share repurchases, dividends, debt repayments and potential acquisitions; the impact of the acquisitions the Company has made and commercial partnerships the Company has established, including the acquisition of CMC Materials; the closing of any announced divestitures, including the timing thereof; trends relating to the fluctuation of currency exchange rates; future capital and other expenditures, including estimates thereof; the Company’s expected tax rate; the impact, financial or otherwise, of any organizational changes; the impact of accounting pronouncements; quantitative and qualitative disclosures about market risk; and other matters. These forward-looking statements are based on current management expectations and assumptions only as of the date of this Quarterly Report, are not guarantees of future performance and involve substantial risks and uncertainties that are difficult to predict and that could cause actual results to differ materially from the results expressed in, or implied by, these forward-looking statements. These risks and uncertainties include, but are not limited to, weakening of global and/or regional economic conditions, generally or specifically in the semiconductor industry, which could decrease the demand for the Company’s products and solutions; the level of, and obligations associated with, the Company’s indebtedness, including the debts incurred in connection with the acquisition of CMC Materials; risks related to the acquisition and integration of CMC Materials, including unanticipated difficulties or expenditures relating thereto, the ability to achieve the anticipated synergies and value-creation contemplated by the acquisition of CMC Materials and the diversion of management time on transaction-related matters; risks related to the COVID-19 pandemic and the conflict in Ukraine on the global economy and financial markets, as well as on the Company, its customers and suppliers, which may impact its sales, gross margin, customer demand and its ability to supply its products to its customers; raw material shortages, supply and labor constraints and price increases; pricing and inflationary pressures and rising interest rates; operational, political and legal risks of the Company’s international operations; the Company’s dependence on sole source and limited source suppliers; the Company’s ability to meet rapid demand shifts; the Company’s ability to continue technological innovation and introduce new products to meet customers’ rapidly changing requirements; substantial competition; the Company’s concentrated customer base; the Company’s ability to identify, complete and integrate acquisitions, joint ventures , divestitures or other similar transactions; the Company’s ability to consummate pending transactions on a timely basis or at all and the satisfaction of the conditions precedent to consummation of such pending transactions, including the satisfaction of regulatory conditions on the terms expected, at all or in a timely manner; the Company’s ability to effectively implement any organizational changes; the Company’s ability to protect and enforce intellectual property rights; the increasing complexity of certain manufacturing processes; changes in government regulations of the countries in which the Company operates, including the imposition of tariffs, export controls and other trade laws and restrictions and changes to national security and international trade policy, especially as they relate to China; fluctuation of currency exchange rates; fluctuations in the market price of the Company’s stock; and other matters. These forward-looking statements are based on current management expectations and assumptions only as of the date of this Annual Report on Form 10-K, are not guarantees of future performance and involve substantial risks and uncertainties that are difficult to predict and that could cause actual results to differ materially from the results expressed in, or implied by, these forward-looking

Table of Contents

statements. These risks and uncertainties include, but are not limited to, the risk factors and additional information described in this Annual Report on Form 10-K under the caption “Risk Factors,” elsewhere in this Annual Report on Form 10-K and in the Company’s other periodic filings. Except as required under the federal securities laws and the rules and regulations of the SEC, the Company undertakes no obligation to update publicly any forward-looking statements or information contained herein, which speak as of their respective dates.

Overview

This overview is not a complete discussion of the Company’s financial condition, changes in financial condition and results of operations; it is intended merely to facilitate an understanding of the most salient aspects of its financial condition and operating performance and to provide a context for the detailed discussion and analysis that follows, and must be read in its entirety in order to fully understand the Company’s financial condition and results of operations.

The Company is a leading supplier of advanced materials and process solutions for the semiconductor and other high-technology industries. We help our customers maximize manufacturing yields, reduce manufacturing costs and enable higher device performance by leveraging our unique breadth of capabilities to provide mission critical enhanced materials and process solutions for the most advanced manufacturing environments.

Our business is organized and operated in four operating segments, which align with the key elements of the advanced semiconductor manufacturing ecosystem.

•The Advanced Planarization Solutions segment, or APS, provides complementary chemical mechanical planarization solutions, advanced materials and high-purity wet chemicals; including CMP slurries, pads, formulated cleans and other electronic chemicals.

These segments share common business systems and processes, technology centers and technology roadmaps. With the complementary capabilities across these segments, we believe we are uniquely positioned to create new, co-optimized and increasingly integrated solutions for our customers. For example, after the acquisition of CMC Materials, we now offer an end-to-end offering for our customers consisting of advanced deposition materials from our SCEM segment, CMP slurries, pads and post-CMP cleaning chemistries from our APS segment, CMP slurry filters from our MC segment, and CMP slurry high-purity packaging and fluid monitoring systems from our AMH segment.

Impact of New Export Control Regulations

On October 7, 2022, the U.S Department of Commerce, Bureau of Industry and Security (“BIS”) announced new export control regulations that restrict the sale of certain products and services to some companies and domestic fabs in China. Since these rules were published, we have assembled a global, cross-functional team to interpret the regulations, analyze how they may impact Entegris and determine how to best serve our customers going forward in compliance with these rules. These new rules restrict the sale of products and the provision of service to domestic fabs in China operating at or above certain advanced technology nodes. We currently estimate that the new regulations will reduce our net sales by approximately $20 million per quarter in 2023. We intend to apply for export licenses where appropriate. See Item 1A, “Risk Factors,” for additional information regarding risk associated with the impact of new export control regulations, including under the caption “The impact of tariffs, export controls and other trade laws and restrictions, especially with respect to China”.

Impact of COVID-19 on our Business

The COVID-19 pandemic continues to impact the global economy. Infection rates vary across the countries in which we operate, and governmental authorities have continued to implement numerous and constantly evolving measures to try to contain the virus. Continuing impacts of the pandemic include a more challenging supply chain and global logistics environment. While we have experienced instances of raw material constraints, higher freight costs and delivery delays in both inbound shipments of raw materials and outgoing shipments of finished products to customers, we have not experienced material adverse impacts to our global operations. See Item 1A, “Risk Factors,” for additional information regarding risks associated with the COVID-19 pandemic, including under the caption “The impact of the COVID-19 pandemic.”

Impact of Conflict Between Russia and Ukraine

Table of Contents

The military conflict between Russia and Ukraine and the sanctions imposed by the United States and other governments in response to this conflict have caused significant volatility and disruptions to global markets. We source certain materials from Russia and Ukraine, and we have been able to obtain an adequate supply of these materials to serve our customers, albeit at increased cost. We are proactively assessing and evaluating alternative sources to bolster our supply of these materials moving forward, in addition to working closely with our customers on any product re-qualification that may be required. Revenue relating to products manufactured from raw materials sourced from this region does not constitute a material portion of our business and historically, we have not received significant revenue from this region. The ultimate impact of the conflict on the global economy, supply chains, logistics, fuel prices, raw material pricing and our business remains uncertain. We cannot currently predict the ultimate impact of the conflict on our financial condition, results of operations or cash flows. See Item 1A, “Risk Factors,” for additional information regarding risk associated with the conflict between Russia and Ukraine, including under the caption “Risks Related to Our Business and Industry”.

Recent Events

On July 6, 2022 (“Closing Date”), we completed the acquisition of CMC Materials. We acquired all of the issued and outstanding common shares of CMC Materials for $133.00 in cash and 0.4506 shares of our common stock per share, representing a total purchase price (inclusive of debt retired and cash assumed) at close of $6.0 billion (based on our closing price on June 30, 2022), including $3.8 billion in cash paid to CMC Materials’ shareholders, the issuance of 12.9 million shares of our common stock (excluding unvested CMC stock options and unvested CMC restricted stock units, restricted shares and performance share units equity awards assumed), $0.9 billion of debt retired and approximately $0.3 billion of acquired cash. We financed the cash portion of the purchase price through debt financing. See Note 10 to our consolidated financial statements for further discussion of the debt financing that occurred prior to and on the Closing Date.

During the three months ended October 1, 2022, the Company realigned its financial reporting structure to reflect management and organizational changes. The Company will report its financial performance based on four reportable segments: Specialty Chemicals and Engineered Materials, Microcontamination Control, Advanced Material Handling and Advanced Planarization Solutions. See Note 20 to the consolidated financial statements for additional information on the Company’s four segments.

On July 28, 2022, we entered into an interest rate swap agreement. The interest rate swap is a floating-to-fixed interest rate swap contract to hedge the variability in Secured Overnight Financing Rate (“SOFR”)-based interest payments associated with $1.95 billion of our $2.495 billion Initial Term Loan Facility. The notional amount is scheduled to decrease quarterly and will expire on December 30, 2025. See Note 12 to our consolidated financial statements for further discussion of our derivative instruments.

On August 16, 2022, the U.S. government enacted the Inflation Reduction Act of 2022 (“IRA”) that includes, among other provisions, changes to the U.S. corporate income tax system, including a 15% minimum tax based on “adjusted financial statement income” exceeding $1 billion and a 1% excise tax on net repurchases of stock after December 31, 2022, as well as tax credits for clean energy initiatives. We are evaluating the IRA and its requirements, as well as any potential impact on our business.

On October 11, 2022, the Company entered into a definitive agreement with Infineum USA L.P. to sell our PIM business, which became part of the Company with the recent acquisition of CMC Materials. Effective February 10, 2023, the Company terminated the definitive agreement in accordance with its terms. At the time of the termination, the transaction had not received clearance under the HSR Act.

Critical Accounting Policies and Estimates

Management’s discussion and analysis of financial condition and results of operations are based upon the Company’s consolidated financial statements, which have been prepared in accordance with accounting principles generally accepted in the United States, or GAAP. The preparation of these consolidated financial statements requires the Company to make estimates, assumptions and judgments that affect the reported amounts of assets, liabilities, revenues and expenses and related disclosure of contingent assets and liabilities. At each balance sheet date, management evaluates its estimates, including, but not limited to, those related to long-lived assets (property, plant and equipment, and identified intangible assets), goodwill and income taxes. The Company bases its estimates on historical experience and various other assumptions that management believes to be reasonable under the circumstances. Management’s utilization of different judgments or estimates could result in material differences in the amount and timing of the Company’s results of operations for any period. In addition, actual results could be different from the Company’s current estimates, possibly resulting in increased future charges to earnings.

Table of Contents

Our critical accounting policies that are most significantly affected by estimates, assumptions and judgments used in the preparation of the Company's consolidated financial statements relate to business acquisitions and are discussed below. See Note 1 to the Company’s consolidated financial statements for additional information about the Company’s other significant accounting policies.

Business Acquisitions

The Company accounts for acquired businesses using the acquisition method of accounting, which requires that the assets acquired and liabilities assumed be recorded at the date of acquisition at their respective fair values. The judgments made in determining the estimated fair value assigned to each class of assets acquired and liabilities assumed, as well as asset lives, can materially impact net income. Accordingly, for significant items the Company typically obtains assistance from a third-party valuation firm.

There are several methods that can be used to determine the fair value of assets acquired and liabilities assumed in a business combination. For intangible assets, the Company normally utilizes the “income method,” which starts with a forecast of all of the expected future net cash flows attributable to the subject intangible asset. These cash flows are then adjusted to present value by applying an appropriate discount rate that reflects the risk factors associated with the cash flow streams. Depending on the asset valued, the key assumptions included one or more of the following: (1) future revenue growth rates, (2) future gross margin, (3) future selling, general and administrative expenses, (4) royalty rates, and (5) discount rates.

Estimating the useful life of an intangible asset also requires judgment. For example, different types of intangible assets will have different useful lives, influenced by the nature of the asset, competitive environment, and rate of change in the industry. Certain assets may even be considered to have indefinite useful lives. All of these judgments and estimates can significantly impact the determination of the amortization period of the intangible asset, and thus net income.

Results of Operations

Year ended December 31, 2022 compared to year ended December 31, 2021

The following table sets forth the results of operations and the relationship between various components of operations, stated as a percent of net sales, for 2022 and 2021.


(Dollars in thousands)	2022				2021
			% of net sales				% of net sales
Net sales	$	3,282,033	100.0	%	$	2,298,893	100.0	%
Cost of sales	1,885,620		57.5		1,239,229		53.9
Gross profit	1,396,413		42.5		1,059,664		46.1
Selling, general and administrative expenses	543,485		16.6		292,408		12.7
Engineering, research and development expenses	228,994		7.0		167,632		7.3
Amortization of intangible assets	143,953		4.4		47,856		2.1
Operating income	479,981		14.6		551,768		24.0
Interest expense	212,669		6.5		41,240		1.8
Interest income	(3,694)		(0.1)		(243)		—
Other expense, net	23,926		0.7		31,695		1.4
Income before income taxes	247,080		7.5		479,076		20.8
Income tax expense	38,160		1.2		69,950		3.0
Net income	$	208,920	6.4		$	409,126	17.8

Net sales For 2022, net sales were $3,282.0 million, up $983.1 million, or 43%, from 2021. An analysis of the factors underlying the increase in net sales is presented in the following table:


(In thousands)
Net sales in 2021	$	2,298,893
Increase mainly associated with volume exclusive of acquired businesses	594,407
Increase associated with acquired businesses	495,591
Decrease associated with effect of foreign currency translation	(106,858)
Net sales in 2022	$	3,282,033

Table of Contents

Total net sales increased primarily driven by the inclusion of sales from the acquisition of CMC Materials for the six-month period subsequent to the Closing Date. Growth was also driven in our unit driven solutions, including liquid filtration, selective etch, gas purification systems and advanced deposition materials, which are of growing importance to our customers’ technology. Total net sales also reflected unfavorable foreign currency translation effects of $106.9 million, mainly due to the significant weakening of the Japanese yen and the Korean won relative to the U.S. dollar.

Sales percentage on a geographic basis for 2022 and 2021 and the percentage increase in sales for 2022 compared to sales for 2021 were as follows:


	Year ended
	December 31, 2022		December 31, 2021		Percentage increase in sales
North America	24	%	23	%	51	%
Taiwan	20	%	20	%	45	%
China	15	%	16	%	38	%
South Korea	13	%	14	%	31	%
Japan	11	%	13	%	16	%
Europe	10	%	9	%	55	%
Southeast Asia	7	%	5	%	88	%

The increase in sales for all geographic areas was primarily driven by the inclusion of sales from the CMC Materials acquisition and a general increase in demand for products.

Gross margin

The following table sets forth gross margin as a percentage of net revenues:


	2022		2021		Percentage point change
Gross margin as a percentage of net revenues:	42.5	%	46.1	%	-3.6

Gross margin decreased by 3.6 percentage points for 2022 compared to 2021, primarily due to a $61.9 million charge or 1.9 percentage point change for fair value write-up of acquired CMC Materials inventory sold during the three-month period subsequent to the CMC Materials acquisition, and the inclusion of CMC Materials’ products, which have aggregate lower gross margins.

Selling, general and administrative expenses

Selling, general and administrative expenses consist primarily of payroll and related expenses for the sales and administrative staff, professional fees (including accounting, legal and technology costs and expenses), and sales and marketing costs. SG&A expenses for 2022 increased $251.1 million, or 86%, to $543.5 million from $292.4 million in 2021.

An analysis of the factors underlying the increase in SG&A expenses is presented in the following table:


(In thousands)
Selling, general and administrative expenses in 2021	$	292,408
SG&A expense recorded by CMC Materials and included in Company’s financial statements after the date of the acquisition	68,249
Employee costs, exclusive of CMC Materials	12,533
Deal and transaction costs	34,799
Integration costs	46,951
Contractual and non-cash integration costs	61,964
Professional costs, exclusive of CMC Materials	7,734
Travel costs, exclusive of CMC Materials	4,029
Other increases, net	14,818
Selling, general and administrative expenses in 2022	$	543,485

Engineering, research and development expenses

Table of Contents

Engineering, research and development expenses consist of expenses for the support of current product lines and the development of new products and manufacturing technologies. These expenses were $229.0 million in 2022 and $167.6 million in 2021.

An analysis of the factors underlying the increase in ER&D expenses is presented in the following table:


(In thousands)
Engineering, research and development expense in 2021	$	167,632
ER&D expense recorded by CMC Materials and included in Company’s financial statements after the date of the acquisition	25,993
Employee costs, exclusive of CMC Materials	18,419
Project related costs, exclusive of CMC Materials	10,734
Other increases, net	6,216
Engineering, research and development expense in 2022	$	228,994

The Company’s overall ER&D efforts will continue to focus on developing and improving its technology platforms for semiconductor and advanced processing applications and identifying and developing products for new applications, and the Company often works directly with its customers to address their particular needs. As a percentage of revenue, the Company expects to increase ER&D expenses in the coming years.

Amortization of intangible assets Amortization of intangible assets was $144.0 million in 2022 compared to $47.9 million for 2021. The increase primarily reflects additional amortization expense associated with the recent acquisition of CMC Materials.

Interest expense Interest expense was $212.7 million in 2022 and $41.2 million in 2021. Interest expense includes interest associated with debt outstanding and the amortization of debt issuance costs associated with such borrowings. The increase primarily reflects higher interest expense related to the debt financing of the CMC Materials acquisition.

Interest income Interest income was $3.7 million in 2022 and $0.2 million in 2021. The increase reflects rising average interest rates and cash balances.

Other expense, net Other expense, net, was $23.9 million in 2022 compared to $31.7 million in 2021.

In 2022, other expense, net consisted mainly of consisted mainly of foreign currency transaction losses of $23.0 million.

In 2021, other expense, net consisted mainly of a loss on extinguishment of debt of $23.1 million associated with the redemption of the Company’s $550 million aggregate principal amount of senior unsecured notes due 2026 and foreign currency transaction losses of $7.9 million.

Income tax expense The Company recorded income tax expense of $38.2 million in 2022 compared to income tax expense of $70.0 million in 2021. The Company’s effective tax rate was 15.4% in 2022 compared to an effective tax rate of 14.6% in 2021.

The increase in the effective tax rate from 2021 to 2022 primarily relates to a reduction in creditable foreign withholding taxes during the year. This was partially offset by certain acquisition related expenses that were recorded during the year and a change in income geographic mix. Additionally, the tax rate for 2021 included the reversal of a valuation allowance on foreign tax credits generated during 2020 of $6.2 million and the recognition of a capital loss tax benefit of $5.1 million. These tax benefits were offset in part by tax recorded on the sale of intangible property of $3.5 million in 2021. The income tax expense for 2022 and 2021 includes discrete benefits of $4.0 million and $13.8 million, respectively, recorded in connection with share-based compensation.

Net income Net income was $208.9 million, or $1.46 per diluted share, in 2022 compared to net income of $409.1 million, or $3.00 per diluted share, in 2021. The decrease reflects the Company’s aforementioned operating results described in greater detail above and an increase of 12.9 million shares of common stock issued in connection with the CMC Materials acquisition that increased the number of dilutive shares outstanding.

Non-GAAP Financial Measures Information The Company’s consolidated financial statements are prepared in conformity with accounting principles generally accepted in the United States. The Company also utilizes certain non-GAAP financial measures as a complement to financial measures provided in accordance with GAAP in order to better assess and reflect trends affecting the Company’s business and results of operations. See “Non-GAAP Information” included below in this section for additional detail, including the reconciliation of the Company’s non-GAAP measures to the most directly comparable GAAP measures.

The Company’s non-GAAP financial measures include adjusted EBITDA and adjusted operating income, together with related percentage changes, and non-GAAP earnings per share, or EPS.

Adjusted EBITDA increased to $973.2 million in 2022, compared to $699.4 million in 2021. Adjusted EBITDA as a percent of net sales was 29.7% in 2022 compared to 30.4% in 2021. Adjusted operating income increased 37.6% to $837.9 million in

Table of Contents

2022, compared to $609.1 million in 2021. Adjusted operating income as a percent of net sales was 25.5% in 2022 compared to 26.5% in 2021. Non-GAAP EPS increased 8.4% to $3.73 in 2022, compared to $3.44 in 2021. The decreases in adjusted EBITDA and adjusted operating income as a percentage net sales reflects lower gross margin.

Segment Analysis

Effective July 6, 2022, coincident to and in conjunction with the CMC acquisition (see Note 3 to the consolidated financial statements) the Company changed its financial segment reporting to reflect management and organizational changes made by the Company. The Company reports its financial performance based on four reportable segments: Specialty Chemicals and Engineered Materials, Microcontamination Control, Advanced Material Handling and Advanced Planarization Solutions. The change which included a transfer of some related operations in our Specialty Chemicals and Engineered Materials reportable segment to our Advanced Planarization Solutions reportable segment. Accordingly, our segment information was restated retroactively in the third quarter of fiscal 2022. The segment realignment had no impact on the Microcontamination Control or Advanced Materials Handling segments. See Note 20 to the consolidated financial statements for additional information on the Company’s four segments. The following is a discussion of the results of operations of these four business segments.

The following table and discussion concern the results of operations of the Company’s four reportable segments for the years ended December 31, 2022, 2021 and 2020.


(In thousands)	2022		2021		2020
Specialty Chemicals and Engineered Materials
Net sales	$	773,594	$	625,670	$	530,040
Segment profit	122,287		137,392		99,474
Microcontamination Control
Net sales	$	1,105,996	$	919,363	$	742,186
Segment profit	411,475		321,300		248,910
Advanced Materials Handling
Net sales	$	846,492	$	704,946	$	538,682
Segment profit	183,738		159,995		111,028
Advanced Planarization Solutions
Net sales	$	606,614	$	85,621	$	79,492
Segment profit	96,902		30,415		28,495

Unallocated general and administrative expenses	$	190,468	$	49,478	$	39,370

Specialty Chemicals and Engineered Materials (SCEM)

For 2022, SCEM net sales increased to $773.6 million, up 24% from $625.7 million in 2021. The sales increase primarily reflects the inclusion of sales of $90.1 million from inclusion of certain product lines from the acquisition of CMC Materials, while the remainder reflects modestly improved sales of advanced deposition materials, formulated cleans, selective etch and specialty coatings products.

SCEM reported a segment profit of $122.3 million for 2022, down 11% compared to $137.4 million in 2021. The decrease in SCEM’s profit in 2022 was primarily due unfavorable product mix, the absence of a gain on a sale of non-core intangibles and higher operating expenses of 31% mainly due to the expenses incurred by the inclusion of certain product lines of CMC Materials and a $5.1 million charge for a fair value write-up of acquired CMC Materials inventory sold, partially offset by higher sales.

For 2021, SCEM net sales increased to $625.7 million, up 18% from $530.0 million in 2020. The sales increase was mainly due to increased sales of specialty gases and advanced deposition materials, formulated cleaning chemistries and advanced coatings products.

SCEM reported a segment profit of $137.4 million for 2021, up 38% compared to $99.5 million in 2020. The increase in SCEM’s profit in 2022 was primarily due to higher sales and a gain on a sale of non-core intangibles.

Microcontamination Control (MC)

For 2022, MC net sales increased to $1,106.0 million, up 20% from $919.4 million in 2021. The sales increase was due to improved performance across substantially all platforms, with growth especially strong in liquid filtration and gas filtration products.

Table of Contents

MC reported a segment profit of $411.5 million for 2022, up 28% compared to $321.3 million in 2021. The increase in MC’s profit in 2022 was primarily due to higher gross profit related to the increased sales volume, partially offset by higher operating expenses of 17%, primarily due to higher compensation costs.

For 2021, MC net sales increased to $919.4 million, up 24% from $742.2 million in 2020. The sales increase was due to improved performance across substantially all platforms, with growth especially strong in liquid filtration and gas filtration products.

MC reported a segment profit of $321.3 million for 2021, up 29% compared to $248.9 million in 2020. The increase in MC’s profit in 2021 was primarily due to higher gross profit related to the increased sales volume, partially offset by higher operating expenses of 13%, primarily due to higher compensation costs.

Advanced Materials Handling (AMH)

For 2022, AMH net sales increased 20% to $846.5 million from $704.9 million in 2021. The sales increase was mainly due to improved sales from wafer handling and fluid handling.

AMH reported a segment profit of $183.7 million for 2022, up 15% compared to $160.0 million in 2021. The increase in AMH’s profit in 2022 was primarily due to higher sales volume, partially offset by a 16% increase in operating expenses, primarily due to higher compensation costs.

For 2021, AMH net sales increased 31% to $704.9 million from $538.7 million in 2020. The sales increase was mainly due to improved sales from wafer handling, fluid handling and measurement products and sales of our Aramus high purity bags, as well as additional sales of $6.8 million attributable to the acquisition of Global Measurement Technologies, Inc. and its manufacturing partner Clean Room Plastics, Inc., which are referred to collectively herein as GMTI.

AMH reported a segment profit of $160.0 million for 2021, up 44% compared to $111.0 million in 2020. The increase in AMH’s profit in 2021 was primarily due to higher sales volume, favorable product mix, partially offset by a 16% increase in operating expenses, primarily due to higher compensation costs.

Advanced Planarization Solutions (APS)

For 2022, APS net sales increased 608% to $606.6 million from $85.6 million in 2021. The sales increase was mainly due to sales attributed to the CMC Materials acquisition.

APS reported a segment profit of $96.9 million for 2022, up 219% compared to $30.4 million in 2021. The segment profit increase was primarily due to the segment profit attributed to the CMC Materials acquisition, partially offset by a $56.8 million charge for a fair value write-up of acquired CMC Materials inventory sold.

For 2021, APS net sales increased 8% to $85.6 million from $79.5 million in 2020. The sales increase was mainly due to improved sales from CMP cleans products, as well as additional sales of $1.2 million attributable to the acquisition of BASF’s Precision Microchemicals business in the fourth quarter of 2021.

APS reported a segment profit of $30.4 million for 2021, up 7% compared to $28.5 million in 2020. The increase in APS’s profit in 2022 was primarily due to higher sales volume.

Unallocated general and administrative expenses

Unallocated general and administrative expenses for 2022 totaled $190.5 million compared to $49.5 million for 2021. The $141.0 million increase mainly reflects the increase of $106.2 million and $34.8 million in integration related and deal and transaction costs, respectively, related to the acquisition of CMC Materials.

Liquidity and Capital Resources

We consider the following when assessing our liquidity and capital resources:


In thousands	December 31, 2022		December 31, 2021
Cash, cash equivalents and restricted cash	$	563,439	$	402,565
Working capital	1,573,254		934,369
Total debt	5,784,893		937,027

The Company has historically financed its operations and capital requirements through cash flow from its operating activities, long-term loans, lease financing and borrowings under domestic and international short-term lines of credit. On April 14, 2022, the Company, via a wholly-owned escrow subsidiary, completed a private offering of $1.6 billion aggregate principal amount of the 2029 Notes. On June 30, 2022, the Company, via a wholly-owned escrow subsidiary, completed a private offering of $0.9 billion aggregate principal amount of the 2030 Notes. In connection with the acquisition of CMC Materials on the Closing Date, the Company borrowed $2.495 billion under the Initial Term Loan Facility and increased commitments by $175.0 million

Table of Contents

under the Revolving Facility (from $400.0 million to $575.0 million). The Company used a portion of the proceeds of the offering to repay the remaining principal amount of the $145.0 million senior secured term loan facility due 2025. In addition, on the Closing Date, the Company entered into a 364-Day Bridge Credit Agreement and borrowed $275 million aggregate principal amount with a pricing of SOFR plus 4.55%. During the year, the Company made $140.0 million principal payments on the Bridge Credit Facility.

Based on our analysis, we believe our existing balances of domestic cash and cash equivalents and our currently anticipated operating cash flows will be sufficient to meet our cash needs arising in the ordinary course of business for the next twelve months and for the longer term.

We may seek to take advantage of opportunities to raise additional capital through additional debt financing or through public or private sales of securities. If in the future our available liquidity is not sufficient to meet the Company’s operating and debt service obligations as they come due, management would need to pursue alternative arrangements through additional equity or debt financing in order to meet the Company’s cash requirements. There can be no assurance that any such financing would be available on commercially acceptable terms, or at all. In 2022, we did not experience difficulty accessing capital and credit markets, but future volatility in the capital and credit markets may increase costs associated with issuing debt instruments or affect our ability to access those markets. In addition, it is possible that our ability to access the capital and credit markets could be limited at a time when we would like, or need, to do so, which could have an adverse impact on our ability to refinance maturing debt and/or react to changing economic and business conditions.

In summary, our cash flows for each period were as follows:


(in thousands)	Year ended December 31, 2022		Year ended December 31, 2021
Net cash provided by operating activities	$	352,283	$	400,454
Net cash used in investing activities	(4,945,709)		(298,118)
Net cash provided by (used in) financing activities	4,766,203		(276,497)
Increase (decrease) in cash and cash equivalents	160,874		(178,328)

Operating activities

Cash provided by operating activities is net income adjusted for certain non-cash items and changes in assets and liabilities.

Compared to 2021, the $48.2 million decrease in cash provided by operating activities in 2022 was primarily driven by a $41.6 million of changes in operating assets and liabilities and a $6.5 million decrease of net income adjusted for non-cash reconciling items.

Changes in working capital for 2022 were driven by higher inventory and lower accounts payable and accrued liabilities, partially offset by lower income taxes payables and lower trade accounts receivable. The change for inventory is due to an increase in raw material purchases to mitigate potential supply chain issues related to COVID-19 and increased business activity. The change for accounts payable and accrued liabilities was driven by timing of payments. The change for taxes was primarily driven by higher tax provision compared to the prior year. The change for trade accounts receivables and notes receivables was primarily due a lower increase in sales compared to that of the comparable previous period.

Investing activities

Investing cash flows consist primarily of capital expenditures, cash used for acquisitions and proceeds from sales of property and equipment.

The increase in cash used in investing activities in 2022 compared to 2021 was primarily due to higher cash paid for acquisitions of property, plant and equipment and for acquisitions.

Acquisition of property and equipment totaled $466.2 million in 2022, which primarily reflected investments in facilities, equipment and tooling, compared to $210.6 million in 2021, which also primarily reflected investments in equipment and tooling. Capital expenditures in 2022 generally reflected more spending related to growth capacity investments and the investment in our previously announced investment in our new facility in Taiwan.

In 2022, the Company acquired CMC Materials. The cash used to acquire these assets was $4,474.9 million, net of cash acquired. The transaction is described in further detail in Note 3 to the Company’s consolidated financial statements.

In 2021, the Company acquired BASF’s Precision Microchemicals business and certain assets of another company in an immaterial transaction. The cash used to acquire these assets was $91.9 million, net of cash acquired. The transactions are described in further detail in Note 3 to the Company’s consolidated financial statements.

Table of Contents

Financing activities

Financing cash flows consist primarily of repurchases of common stock, payment of dividends to stockholders, issuance and repayment of short-term and long-term debt, and proceeds from the sale of shares of common stock through employee equity incentive plans.

In 2022, there was $4,766.2 million of cash provided by financing activities compared to $276.5 million cash used in financing activities in 2021. The change was primarily due to the net debt activity, which was a source of cash of $4.8 billion in 2022 compared to a use of cash of $174.1 million, and the absence of $67.1 million of repurchase and retirement of common stock. See Note 10 to the Company’s consolidated financial statements for further discussion of the debt financing that occurred during the year. In anticipation of its acquisition of CMC Materials, the Company suspended its previously announced share repurchase program in the fourth quarter of 2021 and did not authorize a new repurchase program or resume a repurchase program in 2022.

The Company’s total dividend payments were $57.3 million in 2022 compared to $43.5 million in 2021. The Company has paid a cash dividend in each quarter since the fourth quarter of 2017. On January 18, 2023, the Company’s board of directors declared a quarterly cash dividend of $0.10 per share to be paid on February 22, 2023 to shareholders of record as of February 1, 2023.

Other Liquidity and Capital Resources Considerations

Debt at par value outstanding


(In thousands)	December 31, 2022		December 31, 2021
Senior secured term loan facility due 2029	$	2,495,000	$	—
Senior secured notes due 2029 at 4.75%	1,600,000		—
Senior unsecured notes due 2030 at 5.95%	895,000		—
Senior unsecured notes due 2029 at 3.625%	400,000		400,000
Senior unsecured notes due 2028 at 4.375%	400,000		400,000
Bridge credit facility due 2023	135,000		—
Senior secured term loan facility due 2025 at 2.457%	—		145,000
Revolving facility due 2026	—		—
Total debt (par value)	$	5,925,000	$	945,000

In connection with the acquisition of CMC Materials, the Company obtained the following financing: On the Closing Date, the Company entered into a Term Loan B Facility of $2.495 billion with a pricing at SOFR plus 3.00%. The Company previously syndicated the Initial Term Loan Facility on March 2, 2022 and incurred ticking fees through the Closing Date. The Company used a portion of the proceeds of the offering to repay the remaining principal amount of the $145.0 million senior secured term loan facility due 2025. During the year, the Company incurred $12.0 million in ticking fees, which were recorded to interest expense in the consolidated statement of operations. On the Closing Date, the Company entered into a $275 million senior unsecured Bridge Credit Facility with a pricing of SOFR plus 4.55%. The Company made $140.0 million of principal payments on the Bridge Credit Facility during 2022. On June 30, 2022, the Company issued, via a wholly-owned escrow subsidiary, $895 million aggregate principal amount of the 2030 Notes. On April 14, 2022, the Company also issued, via a wholly-owned escrow subsidiary, $1.6 billion aggregate principal amount of the 2029 Notes.

The Company increased the commitments under the Revolving Facility by $175.0 million (from $400.0 million to $575.0 million) in connection with the closing of the acquisition of CMC Materials on the Closing Date. The Revolving Facility bears interest at a rate per annum equal to, at the Company’s option, either a base rate (such as prime rate) or SOFR, plus, in each case, an applicable margin. During the year, the Company borrowed and repaid $201.0 million under the Revolving Facility. At December 31, 2022, there was no balance outstanding under the Revolving Facility and we had undrawn outstanding letters of credit of $1.5 million.

On July 28, 2022, the Company entered into a floating-to-fixed interest rate swap agreement to hedge the variability in SOFR based interest payments associated with $1.95 billion of its $2.495 billion Initial Term Loan Facility. The notional amount is scheduled to decrease quarterly and will expire on December 30, 2025.

Through December 31, 2022, the Company was in compliance with all applicable financial covenants included in the terms of its debt arrangements.

Table of Contents

The Company also has a line of credit with one bank that provides for borrowings of Japanese yen for the Company’s Japanese subsidiary equivalent to an aggregate of approximately $7.6 million. There were no outstanding borrowings under this line of credit at December 31, 2022.

Cash and cash requirements


(In thousands)	December 31, 2022		December 31, 2021
Cash and cash equivalents	$	561,559	$	402,565
U.S.	136,262		107,814
Non-U.S.	425,297		294,751

Restricted cash - U.S.	1,880		—
Cash, cash equivalents and restricted cash	$	563,439	$	402,565

Our cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less, which are valued at cost and approximate fair value. We utilize a variety of funding strategies in an effort to ensure that our worldwide cash is available in the locations in which it is needed.

Our restricted cash represents cash held in a “Rabbi” trust and is not available for general corporate purposes. See Note 5 to the consolidated financial statements for additional information.

Cash requirements

We have cash requirements to support working capital needs, capital expenditures, business acquisitions, contractual obligations, commitments, principal and interest payments on debt and other liquidity requirements associated with our operations. We generally intend to use available cash and funds generated from our operations to meet these cash requirements, but in the event that additional liquidity is required we may also borrow under our Revolving Facility.

The following table summarizes our short and long-term cash requirements as of December 31, 2022:


(In thousands)	Total		Due within one year of December 31, 2022		Due later than one year from December 31, 2022
Long-term debt	$	5,925,000	$	153,713	$	5,771,287
Interest payments on long-term debt	2,080,742		323,177		1,757,565
Capital purchase obligations	252,333		191,571		60,762
Supply purchase obligations	12,775		8,765		4,010
Operating leases	117,296		22,817		94,479
Income tax liabilities	489,249		98,057		391,192
Total	$	8,877,395	$	798,100	$	8,079,295

Long-term debt and interest payments on long-term debt. We have contractual obligations for principal and interest payments on our long-term debt. See Note 10 of the consolidated financials for additional information. Debt obligations are classified based on their stated maturity date, regardless of their classification on the Company’s consolidated balance sheets. Interest projections on both variable and fixed rate long-term debt are based on interest rates effective as of December 31, 2022 and do not include $140.1 million for net unamortized discounts and debt issuance costs. On July 28, 2022, the Company entered into a floating-to-fixed interest rate swap agreement to hedge the variability in SOFR-based interest payments associated with $1.95 billion of its $2.495 billion Initial Term Loan Facility. The notional amount is scheduled to decrease quarterly and will expire on December 30, 2025. The impact of the interest rate swap is not considered in the interest payments above.

Capital purchase obligations. We have capital purchase obligations that represent commitments for the construction or purchase of property, plant and equipment. They were not recorded as liabilities on the Company’s consolidated balance sheet as of December 31, 2022, as the Company had not yet received the related goods or taken title to the property.

We expect capital expenditure spending to be approximately $500.0 million in 2023 for growth capacity investments and the construction of our new manufacturing facilities in Taiwan and Colorado.

Supply purchase obligations. We have non-cancelable commitments, including take-or-pay contracts, that are not presented as capital purchase commitments above. They were not recorded as liabilities on the Company’s consolidated balance sheet as of December 31, 2022, as the Company had not yet received the related goods or taken title to the property.

Operating lease commitments. Commitments under operating leases primarily relate to leasehold properties. See Note 14 of the consolidated financials for additional information.

Table of Contents

Income tax liabilities. Of the tax liabilities included in the table above, $53.5 million relates to uncertain tax positions. We are unable to accurately predict when these amounts will be realized or released. However, it is reasonably possible that there could be significant changes to our unrecognized tax benefits in the next twelve months due to a tax audit settlement or some other unforeseeable event. See Note 16 of the consolidated financials for additional information.

New Accounting Pronouncements

Recently adopted accounting pronouncements Refer to Note 1 to the Company’s consolidated financial statements for a discussion of accounting pronouncements implemented in 2022. Other than the adoption of ASU 2021-08, Business Combinations (Topic 805) and ASU 2021-10, Government Assistance (Topic 832), there were no recently issued accounting pronouncements adopted in 2022.

Recently issued accounting pronouncements Refer to Note 1 of the Company’s consolidated financial statements for a discussion of accounting pronouncements recently issued but not yet adopted.

Non-GAAP Information The Company’s consolidated financial statements are prepared in conformity with GAAP.

The Company also utilizes certain non-GAAP financial measures as a complement to financial measures provided in accordance with GAAP in order to better assess and reflect trends affecting the Company’s business and results of operations. These non-GAAP financial measures include adjusted EBITDA and adjusted operating income, together with related measures thereof, and non-GAAP earnings per share, as well as certain other supplemental non-GAAP financial measures included in the discussion of the Company’s financial results.

Adjusted EBITDA is defined by the Company as net income before (1) income tax expense, (2) interest expense, (3) interest income, (4) other expense (income), net, (5) charge for fair value write-up of acquired inventory sold, (6) deal and transaction costs, (7) integration costs, (8) contractual and non-cash integration costs (9) severance and restructuring costs, (10) gain on sale of subsidiary, (11) amortization of intangible assets and (12) depreciation. Adjusted operating income is defined by the Company as adjusted EBITDA exclusive of the depreciation addback noted above. The Company also utilizes non-GAAP financial measures whereby adjusted EBITDA and adjusted operating income are each divided by the Company’s net sales to derive adjusted EBITDA margin and adjusted operating margin, respectively.

Non-GAAP Net Income is defined by the Company as net income before, as applicable, (1) charge for fair value write-up of acquired inventory sold, (2) deal and transaction costs, (3) integration costs, (4) contractual and non-cash integration costs (5) severance and restructuring costs, (6) loss on extinguishment of debt and modification, (7) interest expense, net (8) gain on sale of business, (9) amortization of intangible assets and (10) the tax effect of the foregoing adjustments to net income, stated on a per share basis, divided by diluted weighted average shares outstanding. Non-GAAP EPS is defined as our Non-GAAP Net Income divided by our diluted weighted-average shares outstanding.

The Company provides supplemental non-GAAP financial measures to help management and investors to better understand its business and believes these measures provide investors and analysts additional and meaningful information for the assessment of the Company’s ongoing results. Management also uses these non-GAAP measures to assist in the evaluation of the performance of its business segments and to make operating decisions.

Management believes the Company’s non-GAAP measures help indicate the Company’s baseline performance before certain gains, losses or other charges that may not be indicative of the Company’s business or future outlook and offer a useful view of business performance in that the measures provide a more consistent means of comparing performance. The Company believes the non-GAAP measures aid investors’ overall understanding of the Company’s results by providing a higher degree of transparency for such items and providing a level of disclosure that will help investors understand how management plans, measures and evaluates the Company’s business performance. Management believes that the inclusion of non-GAAP measures provides greater consistency in its financial reporting and facilitates investors’ understanding of the Company’s historical operating trends by providing an additional basis for comparisons to prior periods.

Management uses adjusted EBITDA and adjusted operating income to assist it in evaluations of the Company’s operating performance by excluding items that management does not consider as relevant in the results of its ongoing operations. Internally, these non-GAAP measures are used by management for planning and forecasting purposes, including the preparation of internal budgets; for allocating resources to enhance financial performance; for evaluating the effectiveness of operational strategies; and for evaluating the Company’s capacity to fund capital expenditures, secure financing and expand its business.

In addition, and as a consequence of the importance of these non-GAAP financial measures in managing its business, the Company’s board of directors uses non-GAAP financial measures in the evaluation process to determine management compensation.

The Company believes that certain analysts and investors use adjusted EBITDA, adjusted operating income and non-GAAP EPS as supplemental measures to evaluate the overall operating performance of firms in the Company’s industry. Additionally, lenders or potential lenders use adjusted EBITDA measures to evaluate the Company’s creditworthiness.

Table of Contents

The presentation of non-GAAP financial measures is not meant to be considered in isolation, as a substitute for, or superior to, financial measures or information provided in accordance with GAAP. Management strongly encourages investors to review the Company’s consolidated financial statements in their entirety and to not rely on any single financial measure.

Management notes that the use of non-GAAP measures has limitations, including but not limited to:

First, non-GAAP financial measures are not standardized. Accordingly, the methodology used to produce the Company’s non-GAAP financial measures is not computed under GAAP and may differ notably from the methodology used by other companies. For example, the Company’s non-GAAP measure of adjusted EBITDA may not be directly comparable to EBITDA or an adjusted EBITDA measure reported by other companies.

Second, the Company’s non-GAAP financial measures exclude items such as amortization and depreciation that are recurring. Amortization of intangibles and depreciation have been, and will continue to be for the foreseeable future, significant recurring expenses with an impact upon the Company’s results of operations, notwithstanding the lack of immediate impact upon cash flows.

Third, there is no assurance that the Company will not have future charges for fair value write-up of acquired inventory, restructuring activities, deal and transaction costs, integration costs, loss on extinguishment of debt or similar items and, therefore, may need to record additional charges (or credits) associated with such items, including the tax effects thereon. The exclusion of these items in the Company’s non-GAAP measures should not be construed as an implication that these costs are unusual, infrequent or non-recurring.

Management considers these limitations by providing specific information regarding the GAAP amounts excluded from these non-GAAP financial measures and evaluating these non-GAAP financial measures together with their most directly comparable financial measures calculated in accordance with GAAP. The calculations of adjusted EBITDA, adjusted operating income, and non-GAAP EPS, and reconciliations between these financial measures and their most directly comparable GAAP equivalents, are presented below in the accompanying tables.

The reconciliation of GAAP measures to adjusted operating income and adjusted EBITDA for the years ended December 31, 2022 and 2021 are presented below:


(In thousands)	2022			2021
Net sales	$	3,282,033		$	2,298,893
Net income	$	208,920		$	409,126
Net income - as a % of net sales	6.4		%	17.8		%
Adjustments to net income
Income tax expense	38,160			69,950
Interest expense	212,669			41,240
Interest income	(3,694)			(243)
Other expense, net	23,926			31,695
GAAP – Operating income	479,981			551,768
Operating margin - as a % of net sales	14.6		%	24.0		%
Charge for fair value write-up of acquired inventory sold	61,932			428
Deal and transaction costs	39,543			4,744
Integration costs	50,731			3,780
Contractual and non-cash integration costs	61,964			—
Severance and restructuring costs	—			529
Gain on sale of subsidiary	(254)			—
Amortization of intangible assets	143,953			47,856
Adjusted operating income	837,850			609,105
Adjusted operating margin	25.5		%	26.5		%
Depreciation	135,371			90,311
Adjusted EBITDA	$	973,221		$	699,416
Adjusted EBITDA – as a % of net sales	29.7		%	30.4		%

Table of Contents

The reconciliation of GAAP measures to non-GAAP earnings per share for the years ended December 31, 2022 and 2021 are presented below:


(In thousands, except per share data)	2022		2021
Net income	$	208,920	$	409,126
Adjustments to net income:
Charge for fair value write-up of acquired inventory sold	61,932		428
Deal and transaction costs	39,543		4,744
Integration costs	50,731		3,780
Contractual and non-cash integration costs	61,964		—
Severance and restructuring costs	—		529
Loss on debt extinguishment and modification	3,287		23,338
Interest expense, net	29,822		—
Gain on sale of subsidiary	(254)		—
Amortization of intangible assets	143,953		47,856


Tax effect of adjustments to net income and discrete tax items(1)	(65,728)		(20,411)
Non-GAAP net income	$	534,170	$	469,390
Diluted earnings per common share	$	1.46	$	3.00
Effect of adjustments to net income	$	2.27	$	0.44
Diluted non-GAAP earnings per common share	$	3.73	$	3.44

Diluted weighted average shares outstanding	143,146		136,574

1The tax effect of pre-tax adjustments to net income was calculated using the applicable marginal tax rate for each respective year.

Item 7A. Quantitative and Qualitative Disclosure About Market Risks.

Entegris’ principal financial market risks are sensitivities to interest rates and foreign currency exchange rates. The Company’s interest-bearing cash and cash equivalents and variable rate debt are subject to interest rate fluctuations. The Company’s cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less. A 100-basis point change in interest rates would potentially increase or decrease annual net income by approximately $15.5 million and $2.6 million annually for the years ended December 31, 2022 and 2021, respectively. On July 28, 2022, the Company entered into a floating-to-fixed interest rate swap agreement to hedge the variability in SOFR-based interest payments associated with $1.95 billion of its $2.495 billion Initial Term Loan Facility. The notional amount is scheduled to decrease quarterly and will expire on December 30, 2025.

The cash flows and results of operations of the Company’s foreign-based operations are subject to fluctuations in foreign currency exchange rates. Approximately 22.7% and 23.5% of the Company’s sales during 2022 and 2021 were collectively denominated in the South Korean won, New Taiwan dollar, Chinese renmibi, Canadian dollar, Malaysian ringgit, Singapore dollar, euro, Israeli shekel and the Japanese yen. Financial results therefore will be affected by changes in currency exchange rates. If all foreign currencies were to see a 10% reduction versus the U.S. dollar during the years ended December 31, 2022 and 2021, revenue would be negatively impacted by approximately $62.6 million and $52.4 million, respectively.

The Company occasionally uses derivative financial instruments to manage the foreign currency exchange rate risks associated with its foreign-based operations. However, we are unlikely to be able to hedge these exposures completely. We do not enter into forward contracts or other derivative instruments for speculative or trading purposes. See Note 12 of the consolidated financials for additional information.

Item 8. Financial Statements and Supplementary Data.

The information called for by this item is set forth in the Consolidated Financial Statements covered by the Report of Independent Registered Public Accounting Firm at the end of this report.

Item 9. Changes in and Disagreements with Accountants on Accounting and Financial Disclosure.

Not applicable.

Item 9A. Controls and Procedures.

Table of Contents

Evaluation of Disclosure Controls and Procedures

Based on management’s evaluation (with the participation of our principal executive officer and principal financial officer), as of the end of the period covered by this report, our principal executive officer and principal financial officer have concluded that our disclosure controls and procedures (as defined in Rules 13a-15(e) and 15d-15(e) under the Exchange Act), are effective to provide reasonable assurance that information required to be disclosed by us in reports that we file or submit under the Exchange Act is recorded, processed, summarized, and reported within the time periods specified in SEC rules and forms, and is accumulated and communicated to management, including our principal executive officer and principal financial officer, as appropriate, to allow timely decisions regarding required disclosure.

Changes in Internal Control Over Financial Reporting

There were no changes to our internal control over financial reporting (as defined in Rules 13a-15(f) and 15d-15(f) under the Exchange Act) that occurred during the quarter ended December 31, 2022 that have materially affected, or are reasonably likely to materially affect, our internal control over financial reporting.

Management Report on Internal Control Over Financial Reporting

Our management is responsible for establishing and maintaining adequate internal control over financial reporting (as defined in Rules 13a-15(f) and 15d-15(f) under the Exchange Act) to provide reasonable assurance regarding the reliability of our financial reporting and the preparation of consolidated financial statements for external purposes in accordance with GAAP.

Management assessed our internal control over financial reporting as of December 31, 2022. Management based its assessment on criteria established in Internal Control-Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission (2013 framework). Management’s assessment included evaluation of elements such as the design and operating effectiveness of key financial reporting controls, process documentation, accounting policies, and our overall control environment.

As discussed in Note 3 to the consolidated financial statements included in this Annual Report on Form 10-K, the

Company completed its acquisition of CMC Materials on July 6, 2022. As permitted by interpretive guidance for newly

acquired businesses issued by the SEC Staff, management has excluded total assets of approximately $6,540.2 million and net sales of approximately $581.0 million related to CMC Materials that are included in the consolidated financial statements of Entegris and its subsidiaries as of and for the year ended December 31, 2022. Since the date of the acquisition of CMC Materials, CMC Materials’ financial results are included in the Company's consolidated financial statements. As part of our post-closing integration activities, we are engaged in the process of assessing the internal controls. The Company has begun to integrate policies, processes, people, technology and operations for the post acquisition combined company, and it will continue to evaluate the impact of any related changes to internal control over

financial reporting.

Based on its assessment, management has concluded that our internal control over financial reporting was effective as of the end of the fiscal year to provide reasonable assurance regarding the reliability of financial reporting and the preparation of consolidated financial statements for external reporting purposes in accordance with GAAP. We reviewed the results of management’s assessment with the Audit Committee of our board of directors.

KPMG LLP, the independent registered public accounting firm which audited the consolidated financial statements included in this annual report, has issued an attestation report on our internal control over financial reporting.

Inherent Limitations on Effectiveness of Controls

Our management, including our principal executive officer and principal financial officer, does not expect that our disclosure controls and procedures or our internal control over financial reporting will prevent or detect all errors and all fraud. A control system, no matter how well-designed and operated, can provide only reasonable, not absolute, assurance that the control system’s objectives will be met. The design of a control system must reflect the fact that there are resource constraints, and the benefits of controls must be considered relative to their costs. Further, because of the inherent limitations in all control systems, no evaluation of controls can provide absolute assurance that misstatements due to error or fraud will not occur or that all control issues and instances of fraud, if any, have been detected.

Table of Contents

Report of Independent Registered Public Accounting Firm

To the Stockholders and Board of Directors

Entegris, Inc.:

Opinion on Internal Control Over Financial Reporting

We have audited Entegris, Inc. and subsidiaries' (the Company) internal control over financial reporting as of December 31, 2022, based on criteria established in Internal Control – Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission. In our opinion, the Company maintained, in all material respects, effective internal control over financial reporting as of December 31, 2022, based on criteria established in Internal Control – Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission.

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) (PCAOB), the consolidated balance sheets of the Company as of December 31, 2022 and 2021, the related consolidated statements of operations, comprehensive income, equity, and cash flows for each of the years in the three-year period ended December 31, 2022, and the related notes (collectively, the consolidated financial statements), and our report dated February 22, 2023 expressed an unqualified opinion on those consolidated financial statements.

The Company acquired CMC Materials, Inc. and subsidiaries (CMC Materials) during 2022, and management excluded from its assessment of the effectiveness of the Company’s internal control over financial reporting as of December 31, 2022 CMC Material’s internal control over financial reporting associated with total assets of $6,540.2 million and total revenues of $581.0 million included in the consolidated financial statements of the Company as of and for the year ended December 31, 2022. Our audit of internal control over financial reporting of the Company also excluded an evaluation of the internal control over financial reporting of CMC Materials.

Basis for Opinion

The Company’s management is responsible for maintaining effective internal control over financial reporting and for its assessment of the effectiveness of internal control over financial reporting, included in the accompanying Management Report on Internal Control Over Financial Reporting. Our responsibility is to express an opinion on the Company’s internal control over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.

We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all material respects. Our audit of internal control over financial reporting included obtaining an understanding of internal control over financial reporting, assessing the risk that a material weakness exists, and testing and evaluating the design and operating effectiveness of internal control based on the assessed risk. Our audit also included performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a reasonable basis for our opinion.

Definition and Limitations of Internal Control Over Financial Reporting

A company’s internal control over financial reporting is a process designed to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. A company’s internal control over financial reporting includes those policies and procedures that (1) pertain to the maintenance of records that, in reasonable detail, accurately and fairly reflect the transactions and dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and expenditures of the company are being made only in accordance with authorizations of management and directors of the company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or disposition of the company’s assets that could have a material effect on the financial statements.

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.

Table of Contents

/s/ KPMG LLP

Minneapolis, Minnesota

February 22, 2023

Item 9B. Other Information.

None.

Item 9C. Disclosure Regarding Foreign Jurisdictions that Prevent Inspections.

Not Applicable.

PART III

Item 10. Directors, Executive Officers and Corporate Governance.

Except as set forth below, the information required by this Item 10 has been omitted from this report, and is incorporated by reference to our Definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders, which is currently scheduled to be held on April 26, 2023, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2022 fiscal year.

In 2005, our board of directors adopted a code of business ethics, The Entegris, Inc. Code of Business Ethics, applicable to all of our executives, directors and employees, as well as a set of corporate governance guidelines, which have been updated from time to time. The Entegris, Inc. Code of Business Ethics, the Corporate Governance Guidelines and the charters for our Audit & Finance Committee, Governance & Nominating Committee and our Management Development & Compensation Committee all appear on our website at http://www.Entegris.com under “Investor Relations - Corporate Governance”. The Entegris, Inc. Code of Business Ethics, Corporate Governance Guidelines and committee charters are also available in print to any shareholder that requests a copy. Copies may be obtained by contacting our Secretary through our corporate headquarters. The Company intends to comply with the requirements of Item 5.05 of Form 8-K with respect to any amendment to or waiver of the provisions of the Entegris, Inc. Code of Business Ethics applicable to the registrant’s Chief Executive Officer, Chief Financial Officer, Chief Accounting Officer or Controller by posting notice of any such amendment or waiver at the same location on our website.

INFORMATION ABOUT OUR EXECUTIVE OFFICERS

The following is a list of our Executive Officers, their ages and their offices, as of the date of this Annual Report on Form 10-K.


Name	Age	Office
Bertrand Loy	57	President & Chief Executive Officer
Gregory B. Graves	62	Executive Vice President, Chief Financial Officer and Treasurer
Sue Rice	64	Senior Vice President, Global Human Resources
Joe Colella	41	Senior Vice President, General Counsel and Secretary
Jim O’Neill	58	Senior Vice President and Chief Technology Officer
Olivier Blachier	49	Senior Vice President, Business and New Markets Development
Stuart Tison	59	Senior Vice President and President, Specialty Chemicals and Engineered Materials
Clint Haris	50	Senior Vice President and President, Microcontamination Control
William Shaner	55	Senior Vice President and President, Advanced Materials Handling
Daniel Woodland	52	Senior Vice President and President, Advanced Planarization Solutions
Michael Besnard	52	Senior Vice President and Chief Commercial Officer
Neil Richards	50	Senior Vice President, Global Operations, Supply Chain, and Quality
Bruce W. Beckman	55	Senior Vice President, Finance
Michael D. Sauer	57	Vice President, Controller & Chief Accounting Officer

Bertrand Loy has been our Chief Executive Officer, President and a director since November 2012. From July 2008 to November 2012, he served as our Executive Vice President and Chief Operating Officer. From August 2005 until July 2008, he served as our Executive Vice President in charge of our information technology, global supply chain and manufacturing operations. He served as the Vice President and Chief Financial Officer of Mykrolis, a company spun out of Millipore Corporation, a life science products company, from January 2001 until August 2005. Prior to that, Mr. Loy served as the Chief Information Officer of Millipore Corporation during 1999 and 2000, and previously served in various strategic planning, global

Table of Contents

supply chain and financial roles with Millipore and Sandoz Pharmaceuticals (now Novartis), a pharmaceutical company. He has served on the board of directors of Harvard Bioscience, Inc. (scientific equipment) since November 2014 and is now its lead independent director. Since July 2013, Mr. Loy has also been on the board of directors of SEMI, the global industry association representing the electronics manufacturing supply chain, serving as the chairman of the association until December 2022.

Gregory B. Graves has served as our Executive Vice President and Chief Financial Officer since July 2008. Prior to that, he served as Senior Vice President and Chief Financial Officer since April 2007. Prior to April 2007, he served as Senior Vice President, Strategic Planning & Business Development since the effectiveness of the merger with Mykrolis in August 2005. Mr. Graves served as the Chief Business Development Officer of Entegris Minnesota starting in September 2002 and from September 2003 until August 2004 he also served as Senior Vice President of Finance. Prior to joining Entegris Minnesota in September 2002, Mr. Graves held positions in investment banking and corporate development, including at U.S. Bancorp Piper Jaffray from June 1998 to August 2002 and at Dain Rauscher from October 1996 to May 1998. Mr. Graves has served as a director of Laird Superfood, Inc. (a plant-based food company) since September 2018, and was a member of the board of directors of Plug Power Inc. (an energy solutions provider) from May 2017 to June 2019. In 2022, Mr. Graves joined the board of directors of Skywater Technologies, Inc., a semiconductor manufacturer.

Sue Rice has been our Senior Vice President of Global Human Resources since September 2017. Prior to that, Ms. Rice served as Senior Vice President and Chief Human Resources Officer for Thermo Fisher Scientific, a scientific equipment company, from 2013 to 2017, Region Vice President HR Asia Pacific & Emerging Markets from 2009 to 2013 and Group Vice President, HR Analytical Technologies Group from 2006 to 2009. Prior to that, Ms. Rice held senior human resource positions with Fidelity Human Resources Services Company and Sherbrooke Associates.

Joe Colella has been our Senior Vice President, General Counsel and Secretary since April 2020. Previously, Mr. Colella served as our Vice President, Deputy General Counsel from December 2018 until April 2020, Assistant General Counsel from April 2018 until December 2018 and Senior Corporate Counsel from December 2013 until April 2018. Prior to joining Entegris, Mr. Colella served as an associate at an international law firm from 2007 until 2013.

Jim O’Neill has been our Senior Vice President and Chief Technology Officer since September 2019, having previously served as our Vice President, Chief Technology Officer since April 2014 when he joined Entegris as part of our acquisition of ATMI. At ATMI, Dr. O’Neill was Senior Vice President of Electronic Materials from January 2012 to April 2014. Prior to that, he held numerous technical and leadership roles in semiconductor research and development with over 23 years at IBM.

Olivier Blachier has been our Senior Vice President, Business and New Markets Development since November 2021 and is responsible for the company’s merger and acquisition activities and for the commercialization of emerging businesses. Before joining Entegris, Mr. Blachier held various senior leadership positions between 2007 and 2021 at Air Liquide Group, a global leader in gases, technologies, and services for the industrial and healthcare sectors. From 1997 to 2007, Mr. Blachier worked for Edwards, Ltd., a global vacuum and abatement process leader and subsidiary of BOC Group, where he held multiple roles in the U.S. and U.K., including leading multiple acquisitions and joint ventures.

Stuart Tison has been our Senior Vice President and President, Specialty Chemicals and Engineered Materials since July 2022, having served as our Senior Vice President and General Manager, Specialty Chemicals and Engineered Materials since July 2016. Prior to that, Mr. Tison served as Vice President, Specialty Gas Solutions since February 2015, as Vice President, Business Development since January 2010 and as Vice President, Corporate Development since July 2007. Prior to that, he served Celerity, Inc. as Vice President, Engineering and served Entegris predecessor companies Mykrolis and Millipore in a variety of sales, marketing, business development and engineering roles.

Clint Haris has been our Senior Vice President and President, Microcontamination Control since July 2022, having served as our Senior Vice President and General Manager, Microcontamination Control since July 2016. Prior to that, Mr. Haris served as our Vice President, Liquid Microcontamination Control since August 2014. Prior to joining Entegris, Mr. Haris served in a variety of executive roles at Brooks Automation Inc. including Senior Vice President, Life Science Systems from 2010 to 2014 and Senior Vice President and General Manager, Systems Solutions from 2009 to 2010.

William Shaner has been our Senior Vice President and President, Advanced Materials Handling since July 2022, having served as our Senior Vice President and General Manager, Advanced Materials Handling since July 2016. Prior to that, Mr. Shaner served as our Senior Vice President, Global Operations since February 2014 and, prior to that, as our Vice President and General Manager, Microenvironments division since 2007. He has served in a variety of sales, marketing, business development and engineering roles since joining Entegris in 1995.

Daniel Woodland joined Entegris in 2022 as part of the acquisition of CMC Materials. Mr. Woodland serves as Senior Vice President and President, Advanced Planarization Solutions, a newly formed fourth division announced upon acquisition close. Prior to joining Entegris, Mr. Woodland served several roles at CMC Materials (previously Cabot Microelectronics) since 2003, including as Vice President and President, Electronic Materials from 2019 to 2022, Vice President and Chief Marketing and Operations Officer from 2017 to 2019, and Vice President of Marketing from 2015 to 2017.

Table of Contents

Michael Besnard has been our Senior Vice President and Chief Commercial Officer since 2016. Prior to that, Mr. Besnard served as Vice President of Global Strategic Accounts since 2014. Prior to joining Entegris, Mr. Besnard served ATMI as the vice president of global strategic accounts and MacDermid Enthone (previously Enthone) as director of business development for Copper Plating.

Neil Richards has been our Senior Vice President, Global Operations, Supply Chain, and Quality since September 2019. Prior to that, Mr. Richards served as Vice President of Operations for the company’s Specialty Chemicals and Engineered Materials division since 2016. Prior to joining Entegris, Mr. Richards held several positions with the BOC Group, which merged with Linde in 2006.

Bruce W. Beckman has been our Senior Vice President, Finance since February 2018. Prior to that, Mr. Beckman served as Vice President, Finance since joining Entegris in April 2015. From 1990 to 2015, Mr. Beckman worked in numerous capacities for General Mills, Inc., including Vice President, Finance, Meals Division from July 2012 to January 2015, Director of Corporate Planning & Analysis from July 2008 to July 2012 and Director of Internal Controls from 2003 to 2005.

Michael D. Sauer has been our Vice President, Controller and Chief Accounting Officer since June 2012. Prior to that, he served as the Corporate Controller since 2008. From the time of the merger with Mykrolis in August 2005 until April 2008, Mr. Sauer served as Director of Treasury and Risk Management. Mr. Sauer joined Fluoroware, Inc., a predecessor to Entegris Minnesota in 1988 and held a variety of finance and accounting positions until 2001 when he became the Director of Business Development for Entegris Minnesota, the successor to Fluoroware, serving in that position until the merger with Mykrolis.

Item 11. Executive Compensation.

The information required by this Item 11 has been omitted from this report, and is incorporated by reference to our Definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 26, 2023, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2022 fiscal year.

Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters.

Securities Authorized for Issuance Under Equity Compensation Plans:

As of December 31, 2022, our equity compensation plan information is as follows:

Equity Compensation Plan Information


	Number of securities to be issued upon exercise of outstanding options, warrants and rights	Weighted-average exercise price of outstanding options, warrants and rights(1)		Number of securities remaining available for future issuance under equity compensation plans (excluding securities reflected in column (a))(2) (3)
Plan category	(a)	(b)		(c)
Equity compensation plans approved by security holders	3,075,996	$	54.53	12,141,458
Equity compensation plans not approved by security holders	—	—		—
Total	3,075,996	$	54.53	12,141,458

(1)The weighted average exercise price does not take into account the shares issuable upon vesting of outstanding restricted stock units, which have no exercise price.

(2)These shares are available for future issuance under the 2020 Stock Plan in the form of stock options, restricted stock units, performance shares and other stock awards in accordance with the terms of the 2020 Stock Plan.

(3)Includes 1,284,523 shares remaining available for future issuance under the Company’s Employee Stock Purchase Plan as of December 31, 2022.

The other information required by this Item 12 has been omitted from this report, and is incorporated by reference to our Definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 26, 2023, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2022 fiscal year.

Item 13. Certain Relationships and Related Transactions, and Director Independence.

The information required by this Item 13 has been omitted from this report, and is incorporated by reference to our Definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 26, 2023, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2022 fiscal year.

Table of Contents

Item 14. Principal Accountant Fees and Services.

The information required by this Item 14 has been omitted from this report, and is incorporated by reference to our Definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 26, 2023, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2022 fiscal year.

Table of Contents

PART IV

Item 15. Exhibits and Financial Statement Schedules.

(a)The following Financial Statements are included in Item 8 herein:


1.Financial Statements:
Report of Independent Registered Public Accounting Firm
Consolidated Balance Sheets at December 31, 2022 and 2021
Consolidated Statements of Operations for the Years Ended December 31, 2022, 2021 and 2020
Consolidated Statements of Comprehensive Income for the Years Ended December 31, 2022, 2021 and 2020
Consolidated Statements of Equity for the Years Ended December 31, 2022, 2021 and 2020
Consolidated Statements of Cash Flows for the Years Ended December 31, 2022, 2021 and 2020
Notes to Consolidated Financial Statements

2. Financial Statement Schedule - All financial statement schedules have been omitted since the information is either not applicable or is included in the consolidated financial statements notes thereof.

3. Exhibits - The following exhibits are incorporated by reference into this Annual Report on Form 10-K:

Reg. S-K
Item 601(b)
Reference

Document Incorporated

Referenced Document on file with the Commission

(2)

Agreement and Plan of Merger, dated as of December 14, 2021, by and among Entegris, Inc., CMC Materials, Inc. and Yosemite Merger Sub, Inc.

Exhibit 2.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on December 16, 2021

(3)

Amended and Restated Certificate of Incorporation of Entegris, Inc., as amended

Exhibit 3.1 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2011

(3)

By-Laws of Entegris, Inc., as amended December 8 , 2022

Exhibit 3.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on December 9, 2022

(4)

Form of certificate representing shares of Common Stock, $.01 par value per share

Exhibit 4.1 to Form S-4 Registration Statement of Entegris, Inc. and Eagle DE, Inc. (No. 333-124719)

(4)

Indenture, dated as of April 30, 2020, by and among the Company, certain subsidiaries of the Company and Wells Fargo Bank, National Association, as trustee, including the form of note representing the 2028 Notes

Exhibit 4.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on April 30, 2020

(4)

Indenture, dated as of April 30, 2021, by and among the Company, certain subsidiaries of the Company and Wells Fargo Bank, National Association, as trustee, including the form of note representing the 2029 Notes

Exhibit 4.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on April 30, 2021

(4)

Indenture, dated as of April 14, 2022, by and among Entegris Escrow Corporation, as escrow issuer and Truist Bank, as trustee and notes collateral agent, including the form of note issuable thereunder

Exhibit 4.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on April 14, 2022

(4)

Indenture, dated as of June 30, 2022, by and among Entegris and Truist Bank, as trustee, including the form of note representing the Unsecured Notes

Exhibit 4.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on June 30, 2022

(4)

Supplemental Indenture to the 2029 Secured Notes Indenture, dated as of July 6, 2022, by and among Entegris, certain subsidiaries of Entegris and Truist Bank, as trustee and notes collateral agent

Exhibit 4.3 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on July 6, 2022

(4)

Supplemental Indenture to the 2030 Unsecured Notes Indenture, dated as of July 6, 2022, by and among Entegris, certain subsidiaries of Entegris and Truist Bank, as trustee.

Exhibit 4.4 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on July 6, 2022

Table of Contents

(4)

Equal Priority Intercreditor Agreement, dated as of July 6, 2022, among Entegris, certain subsidiaries of Entegris, Morgan Stanley Senior Funding, Inc., as senior credit facilities collateral agent, and Truist Bank, as notes collateral agent.

Exhibit 4.5 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on July 6, 2022

(4)

Supplemental Indenture to the 2028 Notes Indenture, dated as of July 6, 2022, by and among Entegris, certain subsidiaries of Entegris and Computershare Trust Company, National Association, as successor to Wells Fargo Bank, National Association, as trustee.

Exhibit 4.7 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on July 6, 2022

(4)

Supplemental Indenture to the 2029 Notes Indenture, dated as of July 6, 2022, by and among Entegris, certain subsidiaries of Entegris and Computershare Trust Company, National Association, as successor to Wells Fargo Bank, National

Exhibit 4.9 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on July 6, 2022

(4)

Indenture, dated as of June 30, 2022, by and among Entegris Escrow Corporation, as escrow issuer and Truist Bank, as trustee, including the form of note issuable thereunder.

Exhibit 4.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on June 30, 2022

(4)

Amendment and Restatement Agreement, dated as of July 6, 2022, among Entegris, as borrower, certain subsidiaries of Entegris, as guarantors, the lenders party thereto, the issuing banks party thereto and Morgan Stanley Senior Funding, Inc., as administrative agent and collateral agent.

Exhibit 4.10 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on July 6, 2022

(4)

364-Day Bridge Credit and Guaranty Agreement, dated as of July 6, 2022, among Entegris, as borrower, certain subsidiaries of Entegris, as guarantors, the lenders party thereto and Morgan Stanley Senior Funding, Inc., as administrative agent.

Exhibit 4.11 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on July 6, 2022

(4)

Amendment Number 1 to the CMC Materials, Inc. 2021 Omnibus Incentive Plan

Exhibit 4.3 to Entegris, Inc. Registration Statement on Form S-8 filed with the Securities and Exchange Commission on July 7, 2022

(4)

Description of Capital Stock

Exhibit 4.1 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 7, 2020

(10)

CMC Materials, Inc. 2021 Omnibus Incentive Plan

Exhibit 10.1 to Entegris Registration Statement on Form S-3 filed with the Securities and Exchange Commission on July 7, 2022

(10)

Cabot Microelectronics Corporation 2012 Omnibus Incentive Plan

Exhibit 10.2 to Entegris Registration Statement on Form S-3 filed with the Securities and Exchange Commission on July 7, 2022

(10)

Entegris, Inc. – 2010 Stock Plan, as amended*

Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended July 3, 2010

(10)

Entegris, Inc. 2020 Stock Plan*

Annex 1 to the Entegris, Inc. Schedule 14A proxy statement for its 2020 Annual Meeting of Stockholders (No. 001-32598), as filed with the Securities and Exchange Commission on March 18, 2020

(10)

Entegris, Inc. Outside Directors’ Stock Option Plan*

Exhibit 10.2 to Entegris, Inc. Registration Statement on Form S-1 (No. 333-33668)

(10)

Entegris, Inc. Amended and Restated Employee Stock Purchase Plan*

Exhibit 4.1 to Entegris, Inc. Registration Statement on Form S-8 (No. 333-211444)

(10)

Second Amended and Restated Entegris Incentive Plan*

Exhibit 10.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on May 24, 2017

(10)

Entegris, Inc. 2007 Deferred Compensation Plan*

Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form10-Q for the fiscal period ended June 30, 2007

Table of Contents

(10)

Amended and Restated Supplemental Executive Retirement Plan for Key Salaried Employees*

Exhibit 10.2 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2008

(10)

Amendment to Amended and Restated SERP*

Exhibit 10.15 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2009

(10)

Lease Agreement, dated April 1, 2002 between Nortel Networks HPOCS Inc. and Mykrolis Corporation, relating to Executive office, R&D and manufacturing facility located at 129 Concord Road Billerica, MA

Exhibit 10.1.3 to Mykrolis Corporation’s Quarterly Report on Form 10-Q for the quarter ended March 31, 2002

(10)

Amendment of Lease between Entegris, Inc. and KBS Rivertech, LLC dated April 1, 2012

Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended June 30, 2012

(10)

Second Amendment of Lease, dated March 8, 2016, between Entegris, Inc. and KBS Rivertech, LLC

Exhibit 10.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on March 11, 2016

(10)

Third Amendment to Lease Agreement, dated as of October 21, 2021, between Entegris, Inc. and Rivertech Owner LLC

Exhibit 10.4 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2021

(10)

Fourth Amendment to Lease Agreement, dated as of September 16, 2022, by and between the Company and Rivertech Owner LLC

Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended October 1, 2022

(10)

Fluoropolymer Purchase and Sale Agreement, by and between E.I. Du Pont De Nemours and Company and the Registrant, dated January 1, 2011, as amended

Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the quarter ended April 2, 2011

(10)

Form of Indemnification Agreement between Entegris, Inc. and each of its executive officers and Directors

Exhibit 10.30 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended August 27, 2005

(10)

Form of Executive Change of Control Termination Agreement between Entegris, Inc. and certain of its executive officers*

Exhibit 10.31 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended August 27, 2005

(10)

Form of Revised Executive Change of Control Termination Agreement between Entegris, Inc. and certain of its executive officers executed in 2015 (other than those executive officers who executed the form previously filed)*

Exhibit 10.1 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 29, 2016

(10)

Entegris, Inc. 2016 Stock Option Grant Agreement*

Exhibit 10.4 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 17, 2017

(10)

Entegris, Inc. 2017 Stock Option Grant Agreement*

Exhibit 10.3 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 15, 2018

(10)

Entegris, Inc. 2018 Stock Option Grant Agreement*

Exhibit 10.3 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 11, 2019

(10)

Entegris, Inc. 2019 RSU Award Agreement*

Exhibit 10.2 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 7, 2020

(10)

Entegris, Inc. 2019 Stock Option Grant Agreement*

Exhibit 10.3 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 7, 2020

(10)

Entegris, Inc. 2020 Performance Share Award Agreement (under 2010 Stock Plan)*

Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended March 28, 2020

(10)

Entegris, Inc. 2020 RSU Award Agreement (under 2010 Stock Plan)*

Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended March 28, 2020

(10)

Entegris, Inc. 2020 Stock Option Grant Agreement (under 2010 Stock Plan)*

Exhibit 10.3 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended March 28, 2020

Table of Contents

(10)

Entegris, Inc. 2020 RSU Award Agreement (under 2020 Stock Plan)*

Exhibit 10.1 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2020

(10)

Entegris, Inc. 2021 Performance Share Award Agreement*

Exhibit 10.2 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2020

(10)

Entegris, Inc. 2021 RSU Award Agreement*

Exhibit 10.3 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2020

(10)

Entegris, Inc. 2021 Stock Option Grant Agreement*

Exhibit 10.4 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2020

(10)

Entegris, Inc. 2022 Performance Share Award Agreement*

Exhibit 10.1 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2021

(10)

Entegris, Inc. 2022 RSU Award Agreement*

Exhibit 10.2 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2021

(10)

Entegris, Inc. 2022 Stock Option Grant Agreement*

Exhibit 10.3 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2021

(10)

Executive Employment Agreement, effective November 28, 2012, between the Registrant and Bertrand Loy*

Exhibit 10.1 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2012

(10)

Amendment No. 1, dated April 26, 2013, to Executive Change in Control Termination Agreement, between Entegris, Inc. and Bertrand Loy*

Exhibit 99.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on April 26, 2013

(10)

Amendment No. 2, dated February 5, 2020, to Executive Change in Control Termination Agreement, between Entegris, Inc. and Bertrand Loy*

Exhibit 10.4 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 7, 2020

(10)

Severance Protection Agreement, dated May 13, 2011 between Entegris, Inc. and Gregory B. Graves*

Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended July 2, 2011

(10)

Amendment No. 1, dated as of February 23, 2016, to the Severance Protection Agreement by and between Entegris, Inc, and Gregory B. Graves*

Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q filed with the Securities and Exchange Commission on April 28, 2016

(10)

Separation Agreement and Release, dated as of August 27, 2019, by and between the Company and Gregory Marshall*

Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q filed with the Securities and Exchange Commission on October 24, 2019

(10)

Separation Agreement and Release, dated as of September 1, 2022, by and between the Company and Todd Edlund*

Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended October 1, 2022

* A “management contract or compensatory plan”

Table of Contents

The Company hereby files as exhibits to this Annual Report on Form 10-K the following documents:

Reg. S-K

Item 601(b)


Reference	Exhibit No.	Documents Filed Herewith
(10)	10.1	Entegris, Inc 2023 Performance Share Award Agreement *
(10)	10.2	Entegris, Inc 2023 RSU Award Agreement *
(10)	10.3	Entegris, Inc 2023 Stock Option Grant Agreement *
(21)	21	Subsidiaries of Entegris, Inc.
(23)	23	Consent of Independent Registered Public Accounting Firm
(24)	24	Power of Attorney by the Directors of Entegris, Inc.
(31)	31.1	Certification required by Rule 13a-14(a) in accordance with Section 302 of the Sarbanes—Oxley Act of 2002.
(31)	31.2	Certification required by Rule 13a-14(a) in accordance with Section 302 of the Sarbanes—Oxley Act of 2002.
(32)	32.1	Certification required by Rule 13a-14(b) and 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002.
(32)	32.2	Certification required by Rule 13a-14(b) and 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002.
(101)	101.INS	XBRL Instance Document - the instance document does not appear in the Interactive Data File because its XBRL tags are embedded within the Inline XBRL document
(101)	101.SCH	XBRL Taxonomy Extension Schema Document
(101)	101.CAL	XBRL Taxonomy Extension Calculation Linkbase Document
(101)	101.DEF	XBRL Taxonomy Extension Definition Linkbase Document
(101)	101.LAB	XBRL Taxonomy Extension Label Linkbase Document
(101)	101.PRE	XBRL Taxonomy Extension Presentation Linkbase Document
(104)	104	Cover Page Interactive Data File (formatted as Inline XBRL and contained in Exhibit 101)

* A “management contract or compensatory plan”

Item 16. Form 10-K Summary.

None.

Table of Contents

SIGNATURES

Pursuant to the requirements of Section 13 or 15(d) of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.


	ENTEGRIS, INC.

Date: February 22, 2023	By	/s/ BERTRAND LOY
		Bertrand Loy
		President & Chief Executive Officer

Pursuant to the requirements of the Securities Exchange Act of 1934, this report has been signed below by the following persons on behalf of the Registrant and in the capacities and on the dates indicated.

SIGNATURE

TITLE

DATE

/s/ BERTRAND LOY

President, Chief Executive Officer and Director
(Principal executive officer)

February 22, 2023

Bertrand Loy

/s/ GREGORY B. GRAVES

Executive Vice President, Chief Financial Officer & Treasurer (Principal financial officer)

February 22, 2023

Gregory B. Graves

/s/ MICHAEL D. SAUER

Vice President, Controller & Chief Accounting Officer (Principal accounting officer)

February 22, 2023

Michael D. Sauer

PAUL L.H. OLSON*

Director, Chairman of the Board

February 22, 2023

Paul L.H. Olson

MICHAEL A. BRADLEY*

Director

February 22, 2023

Michael A. Bradley

RODNEY CLARK*

Director

February 22, 2023

Rodney Clark

JAMES F. GENTILCORE*

Director

February 22, 2023

James F. Gentilcore

YVETTE KANOUFF*

Director

February 22, 2023

Yvette Kanouff

JAMES P. LEDERER*

Director

February 22, 2023

James P. Lederer

AZITA SALEKI-GERHARDT*

Director

February 22, 2023

Azita Saleki-Gerhardt


*By						/s/ Gregory B. Graves
Gregory B. Graves, Attorney-in-fact

Table of Contents

ENTEGRIS, INC.

INDEX TO FINANCIAL STATEMENTS


Report of Independent Registered Public Accounting Firm			F-2
Consolidated Balance Sheets at December 31, 2022 and 2021			F-4
Consolidated Statements of Operations for the Years Ended December 31, 2022, 2021 and 2020			F-5
Consolidated Statements of Comprehensive Income for the Years Ended December 31, 2022, 2021 and 2020			F-6
Consolidated Statements of Equity for the Years Ended December 31, 2022, 2021 and 2020			F-7
Consolidated Statements of Cash Flows for the Years Ended December 31, 2022, 2021 and 2020			F-8
Notes to Consolidated Financial Statements			F-10

F-1

Table of Contents

Report of Independent Registered Public Accounting Firm

To the Stockholders and Board of Directors

Entegris, Inc.:

Opinion on the Consolidated Financial Statements

We have audited the accompanying consolidated balance sheets of Entegris, Inc. and subsidiaries (the Company) as of December 31, 2022 and 2021, the related consolidated statements of operations, comprehensive income, equity, and cash flows for each of the years in the three-year period ended December 31, 2022, and the related notes (collectively, the consolidated financial statements). In our opinion, the consolidated financial statements present fairly, in all material respects, the financial position of the Company as of December 31, 2022 and 2021, and the results of its operations and its cash flows for each of the years in the three-year period ended December 31, 2022, in conformity with U.S. generally accepted accounting principles.

Basis for Opinion

These consolidated financial statements are the responsibility of the Company’s management. Our responsibility is to express an opinion on these consolidated financial statements based on our audits. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.

We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether the consolidated financial statements are free of material misstatement, whether due to error or fraud. Our audits included performing procedures to assess the risks of material misstatement of the consolidated financial statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures included examining, on a test basis, evidence regarding the amounts and disclosures in the consolidated financial statements. Our audits also included evaluating the accounting principles used and significant estimates made by management, as well as evaluating the overall presentation of the consolidated financial statements. We believe that our audits provide a reasonable basis for our opinion.

Critical Audit Matter

The critical audit matter communicated below is a matter arising from the current period audit of the consolidated financial statements that was communicated or required to be communicated to the audit committee and that: (1) relates to accounts or disclosures that are material to the consolidated financial statements and (2) involved our especially challenging, subjective, or complex judgments. The communication of a critical audit matter does not alter in any way our opinion on the consolidated financial statements, taken as a whole, and we are not, by communicating the critical audit matter below, providing a separate opinion on the critical audit matter or on the accounts or disclosures to which it relates.

Fair value of certain acquired developed technology

As discussed in Note 3 to the consolidated financial statements, on July 6, 2022, the Company acquired CMC Materials, Inc. (CMC Materials) in a business combination. The fair value of developed technology acquired was $1,035.6 million. The fair value of these intangibles was estimated using an income approach, which utilized key assumptions such as future revenue growth rates and a discount rate.

We identified the evaluation of the acquisition date fair value of certain developed technology acquired in the CMC Materials acquisition as a critical audit matter. The estimated fair value was sensitive to changes in certain assumptions. Specifically, a high degree of subjective auditor judgment was required to evaluate the revenue growth rates and the discount rate assumptions. In addition, valuation professionals with specialized skills and knowledge were required to assess the discount rate.

The following are the primary procedures we performed to address the critical audit matter. We evaluated the design and tested the operating effectiveness of certain internal controls related to the Company’s acquisition-date valuation process, including controls related to the development of the assumptions noted above. We evaluated the assumed revenue growth rates by comparing them to the historic growth rates of CMC Materials and to industry reports. In addition, we involved

F-2

Table of Contents

valuation professionals with specialized skills and knowledge, who assisted in evaluating the discount rate by performing an independent analysis using inputs and assumptions and comparing the results to the Company’s discount rate.

/s/ KPMG LLP

We or our predecessor firms have served as the Company’s auditor since 1966.

Minneapolis, Minnesota

February 22, 2023

F-3

Table of Contents

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED BALANCE SHEETS


(In thousands, except share and per share data)	December 31, 2022		December 31, 2021
ASSETS
Current assets:
Cash and cash equivalents	$	561,559	$	402,565
Restricted cash	1,880		—
Trade accounts and notes receivable, net	535,485		347,413
Inventories, net	812,815		475,213
Deferred tax charges and refundable income taxes	47,618		35,312
Assets held-for-sale	246,531		—
Other current assets	129,297		52,867
Total current assets	2,335,185		1,313,370
Property, plant and equipment, net	1,393,337		654,098
Other assets:
Right-of-use assets	94,940		66,563
Goodwill	4,408,331		793,702
Intangible assets, net	1,841,955		335,113
Deferred tax assets and other noncurrent tax assets	28,867		17,671
Other noncurrent assets	36,242		11,379
Total assets	$	10,138,857	$	3,191,896
LIABILITIES AND EQUITY
Current liabilities:
Short-term debt, including current portion of long-term debt	$	151,965	$	—
Accounts payable	172,488		130,734
Accrued payroll and related benefits	142,340		108,818
Accrued interest payable	25,571		6,073
Liabilities held-for-sale	10,637		—
Other accrued liabilities	160,873		84,240
Income taxes payable	98,057		49,136
Total current liabilities	761,931		379,001
Long-term debt, excluding current maturities	5,632,928		937,027
Pension benefit obligations and other liabilities	54,090		37,816
Deferred tax liabilities and other noncurrent tax liabilities	391,192		64,170
Long-term lease liabilities	80,716		60,101

Equity:
Preferred stock, par value $.01; 5,000,000 shares authorized; none issued and outstanding as of December 31, 2022 and December 31, 2021	—		—
Common stock, par value $.01; 400,000,000 shares authorized; issued and outstanding shares as of December 31, 2022: 149,339,486 and 149,137,086, respectively; issued and outstanding shares as of December 31, 2021: 135,719,366 and 135,516,966, respectively	1,493		1,357
Treasury stock, common, at cost: 202,400 shares held as of December 31, 2022 and December 31, 2021	(7,112)		(7,112)
Additional paid-in capital	2,205,325		879,845
Retained earnings	1,031,391		879,776
Accumulated other comprehensive loss	(13,097)		(40,085)
Total equity	3,218,000		1,713,781
Total liabilities and equity	$	10,138,857	$	3,191,896

See the accompanying notes to consolidated financial statements.

F-4

Table of Contents

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF OPERATIONS


(In thousands, except per share data)	Year ended December 31, 2022		Year ended December 31, 2021		Year ended December 31, 2020
Net sales	$	3,282,033	$	2,298,893	$	1,859,313
Cost of sales	1,885,620		1,239,229		1,009,591
Gross profit	1,396,413		1,059,664		849,722
Selling, general and administrative expenses	543,485		292,408		265,128
Engineering, research and development expenses	228,994		167,632		136,057
Amortization of intangible assets	143,953		47,856		53,092
Operating income	479,981		551,768		395,445
Interest expense	212,669		41,240		48,600
Interest income	(3,694)		(243)		(786)
Other expense (income), net	23,926		31,695		(6,656)
Income before income tax expense	247,080		479,076		354,287
Income tax expense	38,160		69,950		59,318
Net income	$	208,920	$	409,126	$	294,969

Basic net income per common share	$	1.47	$	3.02	$	2.19
Diluted net income per common share	$	1.46	$	3.00	$	2.16

Weighted average shares outstanding
Basic	142,294		135,411		134,837
Diluted	143,146		136,574		136,266

See the accompanying notes to consolidated financial statements.

F-5

Table of Contents

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME


(In thousands)	Year ended December 31, 2022		Year ended December 31, 2021		Year ended December 31, 2020
Net income	$	208,920	$	409,126	$	294,969
Other comprehensive income (loss), net of tax
Foreign currency translation adjustments	(10,220)		(2,275)		(120)
Pension liability adjustments	1,139		(382)		(49)
Interest rate swap - cash flow hedge, net of tax expense of $10,520	36,069		—		—
Other comprehensive income (loss)	26,988		(2,657)		(169)
Comprehensive income	$	235,908	$	406,469	$	294,800

See the accompanying notes to consolidated financial statements.

F-6

Table of Contents

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF EQUITY



(In thousands)	Common shares outstanding	Common stock		Treasury shares	Treasury stock		Additional paid-in capital		Retained earnings		Foreign currency translation adjustments		Defined benefit pension adjustments		Interest Rate Swap - Cash flow hedge		Total
Balance at December 31, 2019	134,930	$	1,349	202	$	(7,112)	$	842,784	$	366,127	$	(36,468)	$	(791)	$	—	$	1,165,889
Shares issued under stock plans	997	10		—	—		(16,072)		—		—		—		—		(16,062)
Share-based compensation expense	—	—		—	—		22,920		—		—		—		—		22,920
Repurchase and retirement of common stock	(778)	(8)		—	—		(4,820)		(39,735)		—		—		—		(44,563)
Dividends declared ($0.32 per share)	—	—		—	—		38		(43,528)		—		—		—		(43,490)
Pension liability adjustment	—	—		—	—		—		—		—		(49)		—		(49)
Foreign currency translation	—	—		—	—		—		—		(120)		—		—		(120)

Net income	—	—		—	—		—		294,969		—		—		—		294,969
Balance at December 31, 2020	135,149	1,351		202	(7,112)		844,850		577,833		(36,588)		(840)		—		1,379,494
Shares issued under stock plans	1,133	11		—	—		8,643		—		—		—		—		8,654
Share-based compensation expense	—	—		—	—		29,884		—		—		—		—		29,884
Repurchase and retirement of common stock	(563)	(5)		—	—		(3,547)		(63,557)		—		—		—		(67,109)
Dividends declared ($0.32 per share)	—	—		—	—		15		(43,626)		—		—		—		(43,611)
Pension liability adjustment	—	—		—	—		—		—		—		(382)		—		(382)
Foreign currency translation	—	—		—	—		—		—		(2,275)		—		—		(2,275)
Net income	—	—		—	—		—		409,126		—		—		—		409,126
Balance at December 31, 2021	135,719	1,357		202	(7,112)		879,845		879,776		(38,863)		(1,222)		—		1,713,781
Shares issued under stock plans	692	7		—	—		(6,659)		—		—		—		—		(6,652)
Share-based compensation expense	—	—		—	—		66,578		—		—		—		—		66,578
Issuance of common stock in connection with CMC Materials acquisition	12,928	129		—	—		1,265,561		—		—		—		—		1,265,690
Dividends declared ($0.40 per share)	—	—		—	—		—		(57,305)				—		—		(57,305)
Interest Rate Swap - Cash flow hedge	—	—		—	—		—		—		—		—		36,069		36,069
Pension liability adjustment	—	—		—	—		—		—		—		1,139		—		1,139
Foreign currency translation	—	—		—	—		—		—		(10,220)		—		—		(10,220)
Net income	—	—		—	—		—		208,920		—		—		—		208,920
Balance at December 31, 2022	149,339	$	1,493	202	$	(7,112)	$	2,205,325	$	1,031,391	$	(49,083)	$	(83)	$	36,069	$	3,218,000

See the accompanying notes to consolidated financial statements.

F-7

Table of Contents

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF CASH FLOWS


(In thousands)	Year ended December 31, 2022		Year ended December 31, 2021		Year ended December 31, 2020
Operating activities:
Net income	$	208,920	$	409,126	$	294,969
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation	135,371		90,311		83,430
Amortization	143,953		47,856		53,092
Share-based compensation expense	66,577		29,884		22,920
Charge for fair value mark-up of acquired inventory sold	61,932		428		590
Provision for deferred income taxes	(102,744)		(18,433)		(7,250)
Charge for excess and obsolete inventory	28,896		17,103		15,387
Loss on extinguishment of debt	3,287		23,338		2,378
Other	44,458		(2,428)		500
Changes in operating assets and liabilities, net of effects of acquisitions:
Trade accounts receivable and notes receivable	(59,643)		(86,766)		(27,461)
Inventories	(203,335)		(168,372)		(50,772)
Accounts payable and other accrued liabilities	4,519		53,577		40,162
Other current assets	(13,641)		2,870		(11,952)
Income taxes payable and refundable income taxes	21,751		(3,292)		28,490
Other	11,982		5,252		2,191
Net cash provided by operating activities	352,283		400,454		446,674
Investing activities:
Acquisition of property and equipment	(466,192)		(210,626)		(131,752)
Acquisition of business, net of cash acquired	(4,474,925)		(91,942)		(111,912)
Other	(4,592)		4,450		338
Net cash used in investing activities	(4,945,709)		(298,118)		(243,326)
Financing activities:
Proceeds from revolving credit facility and short-term debt	476,000		101,000		217,000
Payments of revolving credit facility and short-term debt	(341,000)		(101,000)		(217,000)
Proceeds from long-term debt	4,940,753		400,000		400,000
Payments of long-term debt	(145,000)		(550,000)		(251,000)
Payments for debt issuance costs	(99,488)		(5,069)		(3,964)
Payments for debt extinguishment costs	—		(19,080)		—
Payments for dividends	(57,309)		(43,545)		(43,245)
Issuance of common stock from employee stock plans	16,168		24,744		8,738
Taxes paid related to net share settlement of equity awards	(22,820)		(16,090)		(24,800)
Repurchase and retirement of common stock	—		(67,109)		(44,563)
Deferred acquisition payment	—		—		(16,125)
Other	(1,101)		(348)		(2,892)
Net cash provided by (used in) financing activities	4,766,203		(276,497)		22,149
Effect of exchange rate changes on cash, cash equivalents and restricted cash	(11,903)		(4,167)		3,485
Increase (decrease) in cash, cash equivalents and restricted cash	160,874		(178,328)		228,982
Cash, cash equivalents and restricted cash at beginning of year	402,565		580,893		351,911
Cash, cash equivalents and restricted cash at end of year	$	563,439	$	402,565	$	580,893

See the accompanying notes to consolidated financial statements

F-8

Table of Contents

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF CASH FLOWS (CONTINUED)

Supplemental Cash Flow Information


(In thousands)	Year ended December 31, 2022		Year ended December 31, 2021		Year ended December 31, 2020
Non-cash transactions:
Equity consideration on acquisition of CMC Materials, Inc.	$	1,265,690	$	—	$	—
Deferred acquisition payments, net	—		250		1,482
Equipment purchases in accounts payable	28,295		29,042		11,921


Dividends payable	654		658		593
Schedule of interest and income taxes paid:
Interest paid	$	164,183	$	46,791	$	42,575
Income taxes, net of refunds received	113,666		88,059		37,228

See the accompanying notes to consolidated financial statements

F-9

Table of Contents

ENTEGRIS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

DECEMBER 31, 2022

(1) SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

Nature of Operations Entegris, Inc. (“Entegris”, “the Company”, “we”, or “our”) is a leading supplier of advanced materials and process solutions for the semiconductor and other high-technology industries.

Principles of Consolidation The consolidated financial statements include the accounts of the Company and its majority-owned subsidiaries. Our recently acquired subsidiary, CMC Materials, Inc., follows a monthly reporting calendar and the Company follows a 5-4-4 week reporting calendar. CMC Materials, Inc.’s and the Company’s fourth quarter ends December 31, 2022. The Company believes that use of the different fiscal periods for this entity has not had a material impact on the Company’s consolidated financial position, results of operations, or cash flows. Intercompany profits, transactions and balances have been eliminated in consolidation.

Use of Estimates and Basis of Presentation The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States requires management to make judgments, estimates and assumptions that affect the amounts reported in the consolidated financial statements and accompanying notes. On an ongoing basis, Entegris evaluates its estimates, including those related to receivables, inventories, property, plant and equipment, goodwill, intangible assets, accrued liabilities, income taxes and share-based compensation, among others. Actual results could differ from those estimates.

Cash and Cash Equivalents Cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less, which are valued at cost and approximate fair value.

Allowance for Credit Losses An allowance for uncollectible trade receivables is estimated based on a combination of write-off history, aging analysis and any specific, known troubled accounts. The Company maintains an allowance for credit losses that management believes is adequate to cover expected losses on trade receivables.

Inventories Inventories are stated at the lower of cost and net realizable value. Cost is determined by the first-in, first-out (FIFO) method.

Leases The Company determines if an arrangement is a lease at inception. Right-of-use (ROU) assets include operating leases. Lease liabilities for operating leases are classified in “Other accrued liabilities” and “Long-term lease liabilities” in our consolidated balance sheet. We do not have material finance leases.

Operating assets and liabilities are recognized at commencement date based on the present value of the lease payments over the lease term. As most of our leases do not provide an implicit rate, we use our incremental borrowing rate based on the information available at commencement date in determining the present value of lease payments. We use the implicit rate when readily determinable. The ROU assets include prepaid lease payments and exclude lease incentives. Lease terms may include options to extend or terminate the lease when it is reasonably certain that the Company will exercise that option. Lease expense for lease payments is recognized on a straight-line basis over the lease term.

Lease and non-lease components are generally accounted for separately for real estate leases. For non-real estate leases, we account for the lease and non-lease components as a single lease component.

Property, Plant and Equipment Property, plant and equipment are carried at cost and are depreciated using the straight-line method over the estimated useful lives of the assets. When assets are retired or disposed of, the cost and related accumulated depreciation are removed from the accounts, and gains or losses are recognized in the same period. Maintenance and repairs are expensed as incurred, while significant additions and improvements are capitalized. Long-lived assets, including property, plant and equipment, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset or group of assets may not be recoverable based on estimated future undiscounted cash flows. The amount of impairment, if any, is measured as the difference between the net book value and the estimated fair value of the asset(s).

Fair Value of Financial Instruments The carrying value of cash equivalents, accounts receivable, accounts payable, accrued payroll and related benefits, and other accrued liabilities approximates fair value due to the short maturity of those instruments. Fair value is defined as the price that would be received from the sale of an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date. The three-level hierarchy for disclosure is based on the extent and level of judgment used to estimate fair value. Level 1 inputs consist of valuations based on quoted market prices in active markets for identical assets or liabilities. Level 2 inputs consist of valuations based on quoted prices for similar assets or liabilities, quoted prices for identical assets or liabilities in an inactive market, or other observable inputs. Level 3 inputs consist of valuations based on unobservable inputs that are supported by little or no market activity.

F-10

Table of Contents

Goodwill and Intangible Assets Goodwill represents the excess of acquisition costs over the fair value of the net assets of businesses acquired. Goodwill is not subject to amortization, but is tested for impairment annually at August 31, the Company’s annual testing date, and whenever events or changes in circumstances indicate that impairment may have occurred. The Company compares the carrying value of its reporting units, including goodwill, to their fair value. For reporting units in which the assessment indicates that it is more likely than not that the fair value is more than its carrying value, goodwill is not considered impaired. If the carrying value of the reporting unit exceeds fair value, goodwill is considered impaired.

Based on its annual analysis, the Company determined there was no indication of impairment of goodwill and the estimated fair value of each reporting unit exceeded its carrying value.

Amortizable intangible assets include, among other items, patented, unpatented and other developed technology and customer-based intangibles, and are amortized using the straight-line method over their respective estimated useful lives. The Company reviews intangible assets and other long-lived assets for impairment if changes in circumstances or the occurrence of events suggest the remaining value may not be recoverable.

Derivative Financial Instruments The Company is exposed to various market risks, including risks associated with interest rates and foreign currency exchange rates. We enter into certain derivative transactions to mitigate the volatility associated with these exposures. We have policies in place that define acceptable instrument types we may enter into and we have established controls to limit our market risk exposure. We do not use derivative financial instruments for trading or speculative purposes. In addition, all derivatives, whether designated in hedging relationships or not, are recorded on the consolidated balance sheets at fair value on a gross basis.

Interest Rate Swap

The fair value of the interest rate swap is estimated using standard valuation models using market-based observable inputs over the contractual term, including one-month Secured Overnight Financing Rate (“SOFR”) based yield curves, among others. We consider the risk of nonperformance, including counterparty credit risk, in the calculation of the fair value. We have designated this swap agreement as a cash flow hedge. As a cash flow hedge, unrealized gains are recognized as assets and unrealized losses are recognized as liabilities. Unrealized gains and losses are designated as effective or ineffective based on a comparison of the changes in fair value of the interest rate swap and changes in fair value of the underlying exposures being hedged. The effective portion is recorded as a component of accumulated other comprehensive loss, while the ineffective portion is recorded as a component of Interest expense. Changes in the method by which we pay interest from one-month SOFR to another rate of interest could create ineffectiveness in the swap, and result in amounts being reclassified from other comprehensive income (loss) into net income. Hedge effectiveness is tested quarterly to determine if hedge treatment is appropriate. Realized gains and losses are recorded on the same financial statement line as the hedged item, which is Interest expense.

Foreign Currency Contracts Not Designated as Hedges

On a periodic basis, we enter into forward foreign exchange contracts in an effort to mitigate the risks associated with currency fluctuations on certain foreign currency balance sheet exposures. These foreign exchange contracts do not qualify for hedge accounting; therefore, the gains and losses resulting from the impact of currency exchange rate movements on our forward foreign exchange contracts are recognized as Other expense (income), net in the accompanying consolidated statements of operations in the period in which the exchange rates change.

Foreign Currency Translation Assets and liabilities of certain foreign subsidiaries are translated from foreign currencies into U.S. dollars at period-end exchange rates, and the resulting gains and losses arising from translation of net assets located outside the U.S. are recorded as a cumulative translation adjustment, a component of accumulated other comprehensive loss in the consolidated balance sheets. Income statement amounts are translated at the average exchange rates for the year. Translation adjustments are not adjusted for income taxes, as substantially all translation adjustments relate to permanent investments in non-U.S. subsidiaries. Gains and losses resulting from foreign currency transactions are included in Other expense (income), net, in the Company’s consolidated statements of operations.

Revenue Recognition Revenue is measured based on consideration specified in a contract with a customer, and excludes any sales incentives and amounts collected on behalf of third parties. The Company recognizes revenue when it satisfies a performance obligation by transferring control over a product or service to a customer.

Taxes assessed by a governmental authority that are both imposed on and concurrent with a specific revenue-producing transaction, that are collected by the Company from a customer, are excluded from revenue.

Shipping and handling costs associated with outbound freight after control over a product has transferred to a customer are accounted for as a fulfillment cost and are included in cost of sales.

The Company recognizes the incremental costs of obtaining contracts as an expense when incurred if the amortization period of the assets that the Company otherwise would have recognized is one year or less.

F-11

Table of Contents

When the Company receives consideration, or such consideration is unconditionally due, from a customer prior to transferring goods or services to the customer under the terms of a sales contract, the Company records deferred revenue, which represents a contract liability. Such deferred revenue typically results from advance payments received on sales of the Company’s products. The Company makes the required disclosures with respect to deferred revenue in Note 2 to the consolidated financial statements.

The Company does not disclose information about remaining performance obligations that have original expected durations of one year or less.

The following is a description of principal activities from which the Company generates its revenues. The Company has four reportable segments. For more detailed information about reportable segments, see Note 20 to the consolidated financial statements. For each of the four reportable segments, the recognition of revenue regarding the nature of goods and services provided by the segments are similar and described below. The Company recognizes revenue for product sales at a point in time following the transfer of control of such products to the customer, which generally occurs upon shipment or delivery, depending on the terms of the underlying contracts. For product sales contracts that contain multiple performance obligations, the Company allocates the transaction price to each performance obligation identified in the contract based on relative standalone selling prices, or estimates of such prices, and recognizes the related revenue as control of each individual product is transferred to the customer in satisfaction of the corresponding performance obligations. All material revenue is being recognized at a point in time.

The Company generally recognizes revenue for sales of services when the Company has satisfied the performance obligation. The payment terms and revenue recognized are based on time and materials.

The Company also enters into arrangements to license its intellectual property. These arrangements typically permit the customer to use a specialized manufacturing process and in return the Company receives a royalty fee. The Company recognizes revenue for a sales-based or usage-based royalty promised in exchange for a license of intellectual property when the subsequent sale or usage occurs.

The Company offers certain customers cash discounts and volume rebates as sales incentives. The discounts and volume rebates are recorded as a reduction in sales at the time revenue is recognized in an amount estimated based on historical experience and contractual obligations. The Company periodically reviews the assumptions underlying its estimates of discounts and volume rebates and adjusts its revenues accordingly.

In addition, the Company offers free product rebates to certain customers. The Company utilizes an adjusted market approach to estimate the stand-alone selling price of the loyalty program and allocates a portion of the consideration received to the free product offering. The free product offering is redeemable upon future purchases of the Company’s products. The amount associated with free product rebates is recorded as deferred revenue on the balance sheet and is recognized as revenue when the free product is redeemed or when the likelihood of redemption is remote. The Company has deemed that the amount is immaterial for disclosure.

The Company provides for the estimated costs of fulfilling its obligations under product warranties at the time the related revenue is recognized. The Company estimates the costs based on historical failure rates, projected repair costs, and knowledge of specific product failures (if any). The specific warranty terms and conditions vary depending upon the product sold and the country in which we do business, but generally include parts and labor over a period generally ranging from 90 days to one year. The Company regularly reevaluates its estimates to assess the adequacy of the recorded warranty liabilities and adjusts the amounts as necessary.

The Company’s contracts are generally short-term in nature. Most contracts do not exceed twelve months. Payment terms vary by the type and location of the Company’s customers and the products or services offered. The term between invoicing and when payment is due is not significant. For certain products or services and customer types, the Company requires payment before the products or services are delivered to the customer. Those customers that prepay are represented by the contract liabilities until the performance obligations are satisfied.

Engineering, Research and Development Expenses Engineering, research and development expenses are expensed as incurred.

Share-based Compensation The Company measures the cost of employee services received in exchange for the award of equity instruments based on the fair value of the award at the date of grant. Share-based compensation expense is recognized using the straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments recorded for forfeitures as they occur. Awards issued to employees who are retirement eligible or nearing retirement eligibility are expensed on an accelerated basis.

Income Taxes The Company accounts for income taxes under the asset and liability method, which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been included in the financial

F-12

Table of Contents

statements. Under this method, deferred tax assets and liabilities are determined on the basis of the differences between the financial statements and tax basis of assets and liabilities using enacted tax rates in effect for the year in which the differences are expected to reverse. The effect of a change in tax rates on deferred tax assets and liabilities is recognized in income tax expense in the period that includes the enactment date.

The Company recognizes deferred tax assets to the extent that it believes these assets are more likely than not to be realized. A valuation allowance is recorded to reduce deferred tax assets when it is more likely than not that the Company would not be able to realize all or part of its deferred tax assets. In making such a determination, the Company considers all available positive and negative evidence, including future reversals of existing temporary differences, projected future taxable income, tax-planning strategies, and results of recent operations. If the Company determines that it would be able to realize its deferred tax assets in the future in excess of their net recorded amount, the Company would make an adjustment to the deferred tax asset valuation allowance, which would reduce the provision for income taxes.

The Company’s policy for recording interest and penalties associated with audits and unrecognized tax benefits is to record such items as a component of income before taxes. Penalties and interest to be paid or received are recorded in other expense (income), net, in the statement of operations.

Comprehensive Income Comprehensive income represents the change in equity resulting from items other than shareholder investments and distributions. The Company’s foreign currency translation adjustments, unrealized gains and losses on available-for-sale investments, interest rate swap - cash flow hedge and minimum pension liability adjustments are included in accumulated other comprehensive loss. Comprehensive income and the components of accumulated other comprehensive loss are presented in the accompanying consolidated statements of comprehensive income and consolidated statements of equity.

Recent Accounting Pronouncements Adopted in 2022 In October 2021, the FASB issued ASU 2021-08, Business Combinations (Topic 805), Accounting for Contract Assets and Contract Liabilities from Contracts with Customers, which requires an acquirer to recognize and measure contract assets and liabilities acquired in a business combination in accordance with Revenue from Contracts with Customers ("Topic 606") rather than adjust them to fair value at the acquisition date. The Company adopted ASU No. 2021-08 on July 3, 2022 and adopted prospectively, and there was no material effect on its consolidated financial statements.

In November 2021, the FASB issued ASU 2021-10, Government Assistance (Topic 832): Disclosures by Business Entities about Government Assistance. This update requires annual disclosures about transactions with a government that are accounted for by applying a grant or contribution accounting model by analogy. The Company adopted the ASU 2021-10 in the fourth quarter of 2022 and applied prospectively. The adoption of this standard did not have a material impact on the Company's consolidated financial statements and related disclosures.

Recent Accounting Pronouncements Yet to be Adopted

The Company currently has no material recent accounting pronouncements yet to be adopted.

(2) REVENUES

The following table provides information about current contract liabilities from contracts with customers. The contract liabilities are included in other accrued liabilities balance in the consolidated balance sheet.


(In thousands)	2022		2021
Balance at beginning of year	$	23,050	$	13,852
Additions due to acquisition	11,108		—
Revenue recognized that was included in the contract liability balance at the beginning of the period	(30,667)		(13,819)
Increases due to cash received, excluding amounts recognized as revenue during the period	57,490		23,017
Contract liabilities included in asset held-for-sale	(505)		—
Balance at end of year	$	60,476	$	23,050

(3) ACQUISITIONS

CMC Materials, Inc.

On July 6, 2022 (the “Closing Date”), the Company completed its acquisition of CMC Materials, Inc. (“CMC Materials”), a Delaware corporation, for approximately $6.0 billion in cash and stock (the “Merger”) pursuant to an Agreement and Plan of Merger dated as of December 14, 2021 (the “Merger Agreement”). As a result of the Merger, CMC Materials became a wholly owned subsidiary of the Company. The Merger was accounted for under the acquisition method of accounting and the results of

F-13

Table of Contents

operations of CMC Materials are included in the Company's consolidated financial statements as of and since July 6, 2022. CMC Materials reports into the Advanced Planarization Solutions and Specialty Chemicals and Engineered Materials segments of the Company. Direct costs of $39.5 million associated with the acquisition of CMC Materials, consisting primarily of professional and consulting fees, were expensed as incurred in the twelve months ended December 31, 2022, respectively. These costs are classified as selling, general and administrative expense in the Company's consolidated statement of operations. The amounts of net sales and net loss from CMC Materials since the acquisition date included in the consolidated statement of operations for the twelve months ended December 31, 2022 are $581.0 million and $75.8 million, respectively.

CMC Materials is a global supplier of consumable materials, primarily to semiconductor manufacturers. The Company's products play a critical role in the production of advanced semiconductor devices, helping to enable the manufacture of smaller, faster and more complex devices by its customers. The acquisition was executed to expand the Company’s product offering base and technological base, enhance the Company’s materials and process solutions for the most advanced manufacturing environments and help customers improve productivity, performance and total cost of ownership.

The purchase price of CMC Materials consisted of the following:


(In thousands)
Cash paid to CMC Materials’ shareholders	$	3,836,983
Stock paid to CMC Materials’ shareholders	1,265,690
Repayment of CMC Materials’ indebtedness	918,578
Total purchase price	6,021,251
Less cash and cash equivalents acquired	280,636
Total purchase price, net of cash acquired	$	5,740,615

Under the terms of the Merger Agreement, the Company paid $133.00 per share for all outstanding shares of CMC Materials (excluding treasury shares). In addition, the Company settled all outstanding share-based compensation awards held by CMC Materials’ employees at the same per share price except for certain unvested performance units that were replaced by the Company’s restricted share units. The acquisition method of accounting requires the Company to include the amount associated with pre-combination service as purchase price for the acquisition, reflected in the table immediately above.

The Merger was funded with existing cash balances as well as funds raised by the Company through the issuance of debt in the form of a new term loan facility in the aggregate principal amount of $2,495.0 million, senior secured notes due 2029 in an aggregate principal amount of $1,600.0 million, senior unsecured notes due 2030 in an aggregate principal amount of $895.0 million, and a 364-Day Bridge Credit Facility in the aggregate principal amount of $275.0 million (collectively “CMC Materials Acquisition Financing”). For additional information, see Note 10 to the Company’s consolidated financial statements.

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the Merger as originally reported and as of December 31, 2022:


(In thousands)	As of July 6, 2022		As of December 31, 2022
Cash and cash equivalents	$	280,636	$	280,636
Accounts receivable and other current assets	206,887		205,395
Inventory	256,598		256,598
Property, plant and equipment	534,363		537,386
Identifiable intangible assets	1,727,119		1,729,019
Other noncurrent assets	44,149		39,741
Current liabilities	(213,089)		(211,046)
Deferred tax liabilities and other noncurrent liabilities	(448,550)		(444,935)
Net assets acquired	2,388,113		2,392,794
Goodwill	3,633,138		3,628,457
Total purchase price	$	6,021,251	$	6,021,251

The fair value of acquired inventories was $256.6 million and is valued at the estimated selling price less the cost of disposal and reasonable profit for the selling effort. The fair value write-up of acquired finished goods inventory was $61.9 million. This

F-14

Table of Contents

amount was recorded as an incremental cost of sales charge, amortized over the expected turn of the acquired inventory, during the year ended December 31, 2022.

The fair value of acquired property, plant and equipment of $537.4 million is valued at its fair value assuming held and used, unless market data was available supporting the fair value.

The Company recognized the following provisional intangible assets as part of the acquisition of CMC Materials and finite lived assets will be amortized on a straight-line basis:


(In thousands)	Amount		Weighted average life in years
Developed technology	$	1,035,600	7.3
Trademarks and trade names	236,600		14.9
Customer relationships	414,800		18.7
In-process research and development(1)	31,100
Other	10,919		1.2
	$	1,729,019	11.1

(1) In-process research and development assets are treated as indefinite-lived until the completion or abandonment of the associated research and development project, at which time the appropriate useful lives would be determined.

The fair value of acquired identifiable finite intangible assets was determined using an income method, which utilizes discounted cash flows to fair value each of the identifiable intangible assets. The Company normally utilizes the “income method,” which starts with a forecast of all of the expected future net cash flows attributable to the subject intangible asset. These cash flows are then adjusted to present value by applying an appropriate discount rate that reflects the risk factors associated with the cash flow streams. Depending on the asset valued, the key assumptions included one or more of the following: (1) future revenue growth rates, (2) future gross margin, (3) future selling, general and administrative expenses, (4) royalty rates, and (5) discount rates. The valuations were based on the information that was available as of the acquisition date and the expectations and assumptions that have been deemed reasonable by the Company’s management. There are inherent uncertainties and management judgment required in these determinations. The fair value measurements of the assets acquired and liabilities assumed were based on valuations involving significant unobservable inputs, or Level 3 in the fair value hierarchy.

The purchase price of CMC Materials exceeded the fair value of the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $3,628.5 million. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. The purchase price also included the fair values of other assets that were not identifiable, not separately recognizable under accounting rules (e.g., assembled workforce) or of immaterial value in addition to a going-concern element that represents the Company's ability to earn a higher rate of return on the group of assets than would be expected on the separate assets as determined during the valuation process. This additional investment value resulted in goodwill. No amount of goodwill is expected to be deductible for tax purposes. The assignment of goodwill to the Company's reportable segments will be finalized in connection with the final valuation of assets acquired and liabilities assumed.

The final valuation of assets acquired and liabilities assumed is expected to be completed as soon as possible, but no later than one year from the acquisition date. Given the size and complexity of the acquisition, the valuation of certain assets and liabilities is still being finalized. In addition to identifiable intangible assets, for the reasons noted above, the Company's valuation of the CMC Materials’ tax accounts is provisional pending the completion of and the Company's review of CMC Materials’ tax returns to be filed for periods up to the acquisition date. To the extent that the Company's estimates require adjustment, the Company will modify the value.

Pro Forma Results (Unaudited)

The following unaudited pro forma financial information presents the combined results of operations of the Company as if the acquisition of CMC Materials had occurred as of the beginning of the years presented. The unaudited pro forma financial information is not necessarily indicative of what the Company’s consolidated results of operations would have been had the acquisition occurred at the beginning of each year. In addition, the unaudited pro forma financial information does not attempt

F-15

Table of Contents

to project the future results of operations of the combined company. The pro forma information does not include any potential revenue enhancements, cost synergies or other operating efficiencies that could result from the acquisition.


	Year Ended
(In thousands)	December 31, 2022		December 31, 2021
Net sales	$	3,920,850	$	3,518,893
Net income (loss)	308,741		(161,756)

Per share amounts:
Net income (loss) per common share - basic	$	2.08	$	(1.09)
Net income (loss) per common share - diluted	$	2.05	$	(1.09)

The unaudited pro forma financial information above gives effect to the following:

•The elimination of transactions between Entegris and CMC Materials, which upon completion of the Merger would be considered intercompany. This reflects the elimination of intercompany sales and associated intercompany accounts.

•Incremental amortization and depreciation expense related to the estimated fair value of identifiable intangible assets and property, plant and equipment from the purchase price allocation.

•Interest expense on the new debt raised to fund in part the consideration paid to effect the Merger using the effective interest rates.

•The elimination of interest expense, net of the gain on the termination of two swap instruments which were terminated on June 24, 2022 associated with the extinguished CMC Materials’ debt outstanding.

•The elimination of interest expense associated with the repayment of the $145.0 million senior secured term loan facility due 2025.

•The amortization of deferred financing costs and original issue discount associated with the aggregate new debt facilities.

•Transaction and integration costs directly attributable to the Merger were reclassed as of the beginning of the comparable prior annual reporting period.

•The incremental pro forma stock-based compensation expense for accelerated vesting upon the change in control for stock options, restricted stock units, restricted stock shares, phantom units, and other deferred restricted stock units.

•The additional cost of goods sold recognized in connection with the write-up of acquired finished goods inventory of $61.9 million. The write-up is recognized in cost of sales as the inventory is sold, which for purposes of these pro forma financial statements is assumed to occur within the first quarter after the Merger.

•The income tax effect of the transaction accounting adjustments related to the Merger calculated using a blended statutory income tax rate of 22.5%.

Precision Microchemicals

On November 30, 2021, the Company completed its acquisition of the Precision Microchemicals business from BASF SE. The Precision Microchemicals business reports into the Specialty Chemicals and Engineered Materials segment of the Company. The acquisition was accounted for under the acquisition method of accounting, and the Precision Microchemicals business results of operations are included in the Company’s consolidated financial statements as of and since November 30, 2021. Costs associated with the acquisition of the Precision Microchemicals business were $0.2 million for the year ended December 31, 2021 and were expensed as incurred. These costs are included in the selling, general and administrative expenses in the Company’s consolidated statement of operations. The acquisition does not constitute a material business combination.

The purchase price for the Precision Microchemical business includes cash consideration of $89.7 million (net of cash acquired), which was funded from the Company’s existing cash on hand.

The purchase price of the Precision Microchemical business exceeds the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $42.8 million. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. This additional investment value resulted in goodwill, which is expected to be deductible for income tax purposes.

The fair value of acquired identifiable intangible assets was determined using Level 3 inputs for the “income approach” on an individual asset basis. The key assumptions used in the calculation of the discounted cash flows include future revenue growth rates, future gross margin, future selling, general and administrative expense, royalty rates, and discount rates. The valuations

F-16

Table of Contents

and the underlying assumptions have been deemed reasonable by the Company’s management. There are inherent uncertainties and management judgment required in these determinations.

During the quarter ended April 2, 2022, the Company finalized its fair value determination of the assets acquired and the liabilities assumed. The following table summarizes the final allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the acquisition:


(In thousands)	November 30, 2021		As of April 2, 2022
Inventories, net	$	967	$	967
Other current assets	19		19
Identifiable intangible assets	44,910		44,910
Right-of-use assets	1,912		1,912
Property, plant and equipment	1,002		1,002
Other noncurrent assets	18		18
Accounts payable and accrued liabilities	(43)		(30)
Short-term lease liability	(170)		(170)
Long-term lease liability	(1,742)		(1,742)
Net assets acquired	46,873		46,886
Goodwill	42,819		42,824
Total purchase price, net of cash acquired	$	89,692	$	89,710

The Company recognized the following provisional finite-lived intangible assets as part of the acquisition of the Precision Microchemical business:


(In thousands)	Amount		Weighted average life in years
Developed technology	$	9,600	9.0
Trademarks and trade names	3,400		15.0
Customer relationships	31,800		15.5
Other	110
	$	44,910	14.1

(4) ASSET HELD-FOR-SALE

On October 11, 2022, the Company entered into a definitive agreement with Infineum USA L.P. for the sale of its Pipeline and Industrials Materials (“PIM”) business, which became part of the Company with the recent acquisition of CMC Materials. PIM reports into the Specialty Chemicals and Engineered Materials segment of the Company. Effective February 10, 2023, the Company terminated the definitive agreement in accordance with its terms. At the time of the termination, the transaction had not received clearance under the Hart-Scott-Rodino Act..

During the fourth quarter of 2022, the related assets and liabilities were classified as held-for-sale in the Company’s consolidated balance sheet and measured at the lower of their carrying amount or fair value less cost to sell. PIM’s income before income taxes attributable to the PIM business was $4.8 million for the year ended December 31, 2022. Due to management’s decision to terminate the agreement in first quarter of 2023, the Company will monitor and evaluate the held-for-sale criteria at the end of the first quarter 2023.

The planned disposition of PIM did not meet the criteria to be classified as a discontinued operation in the Company’s financial statements since the disposition did not represent a strategic shift that had, or will have, a major effect on the Company’s operations and financial results.

F-17

Table of Contents

Assets-held-for sale comprise the following as of December 31, 2022:


(In thousands)
Assets:	December 31, 2022
Accounts Receivable	$	16,103
Inventory	29,331
Other current assets	633
Property, Plant and Equipment, net	108,036
Intangible assets, net	76,319
Goodwill	8,822
Other assets	7,287
Total assets-held-for sale	$	246,531

Liabilities:
Accounts payable	$	4,185
Accrued expenses	5,029
Long-term liabilities	1,423
Total liabilities-held-for sale	$	10,637

(5) RESTRICTED CASH

The following table provides a reconciliation of cash, cash equivalents and restricted cash reported within the consolidated balance sheet that sum to the total of the same amounts shown in the consolidated statement of cash flows.


(In thousands)	December 31, 2022		December 31, 2021
Cash and cash equivalents	$	561,559	$	402,565
Restricted cash	1,880		—
Total cash, cash equivalents and restricted cash	$	563,439	$	402,565

The restricted cash represents cash held in a “Rabbi” trust. Prior to the acquisition of CMC Materials, CMC Materials’ change in control severance protection agreements required CMC Materials to establish a Rabbi trust prior to a change in control and fully fund the trust to cover all the severance benefits that may become payable under the agreements.

(6) TRADE ACCOUNTS AND NOTES RECEIVABLE

Trade accounts and notes receivable from customers at December 31, 2022 and 2021 consist of the following:


(In thousands)	2022		2021
Accounts receivable	$	536,256	$	347,111
Notes receivable	4,672		2,651
Total trade accounts and notes receivable	540,928		349,762
Less allowance for credit losses	5,443		2,349
Trade accounts and notes receivable, net	$	535,485	$	347,413

(7) INVENTORIES

Inventories at December 31, 2022 and 2021 consist of the following:


(In thousands)	2022		2021
Raw materials	$	337,576	$	191,986
Work-in-process	60,182		40,257
Finished goods (a)	415,057		242,970
Inventories, net	$	812,815	$	475,213

(a) Includes consignment inventories held by customers of $46.2 million and $16.0 million at December 31, 2022 and 2021, respectively.

F-18

Table of Contents

(8) PROPERTY, PLANT AND EQUIPMENT

Property, plant and equipment at December 31, 2022 and 2021 consists of the following:


(In thousands)	2022		2021		Estimated useful lives in years
Land	$	62,192	$	24,000
Buildings and improvements	490,903		281,019		5-35
Manufacturing equipment	569,224		415,985		5-10
Canisters and cylinders	168,516		142,071		3-12
Molds	76,388		77,708		3-5
Office furniture and lab equipment	330,284		189,258		3-8
Construction in progress	465,923		177,161
Total property, plant and equipment	2,163,430		1,307,202
Less accumulated depreciation	770,093		653,104
Property, plant and equipment, net	$	1,393,337	$	654,098

The table below sets forth the depreciation expense for the years ended December 31, 2022, 2021 and 2020:


(In thousands)	2022		2021		2020
Depreciation expense	$	135,371	$	90,311	$	83,430

(9) GOODWILL AND INTANGIBLE ASSETS

Goodwill activity for each of the Company’s reportable segments that carry goodwill, Specialty Chemicals and Engineered Materials (“SCEM”), Microcontamination Control (“MC”), Advanced Materials Handling (“AMH”), and Advanced Planarization Solutions (“APS”) for the years ended December 31, 2022 and 2021 is shown below:


(In thousands)	SCEM		MC		AMH		APS		Total
December 31, 2020	$	427,713	$	247,154	$	73,170	$	—	$	748,037
Addition due to acquisitions	42,819		—		932		—		43,751
Purchase accounting adjustments	—		—		—		—		—
Foreign currency translation	343		1,571		—		—		1,914
December 31, 2021	470,875		248,725		74,102		—		793,702
Addition due to acquisition	210,122		—		—		3,418,335		3,628,457
Purchase accounting adjustments	5		—		—		—		5
Goodwill reallocation	(110,798)		—		—		110,798		—
Goodwill included in assets held-for-sale	(8,822)		—		—		—		(8,822)
Foreign currency translation	(54)		(6,637)		—		1,680		(5,011)
December 31, 2022	$	561,328	$	242,088	$	74,102	$	3,530,813	$	4,408,331

As of December 31, 2022, goodwill amounted to approximately $4,408.3 million, an increase of $3,614.6 million from the balance at December 31, 2021. The increase in goodwill in 2022 reflects the acquisition of CMC Materials as described in Note 3, foreign currency translation, goodwill reclassified to asset held-for-sale as described in Note 4 and goodwill reallocation. The goodwill reallocation related to the creation of our new APS segment during the third quarter of 2022, which included a transfer of some related operations in our SCEM reportable segment to our APS reportable segment. We have allocated goodwill to our reporting units using a relative fair value approach. In addition, we completed an assessment of any potential goodwill impairment for all reporting units immediately prior and subsequent to the reallocation and determined that no impairment existed. There were no goodwill impairments for any of the years presented.

The increase in goodwill in 2021 reflects the acquisition of the Precision Microchemicals business described in Note 3, other immaterial acquisition and foreign currency translation.

F-19

Table of Contents

Identifiable intangible assets at December 31, 2022 and 2021 consist of the following:


2022
(In thousands)	Gross carrying amount		Accumulated amortization		Net carrying value		Weighted average life in years
Developed technology	$	1,302,101	$	313,876	$	988,225	7.3
Trademarks and trade names	250,473		29,565		220,908		14.3
Customer relationships	863,947		273,039		590,908		15.4
In-process research and development (1)	31,100		—		31,100
Other	31,206		20,392		10,814		4.3
	$	2,478,827	$	636,872	$	1,841,955	10.8

(1) Intangible assets acquired in a business combination that are in-process and used in research and development activities are considered indefinite-lived until the completion or abandonment of the research and development efforts. Once the research and development efforts are completed, we determine the useful life and begin amortizing the assets.


2021
(In thousands)	Gross carrying amount		Accumulated amortization		Net carrying value		Weighted average life in years
Developed technology	$	293,982	$	232,722	$	61,260	7.2
Trademarks and trade names	33,553		20,340		13,213		10.6
Customer relationships	481,674		227,350		254,324		12.4
Other	20,505		14,189		6,316		6.6
	$	829,714	$	494,601	$	335,113	10.3

The table below sets forth the amortization expense for finite-lived intangible assets for the years ended December 31, 2022, 2021, and 2020:


(In thousands)	2022		2021		2020
Amortization expense	$	143,953	$	47,856	$	53,092

The amortization expense for each of the five succeeding years and thereafter relating to finite-lived intangible assets currently recorded in the Company’s consolidated balance sheets is estimated to be the following at December 31, 2022:


(In thousands)	2023		2024	2025	2026	2027	Thereafter	Total
Future amortization expense	$	230,469	211,437	204,917	203,373	199,859	791,900	$	1,841,955

(10) DEBT

The Company’s debt at December 31, 2022 and 2021 consists of the following:


(In thousands)	2022		2021
Senior secured term loan facility due 2029	$	2,495,000	$	—
Senior secured notes due 2029	1,600,000		—
Senior unsecured notes due 2030	895,000		—
Senior unsecured notes due 2029	400,000		400,000
Senior unsecured notes due 2028	400,000		400,000
Bridge Credit Facility due 2023	135,000		—
Senior secured term loan facility due 2025	—		145,000
	$	5,925,000	$	945,000
Unamortized discount and debt issuance costs	140,107		7,973
Total debt, net	$	5,784,893	$	937,027
Less short-term debt, including current portion of long-term debt	151,965		—
Total long-term debt, net	$	5,632,928	$	937,027

F-20

Table of Contents

Annual maturities of long-term debt, excluding unamortized discount and issuance costs, due as of December 31, 2022 are as follows:


(In thousands)	2023		2024	2025	2026	2027	Thereafter	Total
Contractual debt obligation maturities*	$	153,713	24,950	24,950	24,950	24,950	5,671,487	$	5,925,000

*Subject to excess cash flow payments to the lenders, see discussion below.

CMC Materials Acquisition Financing

On the Closing Date, the Company completed its acquisition of CMC Materials pursuant to the Merger Agreement, by and among the Company, CMC Materials and Yosemite Merger Sub, Inc., a Delaware corporation and wholly owned subsidiary of the Company (“Merger Sub”). Pursuant to the Merger Agreement, Merger Sub merged with and into CMC Materials, with CMC Materials surviving the Merger and becoming a wholly-owned subsidiary of the Company.

On the Closing Date, the Company and certain of its subsidiaries entered into an Amendment and Restatement Agreement (the “Amendment”), which amended and restated the Credit and Guaranty Agreement, dated as of November 6, 2018 (as previously amended, restated, amended and restated, supplemented, modified and otherwise in effect prior to the effectiveness of the Amendment, the “Existing Credit Agreement” and, the Existing Credit Agreement as amended by the Amendment, the “Amended Credit Agreement”), by and among the Company, as borrower, certain subsidiaries of the Company party thereto, as guarantors, the lenders party thereto and Morgan Stanley Senior Funding, Inc., as administrative agent and collateral agent.

The Amended Credit Agreement provides for senior secured credit facilities in an aggregate principal amount equal to $3.1 billion, consisting of (a) a senior secured term loan credit facility in an aggregate principal amount equal to $2.495 billion (the “Initial Term Loan Facility”) and (b) a senior secured revolving credit facility in an aggregate amount equal to $575.0 million (the “Revolving Facility” and, together with the Initial Term Loan Facility, the “Credit Facilities”). The Revolving Facility contains sublimits for swingline loans and the issuances of letters of credit. The Company used a portion of the proceeds of the offering to repay the remaining principal amount of the $145.0 million senior secured term loan facility due 2025. In connection with the repayment of this debt, the Company incurred a pre-tax loss on extinguishment of debt of $0.9 million, which is included in Other expense (income), net on the consolidated statement of operations.

The commitments under the Revolving Facility expire on July 6, 2027, and any loans then outstanding will be payable in full at that time. All outstanding loans under Initial Term Loan Facility are due and payable on July 6, 2029.

The obligations under the Credit Facilities are guaranteed by certain of the Company’s wholly-owned domestic restricted subsidiaries (collectively, the “Subsidiary Guarantors”), subject to customary exceptions and limitations. The obligations under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company and the Subsidiary Guarantors, subject to customary exceptions and limitations, on a pari passu basis with the obligations under the Secured Notes, pursuant to customary intercreditor arrangements.

Borrowings under the Initial Term Loan Facility bear interest at a rate per annum equal to, at the Company’s option, either (i) Term Secured Overnight Financing Rate (“Term SOFR”) plus an applicable margin of 3.00% or (ii) a base rate plus an applicable margin of 2.00%. Borrowings under the Revolving Facility bear interest at a rate per annum equal to, at the Company’s option, either (i) Term SOFR, in the case of US dollar denominated borrowings, or the applicable benchmark rate as further described in the Amended Credit Agreement, in the case of any other currency, in each case, plus an applicable margin of 1.75% or (ii) a base rate, plus an applicable margin of 0.75%. The applicable margin set forth in the Amended Credit Agreement steps-down depending on the First Lien Net Leverage Ratio. The Amended Credit Agreement also contains customary unused commitment fees, letter of credit fees and agency fees. The interest rate of the Term Loan Facility is 7.5% as of December 31, 2022.

The Amended Credit Agreement contains customary representations, warranties and affirmative covenants. The Amended Credit Agreement also includes negative covenants that limit, among other things, incurring additional indebtedness, transactions with affiliates, additional liens, sales of assets, dividends, investments and advances, prepayments of debt and mergers and acquisitions, in each case, subject to certain exceptions, qualifications and baskets. The Amended Credit Agreement also includes a “springing” financial covenant that would require the Company to maintain a First Lien Net Leverage Ratio of 5.20:1.00 or less as of the end of any period of four fiscal quarters ending after December 31, 2022 if at any time the Company has revolving borrowings, unreimbursed letter of credit drawings and undrawn letters of credit (subject to certain exceptions) outstanding in an amount in excess of 35.0% of the aggregate commitments in respect of the Revolving Facility.

The Amended Credit Agreement contains customary events of default for facilities of this type. If an event of default occurs and is continuing, the Company may be required immediately to repay all amounts outstanding under the Amended Credit Agreement.

F-21

Table of Contents

On the Closing Date, the Company and the Subsidiary Guarantors entered into a 364-Day Bridge Credit and Guaranty Agreement (the “Bridge Credit Agreement”), among the Company, as borrower, certain subsidiaries of the Company party thereto, as guarantors, the lenders party thereto and Morgan Stanley Senior Funding, Inc., as administrative agent. The Bridge Credit Agreement provides for a senior unsecured term loan facility in an aggregate principal amount equal to $275.0 million (the “Bridge Credit Facility”). All outstanding loans under the Bridge Credit Facility are due and payable on the date that is 364 days after the Closing Date. During the year, the Company made $140.0 million of principal repayments on the Bridge Credit Facility. The Company incurred debt issuance costs of $6.9 million in connection with the Bridge Credit Facility. In connection with the repayment of this debt, the Company incurred a loss on extinguishment of debt of $2.1 million which is included in Other expense (income), net on the consolidated statement of operations.

Borrowings under the Bridge Credit Facility bear interest at a rate per annum equal to, at the Company’s option, either (i) Term SOFR plus an applicable margin of 4.55% or (ii) a base rate plus an applicable margin of 3.55%. In addition to paying interest on the outstanding principal under the Bridge Credit Facility, the Company will pay to each lender under the Bridge Credit Agreement duration fees equal to 0.25% of the aggregate outstanding principal amount of such lender’s loans under the Bridge Credit Facility at 90, 180 and 270 days after the Closing Date. The interest rate of the Bridge Credit Facility is 8.9% as of December 31, 2022.

The Company’s obligations under the Bridge Credit Facility are guaranteed, on an unsecured basis, by the Subsidiary Guarantors, subject to customary exceptions and limitations. The Bridge Credit Agreement contains customary representations, warranties and affirmative covenants. The Bridge Credit Agreement also includes negative covenants that limit, among other things, additional subsidiary indebtedness, additional liens, sales of assets and mergers and acquisitions, in each case, subject to certain exceptions, qualifications and baskets.

The Bridge Credit Agreement contains customary events of default, including, but not limited to, payment defaults, breaches of representations and warranties, covenant defaults, events of bankruptcy and insolvency, and a change of control. If an event of default occurs and is continuing, the Company may be required immediately to repay all amounts outstanding under the Bridge Credit Agreement.

The Company began incurring ticking fees associated with the Initial Term Loan Facility on March 2, 2022 through the Closing Date. The ticking fees were paid in cash to the term loan lenders on the Closing Date. For the twelve months ended December 31, 2022, the Company incurred $12.0 million in ticking fees, which were recorded to interest expense, net in the consolidated statement of operations.

Senior Secured Notes Due 2029 and Senior Unsecured Notes Due 2030

On April 14, 2022, the Company, via a wholly-owned escrow subsidiary (the “Escrow Issuer”), issued $1.6 billion aggregate principal amount of 4.750% senior secured notes due April 15, 2029 (the “2029 Notes”) pursuant to an indenture dated as of April 14, 2022 (the “2029 Notes Indenture”), by and between the Escrow Issuer and Truist Bank (“Truist”), as trustee and as notes collateral agent. Interest on the 2029 Notes is payable semi-annually in arrears on April 15 and October 15 of each year, commencing on October 15, 2022. The Company incurred debt issuance costs of $28.5 million in connection with the 2029 Notes. These costs are reported in the Company’s consolidated balance sheet as a direct deduction from the face amount of the 2029 Notes, along with $7.6 million of original issue discount costs.

On June 30, 2022, the Company, via the Escrow Issuer, issued $895.0 million aggregate principal amount of 5.950% senior unsecured notes due June 15, 2030 (the “2030 Notes” and together with the 2029 Notes, the “New Notes”) pursuant to an indenture, dated as of June 30, 2022 (the “2030 Notes Indenture” and together with the 2029 Notes Indenture, the “New Notes Indentures”), by and between the Escrow Issuer and Truist. Interest on the 2030 Notes is payable semi-annually in arrears on June 15 and December 15 of each year, commencing on June 15, 2022. The Company incurred debt issuance costs of $24.1 million in connection with the 2030 Notes. These costs are reported in the Company’s consolidated balance sheet as a direct deduction from the face amount of the 2030 Notes along with $16.7 million of net original issue discount costs.

On the Closing Date, the Escrow Issuer merged with and into the Company and, in connection therewith, the Company executed a supplemental indenture to each New Notes Indenture and such Company subsidiaries agreed to guarantee the Company’s obligations under the New Notes.

Accordingly, each series of New Notes is guaranteed, jointly and severally, fully and unconditionally, on a senior basis, by the Company’s existing and future domestic subsidiaries, other than certain excluded subsidiaries, to the extent that such subsidiaries guarantee indebtedness under the Amended Credit Agreement or existing senior notes. In addition, the 2029 Notes and related guarantees are secured, subject to permitted liens and certain other exceptions, by first priority liens on substantially the same collateral that secures the obligations under the Amended Credit Agreement.

The Company may, at its option, redeem, at any time and from time to time prior to June 15, 2025, some or all of the 2029 Notes at 100% of the principal amount thereof plus the applicable “make-whole” premium as set forth in the 2029 Notes Indenture plus accrued and unpaid interest, if any, to, but excluding, the redemption date. On or after June 15, 2025, the

F-22

Table of Contents

Company may redeem some or all of the 2029 Notes at the applicable prices set forth in the 2029 Notes Indenture plus accrued and unpaid interest, if any, to, but excluding, the redemption date. In addition, the Company may redeem up to 40% of the principal amount of the 2029 Notes before June 15, 2025 with the net proceeds from one or more equity offerings at the applicable price set forth in the 2029 Notes Indenture, plus accrued and unpaid interest, if any, to, but excluding, the redemption date.

The Company may, at its option, redeem, at any time and from time to time prior to January 15, 2029 (the “Par Call Date”), some or all of the 2029 Notes at 100% of the principal amount thereof plus accrued and unpaid interest, if any, to the redemption date plus the applicable “make-whole premium” described in the 2029 Notes Indenture. On or after the Par Call Date, the 2029 Notes will be redeemable, at the Company’s option, in whole or in part, at a redemption price equal to 100% of the principal amount of the 2029 Notes to be redeemed plus accrued and unpaid interest, if any, to, but excluding, the redemption date.

Upon the occurrence of certain change of control events accompanied by certain ratings events, the Company will be required to offer to repurchase all of the outstanding principal amount of each series of New Notes at a purchase price of 101% of the principal amount thereof, plus accrued and unpaid interest, if any, to, but not including, the date of repurchase.

Each New Notes Indenture contains covenants that, among other things, limit the Company’s ability and/or the ability of the Company’s subsidiaries to: incur liens; engage in sales-and-leaseback transactions; and consolidate, merge with or convey, transfer or lease all or substantially all of the Company’s and its subsidiaries’ assets to another person and limits the ability of any non-guarantor subsidiary of the Company to incur indebtedness. These covenants are subject to a number of other limitations and exceptions as set forth in the New Notes Indentures. The Company was in compliance with these covenants at December 31, 2022.

Each New Notes Indenture provides for customary events of default (subject in certain cases to customary grace and cure periods) which, if certain of them occur, would permit the trustee or the holders of at least 25% in aggregate principal amount of the then-outstanding applicable series of New Notes to declare the principal of, and interest or premium, if any, and any other monetary obligations on, all the then-outstanding series of New Notes to be due and payable immediately.

11. FAIR VALUE OF FINANCIAL INSTRUMENTS

The Company is required to record certain assets and liabilities at fair value. The valuation methods used for determining the fair value of these financial instruments by hierarchy are as follows:

Level 1 Cash and cash equivalents consist of various bank accounts used to support our operations and investments in institutional money-market funds that are traded in active markets. The restricted cash represents cash held in a “Rabbi” trust, further described in Note 5.

Level 2 Derivative financial instruments include an interest rate swap contract and foreign exchange contracts. The fair value of our derivative instruments is estimated using standard valuation models and market-based observable inputs over the contractual term, including the prevailing SOFR based yield curves for the interest rate swap, and forward rates and/or the Overnight Index Swap curve for forward foreign exchange contracts, among others. The fair value of our debt is estimated based on independent broker/dealer bids or by comparison to other debt securities having similar durations, yields and credit ratings.

Level 3 No Level 3 financial instruments

F-23

Table of Contents

The following table presents financial instruments that we measure at fair value on a recurring basis:


	Fair Value Measurements at Reporting Date Using
(In thousands)	Level 1				Level 2				Level 3				Total
Assets:	2022		2021		2022		2021		2022		2021		2022		2021
Cash and cash equivalents	$	561,559	$	402,565	$	—	$	—	$	—	$	—	$	561,559	$	402,565
Restricted cash	1,880		—		—		—		—		—		1,880		—
Derivative financial instruments - Interest rate swap - cash flow hedge	—		—		46,589		—		—		—		46,589		—
Derivative financial instruments -Forward exchange contracts	—		—		726		—		—		—		726		—
Total Assets	$	563,439	$	402,565	$	47,315	$	—	$	—	$	—	$	610,754	$	402,565

Liabilities:
Derivative financial instruments - Forward exchange contracts	$	—	$	—	$	193	$	—	$	—	$	—	$	193	$	—
Total Liabilities	$	—	$	—	$	193	$	—	$	—	$	—	$	193	$	—

Other Fair Value Disclosures

The estimated fair value and carrying value of our debt as of December 31, 2022 and 2021 were as follows:


	December 31, 2022				December 31, 2021
(In thousands)	Carrying Value		Fair Value		Carrying Value		Fair Value
Total debt, net	$	5,784,893	$	5,428,900	$	937,027	$	952,500

12. DERIVATIVE INSTRUMENTS

The Company is exposed to various market risks, including risks associated with interest rates and foreign currency exchange rates. One objective of the Company's risk management program is to mitigate these risks using derivative instruments.

Cash Flow Hedges - Interest Rate Swap Contract

In July 2022, the Company entered into a floating-to-fixed swap agreement on its variable rate debt under the Term Loan Facility. For further information on the Term Loan Facility, see Note 10 Debt. The interest rate swap was designated specifically to the Term Loan Facility, is highly effective and qualifies as a cash flow hedge. The notional amount is scheduled to decrease quarterly and will expire on December 30, 2025.

Foreign Currency Contracts Not Designated as Hedges

The Company enters into foreign exchange contracts in an effort to mitigate the risks associated with currency fluctuations on certain foreign currency balance sheet exposures. These foreign exchange contracts do not qualify for hedge accounting.

The notional amounts of our derivative instruments are as follows:


(In thousands)	December 31, 2022		December 31, 2021
Derivatives designated as hedging instruments:
Interest rate swap contract - Cash flow hedge	$	1,950,000	$	—


Derivatives not designated as hedging instruments:
Foreign exchange contracts to purchase U.S. dollars	$	3,995	$	—
Foreign exchange contracts to sell U.S. dollars	26,255		—

The fair values of our derivative instruments included in the consolidated balance sheets are as follows:

F-24

Table of Contents


(In thousands)	Derivative Assets				Derivative Liabilities
Consolidated Balance Sheet Location	December 31, 2022		December 31, 2021		December 31, 2022		December 31, 2021
Derivatives designated as hedging instruments - Interest rate swap contract -cash flow hedge
Other current assets	$	32,481	$	—	$	—	$	—
Other assets - long-term	14,108		—		—		—
Derivatives not designated as hedging instruments -Foreign exchange contracts
Other current assets	$	726	$	—	$	—	$	—
Other accrued liabilities	—		—		193		—

The following table summarizes the effects of our derivative instruments on our consolidated statements of operations for the years ended December 31, 2022, 2021 and 2020:


(In thousands)
Derivatives not designated as hedging instruments:	Consolidated Statements of Operations Location	2022		2021		2020
Foreign exchange contracts	Other expense, net	$	(3,435)	$	—	$	—

The following table summarizes the effects of our derivative instruments on Accumulated Other Comprehensive Income for the years ended December 31, 2022, 2021 and 2020:


(In thousands)	2022		2021		2020
Derivatives designated as hedging instruments:
Interest rate swap contract - Cash flow hedge	$	36,069	$	—	$	—

We expect approximately $32.5 million to be reclassified from Accumulated other comprehensive income into Interest expense, net during the next twelve months related to our interest rate swap based on projected rates of the SOFR forward curve as of December 31, 2022.

(13) OTHER EXPENSE (INCOME), NET

The table below sets forth the Other expense (income), net for the years ended December 31, 2022, 2021 and 2020:


(In thousands)	2022		2021		2020

Loss (gain) on foreign currency remeasurement	$	23,034	$	7,857	$	(9,751)
Loss on extinguishment of debt and modification	3,287		23,338		2,378
Other, net	(2,395)		500		717
Other expense (income), net	$	23,926	$	31,695	$	(6,656)

(14) LEASES

As of December 31, 2022, the Company was obligated under operating lease agreements for certain office space and manufacturing facilities, manufacturing equipment, vehicles, information technology equipment and warehouse space. Our leases have remaining lease terms of 1 year to 19 years, some of which may include options to extend the lease for up to 10 years, and some of which may include options to terminate the leases within 1 year.

As of December 31, 2022 and 2021, the Company’s operating lease components with initial or remaining terms in excess of one year were classified on the consolidated balance sheets as follows, together with certain supplemental balance sheet

F-25

Table of Contents

information:


(In thousands)	Classification	2022			2021
Assets
Right-of-use assets	Right-of-use assets	$	94,940		$	66,563
Liabilities
Short-term lease liability	Other accrued liabilities	19,025			10,638
Long-term lease liability	Long-term lease liability	80,716			60,101
Total lease liabilities		$	99,741		$	70,739
Lease Term and Discount Rate
Weighted average remaining lease term (years)		7.8			9.2
Weighted average discount rate		4.1		%	4.2		%

Expense for leases less than 12 months for the year ended December 31, 2022, 2021 and 2020 were not material. The components of lease expense for the year ended December 31, 2022, 2021 and 2020 are as follows:


(In thousands)	2022		2021		2020
Operating lease cost	$	17,997	$	13,127	$	13,576

The Company combines the amortization of the right-of-use assets and the change in the operating lease liability in the same line item in the Statement of Cash Flows. Other information related to the Company’s operating leases for the year ended December 31, 2022, 2021 and 2020 are as follows:


(In thousands)	2022		2021		2020
Cash paid for amounts included in the measurement of lease liabilities:
Operating cash flows from leases	$	14,916	$	11,009	$	10,806
Right-of-use assets obtained in exchange for lease obligations:
Operating leases	$	23,598	$	31,492	$	5,133

Future minimum lease payments for noncancellable operating leases as of December 31, 2022, were as follows:


(In thousands)	2022
One Year	$	22,817
Two Years	18,252
Three Years	13,990
Four Years	11,919
Five Years	10,455
Beyond Five Years	39,863
Total	$	117,296
Less: Interest	17,555
Present value of lease liabilities	$	99,741

(15) ASSET RETIREMENT OBLIGATIONS

The Company has asset retirement obligations (“AROs”) related to environmental disposal obligations associated with cylinders used to supply customers with gas products, and certain restoration obligations associated with certain of its leased facilities.

F-26

Table of Contents

Changes in the carrying amounts of the Company’s AROs for the years ended December 31, 2022 and 2021 are shown below:


(In thousands)	2022		2021
Balance at beginning of year	$	17,494	$	14,500
Liabilities assumed in acquisitions	12,531		—
Liabilities settled	(453)		(78)
Liabilities incurred	788		3,274
Accretion expense	213		166
Disposition	(2,815)		—
Revision of estimate	277		(368)
Balance at end of year	$	28,035	$	17,494

ARO liabilities expected to be settled within twelve months are included in the consolidated balance sheets in Other accrued liabilities, while all other ARO liabilities are included in Pension benefit obligations and other liabilities in the consolidated balance sheets.

(16) INCOME TAXES

Income before income taxes for the years ended December 31, 2022, 2021 and 2020 was derived from the following sources:


(In thousands)	2022		2021		2020
Domestic	$	(272,365)	$	137,145	$	86,572
Foreign	519,445		341,931		267,715
Income before income tax expense	$	247,080	$	479,076	$	354,287

Income tax expense for the years ended December 31, 2022, 2021 and 2020 is summarized as follows:


(In thousands)	2022		2021		2020
Current:
Federal	$	39,216	$	9,187	$	8,107
State	4,077		2,939		1,151
Foreign	97,611		76,257		57,310
	140,904		88,383		66,568
Deferred (net of valuation allowance):
Federal	(90,238)		(11,726)		(592)
State	(5,749)		(498)		(407)
Foreign	(6,757)		(6,209)		(6,251)
	(102,744)		(18,433)		(7,250)
Income tax expense	$	38,160	$	69,950	$	59,318

Income tax expense differs from the expected amounts based upon the statutory federal tax rates for the years ended December 31, 2022, 2021 and 2020 as follows:


(In thousands)	2022		2021		2020
Expected federal income tax at statutory rate	$	51,887	$	100,606	$	74,400
State income taxes before valuation allowance, net of federal tax effect	(5,907)		(1,333)		(1,539)
Effect of foreign source income	(7,607)		(15,862)		(7,877)
Tax contingencies	5,762		4,696		1,688
Valuation allowance	8,052		9,984		9,281
U.S. federal research credit	(13,525)		(8,469)		(7,204)
Equity compensation	5,290		(8,899)		(8,231)



Foreign derived intangible income	(15,265)		(6,496)		(1,153)
Legal entity restructuring capital loss	—		(5,079)		—
Acquisition related retention, severance, and transaction costs	8,924		—		—
Other items, net	549		802		(47)
Income tax expense	$	38,160	$	69,950	$	59,318

F-27

Table of Contents

The Company has made employment and spending commitments to Singapore. In return for those commitments, the Company was granted a partial tax holiday for eight years starting in 2013. During 2017, this agreement was extended to 2027 in exchange for revised employment and spending commitments. The income tax benefits attributable to the tax status are $24.8 million ($0.17 per diluted share), $13.9 million ($0.10 per diluted share) and $9.4 million ($0.07 per diluted share) for the years ending December 31, 2022, 2021 and 2020, respectively. The 2022, 2021 and 2020 effective tax rates include additional benefits of $14.2 million, $8.0 million and $5.4 million because the corporate tax rate in Singapore is lower than the U.S. rate.

At December 31, 2022, there were approximately $115.9 million of accumulated undistributed earnings of subsidiaries outside of the United States, all of which are considered to be indefinitely reinvested. Management estimates that approximately $13.3 million of withholding taxes would be incurred if these undistributed earnings were distributed.

The significant components of the Company’s deferred tax assets and deferred tax liabilities at December 31, 2022 and 2021 are as follows:


(In thousands)	2022		2021
Deferred tax assets attributable to:
Accounts receivable	$	1,239	$	397
Inventory	14,862		6,510
Accruals not currently deductible for tax purposes	25,787		19,636
Net operating loss and credit carryforwards	57,760		42,599
Capital loss carryforward	895		485
Equity compensation	15,249		2,630

Other, net	5,670		7,786
Gross deferred tax assets	121,462		80,043
Valuation allowance	(48,047)		(39,383)
Total deferred tax assets	73,415		40,660
Deferred tax liabilities attributable to:
Purchased intangible assets	(364,979)		(33,887)
Depreciation and Amortization	(2,719)		(9,102)
Total deferred tax liabilities	(367,698)		(42,989)
Net deferred tax liabilities	$	(294,283)	$	(2,329)

Deferred tax assets are generally required to be reduced by a valuation allowance if it is more likely than not that some portion or all of the deferred tax assets will not be realized.

As of December 31, 2022 and 2021, the Company had net U.S. deferred tax liabilities of $298.5 million and deferred tax assets of $3.0 million, respectively, which are composed of temporary differences and various tax credit carryforwards. Management believes that it is more likely than not that the benefit from certain state net operating loss carryforwards, state credit carryforwards and certain federal foreign tax credit carryforwards will not be realized. In recognition of this risk, management has provided valuation allowances of $18.5 million and $16.1 million as of December 31, 2022 and 2021, respectively, on the related deferred tax assets. If the assumptions change and management determines the assets will be realized, the tax benefits relating to any reversal of the valuation allowance on deferred tax assets at December 31, 2022 will be recognized as a reduction of income tax expense.

At December 31, 2022, the Company had state operating loss and credit carryforwards of approximately $18.3 million, which began to expire in 2022, and foreign operating loss carryforwards of $82.7 million, which begin to expire in 2023.

As of December 31, 2022 and 2021, the Company had net non-U.S. deferred tax assets of $52.3 million and $34 million, respectively, for which management determined based upon the available evidence a valuation allowance of $29.5 million and $23.3 million as of December 31, 2022 and 2021, respectively, was required against the non-U.S. gross deferred tax assets. For other non-U.S. jurisdictions, management relies upon projections of future taxable income to utilize deferred tax assets.

Benefits from tax positions should be recognized in the financial statements only when it is more likely than not that the tax positions will be sustained upon examination by the appropriate taxing authority that would have full knowledge of all relevant information. A tax position that meets the more-likely-than-not recognition threshold is measured at the largest amount of benefit that is greater than fifty percent likely of being realized upon ultimate settlement. Tax positions that fail to meet the more-likely-than-not recognition threshold should be recognized in the first subsequent financial reporting period in which that threshold is met. Previously recognized tax positions that no longer meet the more-likely-than-not recognition threshold should be derecognized in the first subsequent financial reporting period in which that threshold is no longer met. The provisions also provide guidance on the accounting for and disclosure of unrecognized tax benefits, interest and penalties.

F-28

Table of Contents

Reconciliations of the beginning and ending balances of the total amounts of gross unrecognized tax benefits for the years ended December 31, 2022 and 2021 are as follows:


(In thousands)	2022		2021
Gross unrecognized tax benefits at beginning of year	$	23,789	$	17,395
Increase from acquisition	24,452		—
Increase in tax positions from prior years	175		131
Decrease in tax positions from prior years	(248)		(69)
Increases in tax positions for current year	13,577		8,476
Settlement of tax positions for current year	(6,395)		(286)
Lapse in statute of limitations	(1,872)		(1,858)
Gross unrecognized tax benefits at end of year	$	53,478	$	23,789

The total amount of net unrecognized tax benefits that, if recognized, would affect the effective tax rate was $42.3 million at December 31, 2022.

Penalties and interest paid or received are recorded in other income, net in the consolidated statements of operations. As of December 31, 2022 and 2021, the Company had accrued interest and penalties related to unrecognized tax benefits of $4.2 million and $5.9 million, respectively. Expenses of $2.0 million, $1.0 million and $0.9 million were recognized as interest and penalties in the consolidated statements of operations for the years ended December 31, 2022, 2021 and 2020, respectively.

The Company files income tax returns in the U.S. and in various state, local and foreign jurisdictions. The statutes of limitations related to both the consolidated federal income tax return and state returns are closed for all years up to and including 2018 and 2018, respectively. With respect to foreign jurisdictions, the statute of limitations varies from country to country, with the earliest open year for the Company’s major foreign subsidiaries being 2016.

Due to the expiration of various statutes of limitations and settlements of audits, it is reasonably possible that the Company’s gross unrecognized tax benefit balance may decrease within the next twelve months by approximately $2.6 million.

(17) EQUITY

Dividends

Holders of the Company’s common stock are entitled to receive dividends when and if they are declared by the Company’s board of directors. The Company’s board of directors declared cash dividends of $0.10 per share during each of the first, second, third and fourth quarters of 2022, payments for which totaled $57.3 million. The Company’s board of directors declared cash dividends of $0.08 per share during each of the first, second, third and fourth quarters of 2021, payments for which totaled $43.6 million. During 2020, the Company’s board of directors declared cash dividends of $0.08 per share during each of the first and second, third and fourth quarters of 2020, payments for which totaled $43.5 million.

On January 18, 2023, the Company’s board of directors declared a quarterly cash dividend of $0.10 per share to be paid on February 22, 2023 to shareholders of record as of February 1, 2023.

Future dividend declarations, if any, as well as the record and payment dates for such dividends, are subject to the final determination of the Company’s board of directors. Furthermore, the credit agreements governing the New Credit Facilities contain restrictions that may limit our ability to pay dividends.

Share Repurchase Program

On December 14, 2020, the Company’s board of directors authorized a repurchase program, effective February 16, 2021, covering the repurchase of up to an aggregate of $125.0 million of the Company’s common stock, during a period of twelve months, in open market transactions and in accordance with one or more pre-arranged stock trading plans to be established in accordance with Rule 10b5-1 under the Securities Exchange Act of 1934, as amended. This repurchase program expired pursuant to its terms on February 15, 2022. In anticipation of its acquisition of CMC Materials, the Company suspended its previously announced share repurchase program in the fourth quarter of 2021 and does not anticipate authorizing a new repurchase program or resuming a repurchase program in 2023.

The Company repurchased $0.0 million, $67.1 million and $44.6 million of shares for the years ended December 31, 2022, 2021 and 2020, respectively.

The credit agreement governing the New Credit Facilities contains restrictions that may limit the Company’s ability to continue to repurchase shares.

2020 Stock Plan

F-29

Table of Contents

In 2020, the Company’s board of directors and stockholders approved the Entegris, Inc. 2020 Stock Plan (the “2020 Stock Plan”). The 2020 Stock Plan replaced the Entegris, Inc. 2010 Stock Plan for future stock awards and stock option grants. The 2020 Stock Plan has a term of ten years and provides for the issuance of stock options and other share-based awards to selected employees, directors, and other individuals or entities that provide services to the Company or its affiliates. Under the 2020 Stock Plan, the board of directors or a committee selected by the board of directors will determine for each award, the term, price, number of shares, rate at which each award is exercisable and whether restrictions are imposed on the shares subject to the awards. The exercise price for option awards generally may not be less than the fair market value per share of the underlying common stock on the date granted. The 2020 Stock Plan provides that after December 31, 2019, any shares subject to stock awards that were awarded from the Company’s expired plans and that are forfeited, expired or otherwise terminated without issuance of shares will again be available for issuance under the 2020 Stock Plan.

Stock Plan assumed from CMC Materials

Subsequent to the acquisition of CMC Materials, the Company's Board of Directors approved the absorption of the CMC Materials 2021 Omnibus Incentive Plan (the “OIP”) into the Company's 2020 Stock Plan for the remainder of the term of the OIP Plan. The 2021 OIP provides for grants of equity awards in the form of stock options, restricted stock, restricted stock units, stock appreciation rights, performance-based awards, other stock-based awards such as substitute awards in connection with an acquisition, and cash incentive awards. 3.9 million additional shares became available for grant by the Company upon absorption of the OIP Plan.

Each outstanding option to purchase shares of CMC Materials common stock under CMC Materials’s stock plan became an option to acquire, on the same terms and condition as were applicable under the CMC Materials stock plan, the Company’s common stock, with the number of shares and exercise prices thereof adjusted for the exchange ratio of 1.82. Accordingly, options to purchase 0.6 million shares of CMC Materials common stock were exchanged for options to purchase 1.2 million shares of the Company’s common stock.

Each outstanding performance-based restricted stock unit of CMC Materials under CMC Materials’s stock plan became a time-based restricted stock unit with the same terms and conditions as were applicable under the CMC Materials stock plan, the Company’s common stock, with the number of shares and exercise price thereof adjusted for the exchange ratio of 1.82. Accordingly, 0.1 million shares of performance-based restricted stock units of CMC Materials common stock were exchanged for restricted stock units of 0.2 million shares of the Company’s common stock.

For all plans, exclusive of the employee stock purchase plan, the Company had shares available for future grants of 10.9 million, 8.7 million, and 9.0 million shares at December 31, 2022, 2021 and 2020, respectively.

Stock Options

Stock option activity for the years ended December 31, 2022, 2021 and 2020 is summarized as follows:


	2022			2021			2020
(Shares in thousands)	Number of shares	Weighted average exercise price		Number of shares	Weighted average exercise price		Number of shares	Weighted average exercise price
Options outstanding, beginning of year	657	$	55.32	1,082	$	33.38	1,575	$	21.39
Granted	146	128.44		167	98.11		216	55.72
Assumed in CMC acquisition	1,178	55.80		—	—		—	—
Exercised	(141)	40.00		(592)	27.32		(709)	13.60
Cancelled or forfeited	(1)	61.42		—	—		—	—
Options outstanding, end of year	1,839	$	62.59	657	$	55.32	1,082	$	33.38
Options exercisable, end of year	1,386	$	54.53	111	$	34.54	426	$	24.99

F-30

Table of Contents

Options outstanding under the Company’s stock plans at December 31, 2022 are summarized as follows:


(Shares in thousands)	Options outstanding				Options exercisable
Range of exercise prices	Number outstanding	Weighted average remaining life in years	Weighted- average exercise price		Number exercisable	Weighted average exercise price
$— to $31.10	343	1.9 years	$	24.89	343	$	24.89
$31.11 to $43.47	222	3.4 years	34.05		149	34.40
$43.48 to $55.72	260	3.7 years	53.83		151	52.47
$55.73 to $80.00	663	4.5 years	70.29		663	70.29
$80.01 to $128.44	351	5.6 years	109.43		80	92.50
	1,839	4.0 years	$	62.59	1,386	$	54.53

The weighted average remaining contractual term for options outstanding and options exercisable for all plans at December 31, 2022 was 4.0 years and 3.7 years, respectively.

Under the stock plans, the total pre-tax intrinsic value of stock options exercised during the years ended December 31, 2022 and 2021 was $11.4 million and $54.7 million, respectively. The aggregate intrinsic value, which represents the total pre-tax intrinsic value based on the Company’s closing stock price of $65.59 at December 31, 2022, which theoretically could have been received by the option holders had all option holders exercised their options as of that date, was $25.7 million and $22.3 million for options outstanding and options exercisable, respectively.

Share-based payment awards in the form of stock option awards for 0.1 million, 0.2 million and 0.2 million shares were granted to employees during the years ended December 31, 2022, 2021 and 2020, respectively. Compensation expense is based on the grant date fair value. The awards vest annually over a period of four years and have a contractual term of 7 years. The Company estimates the fair value of stock options using the Black-Scholes valuation model. Key inputs and assumptions used to estimate the fair value of stock options include the grant price of the award, the expected option term, volatility of the Company’s stock, the risk-free rate and the Company’s dividend yield. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive equity awards, and subsequent events are not indicative of reasonableness of the original estimates of fair value made by the Company.

The fair value of each stock option grant was estimated at the date of grant using a Black-Scholes option pricing model. The following table presents the weighted-average assumptions used in the valuation and the resulting weighted-average fair value per option granted for the years ended December 31, 2022, 2021 and 2020:


Employee stock options:	2022			2021			2020
Volatility	40.9		%	38.0		%	31.9		%
Risk-free interest rate	1.5		%	0.4		%	1.4		%
Dividend yield	0.3		%	0.3		%	0.6		%
Expected life (years)	4.2			4.6			4.3
Weighted average fair value per option	$	43.47		$	30.69		$	14.83

A historical daily measurement of volatility is determined based on the expected life of the option granted. The risk-free interest rate is determined by reference to the yield on an outstanding U.S. Treasury note with a term equal to the expected life of the option granted. Expected life is determined by reference to the Company’s historical experience. The Company determines the dividend yield by dividing the expected annual dividend on the Company’s stock by the option exercise price.

Employee Stock Purchase Plan

The Company maintains the Entegris, Inc. Amended and Restated Employee Stock Purchase Plan (“ESPP”). The ESPP allows employees to elect, at six-month intervals, to contribute up to 10% of their compensation, subject to certain limitations, to purchase shares of the Company’s common stock at a discount of 15% from the fair market value on the first day or last day of each six-month period. The Company treats the ESPP as a compensatory plan. At December 31, 2022, 1.3 million shares remained available for issuance under the ESPP. Employees purchased 0.2 million, 0.1 million and 0.2 million shares, at a weighted-average price of $65.25, $90.89, and $46.58 during the years ended December 31, 2022, 2021 and 2020, respectively.

F-31

Table of Contents

Restricted Stock Units

Restricted stock units are awards of common stock made under the Stock Plans that are subject to a risk of forfeiture if the awardee terminates employment with the Company prior to the lapse of the restrictions. The value of such restricted stock units is determined using the market price on the grant date. Compensation expense for restricted stock units is generally recognized using the straight-line single-option method. A summary of the Company’s restricted stock unit activity for the years ended December 31, 2022, 2021 and 2020 is presented in the following table:


	2022			2021			2020
(Shares in thousands)	Number of shares	Weighted average grant date fair value		Number of shares	Weighted average grant date fair value		Number of shares	Weighted average grant date fair value
Unvested, beginning of year	897	$	62.69	1,083	$	41.31	1,254	$	27.48
Granted	366	117.82		293	101.04		437	57.46
Assumed in CMC acquisition	155	92.96		—	—		—	—
Vested	(523)	64.77		(439)	35.58		(564)	23.48
Forfeited	(51)	85.16		(40)	57.39		(44)	35.86
Unvested, end of year	844	90.37		897	62.69		1,083	41.31

During the years ended December 31, 2022, 2021 and 2020, the Company awarded performance-based restricted stock units for up to 0.1 million, 0.1 million and 0.1 million shares of common stock, respectively, to be issued upon the achievement of performance conditions under the Company’s stock plans to certain officers. Compensation expense is based on the grant date fair value. The awards vest on the third anniversary of the award date. The Company estimates the fair value of the performance shares using a Monte Carlo simulation process.

As of December 31, 2022, the total compensation cost related to unvested stock options, performance-based restricted stock units and restricted stock unit awards not yet recognized was $3.7 million, $2.8 million and $43.4 million, respectively, and is expected to be recognized over the next 2.5 years on a weighted-average basis.

Modifications

During the three months ended October 1, 2022, the Company modified all employee awards of restricted share units, options, and performance-based restricted share units that were granted in the 2022 fiscal year to provide that the awards will generally vest in connection with the grantee’s qualifying retirement. The Company accounted for this as a modification of awards and recognized incremental compensation cost of $15.3 million. The incremental compensation cost is measured as the accelerated expense over the requisite service period. The fair-value-based measure of the modified awards was the same as the fair-value based measure of the original award immediately before modification because the modification only affects the service period of the award.

In addition during the three months ended October 1, 2022, the Company modified restricted share units, options, and performance-based restricted share units granted prior to the 2022 fiscal year for two employees to accelerate the unvested awards upon their respective retirements from the Company. The Company accounted for this as a modification of awards and recognized incremental compensation cost of $6.2 million. The incremental compensation cost is measured as the excess of the fair value of the modified award over the fair value of the original award immediately before its terms modified and recognized as compensation cost on the date of the modification for the vested awards.

Valuation and Expense Information

The Company recognizes compensation expense for all share-based payment awards made to employees and directors based on their estimated fair values on the date of grant. Compensation expense is recognized using the straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments recorded for forfeitures as they occur. Awards issued to employees who are retirement eligible or nearing retirement eligibility are expensed on an accelerated basis. The following table summarizes the allocation of share-based compensation expense related to employee stock options, restricted stock awards, performance-based restricted stock awards and grants under the employee stock purchase plan for the

F-32

Table of Contents

years ended December 31, 2022, 2021 and 2020:


(In thousands)	2022		2021		2020
Cost of sales	$	5,780	$	3,844	$	1,463
Engineering, research and development expenses	4,596		3,504		2,359
Selling, general and administrative expenses	56,201		22,536		19,098
Share-based compensation expense	$	66,577	$	29,884	$	22,920
Tax benefit	13,977		5,488		4,129
Share-based compensation expense, net of tax	$	52,600	$	24,396	$	18,791

(18) BENEFIT PLANS

401(k) Plan

The Company has 401(k) defined contribution plans covering employees in the U.S. The related expense totaled $21.9 million, $10.1 million and $8.2 million in the fiscal years ended December 31, 2022, 2021 and 2020, respectively. The increase in the 2022 expense compared to the prior year is due primarily to the CMC Materials acquisition for the U.S. employees covered under the 401(k) defined contribution plan and under the Entegris, Inc 401(k) Savings and Profit Sharing Plan the Company’s match increased from 4% to 5%. The Company’s United Kingdom, Singapore and Korea subsidiaries also make immaterial contributions to retirement plans that function as defined contribution retirement plans.

Defined Benefit Plans

The employees of the Company’s subsidiaries in Japan, Taiwan, South Korea, France and Germany are covered in defined benefit pension plans. As part of the CMC Materials acquisition in 2022, the Company assumed $10.1 million of projected benefit obligation. The Company uses a December 31 measurement date for its pension plans. A summary of these combined plans are:


(In thousands)	2022		2021
Projected benefit obligation	$	15,253	$	7,050
Fair value of plan assets	1,014		969
Plan assets less benefit obligation - net amount recognized	(14,239)		(6,081)
Accumulated benefit obligation	12,151		5,995

Cash Flows

Benefits for the combined plans were $0.7 million, $0.1 million and $0.1 million in fiscal years 2022, 2021 and 2020, respectively, consisting primarily of service costs. Net service costs are included in Cost of sales and Operating expenses, and all other costs are recorded in Other expense, net in our Consolidated Statements of Operations. The Company expects to make the following contributions and benefit payments:


(In thousands)	Payments
2023	$	735
2024	779
2025	1,264
2026	1,127
2027	922
Years 2028-2032	5,940

(19) EARNINGS PER SHARE (“EPS”)

Basic EPS is computed by dividing net income by the weighted average number of shares of common stock outstanding during each period. The following table presents a reconciliation of the share amounts used in the computation of basic and diluted earnings per share:


(In thousands)	2022	2021	2020
Basic earnings per share—Weighted common shares outstanding	142,294	135,411	134,837
Weighted common shares assumed upon exercise of options and vesting of restricted stock units	852	1,163	1,429
Diluted earnings per share—Weighted common shares outstanding	143,146	136,574	136,266

F-33

Table of Contents

The Company excluded the following shares underlying stock-based awards from the calculations of diluted EPS because their inclusion would have been anti-dilutive for the years ended December 31, 2022, 2021 and 2020:


(In thousands)	2022	2021	2020
Shares excluded from calculations of diluted EPS	447	136	195

(20) SEGMENT INFORMATION

The Company’s financial segment reporting reflects an organizational alignment intended to leverage the Company’s unique breadth of capabilities to create mission-critical microcontamination control products, advanced materials, specialty chemicals and advanced materials handling solutions that maximize manufacturing yields, reduce manufacturing costs and enable higher device performance for its customers. These segments share common business systems and processes, technology centers and technology roadmaps. The Company leverages its expertise from these four segments to create new and increasingly integrated solutions for its customers. The Company reports its financial performance in the following segments:

•Specialty Chemicals and Engineered Materials: SCEM provides high-performance and high-purity process chemistries, gases and materials, and safe and efficient materials delivery systems to support semiconductor and other advanced manufacturing processes.

•Microcontamination Control: MC offers solutions to filter and purify critical liquid and gaseous chemistries used in semiconductor manufacturing processes and other high-technology industries.

•Advanced Materials Handling: AMH develops solutions to monitor, protect, transport and deliver critical liquid chemistries, wafers and other substrates for a broad set of applications in the semiconductor industry, life sciences and other high-technology industries.

•Advanced Planarization Solutions: APS provides complementary chemical mechanical planarization solutions, advanced materials and high-purity wet chemicals; including CMP slurries, pads, formulated cleans and other electronic chemicals

Segment profit is defined as net sales less direct and indirect segment operating expenses, including certain general and administrative costs for the Company’s human resources, finance and information technology functions. The Company generally accounts for inter-segment sales and transfers as if the sales or transfers were to third parties, that is, at approximate market prices. Inter-segment sales are presented as an elimination below. The remaining unallocated expenses consist mainly of the Company’s corporate functions as well as interest expense, interest income, amortization of intangible assets and income tax expense.

Corporate assets consist primarily of cash and cash equivalents, deferred tax assets and deferred tax charges.

F-34

Table of Contents

Summarized financial information for the Company’s reportable segments is shown in the following tables:


(In thousands)	2022		2021		2020
Net sales:
SCEM	$	773,594	$	625,670	$	530,040
MC	1,105,996		919,363		742,186
AMH	846,492		704,946		538,682
APS	606,614		85,621		79,492
Inter-segment elimination	(50,663)		(36,707)		(31,087)
Total net sales	$	3,282,033	$	2,298,893	$	1,859,313

(In thousands)	2022		2021		2020
Segment profit:
SCEM	$	122,287	$	137,392	$	99,474
MC	411,475		321,300		248,910
AMH	183,738		159,995		111,028
APS	96,902		30,415		28,495
Total segment profit	$	814,402	$	649,102	$	487,907

(In thousands)	2022		2021		2020
Total assets:
SCEM	$	1,671,456	$	971,678	$	866,029
MC	1,161,636		946,336		819,602
AMH	801,591		598,547		437,322
APS	5,864,250		219,787		156,328
Corporate	639,924		455,548		638,415
Total assets	$	10,138,857	$	3,191,896	$	2,917,696


(In thousands)	2022		2021		2020
Depreciation and amortization:
SCEM	$	76,550	$	57,995	$	62,770
MC	42,514		41,536		39,775
AMH	33,490		29,648		25,231
APS	126,770		8,988		8,647
Corporate	—		—		99
Total depreciation and amortization	$	279,324	$	138,167	$	136,522

(In thousands)	2022		2021		2020
Capital expenditures:
SCEM	$	105,057	$	68,058	$	49,711
MC	178,800		69,120		40,656
AMH	136,061		67,096		36,107
APS	46,274		6,352		5,278

Total capital expenditures	$	466,192	$	210,626	$	131,752

F-35

Table of Contents

The following table reconciles total segment profit to income before income taxes and equity in net loss of affiliate:


(In thousands)	2022		2021		2020
Total segment profit	$	814,402	$	649,102	$	487,907
Less:
Amortization of intangibles	143,953		47,856		53,092
Unallocated general and administrative expenses	190,468		49,478		39,370
Operating income	$	479,981	$	551,768	395,445
Interest expense	212,669		41,240		48,600
Interest income	(3,694)		(243)		(786)
Other expense (income), net	23,926		31,695		(6,656)
Income before income tax expense	$	247,080	$	479,076	$	354,287

In the following tables, revenue is disaggregated by country or region based on the ship to location of the customer for the years ended December 31, 2022, 2021 and 2020:


	2022
(In thousands)	SCEM		MC		AMH		APS		Inter-segment		Total
North America	$	272,696	$	158,627	$	265,510	$	149,489	$	(50,663)	$	795,659
Taiwan	111,921		305,899		151,663		90,644		—		660,127
South Korea	78,675		129,750		121,726		83,926		—		414,077
Japan	87,452		183,485		59,278		19,787		—		350,002
China	95,184		184,609		119,325		102,838		—		501,956
Europe	66,938		85,696		88,405		83,976		—		325,015
Southeast Asia	60,728		57,930		40,585		75,954		—		235,197
	$	773,594	$	1,105,996	$	846,492	$	606,614	$	(50,663)	$	3,282,033


	2021
(In thousands)	SCEM		MC		AMH		APS		Inter-segment		Total
North America	$	191,717	$	133,653	$	219,853	$	17,280	$	(36,707)	$	525,796
Taiwan	96,069		225,086		111,968		20,987		—		454,110
South Korea	76,270		114,211		105,493		21,298		—		317,272
Japan	86,442		161,569		51,267		3,325		—		302,603
China	91,272		164,471		97,157		11,519		—		364,419
Europe	43,703		70,011		89,121		6,433		—		209,268
Southeast Asia	40,197		50,362		30,087		4,779		—		125,425
	$	625,670	$	919,363	$	704,946	$	85,621	$	(36,707)	$	2,298,893


	2020
(In thousands)	SCEM		MC		AMH		APS		Inter-segment		Total
North America	$	168,270	$	144,015	$	164,576	$	20,739	$	(31,087)	$	466,513
Taiwan	85,406		171,201		94,339		21,259		—		372,205
South Korea	69,235		91,997		92,623		19,345		—		273,200
Japan	71,242		124,321		45,209		2,124		—		242,896
China	68,625		108,588		61,458		9,192		—		247,863
Europe	32,746		67,090		52,321		2,281		—		154,438
Southeast Asia	34,516		34,974		28,156		4,552		—		102,198
	$	530,040	$	742,186	$	538,682	$	79,492	$	(31,087)	$	1,859,313

F-36

Table of Contents

The following table summarizes property, plant and equipment, net, attributed to significant countries for the years ended December 31, 2022, 2021 and 2020:


(In thousands)	2022		2021		2020
Property, plant and equipment:
North America	$	776,913	$	417,549	$	348,363
South Korea	84,253		58,725		55,404
Japan	104,282		56,357		41,044
Malaysia	46,703		29,443		32,727
China	253,285		32,133		29,528
Taiwan	31,592		58,444		17,050
Other	96,309		1,447		1,251
	$	1,393,337	$	654,098	$	525,367

The Company reported net sales of 10 percent or more for one customer in the amount of $408.6 million, $271.9 million and $208.3 million for the years ended December 31, 2022, 2021 and 2020, respectively, all of which include sales from all the Company’s segments.

(21) COMMITMENTS AND CONTINGENT LIABILITIES

(22) QUARTERLY INFORMATION-UNAUDITED


	Fiscal quarter ended
(In thousands, except per share data)	April 2, 2022		July 2, 2022		October 1, 2022		December 31, 2022
Net sales	$	649,646	$	692,489	$	993,828	$	946,070
Gross profit	309,820		310,397		371,671		404,525
Net income (loss)	125,705		99,491		(73,703)		57,427
Basic net income (loss) per common share	0.93		0.73		(0.50)		0.39
Diluted net income (loss) per common share	0.92		0.73		(0.50)		0.38


	Fiscal quarter ended
(In thousands, except per share data)	April 3, 2021		July 3, 2021		October 2, 2021		December 31, 2021
Net sales	$	512,844	$	571,352	$	579,493	$	635,204
Gross profit	234,986		265,384		264,204		295,090
Net income	84,676		88,770		117,461		118,219
Basic net income per common share	0.63		0.66		0.87		0.87
Diluted net income per common share	0.62		0.65		0.86		0.87

(23) SUBSEQUENT EVENTS

On January 20, 2023, the Company announced a definitive agreement for Quad-C Management to acquire the QED business, which became part of the Company with the recent acquisition of CMC Materials. The selling price is expected to be approximately $135.0 million, subject to customary purchase price adjustments. The sale is currently expected to close in the first quarter of 2023, subject to the satisfaction of certain customary closing conditions, including, among others, receipt of regulatory approval. The Company does not expect a material gain or loss from the sale of the QED business.

F-37

Exhibit 10.1

ENTEGRIS, INC.

Performance-Based RSU Award Agreement

(2020 Stock Plan)

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company may periodically make equity incentive awards consisting of performance-based restricted stock units with respect to the Company’s Common Stock, $0.01 par value (“Stock”), to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2020 Stock Plan (as amended from time to time, the “Plan”). Any key employee, non-employee director, consultant or advisor (a “Participant”) who receives a performance-based restricted stock unit award (the “Award”) is notified in writing or via email and the Award is credited to the Participant’s account and reflected under the Stock Plans section on Fidelity’s NetBenefits website. To Accept the award; click on the “Begin your grant acceptance now” link located in the New Grant Alert notification or scroll down to and expand the Stock Plans section; then click on “Begin Acceptance” and follow the prompts. By accepting the Award, Participant: (i) acknowledges that Participant has received a copy of the Plan, of the related prospectus providing information concerning awards under the Plan and of the Company’s most recent Annual Report on Form 10-K; and (ii) accepts the Award and agrees with the Company that the Award is subject to the terms of the Plan and to the following terms and conditions:

Article I – PERFORMANCE-BASED RESTRICTED STOCK UNIT AWARD

1.1. Award Date. This Agreement shall take effect as of the date specified as the Award Date with respect to the Award in the Award summary provided to you online through the Portal (the “Award Date”).

1.2. Performance-based Restricted Stock Units Subject to Award. The Award consists of that number of performance-based restricted stock units (the “PRSU”) with respect to the Stock that has been approved for the Award to Participant by the Administrator as the target number of PRSUs (“Target PRSUs”). The Target PRSUs shall be subject to increase or decrease in accordance with Sections 1.3 and 1.4 below. Each PRSU is equivalent to one share of the Stock (subject to adjustment under the Plan). The Participant’s rights to the PRSU are subject to the restrictions described in this Agreement and in the Plan (which is incorporated herein by reference with the same effect as if set forth herein in full) in addition to such other restrictions, if any, as may be imposed by law.

1.3. Earned Performance-based Restricted Stock Units. The number of PRSUs earned under this Agreement (the “Earned PRSUs”) shall be equal to the Target PRSUs multiplied by the TSR Performance Multiplier (as defined herein). The “TSR Performance Multiplier” will be determined by comparing the Company’s total stockholder return to the total stockholder return of each of the companies in the Comparator Peer Group (as set forth below) over the period commencing on the Award Date and ending on the third anniversary of the Award Date (the “Performance Period”) to determine the Company’s TSR ranking against the Comparator Group. For purposes of computing total stockholder return: (i), any dividends paid by the Company or the companies in the Comparator Group shall be treated as having been reinvested at the closing price as of the ex-dividend date; and (ii) the beginning stock price will be the average stock price over the 20 trading days ending on the Award Date and the ending stock price will be the average stock price over the 20 trading days ending on the last day of the Performance Period (adjusted, as applicable, for stock splits, reorganizations, recapitalizations, or similar corporate transactions during such period).

1.4. Calculation of the TSR Performance Multiplier. The TSR Performance Multiplier will be calculated as set forth in the following table based upon the Company’s total stockholder return over the Performance Period when ranked against the total stockholder return over the Performance Period of each of the companies in the Comparator Peer Group:


Company TSR Percentile Rank			TSR Performance Multiplier
Below 25th percentile			0
25th percentile			50%
50th percentile			100%
85th percentile or above			200%

If the Company’s total stockholder return percentile rank during the Performance Period is between the 25th and the 50th percentiles or between the 50th and the 85th percentiles, the TSR Performance Multiplier will be determined using straight line interpolation based on the actual percentile ranking.

As used herein, the “Comparator Peer Group” consists of those companies that are in the Philadelphia Semiconductor Index on the Award Date; provided that, except as provided below, the common stock (or similar equity security) of each such peer company is continually listed or traded on a national securities exchange from the first day of the Performance Period through the last trading day of the Performance Period. In the event a member of the Comparator Peer Group files for bankruptcy or liquidates due to an insolvency or is delisted due to failure to meet the national securities exchange’s minimum market capitalization requirement, such company shall continue to be treated as a Comparator Peer Group member, and such company’s ending price will be treated as $0 if the common stock (or similar equity security) of such company is no longer listed or traded on a national securities exchange on the last trading day of the Performance Period (and if multiple members of the Comparator Peer Group file for bankruptcy or liquidate due to an insolvency or are delisted for such reason, such members shall be ranked in order of when such bankruptcy or liquidation occurs, with earlier bankruptcies, liquidations or delistings ranking lower than later bankruptcies, liquidations or delistings). In the event of a formation of a new parent company by a Comparator Peer Group member, substantially all of the assets and liabilities of which consist immediately after the transaction of the equity interests in the original Comparator Peer Group member or the assets and liabilities of such Comparator Peer Group member immediately prior to the transaction, such new parent company shall be substituted for the Comparator Peer Group member to the extent (and for such period of time) as its common stock (or similar equity securities) are listed or traded on a national securities exchange but the common stock (or similar equity securities) of the original Comparator Peer Group member are not. In the event of a merger or other business combination of two Comparator Peer Group members (including, without limitation, the acquisition of one Comparator Peer Group member, or all or substantially all of its assets, by another Comparator Peer Group member), the surviving, resulting or successor entity, as the case may be, shall continue to be treated as a member of the Comparator Peer Group, provided that the common stock (or similar equity security) of such entity is listed or traded on a national securities exchange through the last trading day of the Performance Period. With respect to the preceding two sentences, the applicable stock prices shall be equitably and proportionately adjusted to the extent (if any) necessary to preserve the intended incentives of the awards and mitigate the impact of the transaction.

-2-

The Award shall be subject to limitation that, if the Company’s absolute total shareholder return is negative, then the maximum number of shares that may be earned is the Target PRSUs.

1.5. Vesting of PRSUs. The term “vest” as used herein with respect to any PRSU means the lapsing of the restrictions described herein with respect to such PRSU. The Award shall not be vested as of the Award Date and shall be forfeitable by the Participant without consideration or compensation in accordance with Section 1.6 below unless and until otherwise vested pursuant to the terms of this Agreement. The Participant has no rights, partial or otherwise, in the Award and/or any Stock subject thereto unless and until the Award has been earned pursuant to Section 1.3 and vested pursuant to this Section 1.5 or vested pursuant to Section 1.7. A number of PRSUs equal to the Earned PRSUs will become vested (referred to as “Vested Units”) on the last day of the Performance Period (the “Maturity Date”), provided that the Participant remains continuously employed by the Company or an Affiliate through the Maturity Date. Each Vested Unit shall be settled by the delivery of one share of Stock (subject to adjustment under the Plan). Subject to Section 1.7 and Section 2.3 below, settlement will occur as soon as practicable following certification by the Administrator of the number of Earned PRSUs and passage of the Maturity Date (or, if earlier, the date the Award becomes vested), but in no event later than the earlier of (i) 90 days following the Maturity Date (or such earlier date that the Award becomes vested), or (ii) March 15th of the year following the year in which the Award becomes vested. No fractional shares of Stock shall be issued pursuant to this Agreement.

1.6. Forfeiture Risk. Subject to Section 1.7, if the Participant ceases to be employed or retained by the Company or an Affiliate for any reason, any then-outstanding PRSU that is not a Vested Unit acquired by the Participant hereunder shall be automatically and immediately forfeited. The Participant hereby appoints the Company as the attorney-in-fact of the Participant to take such actions as may be necessary or appropriate to effectuate the cancellation of a forfeited PRSU.

1.7. Early Vesting of PRSUs. This Section sets forth the exclusive circumstances under which the Participant may become entitled to Vested Units even though he or she is not employed through the Maturity Date. The provisions of clauses (c) and (d) of this Section 1.7 shall govern the Award notwithstanding the provisions of any Executive Change In Control Termination Agreement (or similar agreement) that may exist between the Company or an Affiliate and the Participant.

(a) Death. If the Participant’s employment, tenure or service, as applicable, terminates due to the death of the Participant and such death occurs (i) prior to the Maturity Date and also the date of a Change in Control, the Participant shall continue to be entitled to receive the Earned PRSUs granted hereunder (without proration), to the extent earned as of the earlier of the Maturity Date and the date of a Change in Control, and any such Earned PRSU shall be settled in accordance with Section 1.5 or (ii) prior to the Maturity Date but on or following the date of a Change in Control and such PRSUs become Earned PRSUs as of the date of a Change in Control as provided in clause (d) below and as calculated in accordance with clause (c) below, such Earned PRSUs shall be Vested Units and shall be settled and delivered to the Participant as soon as practicable following the date of such death and, in any event, no later than thirty (30) days thereafter.

(b) Retirement. If the Participant ceases to be an employee due to Retirement prior to the Maturity Date, then, subject to compliance with the Retirement Vesting Criteria,

-3-

the Participant shall continue to be entitled to receive the Earned PRSUs hereunder (without proration) to the extent earned as of the earlier of the Maturity Date and the date of a Change in Control, and shall be settled in accordance with Section 1.5 (to the extent such PRSUs become Earned PRSUs as of the Maturity Date) or clauses (c)-(d) below (to the extent such PRSUs become Earned PRSUs as of the date of a Change in Control), as applicable. Notwithstanding the foregoing, to the extent the PRSU becomes an Earned PRSU as of the date of a Change in Control, (i) the applicable level of performance shall be calculated in accordance with clause (c) below and (ii) such Earned PRSU shall be subject to clauses (c) and (d) below.

(c) Change in Control – Award Not Assumed or Substituted. In the event of a Change in Control where the Award is not continued or assumed by a public company, the Earned PRSU, to the extent earned pursuant to the next sentence, shall be fully vested immediately prior to the Change in Control and such Earned PSUs shall be Vested Units. The number of Earned PRSUs at the time of a Change in Control shall be determined as of the date such Change in Control is consummated, rather than the Maturity Date (as defined in Section 1.5), with the number of Earned PRSUs determined as set forth in Section 1.4 above, based upon the Company’s total stockholder return and the total stockholder return of each of the companies in the Comparator Peer Group through the date of the Change in Control (and, with respect to the Company, instead of the 20-business day average, taking into account the consideration per share to be paid in the Change in Control transaction). Such Vested Units shall be settled and delivered to the participant as soon as practicable following the date of the Change in Control and, in any event, no later than thirty (30) days thereafter.

(d) Change in Control – Award Assumed or Substituted. In the event of a Change in Control where the Award is continued or assumed by a public company, then payment of the Earned PRSUs calculated in accordance with clause (c) above, shall continue to be contingent on the Participant’s employment through the Maturity Date unless (x) there is a Qualifying Termination within two years following the Change in Control or (y) the Participant ceases to be an employee due to Retirement (subject to compliance with the Retirement Vesting Criteria).

If such a Qualifying Termination occurs, the restrictions on all unvested Earned PRSUs shall immediately lapse and such unvested Earned PRSUs shall be Vested Units and shall be settled and delivered to the Participant as soon as practicable following the date of the Qualifying Termination and, in any event, no later than thirty (30) days thereafter. Notwithstanding the foregoing, to the extent that such Earned RSUs are held by a Participant who is or may become eligible for Retirement prior to the Maturity Date, such Participant’s employment is terminated in accordance with this Section 1.7(d) and (i) such Change in Control constitutes a change in control event within the meaning of Section 409A of the Code, then such Earned PRSUs shall be settled as soon as practicable following such termination, and in no event later than thirty (30) days thereafter or (ii) such Change in Control does not constitute a change in control event within the meaning of Section 409A of the Code, then to the extent required to avoid accelerated taxation and/or tax penalties under Section 409A of the Code, such Earned PRSUs shall continue to be settled on the Maturity Date or at such earlier time that does not result in such accelerated taxation and/or tax penalties.

Except as provided in the foregoing paragraph or in Section 1.7(a), if the Participant ceases to be an employee due to Retirement prior to the Maturity Date, then, subject to the Participant’s compliance with the Retirement Vesting Criteria through the Maturity Date, the restrictions on all unvested Earned PRSUs shall immediately lapse as of the

-4-

Maturity Date and such unvested Earned PRSUs shall be Vested Units, and shall be settled and delivered to the Participant on the Maturity Date.

1.8. Nontransferability of PRSUs. The PRSU acquired by the Participant pursuant to this Agreement shall not be sold, transferred, pledged, assigned or otherwise encumbered or disposed of except as provided below and in the Plan.

1.9. Dividends Equivalent Rights. The Participant shall not be entitled: (i) to receive any dividends or other distributions paid with respect to the Stock to which the PRSU relates, or (ii) to vote any Stock with respect to which the PRSU relates, unless and until, and only to the extent, the PRSU becomes vested and the Participant becomes a stockholder of record with respect to such shares of Stock. Notwithstanding the foregoing, as of each date on which the Company pays an ordinary cash dividend to record owners of shares of Stock, the Participant’s account shall, as of each such dividend date, be credited with a cash amount (without interest) equal to the product of the total number of shares subject to the Target PRSU immediately prior to such dividend date multiplied by the dollar amount of the cash dividend paid per share of Stock by the Company on such dividend date (such amount, the “Dividend Equivalent Amount”). The Dividend Equivalent Amount, which shall be adjusted to reflect the number of Earned PRSUs, shall be subject to the same vesting conditions and settlement terms as the PRSU shares to which they relate.

1.10. Sale of Vested Shares. The Participant understands that Participant will be free to sell any Stock with respect to which the PRSU relates once the PRSU has vested and settled, subject to (i) satisfaction of any applicable tax withholding requirements with respect to the vesting of such PRSU; (ii) the completion of any administrative steps (for example, but without limitation, the transfer of certificates) that the Company may reasonably impose; and (iii) applicable requirements of federal and state securities laws.

1.11. Certain Tax Matters. The Participant expressly acknowledges that the award or vesting of the PRSU acquired hereunder may give rise to income subject to withholding. The Participant expressly acknowledges and agrees that Participant’s rights hereunder are subject to Participant promptly paying to the Company all taxes required to be withheld in connection with such award, vesting, settlement and/or payment. Unless the Administrator determines otherwise, such payment of Participant’s withholding tax obligations shall be made through net share settlement procedures whereby that number of the vesting shares needed to cover the withholding tax obligation (calculated using the Fair Market Value of the Company’s stock on the date of vesting) shall be cancelled to fund the Company’s payment of the withholding tax obligation and the net shares remaining after such cancellation shall be credited to Participant’s account.

1.12 Equitable Adjustments. The Award is subject to adjustment pursuant to Section 15.1 of the Plan.

Article II – GENERAL PROVISIONS

2.1. Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan. The following terms shall have the indicated meanings:

“Cause” means (a) “Cause” as defined in any individual agreement to which the Participant and the Company or an Affiliate are parties or (b) if there is no such agreement or if it does not define Cause, the Company's termination of the Participant’s employment with the Company or any Affiliate following the occurrence of any one or more of the following: (i) the Participant’s conviction of, or plea of guilty or nolo

-5-

contendere to, a felony; (ii) the Participant’s willful and continual failure to substantially perform the Participant’s duties after written notification by the Company; (iii) the Participant’s willful engagement in conduct that is materially injurious to the Company or an Affiliate monetarily or otherwise; (iv) the Participant’s commission of an act of gross misconduct in connection with the performance of the Participant’s duties; (v) the Participant’s material breach of any employment, confidentiality, or other similar agreement between the Company or an Affiliate and the Participant; or (vi) prior to a Change in Control, such other events as shall be determined by the Administrator.

“Retirement” means Participant’s employment, tenure or service, as applicable, with the Company and its Affiliates is terminated after (x) Participant has provided at least five (5) years of consecutive years of service with the Company or an Affiliate thereof, (y) Participant is at least fifty-five (55) years old as of the date of Retirement, and (z) Participant’s age plus complete years of service with the Company or an Affiliate thereof as of Participant’s date of termination equals at least seventy (70).

“Retirement Vesting Criteria” means that Participant (x) provides six (6) months’ advance written notice to the Company of Participant’s Retirement (which notice may be waived at the discretion of the Administrator), (y) executes a release of claims in favor of the Company in a form satisfactory to the Company and such release becomes effective within sixty (60) days following the date of termination due to Retirement (which release may be waived at the direction of the Administrator), and (z) continues to comply with and does not violate the terms of the Restrictive Covenant Agreement attached hereto as Exhibit A through the Maturity Date. Determination as to whether Participant complies with and has not violated the terms of the Restrictive Covenant Agreement will be made in good faith by the Company.

“Qualifying Termination” means the termination of a Participant’s employment with the Company or an Affiliate (a) by the Company for any reason other than Cause, death, or total and permanent disability (as that term is defined in the Company’s disability insurance policy in effect on the Award Date); or (b) by the Participant because of the occurrence, without the Participant’s consent, of (i) a material reduction in the position, duties, or responsibilities of the Participant from those in effect immediately prior to such change; (ii) a reduction in the Participant’s base salary; (iii) a relocation of the Participant’s primary work location to a distance of more than 50 miles from its location as of immediately prior to such change; or (iv) a material breach by the Company or an Affiliate of any employment agreement with the Participant. In order to invoke a termination of employment pursuant to clause (b) of this definition, Participant shall provide written notice to the Company of the existence of one or more of the conditions described in clauses (i) through (iv) within 90 days following the Participant’s knowledge of the initial existence of such condition or conditions, and the Company shall have 30 days following receipt of such written notice (the “Cure Period”) during which it may remedy the condition(s). In the event that the Company fails to remedy the condition(s) covered by clause (b) of this definition during the Cure Period, the Participant must terminate employment, if at all, within 90 days following the Cure Period in order for such termination of employment to constitute a Qualifying Termination.

2.2. No Understandings as to Employment etc. The Participant further expressly acknowledges that nothing in the Plan or any modification thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to employ or retain the Participant for any period or with respect to the terms of the Participant’s employment or to give rise to any right to remain in the service of the Company or any Affiliate, and the Participant shall remain subject to

-6-

discharge to the same extent as if the Plan had never been adopted or the Award had never been made.

2.3. Compliance with Section 409A of the Code. Notwithstanding any other provision of the Plan or this Agreement to the contrary, the Plan and this Agreement shall be construed or deemed to be amended as necessary to remain exempt from or comply with the requirements of Section 409A of the Code and to avoid the imposition of any additional or accelerated taxes or other penalties under Section 409A of the Code. The Committee, in its sole discretion, shall determine the requirements of Section 409A of the Code applicable to the Plan and this Agreement and shall interpret the terms of each consistently therewith. Under no circumstances, however, shall the Company, an Affiliate, or a subsidiary have any liability under the Plan or this Agreement for any taxes, penalties, or interest due on amounts paid or payable pursuant to the Plan and/or this Agreement, including any taxes, penalties, or interest imposed under Section 409A of the Code. In the event that it is determined by the Company that, as a result of the deferred compensation tax rules under Section 409A of the Code (and any related regulations or other pronouncements thereunder) (the “Deferred Compensation Tax Rules”), benefits that the Participant is entitled to receive under the terms of this Agreement are deferred compensation subject to tax under the Deferred Compensation Tax Rules, (i) the Participant shall not be considered to have terminated employment for purposes hereof until the Participant would be considered to have incurred a “separation from service” within the meaning of the Deferred Compensation Tax Rules and (ii) the Company shall, in lieu of providing such benefit when otherwise due under this Agreement, instead provide such benefit on the first day on which such provision would not result in the Participant incurring any tax liability under the Deferred Compensation Tax Rules; which day, if the Participant is a “specified employee” (within the meaning of the Deferred Compensation Tax Rules), shall, in the event the benefit to be provided is due to the Participant’s “separation from service” (within the meaning of the Deferred Compensation Tax Rules) with the Company and its subsidiaries, be the first day following the six-month period beginning on the date of such separation from service. Each amount to be paid or benefit to be provided under this Agreement shall be construed as a separately identified payment for purposes of the Deferred Compensation Tax Rules, and any payments described in this Agreement that are due within the “short term deferral period” as defined in the Deferred Compensation Tax Rules shall not be treated as deferred compensation unless applicable law requires otherwise.

2.4. Data Protection Waiver. Participant understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator may process personal data and/or sensitive personal information concerning the Participant. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate personal and financial data about Participant, and information about Participant’s participation in the Plan and transactions under the Plan from time to time. Participant hereby gives his or her explicit consent to the Company and the Administrator to process any such personal data and/or sensitive personal information. Participant also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country in which Participant works, is employed or provides services and to the United States. The legal persons granted access to such Participant personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Participant has been informed of his or her right of access and correction to Participant’s personal data by contacting the Company. Participant also understands that the transfer of the information outlined herein is

-7-

important to the administration of the Award and the Plan and failure to consent to the transmission of such information may limit or prohibit Participant’s participation under the Plan and/or void the Award.

2.5. Savings Clause. In the event that Participant is employed or provides services in a jurisdiction where the performance of any term or provision of this Agreement by the Company: (i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental agency, board, bureau, body, department or authority, or (ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company or an Affiliate, then any such term or provision shall be null, void and of no effect.

2.6. Amendment. The Company may amend the provisions of this Agreement at any time; provided that an amendment that would materially adversely affect the Participant’s rights under this Agreement shall be subject to the written consent of the Participant. No course of conduct or failure or delay in enforcing the provisions of this Agreement shall affect the validity, binding effect or enforceability of this Agreement.

2.7. Acts of Misconduct. If Participant has allegedly committed an act of serious misconduct, including, but not limited to, embezzlement, fraud, dishonesty, unauthorized disclosure of trade secrets or confidential information, breach of fiduciary duty or nonpayment of an obligation owed to the Company, an executive officer of the Company may suspend Participant’s rights under the Award, including the vesting of the Award and the settlement of vested PRSUs, subject to the Administrator’s final decision regarding termination of the Award. No rights under the Award may be exercised during such suspension or after such termination.

2.8. Disputes. The Administrator or its delegate shall finally and conclusively determine any disagreement concerning the Award.

2.9. Plan. The terms and provisions of the Plan are incorporated herein by reference, a copy of which has been provided or made available to the Participant. In the event of a conflict or inconsistency between the terms and provisions of the Plan and the provisions of this Agreement, the Plan shall govern and control.

2.10. Successors. The terms of this Agreement shall be binding upon and inure to the benefit of the Company, its successors and assigns, and the Participant and the beneficiaries, executors, administrators, heirs and successors of the Participant.

2.11. Entire Agreement. This Agreement and the Plan contain the entire agreement and understanding of the parties hereto with respect to the subject matter contained herein and supersede all prior communications, representations and negotiations in respect thereof; provided, however, that to the extent that the Participant has entered into an employment agreement, severance agreement or change in control termination agreement with the Company that provides for vesting terms that are more favorable than the vesting terms set forth in this Agreement or the Plan, such more favorable vesting terms shall apply.

2.12 Claw Back Policy. This grant is subject to the terms of the Company’s Claw Back Policy, as it may be amended, modified, superseded or replaced from time to time.

-8-

Exhibit 10.2

ENTEGRIS, INC.

RSU Award Agreement

(2020 Stock Plan)

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company may periodically make equity incentive awards consisting of restricted stock units with respect to the Company’s Common Stock, $0.01 par value (“Stock”), to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2020 Stock Plan (as amended from time to time, the “Plan”). Any key employee, non-employee director, consultant or advisor (a “Participant”) who receives a restricted stock unit award (the “Award”) is notified in writing or via email alert. The Award is credited to the Participant’s account and reflected under the Stock Plans section on Fidelity’s NetBenefits website. To Accept the award; click on the “Begin your grant acceptance now” link located in the New Grant Alert notification or scroll down to and expand the Stock Plans section; then click on “Begin Acceptance” and follow the prompts. By accepting the Award, Participant: (i) acknowledges that Participant has received a copy of the Plan, of the related prospectus providing information concerning awards under the Plan and of the Company’s most recent Annual Report on Form 10-K; and (ii) accepts the Award and agrees with the Company that the Award is subject to the terms of the Plan and to the following terms and conditions:

Article I – RSU Award

1.1. Award Date. This Award Agreement (this “Agreement”) shall take effect as of the date specified in the Stock Plans section as of the Award Date provided to you online through Fidelity’s NetBenefits website (the “Award Date”).

1.2. Restricted Stock Units Subject to Award. The Award consists of that number of restricted stock units (the “RSU”) with respect to the Stock that has been approved for the Award to Participant by the Administrator. Each RSU is equivalent to one share of the Stock. The Participant’s rights to the RSU are subject to the restrictions described in this Agreement and in the Plan (which is incorporated herein by reference with the same effect as if set forth herein in full) in addition to such other restrictions, if any, as may be imposed by law.

1.3. Nontransferability of RSUs. The RSU acquired by the Participant pursuant to this Agreement shall not be sold, transferred, pledged, assigned or otherwise encumbered or disposed of except as provided below and in the Plan.

1.4. Forfeiture Risk. Except as otherwise provided in this Agreement, if the Participant ceases to be employed or retained by the Company or an Affiliate for any reason, any then-outstanding and unvested RSU acquired by the Participant hereunder shall be automatically and immediately forfeited. The Participant hereby appoints the Company as the attorney-in-fact of the Participant to take such actions as may be necessary or appropriate to effectuate the cancellation of a forfeited RSU.

1.5. Vesting of RSUs. The RSU granted hereunder shall vest in accordance with the provisions of this Article I, Section 1.6 and applicable provisions of the Plan, as follows (each, a “Vesting Date”):

[ ]

Notwithstanding the foregoing, no RSU shall vest on any Vesting Date specified above unless: (A) the Participant is then, and since the Award Date has continuously been, employed or retained by the Company or an Affiliate (subject to Sections 1.6 and 2.2); and (B) the Participant has fulfilled the obligations specified in Section 1.10 below. Upon

vesting, each RSU shall entitle Participant to receive one share of Stock (subject to adjustment under the Plan).

1.6. Retirement; Death.

(a) Notwithstanding Section 1.5, if the Participant’s employment, tenure or service, as applicable, is terminated prior to the final Vesting Date as a result of the Participant’s Retirement, then, subject to the Participant’s compliance with the Retirement Vesting Criteria, each of the RSUs granted hereunder that are outstanding as immediately prior to the Participant’s Retirement shall remain outstanding and eligible to vest for purposes of this Award and be delivered on the applicable Vesting Dates in accordance with Section 1.7 below.

(b) Notwithstanding Sections 1.5, 1.6(a) and 2.2, if the Participant’s employment, tenure or service, as applicable, terminates due to the death of the Participant, each then-outstanding RSU shall vest effective as of the death of the Participant and shall be settled no later than thirty (30) days thereafter.

(i) “Retirement” means the Participant’s employment, tenure or service, as applicable, with the Company and its Affiliates is terminated after (x) the Participant has provided at least five (5) years of consecutive years of service with the Company or an Affiliate thereof, (y) the Participant is at least fifty-five (55) years old as of the date of Retirement, and (z) the Participant’s age plus complete years of service with the Company or an Affiliate thereof as of Participant’s date of termination equals at least seventy (70).

(ii) “Retirement Vesting Criteria” means that the Participant (x) provides six (6) months’ advance written notice to the Company of the Participant’s Retirement (which notice may be waived at the discretion of the Administrator and shall be waived on and following a Change in Control), (y) executes a release of claims in favor of the Company in a form satisfactory to the Company and such release becomes effective within sixty (60) days following the date of termination due to Retirement (which release may be waived at the direction of the Administrator), and (z) continues to comply with and does not violate the terms of the Restrictive Covenant Agreement attached hereto as Exhibit A through the final Vesting Date. Determination as to whether the Participant complies with and has not violated the terms of the Restrictive Covenant Agreement will be made in good faith by the Company.

1.7. Settlement of RSUs. Vested RSUs shall be settled in shares of Stock (or, in the discretion of the Administrator, in cash equal to the Fair Market Value thereof). Any shares of Stock (or cash equivalent, if applicable) issuable in respect of RSUs that have vested in accordance with the terms of this Agreement shall be delivered to the Participant: (i) for RSUs that are exempt from Section 409A of the Code, as soon as practicable following vesting, and in no event later than 30 days thereafter and (ii) for RSUs that constitute deferred compensation under Section 409A of the Code, upon the date such vesting occurs, except as determined by the Company, but in no event later than the end of the calendar year in which such vesting occurs (or, if such calendar year ends within two and half months following the date such vesting occurs, no later than the fifteenth day of the third month following the date such vesting occurs). No fractional shares of Stock shall be issued pursuant to this Agreement.

1.8. Dividend Equivalent Rights. The Participant shall not be entitled: (i) to receive any dividends or other distributions paid with respect to the Stock to which the RSU relates, or (ii) to vote any Stock with respect to which the RSU relates, unless and until, and only to the

-2-

extent, the RSU becomes vested and the Participant becomes a stockholder of record with respect to such shares of Stock. Notwithstanding the foregoing, as of each date on which the Company pays an ordinary cash dividend to record owners of shares of Stock, the Participant’s account shall, as of each such dividend date, be credited with a cash amount (without interest) equal to the product of the total number of shares subject to the RSU immediately prior to such dividend date multiplied by the dollar amount of the cash dividend paid per share of Stock by the Company on such dividend date (such amount, the “Dividend Equivalent Amount”). The Dividend Equivalent Amount shall be subject to the same vesting conditions and settlement terms as the RSU shares to which they relate.

1.9. Sale of Vested Shares. The Participant understands that Participant will be free to sell any Stock with respect to which the RSU relates once the RSU has vested and settled, subject to (i) satisfaction of any applicable tax withholding requirements with respect to the vesting of such RSU; (ii) the completion of any administrative steps (for example, but without limitation, the transfer of certificates) that the Company may reasonably impose; and (iii) applicable requirements of federal and state securities laws.

1.10. Certain Tax Matters. The Participant expressly acknowledges that the award or vesting of the RSU acquired hereunder may give rise to income subject to withholding. The Participant expressly acknowledges and agrees that Participant’s rights hereunder are subject to Participant promptly paying to the Company all taxes required to be withheld in connection with such award, vesting, settlement and/or payment. Unless the Administrator determines otherwise, such payment of Participant’s withholding tax obligations shall be made through net share settlement procedures whereby that number of the vesting shares needed to cover the withholding tax obligation (calculated using the Fair Market Value of the Company’s stock on the date of vesting) shall be cancelled to fund the Company’s payment of the withholding tax obligation and the net shares remaining after such cancellation shall be credited to Participant’s account.

Article II – GENERAL PROVISIONS

2.1. Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan.

2.2. Change in Control.

(a) Assumption or Substitution.

(i) If the Change in Control is one in which there is an acquiring or surviving entity, the Administrator may provide for the assumption or continuation of some or all outstanding Awards or for the grant of new awards in substitution therefor by the acquiror or survivor or an affiliate of the acquiror or survivor.

(ii) In the event of a Change in Control in which the successor company assumes or substitutes for the RSU (or in which the Company is the ultimate parent corporation and continues the Award), if Participant’s employment with such successor company (or the Company) or an affiliate thereof is involuntarily terminated without Cause by the successor employer or Participant resigns for Good Reason, in either case within 24 months following such Change in Control: the restrictions, limitations and other conditions applicable to the RSU shall lapse and the RSU shall become free of all restrictions, limitations and conditions and become fully vested and shall be settled in accordance with Section 1.7. Notwithstanding the foregoing, to the extent that such RSUs are held by a Participant who is or may become eligible for Retirement prior to the final Vesting Date, such Participant’s employment is terminated in accordance with this Section 2.2(a)(ii) and

-3-

(A) such Change in Control constitutes a change in control event within the meaning of Section 409A of the Code, then such RSUs shall be settled as soon as practicable following such termination, and in no event later than 30 days thereafter or (B) such Change in Control does not constitute a change in control event within the meaning of Section 409A of the Code, then to the extent required to avoid accelerated taxation and/or tax penalties under Section 409A of the Code, such RSUs shall continue to be settled on the applicable Vesting Dates or at such earlier time that does not result in such accelerated taxation and/or tax penalties.

(b) Awards Not Assumed or Substituted. In the event of a Change in Control in which the successor company does not assume or substitute for the RSU (or in which the Company is the ultimate parent corporation and does not continue the Award): the restrictions, limitations and other conditions applicable to the RSU shall lapse and the RSU shall become free of all restrictions, limitations and conditions and become fully vested and shall be settled in accordance with Section 1.7. Notwithstanding the foregoing, to the extent that such RSUs are held by a Participant who has Retired in accordance with Section 1.6 above or who is or may become eligible for Retirement prior to the final Vesting Date and (A) such Change in Control constitutes a change in control event within the meaning of Section 409A of the Code, then such RSUs shall be settled as soon as practicable following such Change in Control, and in no event later than 30 days thereafter or (B) such Change in Control does not constitute a change in control event within the meaning of Section 409A of the Code, then to the extent required to avoid accelerated taxation and/or tax penalties under Section 409A of the Code, such RSUs shall continue to be settled on the applicable Vesting Dates or at such earlier time that does not result in such accelerated taxation and/or tax penalties.

(c) Good Reason Definition. For purposes of this Section 2.2, “Good Reason” means (i) “Good Reason” as defined in any individual agreement to which Participant and the Company or an Affiliate are parties, or (ii) if there is no such agreement or if it does not define Good Reason, without the Participant’s prior written consent: (A) a reduction in the Participant’s base salary; (B) a relocation of the Participant’s primary work location to a distance of more than 50 miles from its location as of immediately prior to such change; or (C) a material breach by the Company or an Affiliate of any employment agreement with the Participant. In order to invoke a termination of employment for Good Reason, a Participant shall provide written notice to the Company of the existence of one or more of the conditions described in clauses (A) through (C) within 90 days following the Participant’s knowledge of the initial existence of such condition or conditions, and the Company shall have 30 days following receipt of such written notice (the “Cure Period”) during which it may remedy the condition(s). In the event that the Company fails to remedy the condition(s) constituting Good Reason during the Cure Period, the Participant must terminate employment, if at all, within 90 days following the Cure Period in order for such termination to constitute a termination of employment for Good Reason.

(d) Cause Definition. “Cause” means (i) “Cause” as defined in any individual agreement to which the Participant and the Company or an Affiliate are parties or (ii) if there is no such agreement or if it does not define Cause, the Company’s termination of the Participant’s employment with the Company or any Affiliate following the occurrence of any one or more of the following: (A) the Participant’s conviction of, or plea of guilty or nolo contendere to, a felony; (B) the Participant’s willful and continual failure to substantially perform the Participant’s duties after written notification by the Company; (C) the Participant’s willful engagement in conduct that is materially injurious to the Company or an Affiliate monetarily or otherwise; (D) the Participant’s commission of an act of gross misconduct in connection with the performance of the Participant’s duties; or (E) the

-4-

Participant’s material breach of any employment, confidentiality, or other similar agreement between the Company or an Affiliates and the Participant.

2.3. Equitable Adjustments. The Award is subject to adjustment pursuant to Section 15.1 of the Plan.

2.4. No Understandings as to Employment etc. The Participant further expressly acknowledges that nothing in the Plan or any modification thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to employ or retain the Participant for any period or with respect to the terms of the Participant’s employment or to give rise to any right to remain in the service of the Company or any Affiliate, and the Participant shall remain subject to discharge to the same extent as if the Plan had never been adopted or the Award had never been made.

2.5. Data Protection Waiver. Participant understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator may process personal data and/or sensitive personal information concerning the Participant. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate personal and financial data about Participant, and information about Participant’s participation in the Plan and transactions under the Plan from time to time. Participant hereby gives his or her explicit consent to the Company and the Administrator to process any such personal data and/or sensitive personal information. Participant also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country in which Participant works, is employed or provides services and to the United States. The legal persons granted access to such Participant personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Participant has been informed of his or her right of access and correction to Participant’s personal data by contacting the Company. Participant also understands that the transfer of the information outlined herein is important to the administration of the Award and the Plan and failure to consent to the transmission of such information may limit or prohibit Participant’s participation under the Plan and/or void the Award.

2.6. Savings Clause. In the event that Participant is employed or provides services in a jurisdiction where the performance of any term or provision of this Agreement by the Company: (i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental agency, board, bureau, body, department or authority, or (ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company or an Affiliate, then any such term or provision shall be null, void and of no effect.

2.7. Amendment. The Company may amend the provisions of this Agreement at any time; provided that an amendment that would materially adversely affect the Participant’s rights under this Agreement shall be subject to the written consent of the Participant. No course of conduct or failure or delay in enforcing the provisions of this Agreement shall affect the validity, binding effect or enforceability of this Agreement.

2.8. Acts of Misconduct. If Participant has allegedly committed an act of serious misconduct, including, but not limited to, embezzlement, fraud, dishonesty, unauthorized disclosure of trade secrets or confidential information, breach of fiduciary duty or nonpayment of an obligation owed to the Company, an executive officer of the Company may suspend Participant’s rights under the Award, including the vesting of the Award and the settlement

-5-

of vested RSUs, subject to the Administrator’s final decision regarding termination of the award. No rights under the Award may be exercised during such suspension or after such termination.

2.9. Disputes. The Administrator or its delegate shall finally and conclusively determine any disagreement concerning the Award.

2.10. Plan. The terms and provisions of the Plan are incorporated herein by reference, a copy of which has been provided or made available to the Participant. In the event of a conflict or inconsistency between the terms and provisions of the Plan and the provisions of this Agreement, the Plan shall govern and control.

2.11. Compliance with Section 409A of the Code. Notwithstanding any other provision of the Plan or this Agreement to the contrary, the Plan and this Agreement shall be construed or deemed to be amended as necessary to remain exempt from or comply with the requirements of Section 409A of the Code and to avoid the imposition of any additional or accelerated taxes or other penalties under Section 409A of the Code. The Committee, in its sole discretion, shall determine the requirements of Section 409A of the Code applicable to the Plan and this Agreement and shall interpret the terms of each consistently therewith. Under no circumstances, however, shall the Company, an Affiliate, or a subsidiary have any liability under the Plan or this Agreement for any taxes, penalties, or interest due on amounts paid or payable pursuant to the Plan and/or this Agreement, including any taxes, penalties, or interest imposed under Section 409A of the Code. In the event that it is determined by the Company that, as a result of the deferred compensation tax rules under Section 409A of the Code (and any related regulations or other pronouncements thereunder) (the “Deferred Compensation Tax Rules”), benefits that the Participant is entitled to receive under the terms of this Agreement are deferred compensation subject to tax under the Deferred Compensation Tax Rules, (i) the Participant shall not be considered to have terminated employment for purposes hereof until the Participant would be considered to have incurred a “separation from service” within the meaning of the Deferred Compensation Tax Rules and (ii) the Company shall, in lieu of providing such benefit when otherwise due under this Agreement, instead provide such benefit on the first day on which such provision would not result in the Participant incurring any tax liability under the Deferred Compensation Tax Rules; which day, if the Participant is a “specified employee” (within the meaning of the Deferred Compensation Tax Rules), shall, in the event the benefit to be provided is due to the Participant’s “separation from service” (within the meaning of the Deferred Compensation Tax Rules) with the Company and its subsidiaries, be the first day following the six-month period beginning on the date of such separation from service. Each amount to be paid or benefit to be provided under this Agreement shall be construed as a separately identified payment for purposes of the Deferred Compensation Tax Rules, and any payments described in this Agreement that are due within the “short term deferral period” as defined in the Deferred Compensation Tax Rules shall not be treated as deferred compensation unless applicable law requires otherwise.

2.12. Successors. The terms of this Agreement shall be binding upon and inure to the benefit of the Company, its successors and assigns, and the Participant and the beneficiaries, executors, administrators, heirs and successors of the Participant.

2.13. Entire Agreement. This Agreement and the Plan contain the entire agreement and understanding of the parties hereto with respect to the subject matter contained herein and supersede all prior communications, representations and negotiations in respect thereof; provided, however, that to the extent that the Participant has entered into an employment agreement, severance agreement or change in control termination agreement with the

-6-

Company that provides for vesting terms that are more favorable than the vesting terms set forth in this Agreement or the Plan, such more favorable vesting terms shall apply.

2.14 Claw Back Policy. This grant is subject to the terms of the Company’s Claw Back Policy, as it may be amended, modified, superseded or replaced from time to time.

-7-

Exhibit 10.3

ENTEGRIS, INC.

Stock Option Award Agreement

(2020 Stock Plan)

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company may periodically make equity incentive awards consisting of stock options with respect to the Company’s Common Stock, $0.01 par value (“Stock”), to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2020 Stock Plan (as amended from time to time, the “Plan”). Any key employee, non-employee director, consultant or advisor (a “Participant”) who receives a stock option award (the “Award”) is notified in writing or via email and the Award is credited to the Participant’s account as reflected on the Overview tab under the Stock Options Plan section on Fidelity’s NetBenefits website. By clicking on the “Accept” button for the Award in the Stock Options Plan section on the Overview tab or by otherwise receiving the benefits of the Award, Participant: (i) acknowledges that Participant has received a copy of the Plan, of the related prospectus providing information concerning awards under the Plan and of the Company’s most recent Annual Report on Form 10-K; and (ii) accepts the Award and agrees with the Company that the Award is subject to the terms of the Plan and to the following terms and conditions:

Article I –Stock Option Grant

1.1. Option Grant. Effective as of the grant date specified in the Stock Options Plan section provided to you online (the “Grant Date”), the Company hereby grants Participant a non-statutory stock option to purchase that number of shares of Stock that has been approved for the Award to the Participant by the Administrator (“Option”). The shares of Stock awarded are specified in the Stock Options Plan section in the Granted column online through Fidelity’s NetBenefits website. The Option is not intended to be an incentive stock option under Section 422 of the Internal Revenue Code of 1986, as amended, and will be interpreted accordingly.

1.2. Option Exercise Price. The exercise (grant) price of the Option shall be 100% of the closing price of the Stock on the NASDAQ stock market on the Grant Date. The exercise price is provided to Participant online through Fidelity’s NetBenefits website.

1.3. Option Vesting Schedule. This Option shall vest and become exercisable, except as hereinafter provided, in whole or in part, as follows:

[ ]

Notwithstanding the foregoing, no Option shall vest and become exercisable on any such vesting date specified above unless: (A) the Participant is then, and since the Grant Date has continuously been, employed or retained by the Company or an Affiliate (subject to Sections 1.8, 2.2 and 2.3); and (B) the Participant has fulfilled the obligations specified in Section 1.5 and 1.10 below.

1.4. Expiration of Option. To the extent that the Option shall not have been exercised, this Option shall expire at 5:00 p.m. local time at the Company’s headquarters on ________, _____ and no part of the Option may be exercised thereafter. If an expiration, termination or forfeiture date described herein falls on a weekday, Participant must exercise the Option before 5:00 p.m. local time at the Company’s headquarters on that date. If an expiration, termination or forfeiture date described herein falls on a weekend or any other day on which the NASDAQ stock market is not open, Participant must exercise the Option before 5:00 p.m. local time at the Company’s headquarters on the last NASDAQ business day prior to the expiration, termination or forfeiture date.

1.5. Exercise of Option. When and as vested, this Option may be exercised up to the number of shares of Stock specified in Section 1.1 above only by serving written notice on the designated stock plan administrator. Payment of the Option exercise price specified in Section 1.2 above may be made (i) in cash or by certified check, (ii) through net share settlement procedures whereby that number of the Option shares being exercised that are needed to cover the payment of the Option exercise price (calculated using the Fair Market Value of the Company’s stock on the date of exercise) shall be cancelled to fund the payment of the Option exercise price, (iii) by broker assisted sale of shares to satisfy the Option exercise price; or (iv) by any other method specified in the Plan or as permitted by the Administrator. No fractional shares of Stock shall be issued pursuant to this Agreement. Participant will have the rights of a stockholder only after the shares of Stock have been issued to the Participant in accordance with this Agreement.

1.6. No Assignment of Option. This Option may not be assigned or transferred except as may otherwise be provided by the terms of this Agreement.

1.7. Equitable Adjustments. The Award is subject to adjustment pursuant to Section 15.1 of the Plan.

1.8. Termination of Employment or Service with the Company. Except as provided in this Section 1.8 and in Sections 2.2 and 2.3 below, each then unvested Option will terminate and be forfeited upon any termination of the Participant’s employment or services with the Company and its Affiliates. All exercisable Options granted herein must be exercised within ninety (90) days following the date on which the employment or services of Participant with the Company or an Affiliate terminates (i.e., last day worked, excluding any severance period), or, if earlier, prior to the original expiration date of the Option (“Termination Date”), or be forfeited, except as provided in Sections 2.2 and 2.3 below and as follows:

(a) In the event of Participant’s death during employment/services, each Option granted hereunder will be exercisable, whether or not vested on or prior to the date of Participant’s death, until the earlier of: (1) the first anniversary of Participant’s date of death; or (2) the original expiration date of the Option.

(b) In the event of the termination of employment/services of Participant due to Disability, Participant may exercise each Option that is vested as of the date of such termination at any time prior to the earlier of the original expiration date of the Option and 365 days following the later of the date of Participant’s separation from service due to Participant’s Disability or the date of determination of Participant’s Disability. The Option shall terminate on the earlier of the original expiration date of the Option and 365 days following the later of the date of Participant’s separation from service due to Participant’s Disability or the date of determination of Participant’s Disability, to the extent that it is unexercised. For these purposes “Disability” shall be determined in accordance with the standards and procedures of the then-current Long-Term Disability policies maintained by the Company, which is generally a physical condition arising from an illness or injury which renders an individual incapable of performing work in any occupation, as determined by the Company.

(c) If Participant’s employment/services is terminated for “Cause”, all granted but unexercised stock Options, whether vested or unvested, shall be forfeited on Participant’s Termination Date.

-2-

1.9. Suspension of Option Exercises. For administrative or other reasons, the Company may, from time to time, suspend the ability of Participants to exercise options for limited periods of time. Notwithstanding the above, the Company shall not be obligated to deliver any shares of Stock during any period when the Company determines that the exercisability of the Option or the delivery of shares hereunder would violate any federal, state or other applicable laws.

1.10. Withholding of Income Taxes. The Company shall have no obligation to issue shares upon exercise of this Option unless the Participant has satisfied any tax withholding obligation with respect to such exercise. Payment of Participant’s withholding tax obligations may be made through any method specified in the Plan or as permitted by the Administrator.

Article II – GENERAL PROVISIONS

2.1. Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan.

2.2. Change in Control.

(a) Assumption or Substitution.

(ii) In the event of a Change in Control in which the successor company assumes or substitutes for the Option (or in which the Company is the ultimate parent corporation and continues the Award), if Participant’s employment with such successor company (or the Company) or an affiliate thereof is involuntarily terminated without Cause by the successor employer or Participant resigns for Good Reason, in either case within 24 months following such Change in Control: the Option will immediately vest, become fully exercisable, and may thereafter be exercised for 24 months (but in no event after the original expiration date specified in Section 1.4 above). For the purposes of this Section 2.2, the Option shall be considered assumed or substituted for if following the Change in Control the Award confers the right to purchase or receive, for each share of Stock subject to the Option immediately prior to the Change in Control, the consideration (whether stock, cash or other securities or property) received in the transaction constituting a Change in Control by holders of Stock for each Share held on the effective date of such transaction (and if holders were offered a choice of consideration, the type of consideration chosen by the holders of a majority of the outstanding Stock); provided, however, that if such consideration received in the transaction constituting a Change in Control is not solely common stock of the successor company, the Administrator may, with the consent of the successor company, provide that the consideration to be received upon the exercise or vesting of the Option, for each Share subject thereto, will be solely common stock of the successor company substantially equal in fair market value to the per Share consideration received by holders of Stock in the transaction constituting a Change in Control. The determination of such substantial equality of value of consideration shall be made by the Administrator in its sole discretion and its determination shall be conclusive and binding.

(b) Awards Not Assumed or Substituted. In the event of a Change in Control in which the successor company does not assume or substitute for the Option (or in which

-3-

the Company is the ultimate parent corporation and does not continue the Award): the Option shall immediately vest and become fully exercisable.

2.3. Retirement. Notwithstanding any provision to the contrary in Sections 1.3 and 2.2 above, if Participant is an employee of the Company or an Affiliate and ceases to be an employee due to Retirement then, to the extent that Participant (x) provides six (6) months’ advance written notice to the Company of such Retirement (which notice may be waived at the discretion of the Administrator and shall be waived on and following a Change in Control), (y) executes a release of claims in favor of the Company in a form satisfactory to the Company and such release becomes effective within sixty (60) days following the date of termination due to Retirement (which release may be waived at the discretion of the Administrator), and (z) continues to comply with and does not violate the terms of the Restrictive Covenant Agreement attached hereto as Exhibit A through the final vesting date provided in Section 1.3, the Option will continue to vest in accordance with the schedule specified in Section 1.3 above as if Participant continued in the employment of or service with the Company or an Affiliate and such Options will be exercisable until the earlier to occur of (A) four (4) years following the date of Retirement and (B) the original expiration date specified in Section 1.4 above. Determination as to whether Participant complies with and has not violated the terms of the Restrictive Covenant Agreement will be made in good faith by the Company.

For purposes of this Award, “Retirement” means Participant’s employment, tenure or service, as applicable, with the Company and its Affiliates is terminated after (x)

-4-

Participant has provided at least five (5) years of consecutive years of service with the Company or an Affiliate thereof, (y) Participant is at least fifty-five (55) years old as of the date of Retirement, and (z) Participant’s age plus complete years of service with the Company or an Affiliate thereof as of Participant’s date of termination equals at least seventy (70).

2.4. No Understandings as to Employment, etc. The Participant further expressly acknowledges that nothing in the Plan or any modification thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to employ or retain the Participant for any period or with respect to the terms of the Participant’s employment or to give rise to any right to remain in the service of the Company or any Affiliate, and the Participant shall remain subject to discharge to the same extent as if the Plan had never been adopted or the Award had never been made.

2.5. Acts of Misconduct. If Participant has allegedly committed an act of serious misconduct, including, but not limited to, embezzlement, fraud, dishonesty, unauthorized disclosure of trade secrets or confidential information, breach of fiduciary duty or nonpayment of an obligation owed to the Company, an Executive Officer of the Company may suspend Participant’s rights under the Award, including the vesting of Options and the exercise of vested Options, subject to the Administrator’s final decision regarding termination of the award. No rights under the Award may be exercised during such suspension or after such termination.

2.6. Data Protection Waiver. Participant understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator may process personal data and/or sensitive personal information concerning the Participant. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate personal and financial data about Participant, and information about Participant’s participation in the Plan and transactions under the Plan from time to time. Participant hereby gives his or her explicit consent to the Company and the Administrator to process any such personal data and/or sensitive personal information. Participant also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country in which Participant works, is employed or provides services and to the United States. The legal persons granted access to such Participant personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Participant has been informed of his or her right of access and correction to Participant’s personal data by contacting the Company. Participant also understands that the transfer of the information outlined herein is important to the administration of the Award and the Plan and failure to consent to the transmission of such information may limit or prohibit Participant’s participation under the Plan and/or void the Award.

2.7. Disputes. The Administrator or its delegate shall finally and conclusively determine any disagreement concerning the Award.

2.8. Savings Clause. In the event that Participant is employed or provides services in a jurisdiction where the performance of any term or provision of this Agreement by the Company: (i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental

-5-

agency, board, bureau, body, department or authority, or (ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company or an Affiliate, then any such term or provision shall be null, void and of no effect.

2.9. Amendment. The Company may amend the provisions of this Agreement at any time; provided that an amendment that would materially adversely affect the Participant’s rights under this Agreement shall be subject to the written consent of the Participant. No course of conduct or failure or delay in enforcing the provisions of this Agreement shall affect the validity, binding effect or enforceability of this Agreement.

2.11. Successors. The terms of this Agreement shall be binding upon and inure to the benefit of the Company, its successors and assigns, and the Participant and the beneficiaries, executors, administrators, heirs and successors of the Participant.

2.12. Entire Agreement. This Agreement and the Plan contain the entire agreement and understanding of the parties hereto with respect to the subject matter contained herein and supersede all prior communications, representations and negotiations in respect thereof; provided, however, that to the extent that the Participant has entered into an employment agreement, severance agreement or change in control termination agreement with the Company that provides for vesting and/or exercise terms that are more favorable than the vesting and/or exercise terms set forth in this Agreement or the Plan, such more favorable vesting and/or exercise terms shall apply.

2.13 Claw Back Policy. This grant is subject to the terms of the Company’s Claw Back Policy, as it may be amended, modified, superseded or replaced from time to time.

-6-

Exhibit 21

Subsidiaries of Entegris, Inc.


Name of Subsidiary						Jurisdiction
ATMI International Trading Co. Ltd.						China
CMC Materials Asia Pte. Ltd.						Singapore
CMC Materials B.V.						The Netherlands
CMC Materials EC, Inc.						Texas
CMC Materials EC Pte. Ltd.						Singapore
CMC Materials France SAS						France
CMC Materials Global Corp.						Delaware
CMC Materials Inc.						Delaware
CMC Materials Italia Srl						Italy
CMC Materials Japan KK						Japan
CMC Materials KK						Japan
CMC Materials KMG Corporation						Texas
CMC Materials Korea, LLC						South Korea
CMC Materials Luxembourg Holdings S.a.r.l.						Luxembourg
CMC Materials SDN BHD						Malaysia
CMC Materials Sealweld Canada, Inc.						Canada
CMC Materials Shanghai Co., Ltd.						China
CMC Materials Singapore Pte. Ltd.						Singapore
CMC Materials Taiwan Co., Ltd.						Taiwan
CMC Materials UK Limited						United Kingdom
CMC Materials UPC Limited						United Kingdom
CMC Materials UPS SAS						France
Entegris Canada Limited						Canada
Digital Specialty Chemicals UK Limited						United Kingdom
Entegris Asia LLC						Delaware
Entegris Asia-U.S. LLC						Delaware
Entegris Asia Pte. Ltd.						Singapore
Entegris Ecosys LLC						Delaware
Entegris GmbH						Germany
Entegris GP, Inc.						Delaware
Entegris International Holdings B.V.						The Netherlands
Entegris International Holdings II B.V.						The Netherlands
Entegris International Holdings III B.V.						The Netherlands
Entegris International Holdings IV LLC						Delaware
Entegris International Holdings V LLC						Delaware
Entegris International Holdings VI LLC						Delaware
Entegris International Holdings VII LLC						The Netherlands
Entegris International Holdings VIII LLC						The Netherlands
Entegris International Holdings, Inc.						Delaware
Entegris Ireland Unlimited Company						Ireland
Entegris Israel Ltd.						Israel
Entegris Japan Co. Ltd.						Japan
Entegris Korea Co., Ltd.						South Korea
Entegris Korea II Ltd.						South Korea


Entegris Malaysia Sdn. Bhd.						Malaysia
Entegris (Shanghai) Microelectronics Trading Company Ltd.						China
Entegris Pacific Ltd.						Delaware
Entegris Pacific Pte., Ltd						Singapore
Entegris Professional Solutions, Inc.						Delaware
Entegris Sarl						Luxembourg
Entegris SAS						France
Entegris Singapore Pte. Ltd.						Singapore
Entegris Specialty Materials, LLC						Delaware
Entegris Taiwan Enterprises Partnership						Taiwan
Entegris Taiwan Holdings, Inc.						Delaware
Entegris Taiwan Technologies Co. Ltd.						Taiwan
Flowchem LLC						Delaware
FLX Inc.						Texas
Hanguk Entegris Co., Ltd						South Korea
Hangzhou Anow Filtration and Materials Co., Ltd.						China
Hangzhou AiNuo Microfiltration Co., Ltd.						China
International Development Test Co., Ltd.						Taiwan
International Test Solutions Korea Limited						South Korea
International Test Solutions, LLC						Delaware
KMG-Bernuth, Inc.						Delaware
KMG-Flowchem, Inc.						Delaware
NexPlanar Corporation						Delaware
Nihon Entegris G.K.						Japan
Poco Graphite, Inc.						Delaware
QED Technologies International, Inc.						Delaware
Sealweld (USA), Inc.						Nevada
Sealweld Corporation (2003), Inc.						Nevada
Suzhou Meice Test Technology Co., Ltd.						China
KMG Val-Tex, LLC						Texas

EXHIBIT 23

Consent of Independent Registered Public Accounting Firm

We consent to the incorporation by reference in the registration statements (Nos. 333-167178, 333-203789, 333-203790, 333-211444, 333-237905, 333-53382, and 333-266040 on Form S-8, No. 333-262172 on Form S-4, and No. 333-266041 on Form S-3ASR) of our reports dated February 21, 2023, with respect to the consolidated financial statements of Entegris, Inc. and subsidiaries and the effectiveness of internal control over financial reporting.

/s/ KPMG LLP

Minneapolis, Minnesota

February 22, 2023

Exhibit 24

POWER OF ATTORNEY

KNOW ALL PERSONS BY THESE PRESENTS, that the undersigned Directors and Officers of Entegris, Inc. (the “Corporation”), do hereby constitute and appoint Bertrand Loy and Gregory B. Graves and each of them individually, their true and lawful attorneys and agents to execute on behalf of the Corporation the Form 10-K Annual Report of the Corporation for the fiscal year ended December 31, 2022, together with all such amendments thereto on Form 10-K/A as well as additional instruments related thereto which such attorneys and agents may deem to be necessary and desirable to enable the Corporation to comply with the requirements of the Securities Exchange Act of 1934, as amended, and any regulations, orders, or other requirements of the United States Securities and Exchange Commission thereunder in connection with the preparation and filing of said documents, including specifically, but without limitation of the foregoing, power and authority to sign the names of each of such Directors and Officers on his behalf, as such Director or Officer, as indicated below to the said Form 10-K Annual Report or documents filed or to be filed as a part of or in connection with such Form 10-K Annual Report; and each of the undersigned hereby ratifies and confirms all that said attorneys and agents shall do or cause to be done by virtue thereof.


SIGNATURE	TITLE	DATE
/s/ Bertrand Loy	President, Chief Executive Officer	February 22, 2023
Bertrand Loy	and Director
/s/ Paul L. H. Olson	Chairman of the Board, Director	February 22, 2023
Paul L. H. Olson
/s/ Michael A. Bradley	Director	February 22, 2023
Michael A. Bradley
/s/ Rodney Clark	Director	February 22, 2023
Rodney Clark
/s/ James F. Gentilcore	Director	February 22, 2023
James F. Gentilcore
/s/ Yvette Kanouff	Director	February 22, 2023
Yvette Kanouff
/s/ James P. Lederer	Director	February 22, 2023
James P. Lederer
/s/ Azita Saleki-Gerhardt	Director	February 22, 2023
Azita Saleki-Gerhardt

Exhibit 31.1

CERTIFICATIONS

I, Bertrand Loy, certify that:

1.I have reviewed this Annual Report on Form 10-K of Entegris, Inc.;

2.Based on my knowledge, this annual report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3.Based on my knowledge, the financial statements, and other financial information included in this annual report, fairly present in all material respects, the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;

4.The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as

defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a) Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

(b) Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c) Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this annual report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d) Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5.The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a) All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b) Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.


Date: February 22, 2023			/s/ Bertrand Loy
			Bertrand Loy
			Chief Executive Officer
			(Principal Executive Officer)

Exhibit 31.2

CERTIFICATIONS

I, Gregory B. Graves, certify that:

1.I have reviewed this Annual Report on Form 10-K of Entegris, Inc.;

4.The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as

defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(b) Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.


Date: February 22, 2023			/s/ Gregory B. Graves
			Gregory B. Graves
			Chief Financial Officer
			(Principal Financial Officer)

EXHIBIT 32.1

CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED PURSUANT TO SECTION 906

OF THE SARBANES-OXLEY ACT OF 2002

In connection with the Annual Report on Form 10-K (the “Report”) of Entegris, Inc, a Delaware corporation (the “Company”), for the period ended December 31, 2022 as filed with the Securities and Exchange Commission on the date hereof, I, Bertrand Loy, President and Chief Executive Officer of the Company, hereby certify pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002 that:

(1)The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934, as amended; and

(2)The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.


Date: February 22, 2023			/s/ Bertrand Loy
			Bertrand Loy
			Chief Executive Officer

EXHIBIT 32.2

CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED PURSUANT TO SECTION 906

OF THE SARBANES-OXLEY ACT OF 2002

In connection with the Annual Report on Form 10-K (the “Report”) of Entegris, Inc, a Delaware corporation (the “Company”), for the period ended December 31, 2022 as filed with the Securities and Exchange Commission on the date hereof, I, Gregory B. Graves, Chief Financial Officer of the Company, hereby certify pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002 that:

(1)The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934, as amended; and

(2)The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.


Date: February 22, 2023			/s/ Gregory B. Graves
			Gregory B. Graves
			Chief Financial Officer

v3.22.4

Document and Entity Information - USD ($)
12 Months Ended

Dec. 31, 2022

Feb. 13, 2023

Jul. 02, 2022

Cover [Abstract]

Document Type 10-K

Document Annual Report true

Document Period End Date Dec. 31, 2022

Entity File Number 001-32598

Document Transition Report false

Entity Registrant Name Entegris, Inc.

Entity Incorporation, State or Country Code DE

Entity Tax Identification Number 41-1941551

Entity Address, Address Line One 129 Concord Road

Entity Address, City or Town Billerica

Entity Address, State or Province MA

Entity Address, Postal Zip Code 01821

City Area Code 978

Local Phone Number 436-6500

Title of 12(b) Security Common Stock, $0.01 Par Value

Trading Symbol ENTG

Security Exchange Name NASDAQ

Entity Well-known Seasoned Issuer Yes

Entity Voluntary Filers No

Entity Current Reporting Status Yes

Entity Interactive Data Current Yes

Entity Filer Category Large Accelerated Filer

Entity Small Business false

Entity Emerging Growth Company false

ICFR Auditor Attestation Flag true

Entity Shell Company false

Entity Public Float $ 9,345,493,438

Entity Common Stock, Shares Outstanding 149,381,222

Entity Central Index Key 0001101302

Current Fiscal Year End Date --12-31

Document Fiscal Year Focus 2022

Document Fiscal Period Focus FY

Auditor Location Minneapolis, Minnesota

Auditor Name KPMG LLP

Amendment Flag false

Auditor Firm ID 185

v3.22.4

Consolidated Balance Sheets - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Current assets:

Cash and cash equivalents $ 561,559 $ 402,565

Restricted cash 1,880 0

Trade accounts and notes receivable, net 535,485 347,413

Inventories, net 812,815 475,213

Deferred tax charges and refundable income taxes 47,618 35,312

Assets held-for-sale 246,531 0

Other current assets 129,297 52,867

Total current assets 2,335,185 1,313,370

Property, plant and equipment, net 1,393,337 654,098

Other assets:

Right-of-use assets 94,940 66,563

Goodwill 4,408,331 793,702

Intangible assets, net 1,841,955 335,113

Deferred tax assets and other noncurrent tax assets 28,867 17,671

Other noncurrent assets 36,242 11,379

Total assets 10,138,857 3,191,896

Current liabilities:

Short-term debt, including current portion of long-term debt 151,965 0

Accounts payable 172,488 130,734

Accrued payroll and related benefits 142,340 108,818

Accrued interest payable 25,571 6,073

Liabilities held-for-sale 10,637 0

Other accrued liabilities 160,873 84,240

Income taxes payable 98,057 49,136

Total current liabilities 761,931 379,001

Long-term debt, excluding current maturities 5,632,928 937,027

Pension benefit obligations and other liabilities 54,090 37,816

Deferred tax liabilities and other noncurrent tax liabilities 391,192 64,170

Long-term lease liabilities 80,716 60,101

Equity:

Preferred stock, par value $.01; 5,000,000 shares authorized; none issued and outstanding as of December 31, 2022 and December 31, 2021 0 0

Common stock, par value $.01; 400,000,000 shares authorized; issued and outstanding shares as of December 31, 2022: 149,339,486 and 149,137,086, respectively; issued and outstanding shares as of December 31, 2021: 135,719,366 and 135,516,966, respectively 1,493 1,357

Treasury stock, common, at cost: 202,400 shares held as of December 31, 2022 and December 31, 2021 (7,112) (7,112)

Additional paid-in capital 2,205,325 879,845

Retained earnings 1,031,391 879,776

Accumulated other comprehensive loss (13,097) (40,085)

Total equity 3,218,000 1,713,781

Total liabilities and equity $ 10,138,857 $ 3,191,896

v3.22.4

Consolidated Balance Sheets (Parenthetical) - $ / shares

Dec. 31, 2022

Dec. 31, 2021

Preferred stock, par value $ 0.01 $ 0.01

Preferred stock, shares authorized 5,000,000 5,000,000

Preferred stock, shares issued 0 0

Preferred stock, shares outstanding 0 0

Common stock, par value $ 0.01 $ 0.01

Common stock, shares authorized 400,000,000 400,000,000

Common stock, shares issued 149,339,486 135,719,366

Common stock, shares outstanding 149,137,086 135,516,966

Treasury Stock, Shares 202,400 202,400

v3.22.4

Consolidated Statements Of Operations - USD ($)
shares in Thousands, $ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Net sales $ 3,282,033 $ 2,298,893 $ 1,859,313

Cost of sales 1,885,620 1,239,229 1,009,591

Gross profit 1,396,413 1,059,664 849,722

Selling, general and administrative expenses 543,485 292,408 265,128

Engineering, research and development expenses 228,994 167,632 136,057

Amortization 143,953 47,856 53,092

Operating income 479,981 551,768 395,445

Interest expense 212,669 41,240 48,600

Interest income (3,694) (243) (786)

Other expense (income), net 23,926 31,695 (6,656)

Income before income tax expense 247,080 479,076 354,287

Income tax expense 38,160 69,950 59,318

Net income $ 208,920 $ 409,126 $ 294,969

Earnings Per Share:

Basic net income per common share $ 1.47 $ 3.02 $ 2.19

Diluted net income per common share $ 1.46 $ 3.00 $ 2.16

Weighted average shares outstanding

Basic 142,294 135,411 134,837

Diluted 143,146 136,574 136,266

v3.22.4

Consolidated Statements Of Comprehensive Income - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Net income $ 208,920 $ 409,126 $ 294,969

Other comprehensive income (loss), net of tax

Foreign currency translation adjustments (10,220) (2,275) (120)

Pension liability adjustments 1,139 (382) (49)

Interest rate swap - cash flow hedge, net of tax expense of $10,520 36,069 0 0

Other comprehensive income (loss) 26,988 (2,657) (169)

Comprehensive income $ 235,908 $ 406,469 $ 294,800

v3.22.4

Consolidated Statements Of Comprehensive Income Paranthetical
$ in Thousands
12 Months Ended

Dec. 31, 2022

USD ($)

Net income $ 208,920

Other Comprehensive Income (Loss), Tax 10,520

Retained earnings (deficit)

Net income $ 208,920

v3.22.4

Consolidated Statements Of Equity - USD ($)
shares in Thousands, $ in Thousands

Total

Common stock

Treasury Stock, Common

Additional paid-in capital

Retained earnings (deficit)

Foreign currency translation adjustments

Defined benefit pension adjustments

Accumulated Gain (Loss), Net, Cash Flow Hedge, Parent [Member]

Balance $ 1,165,889 $ 1,349 $ (7,112) $ 842,784 $ 366,127 $ (36,468) $ (791) $ 0

Balance (in shares) at Dec. 31, 2019 134,930 202

Shares issued under stock plans (in shares) 997

Shares issued under stock plans (16,062) $ 10 $ 0 (16,072) 0 0 0 0

Share-based compensation expense 22,920 $ 0 0 22,920 0 0 0 0

Repurchase and retirement of common stock (in shares) (778)

Repurchase and retirement of common stock (44,563) $ (8) 0 (4,820) (39,735) 0 0 0

Dividends, Common Stock, Cash (43,490) 0 0 38 (43,528) 0 0 0

Pension liability adjustment (49) 0 0 0 0 0 (49) 0

Foreign currency translation (120) 0 0 0 0 (120) 0 0

Net income 294,969 $ 0 $ 0 0 294,969 0 0 0

Balance (in shares) at Dec. 31, 2020 135,149 202

Balance 1,379,494 $ 1,351 $ (7,112) 844,850 577,833 (36,588) (840) 0

Shares issued under stock plans (in shares) 1,133

Shares issued under stock plans 8,654 $ 11 0 8,643 0 0 0 0

Share-based compensation expense 29,884 $ 0 0 29,884 0 0 0 0

Repurchase and retirement of common stock (in shares) (563)

Repurchase and retirement of common stock (67,109) $ (5) 0 (3,547) (63,557) 0 0 0

Dividends, Common Stock, Cash (43,611) 0 0 15 (43,626) 0 0 0

Pension liability adjustment (382) 0 0 0 0 0 (382) 0

Foreign currency translation (2,275) 0 0 0 0 (2,275) 0 0

Net income 409,126 $ 0 $ 0 0 409,126 0 0 0

Balance (in shares) at Dec. 31, 2021 135,719 202

Balance 1,713,781 $ 1,357 $ (7,112) 879,845 879,776 (38,863) (1,222) 0

Shares issued under stock plans (in shares) 692

Shares issued under stock plans (6,652) $ 7 0 (6,659) 0 0 0 0

Share-based compensation expense 66,578 0 0 66,578 0 0 0 0

Repurchase and retirement of common stock 0

Issuance of common stock in connection with CMC Materials acquisition 1,265,690 $ 129 0 1,265,561 0 0 0 0

Issuance of common stock in connection with CMC Materials acquisition 12,928

Dividends, Common Stock, Cash (57,305) $ 0 0 0 (57,305) 0 0

Interest Rate Swap - Cash flow hedge 36,069 0 0 0 0 0 0 36,069

Pension liability adjustment 1,139 0 0 0 0 0 1,139 0

Foreign currency translation (10,220) 0 0 0 0 (10,220) 0 0

Net income 208,920 $ 0 $ 0 0 208,920 0 0 0

Balance (in shares) at Dec. 31, 2022 149,339 202

Balance $ 3,218,000 $ 1,493 $ (7,112) $ 2,205,325 $ 1,031,391 $ (49,083) $ (83) $ 36,069

v3.22.4

Consolidated Statements Of Equity Consolidated Statement of Equity (Parenthetical) - $ / shares
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Statement of Stockholders' Equity [Abstract]

Common Stock, Dividends, Per Share, Declared $ 0.40 $ 0.32 $ 0.32

v3.22.4

Consolidated Statements Of Cash Flows - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Operating activities:

Net income $ 208,920 $ 409,126 $ 294,969

Adjustments to reconcile net income to net cash provided by operating activities:

Depreciation 135,371 90,311 83,430

Amortization 143,953 47,856 53,092

Share-based compensation expense 66,577 29,884 22,920

Charge for fair value mark-up of acquired inventory sold 61,932 428 590

Provision for deferred income taxes (102,744) (18,433) (7,250)

Charge for excess and obsolete inventory 28,896 17,103 15,387

Loss on extinguishment of debt and modification 3,287 23,338 2,378

Other 44,458 (2,428) 500

Changes in operating assets and liabilities, net of effects of acquisitions:

Trade accounts receivable and notes receivable (59,643) (86,766) (27,461)

Inventories (203,335) (168,372) (50,772)

Accounts payable and other accrued liabilities 4,519 53,577 40,162

Other current assets (13,641) 2,870 (11,952)

Income taxes payable and refundable income taxes 21,751 (3,292) 28,490

Other 11,982 5,252 2,191

Net cash provided by operating activities 352,283 400,454 446,674

Investing activities:

Acquisition of property and equipment (466,192) (210,626) (131,752)

Acquisition of business, net of cash acquired (4,474,925) (91,942) (111,912)

Other (4,592) 4,450 338

Net cash used in investing activities (4,945,709) (298,118) (243,326)

Financing activities:

Proceeds from revolving credit facility and short-term debt 476,000 101,000 217,000

Payments of revolving credit facility and short-term debt (341,000) (101,000) (217,000)

Proceeds from long-term debt 4,940,753 400,000 400,000

Payments of long-term debt (145,000) (550,000) (251,000)

Payments for debt issuance costs (99,488) (5,069) (3,964)

Payments for debt extinguishment costs 0 (19,080) 0

Payments for dividends (57,309) (43,545) (43,245)

Issuance of common stock from employee stock plans 16,168 24,744 8,738

Taxes paid related to net share settlement of equity awards (22,820) (16,090) (24,800)

Repurchase and retirement of common stock 0 (67,109) (44,563)

Deferred acquisition payment 0 0 (16,125)

Other (1,101) (348) (2,892)

Net cash provided by (used in) financing activities 4,766,203 (276,497) 22,149

Effect of exchange rate changes on cash, cash equivalents and restricted cash (11,903) (4,167) 3,485

Increase (decrease) in cash, cash equivalents and restricted cash 160,874 (178,328) 228,982

Cash, cash equivalents and restricted cash at beginning of year 402,565 580,893 351,911

Cash, cash equivalents and restricted cash at end of year 563,439 402,565 580,893

Supplemental Cash Flow Information

Equity consideration on acquisition of CMC Materials, Inc. 1,265,690 0 0

Deferred acquisition payments, net 0 250 1,482

Equipment purchases in accounts payable 28,295 29,042 11,921

Dividends payable 654 658 593

Schedule of interest and income taxes paid:

Interest paid 164,183 46,791 42,575

Income taxes, net of refunds received $ 113,666 $ 88,059 $ 37,228

v3.22.4

Summary of Significant Accounting Policies
12 Months Ended

Dec. 31, 2022

Accounting Policies [Abstract]

Summary of Significant Accounting Policies SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES
Nature of Operations Entegris, Inc. (“Entegris”, “the Company”, “we”, or “our”) is a leading supplier of advanced materials and process solutions for the semiconductor and other high-technology industries.
Principles of Consolidation The consolidated financial statements include the accounts of the Company and its majority-owned subsidiaries. Our recently acquired subsidiary, CMC Materials, Inc., follows a monthly reporting calendar and the Company follows a 5-4-4 week reporting calendar. CMC Materials, Inc.’s and the Company’s fourth quarter ends December 31, 2022. The Company believes that use of the different fiscal periods for this entity has not had a material impact on the Company’s consolidated financial position, results of operations, or cash flows. Intercompany profits, transactions and balances have been eliminated in consolidation.
Use of Estimates and Basis of Presentation The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States requires management to make judgments, estimates and assumptions that affect the amounts reported in the consolidated financial statements and accompanying notes. On an ongoing basis, Entegris evaluates its estimates, including those related to receivables, inventories, property, plant and equipment, goodwill, intangible assets, accrued liabilities, income taxes and share-based compensation, among others. Actual results could differ from those estimates.
Cash and Cash Equivalents Cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less, which are valued at cost and approximate fair value.
Allowance for Credit Losses An allowance for uncollectible trade receivables is estimated based on a combination of write-off history, aging analysis and any specific, known troubled accounts. The Company maintains an allowance for credit losses that management believes is adequate to cover expected losses on trade receivables.
Inventories Inventories are stated at the lower of cost and net realizable value. Cost is determined by the first-in, first-out (FIFO) method.
Leases The Company determines if an arrangement is a lease at inception. Right-of-use (ROU) assets include operating leases. Lease liabilities for operating leases are classified in “Other accrued liabilities” and “Long-term lease liabilities” in our consolidated balance sheet. We do not have material finance leases.
Operating assets and liabilities are recognized at commencement date based on the present value of the lease payments over the lease term. As most of our leases do not provide an implicit rate, we use our incremental borrowing rate based on the information available at commencement date in determining the present value of lease payments. We use the implicit rate when readily determinable. The ROU assets include prepaid lease payments and exclude lease incentives. Lease terms may include options to extend or terminate the lease when it is reasonably certain that the Company will exercise that option. Lease expense for lease payments is recognized on a straight-line basis over the lease term.
Lease and non-lease components are generally accounted for separately for real estate leases. For non-real estate leases, we account for the lease and non-lease components as a single lease component.
Property, Plant and Equipment Property, plant and equipment are carried at cost and are depreciated using the straight-line method over the estimated useful lives of the assets. When assets are retired or disposed of, the cost and related accumulated depreciation are removed from the accounts, and gains or losses are recognized in the same period. Maintenance and repairs are expensed as incurred, while significant additions and improvements are capitalized. Long-lived assets, including property, plant and equipment, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset or group of assets may not be recoverable based on estimated future undiscounted cash flows. The amount of impairment, if any, is measured as the difference between the net book value and the estimated fair value of the asset(s).
Fair Value of Financial Instruments The carrying value of cash equivalents, accounts receivable, accounts payable, accrued payroll and related benefits, and other accrued liabilities approximates fair value due to the short maturity of those instruments. Fair value is defined as the price that would be received from the sale of an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date. The three-level hierarchy for disclosure is based on the extent and level of judgment used to estimate fair value. Level 1 inputs consist of valuations based on quoted market prices in active markets for identical assets or liabilities. Level 2 inputs consist of valuations based on quoted prices for similar assets or liabilities, quoted prices for identical assets or liabilities in an inactive market, or other observable inputs. Level 3 inputs consist of valuations based on unobservable inputs that are supported by little or no market activity.
Goodwill and Intangible Assets Goodwill represents the excess of acquisition costs over the fair value of the net assets of businesses acquired. Goodwill is not subject to amortization, but is tested for impairment annually at August 31, the Company’s annual testing date, and whenever events or changes in circumstances indicate that impairment may have occurred. The Company compares the carrying value of its reporting units, including goodwill, to their fair value. For reporting units in which the assessment indicates that it is more likely than not that the fair value is more than its carrying value, goodwill is not considered impaired. If the carrying value of the reporting unit exceeds fair value, goodwill is considered impaired.
Based on its annual analysis, the Company determined there was no indication of impairment of goodwill and the estimated fair value of each reporting unit exceeded its carrying value.
Amortizable intangible assets include, among other items, patented, unpatented and other developed technology and customer-based intangibles, and are amortized using the straight-line method over their respective estimated useful lives. The Company reviews intangible assets and other long-lived assets for impairment if changes in circumstances or the occurrence of events suggest the remaining value may not be recoverable.
Derivative Financial Instruments The Company is exposed to various market risks, including risks associated with interest rates and foreign currency exchange rates. We enter into certain derivative transactions to mitigate the volatility associated with these exposures. We have policies in place that define acceptable instrument types we may enter into and we have established controls to limit our market risk exposure. We do not use derivative financial instruments for trading or speculative purposes. In addition, all derivatives, whether designated in hedging relationships or not, are recorded on the consolidated balance sheets at fair value on a gross basis.
Interest Rate Swap
The fair value of the interest rate swap is estimated using standard valuation models using market-based observable inputs over the contractual term, including one-month Secured Overnight Financing Rate (“SOFR”) based yield curves, among others. We consider the risk of nonperformance, including counterparty credit risk, in the calculation of the fair value. We have designated this swap agreement as a cash flow hedge. As a cash flow hedge, unrealized gains are recognized as assets and unrealized losses are recognized as liabilities. Unrealized gains and losses are designated as effective or ineffective based on a comparison of the changes in fair value of the interest rate swap and changes in fair value of the underlying exposures being hedged. The effective portion is recorded as a component of accumulated other comprehensive loss, while the ineffective portion is recorded as a component of Interest expense. Changes in the method by which we pay interest from one-month SOFR to another rate of interest could create ineffectiveness in the swap, and result in amounts being reclassified from other comprehensive income (loss) into net income. Hedge effectiveness is tested quarterly to determine if hedge treatment is appropriate. Realized gains and losses are recorded on the same financial statement line as the hedged item, which is Interest expense.
Foreign Currency Contracts Not Designated as Hedges
On a periodic basis, we enter into forward foreign exchange contracts in an effort to mitigate the risks associated with currency fluctuations on certain foreign currency balance sheet exposures. These foreign exchange contracts do not qualify for hedge accounting; therefore, the gains and losses resulting from the impact of currency exchange rate movements on our forward foreign exchange contracts are recognized as Other expense (income), net in the accompanying consolidated statements of operations in the period in which the exchange rates change.
Foreign Currency Translation Assets and liabilities of certain foreign subsidiaries are translated from foreign currencies into U.S. dollars at period-end exchange rates, and the resulting gains and losses arising from translation of net assets located outside the U.S. are recorded as a cumulative translation adjustment, a component of accumulated other comprehensive loss in the consolidated balance sheets. Income statement amounts are translated at the average exchange rates for the year. Translation adjustments are not adjusted for income taxes, as substantially all translation adjustments relate to permanent investments in non-U.S. subsidiaries. Gains and losses resulting from foreign currency transactions are included in Other expense (income), net, in the Company’s consolidated statements of operations.
Revenue Recognition Revenue is measured based on consideration specified in a contract with a customer, and excludes any sales incentives and amounts collected on behalf of third parties. The Company recognizes revenue when it satisfies a performance obligation by transferring control over a product or service to a customer.
Taxes assessed by a governmental authority that are both imposed on and concurrent with a specific revenue-producing transaction, that are collected by the Company from a customer, are excluded from revenue.
Shipping and handling costs associated with outbound freight after control over a product has transferred to a customer are accounted for as a fulfillment cost and are included in cost of sales.
The Company recognizes the incremental costs of obtaining contracts as an expense when incurred if the amortization period of the assets that the Company otherwise would have recognized is one year or less.
When the Company receives consideration, or such consideration is unconditionally due, from a customer prior to transferring goods or services to the customer under the terms of a sales contract, the Company records deferred revenue, which represents a contract liability. Such deferred revenue typically results from advance payments received on sales of the Company’s products. The Company makes the required disclosures with respect to deferred revenue in Note 2 to the consolidated financial statements.
The Company does not disclose information about remaining performance obligations that have original expected durations of one year or less.
The following is a description of principal activities from which the Company generates its revenues. The Company has four reportable segments. For more detailed information about reportable segments, see Note 20 to the consolidated financial statements. For each of the four reportable segments, the recognition of revenue regarding the nature of goods and services provided by the segments are similar and described below. The Company recognizes revenue for product sales at a point in time following the transfer of control of such products to the customer, which generally occurs upon shipment or delivery, depending on the terms of the underlying contracts. For product sales contracts that contain multiple performance obligations, the Company allocates the transaction price to each performance obligation identified in the contract based on relative standalone selling prices, or estimates of such prices, and recognizes the related revenue as control of each individual product is transferred to the customer in satisfaction of the corresponding performance obligations. All material revenue is being recognized at a point in time.
The Company generally recognizes revenue for sales of services when the Company has satisfied the performance obligation. The payment terms and revenue recognized are based on time and materials.
The Company also enters into arrangements to license its intellectual property. These arrangements typically permit the customer to use a specialized manufacturing process and in return the Company receives a royalty fee. The Company recognizes revenue for a sales-based or usage-based royalty promised in exchange for a license of intellectual property when the subsequent sale or usage occurs.
The Company offers certain customers cash discounts and volume rebates as sales incentives. The discounts and volume rebates are recorded as a reduction in sales at the time revenue is recognized in an amount estimated based on historical experience and contractual obligations. The Company periodically reviews the assumptions underlying its estimates of discounts and volume rebates and adjusts its revenues accordingly.
In addition, the Company offers free product rebates to certain customers. The Company utilizes an adjusted market approach to estimate the stand-alone selling price of the loyalty program and allocates a portion of the consideration received to the free product offering. The free product offering is redeemable upon future purchases of the Company’s products. The amount associated with free product rebates is recorded as deferred revenue on the balance sheet and is recognized as revenue when the free product is redeemed or when the likelihood of redemption is remote. The Company has deemed that the amount is immaterial for disclosure.
The Company provides for the estimated costs of fulfilling its obligations under product warranties at the time the related revenue is recognized. The Company estimates the costs based on historical failure rates, projected repair costs, and knowledge of specific product failures (if any). The specific warranty terms and conditions vary depending upon the product sold and the country in which we do business, but generally include parts and labor over a period generally ranging from 90 days to one year. The Company regularly reevaluates its estimates to assess the adequacy of the recorded warranty liabilities and adjusts the amounts as necessary.
The Company’s contracts are generally short-term in nature. Most contracts do not exceed twelve months. Payment terms vary by the type and location of the Company’s customers and the products or services offered. The term between invoicing and when payment is due is not significant. For certain products or services and customer types, the Company requires payment before the products or services are delivered to the customer. Those customers that prepay are represented by the contract liabilities until the performance obligations are satisfied.
Engineering, Research and Development Expenses Engineering, research and development expenses are expensed as incurred.
Share-based Compensation The Company measures the cost of employee services received in exchange for the award of equity instruments based on the fair value of the award at the date of grant. Share-based compensation expense is recognized using the straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments recorded for forfeitures as they occur. Awards issued to employees who are retirement eligible or nearing retirement eligibility are expensed on an accelerated basis.
Income Taxes The Company accounts for income taxes under the asset and liability method, which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been included in the financial
statements. Under this method, deferred tax assets and liabilities are determined on the basis of the differences between the financial statements and tax basis of assets and liabilities using enacted tax rates in effect for the year in which the differences are expected to reverse. The effect of a change in tax rates on deferred tax assets and liabilities is recognized in income tax expense in the period that includes the enactment date.
The Company recognizes deferred tax assets to the extent that it believes these assets are more likely than not to be realized. A valuation allowance is recorded to reduce deferred tax assets when it is more likely than not that the Company would not be able to realize all or part of its deferred tax assets. In making such a determination, the Company considers all available positive and negative evidence, including future reversals of existing temporary differences, projected future taxable income, tax-planning strategies, and results of recent operations. If the Company determines that it would be able to realize its deferred tax assets in the future in excess of their net recorded amount, the Company would make an adjustment to the deferred tax asset valuation allowance, which would reduce the provision for income taxes.
The Company’s policy for recording interest and penalties associated with audits and unrecognized tax benefits is to record such items as a component of income before taxes. Penalties and interest to be paid or received are recorded in other expense (income), net, in the statement of operations.
Comprehensive Income Comprehensive income represents the change in equity resulting from items other than shareholder investments and distributions. The Company’s foreign currency translation adjustments, unrealized gains and losses on available-for-sale investments, interest rate swap - cash flow hedge and minimum pension liability adjustments are included in accumulated other comprehensive loss. Comprehensive income and the components of accumulated other comprehensive loss are presented in the accompanying consolidated statements of comprehensive income and consolidated statements of equity.
Recent Accounting Pronouncements Adopted in 2022 In October 2021, the FASB issued ASU 2021-08, Business Combinations (Topic 805), Accounting for Contract Assets and Contract Liabilities from Contracts with Customers, which requires an acquirer to recognize and measure contract assets and liabilities acquired in a business combination in accordance with Revenue from Contracts with Customers ("Topic 606") rather than adjust them to fair value at the acquisition date. The Company adopted ASU No. 2021-08 on July 3, 2022 and adopted prospectively, and there was no material effect on its consolidated financial statements.
In November 2021, the FASB issued ASU 2021-10, Government Assistance (Topic 832): Disclosures by Business Entities about Government Assistance. This update requires annual disclosures about transactions with a government that are accounted for by applying a grant or contribution accounting model by analogy. The Company adopted the ASU 2021-10 in the fourth quarter of 2022 and applied prospectively. The adoption of this standard did not have a material impact on the Company's consolidated financial statements and related disclosures.
Recent Accounting Pronouncements Yet to be Adopted
The Company currently has no material recent accounting pronouncements yet to be adopted.

v3.22.4

Revenues
12 Months Ended

Dec. 31, 2022

Revenue from Contract with Customer [Abstract]

Revenue from Contract with Customer REVENUES
The following table provides information about current contract liabilities from contracts with customers. The contract liabilities are included in other accrued liabilities balance in the consolidated balance sheet.
(In thousands) 2022 2021
Balance at beginning of year $ 23,050 $ 13,852
Additions due to acquisition 11,108 —
Revenue recognized that was included in the contract liability balance at the beginning of the period (30,667) (13,819)
Increases due to cash received, excluding amounts recognized as revenue during the period 57,490 23,017
Contract liabilities included in asset held-for-sale (505) —
Balance at end of year $ 60,476 $ 23,050

v3.22.4

Acquisition
12 Months Ended

Dec. 31, 2022

Business Combinations [Abstract]

Business Combination Disclosure ACQUISITIONS
CMC Materials, Inc.
On July 6, 2022 (the “Closing Date”), the Company completed its acquisition of CMC Materials, Inc. (“CMC Materials”), a Delaware corporation, for approximately $6.0 billion in cash and stock (the “Merger”) pursuant to an Agreement and Plan of Merger dated as of December 14, 2021 (the “Merger Agreement”). As a result of the Merger, CMC Materials became a wholly owned subsidiary of the Company. The Merger was accounted for under the acquisition method of accounting and the results of
operations of CMC Materials are included in the Company's consolidated financial statements as of and since July 6, 2022. CMC Materials reports into the Advanced Planarization Solutions and Specialty Chemicals and Engineered Materials segments of the Company. Direct costs of $39.5 million associated with the acquisition of CMC Materials, consisting primarily of professional and consulting fees, were expensed as incurred in the twelve months ended December 31, 2022, respectively. These costs are classified as selling, general and administrative expense in the Company's consolidated statement of operations. The amounts of net sales and net loss from CMC Materials since the acquisition date included in the consolidated statement of operations for the twelve months ended December 31, 2022 are $581.0 million and $75.8 million, respectively.

CMC Materials is a global supplier of consumable materials, primarily to semiconductor manufacturers. The Company's products play a critical role in the production of advanced semiconductor devices, helping to enable the manufacture of smaller, faster and more complex devices by its customers. The acquisition was executed to expand the Company’s product offering base and technological base, enhance the Company’s materials and process solutions for the most advanced manufacturing environments and help customers improve productivity, performance and total cost of ownership.

The purchase price of CMC Materials consisted of the following:

(In thousands)
Cash paid to CMC Materials’ shareholders $ 3,836,983
Stock paid to CMC Materials’ shareholders 1,265,690
Repayment of CMC Materials’ indebtedness 918,578
Total purchase price 6,021,251
Less cash and cash equivalents acquired 280,636
Total purchase price, net of cash acquired $ 5,740,615

Under the terms of the Merger Agreement, the Company paid $133.00 per share for all outstanding shares of CMC Materials (excluding treasury shares). In addition, the Company settled all outstanding share-based compensation awards held by CMC Materials’ employees at the same per share price except for certain unvested performance units that were replaced by the Company’s restricted share units. The acquisition method of accounting requires the Company to include the amount associated with pre-combination service as purchase price for the acquisition, reflected in the table immediately above.

The Merger was funded with existing cash balances as well as funds raised by the Company through the issuance of debt in the form of a new term loan facility in the aggregate principal amount of $2,495.0 million, senior secured notes due 2029 in an aggregate principal amount of $1,600.0 million, senior unsecured notes due 2030 in an aggregate principal amount of $895.0 million, and a 364-Day Bridge Credit Facility in the aggregate principal amount of $275.0 million (collectively “CMC Materials Acquisition Financing”). For additional information, see Note 10 to the Company’s consolidated financial statements.

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the Merger as originally reported and as of December 31, 2022:

(In thousands) As of July 6, 2022 As of December 31, 2022
Cash and cash equivalents $ 280,636 $ 280,636
Accounts receivable and other current assets 206,887 205,395
Inventory 256,598 256,598
Property, plant and equipment 534,363 537,386
Identifiable intangible assets 1,727,119 1,729,019
Other noncurrent assets 44,149 39,741
Current liabilities (213,089) (211,046)
Deferred tax liabilities and other noncurrent liabilities (448,550) (444,935)
Net assets acquired 2,388,113 2,392,794
Goodwill 3,633,138 3,628,457
Total purchase price $ 6,021,251 $ 6,021,251

The fair value of acquired inventories was $256.6 million and is valued at the estimated selling price less the cost of disposal and reasonable profit for the selling effort. The fair value write-up of acquired finished goods inventory was $61.9 million. This
amount was recorded as an incremental cost of sales charge, amortized over the expected turn of the acquired inventory, during the year ended December 31, 2022.
The fair value of acquired property, plant and equipment of $537.4 million is valued at its fair value assuming held and used, unless market data was available supporting the fair value.
The Company recognized the following provisional intangible assets as part of the acquisition of CMC Materials and finite lived assets will be amortized on a straight-line basis:

(In thousands) Amount Weighted
average life in
years
Developed technology $ 1,035,600 7.3
Trademarks and trade names 236,600 14.9
Customer relationships 414,800 18.7
In-process research and development(1)
31,100
Other 10,919 1.2
$ 1,729,019 11.1

(1) In-process research and development assets are treated as indefinite-lived until the completion or abandonment of the associated research and development project, at which time the appropriate useful lives would be determined.

The fair value of acquired identifiable finite intangible assets was determined using an income method, which utilizes discounted cash flows to fair value each of the identifiable intangible assets. The Company normally utilizes the “income method,” which starts with a forecast of all of the expected future net cash flows attributable to the subject intangible asset. These cash flows are then adjusted to present value by applying an appropriate discount rate that reflects the risk factors associated with the cash flow streams. Depending on the asset valued, the key assumptions included one or more of the following: (1) future revenue growth rates, (2) future gross margin, (3) future selling, general and administrative expenses, (4) royalty rates, and (5) discount rates. The valuations were based on the information that was available as of the acquisition date and the expectations and assumptions that have been deemed reasonable by the Company’s management. There are inherent uncertainties and management judgment required in these determinations. The fair value measurements of the assets acquired and liabilities assumed were based on valuations involving significant unobservable inputs, or Level 3 in the fair value hierarchy.

The purchase price of CMC Materials exceeded the fair value of the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $3,628.5 million. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. The purchase price also included the fair values of other assets that were not identifiable, not separately recognizable under accounting rules (e.g., assembled workforce) or of immaterial value in addition to a going-concern element that represents the Company's ability to earn a higher rate of return on the group of assets than would be expected on the separate assets as determined during the valuation process. This additional investment value resulted in goodwill. No amount of goodwill is expected to be deductible for tax purposes. The assignment of goodwill to the Company's reportable segments will be finalized in connection with the final valuation of assets acquired and liabilities assumed.

The final valuation of assets acquired and liabilities assumed is expected to be completed as soon as possible, but no later than one year from the acquisition date. Given the size and complexity of the acquisition, the valuation of certain assets and liabilities is still being finalized. In addition to identifiable intangible assets, for the reasons noted above, the Company's valuation of the CMC Materials’ tax accounts is provisional pending the completion of and the Company's review of CMC Materials’ tax returns to be filed for periods up to the acquisition date. To the extent that the Company's estimates require adjustment, the Company will modify the value.
Pro Forma Results (Unaudited)
The following unaudited pro forma financial information presents the combined results of operations of the Company as if the acquisition of CMC Materials had occurred as of the beginning of the years presented. The unaudited pro forma financial information is not necessarily indicative of what the Company’s consolidated results of operations would have been had the acquisition occurred at the beginning of each year. In addition, the unaudited pro forma financial information does not attempt
to project the future results of operations of the combined company. The pro forma information does not include any potential revenue enhancements, cost synergies or other operating efficiencies that could result from the acquisition.

Year Ended
(In thousands) December 31, 2022 December 31, 2021
Net sales $ 3,920,850 $ 3,518,893
Net income (loss) 308,741 (161,756)
Per share amounts:
Net income (loss) per common share - basic $ 2.08 $ (1.09)
Net income (loss) per common share - diluted $ 2.05 $ (1.09)

The unaudited pro forma financial information above gives effect to the following:

•The elimination of transactions between Entegris and CMC Materials, which upon completion of the Merger would be considered intercompany. This reflects the elimination of intercompany sales and associated intercompany accounts.
•Incremental amortization and depreciation expense related to the estimated fair value of identifiable intangible assets and property, plant and equipment from the purchase price allocation.
•Interest expense on the new debt raised to fund in part the consideration paid to effect the Merger using the effective interest rates.
•The elimination of interest expense, net of the gain on the termination of two swap instruments which were terminated on June 24, 2022 associated with the extinguished CMC Materials’ debt outstanding.
•The elimination of interest expense associated with the repayment of the $145.0 million senior secured term loan facility due 2025.
•The amortization of deferred financing costs and original issue discount associated with the aggregate new debt facilities.
•Transaction and integration costs directly attributable to the Merger were reclassed as of the beginning of the comparable prior annual reporting period.
•The incremental pro forma stock-based compensation expense for accelerated vesting upon the change in control for stock options, restricted stock units, restricted stock shares, phantom units, and other deferred restricted stock units.
•The additional cost of goods sold recognized in connection with the write-up of acquired finished goods inventory of $61.9 million. The write-up is recognized in cost of sales as the inventory is sold, which for purposes of these pro forma financial statements is assumed to occur within the first quarter after the Merger.
•The income tax effect of the transaction accounting adjustments related to the Merger calculated using a blended statutory income tax rate of 22.5%.

Precision Microchemicals
On November 30, 2021, the Company completed its acquisition of the Precision Microchemicals business from BASF SE. The Precision Microchemicals business reports into the Specialty Chemicals and Engineered Materials segment of the Company. The acquisition was accounted for under the acquisition method of accounting, and the Precision Microchemicals business results of operations are included in the Company’s consolidated financial statements as of and since November 30, 2021. Costs associated with the acquisition of the Precision Microchemicals business were $0.2 million for the year ended December 31, 2021 and were expensed as incurred. These costs are included in the selling, general and administrative expenses in the Company’s consolidated statement of operations. The acquisition does not constitute a material business combination.
The purchase price for the Precision Microchemical business includes cash consideration of $89.7 million (net of cash acquired), which was funded from the Company’s existing cash on hand.
The purchase price of the Precision Microchemical business exceeds the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $42.8 million. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. This additional investment value resulted in goodwill, which is expected to be deductible for income tax purposes.
The fair value of acquired identifiable intangible assets was determined using Level 3 inputs for the “income approach” on an individual asset basis. The key assumptions used in the calculation of the discounted cash flows include future revenue growth rates, future gross margin, future selling, general and administrative expense, royalty rates, and discount rates. The valuations
and the underlying assumptions have been deemed reasonable by the Company’s management. There are inherent uncertainties and management judgment required in these determinations.
During the quarter ended April 2, 2022, the Company finalized its fair value determination of the assets acquired and the liabilities assumed. The following table summarizes the final allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the acquisition:
(In thousands) November 30, 2021 As of April 2, 2022
Inventories, net $ 967 $ 967
Other current assets 19 19
Identifiable intangible assets 44,910 44,910
Right-of-use assets 1,912 1,912
Property, plant and equipment 1,002 1,002
Other noncurrent assets 18 18
Accounts payable and accrued liabilities (43) (30)
Short-term lease liability (170) (170)
Long-term lease liability (1,742) (1,742)
Net assets acquired 46,873 46,886
Goodwill 42,819 42,824
Total purchase price, net of cash acquired $ 89,692 $ 89,710
The Company recognized the following provisional finite-lived intangible assets as part of the acquisition of the Precision Microchemical business:
(In thousands) Amount Weighted
average life in
years
Developed technology $ 9,600 9.0
Trademarks and trade names 3,400 15.0
Customer relationships 31,800 15.5
Other 110
$ 44,910 14.1

v3.22.4

Cash, Cash Equivalents and Restricted Cash
12 Months Ended

Dec. 31, 2022

Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents [Abstract]

Restricted Assets Disclosure RESTRICTED CASH
The following table provides a reconciliation of cash, cash equivalents and restricted cash reported within the consolidated balance sheet that sum to the total of the same amounts shown in the consolidated statement of cash flows.
(In thousands) December 31, 2022 December 31, 2021
Cash and cash equivalents $ 561,559 $ 402,565
Restricted cash 1,880 —
Total cash, cash equivalents and restricted cash $ 563,439 $ 402,565
The restricted cash represents cash held in a “Rabbi” trust. Prior to the acquisition of CMC Materials, CMC Materials’ change in control severance protection agreements required CMC Materials to establish a Rabbi trust prior to a change in control and fully fund the trust to cover all the severance benefits that may become payable under the agreements.

v3.22.4

Assets Held For Sale
12 Months Ended

Dec. 31, 2022

Assets Held-for-sale, Not Part of Disposal Group [Abstract]

Assets Held for Sale ASSET HELD-FOR-SALE
On October 11, 2022, the Company entered into a definitive agreement with Infineum USA L.P. for the sale of its Pipeline and Industrials Materials (“PIM”) business, which became part of the Company with the recent acquisition of CMC Materials. PIM reports into the Specialty Chemicals and Engineered Materials segment of the Company. Effective February 10, 2023, the Company terminated the definitive agreement in accordance with its terms. At the time of the termination, the transaction had not received clearance under the Hart-Scott-Rodino Act..

During the fourth quarter of 2022, the related assets and liabilities were classified as held-for-sale in the Company’s consolidated balance sheet and measured at the lower of their carrying amount or fair value less cost to sell. PIM’s income before income taxes attributable to the PIM business was $4.8 million for the year ended December 31, 2022. Due to management’s decision to terminate the agreement in first quarter of 2023, the Company will monitor and evaluate the held-for-sale criteria at the end of the first quarter 2023.

The planned disposition of PIM did not meet the criteria to be classified as a discontinued operation in the Company’s financial statements since the disposition did not represent a strategic shift that had, or will have, a major effect on the Company’s operations and financial results.
Assets-held-for sale comprise the following as of December 31, 2022:
(In thousands)
Assets: December 31, 2022
Accounts Receivable $ 16,103
Inventory 29,331
Other current assets 633
Property, Plant and Equipment, net 108,036
Intangible assets, net 76,319
Goodwill 8,822
Other assets 7,287
Total assets-held-for sale $ 246,531
Liabilities:
Accounts payable $ 4,185
Accrued expenses 5,029
Long-term liabilities 1,423
Total liabilities-held-for sale $ 10,637

v3.22.4

Trade Accounts and Notes Receivable
12 Months Ended

Dec. 31, 2022

Accounts, Notes, Loans and Financing Receivable, Gross, Allowance, and Net [Abstract]

Trade Accounts and Notes Receivable TRADE ACCOUNTS AND NOTES RECEIVABLETrade accounts and notes receivable from customers at December 31, 2022 and 2021 consist of the following:
(In thousands) 2022 2021
Accounts receivable $ 536,256 $ 347,111
Notes receivable 4,672 2,651
Total trade accounts and notes receivable 540,928 349,762
Less allowance for credit losses 5,443 2,349
Trade accounts and notes receivable, net $ 535,485 $ 347,413

v3.22.4

Inventories
12 Months Ended

Dec. 31, 2022

Inventory Disclosure [Abstract]

Inventories INVENTORIES
Inventories at December 31, 2022 and 2021 consist of the following:
(In thousands) 2022 2021
Raw materials $ 337,576 $ 191,986
Work-in-process 60,182 40,257
Finished goods (a)
415,057 242,970
Inventories, net $ 812,815 $ 475,213
(a) Includes consignment inventories held by customers of $46.2 million and $16.0 million at December 31, 2022 and 2021, respectively.

v3.22.4

Property, Plant and Equipment
12 Months Ended

Dec. 31, 2022

Property, Plant and Equipment [Abstract]

Property, Plant and Equipment PROPERTY, PLANT AND EQUIPMENT
Property, plant and equipment at December 31, 2022 and 2021 consists of the following:
(In thousands) 2022 2021 Estimated
useful lives in
years
Land $ 62,192 $ 24,000
Buildings and improvements 490,903 281,019
5-35
Manufacturing equipment 569,224 415,985
5-10
Canisters and cylinders 168,516 142,071
3-12
Molds 76,388 77,708
3-5
Office furniture and lab equipment 330,284 189,258
3-8
Construction in progress 465,923 177,161
Total property, plant and equipment 2,163,430 1,307,202
Less accumulated depreciation 770,093 653,104
Property, plant and equipment, net $ 1,393,337 $ 654,098
The table below sets forth the depreciation expense for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Depreciation expense $ 135,371 $ 90,311 $ 83,430

v3.22.4

Goodwill and Intangible Assets
12 Months Ended

Dec. 31, 2022

Goodwill and Intangible Assets Disclosure [Abstract]

Intangible Assets GOODWILL AND INTANGIBLE ASSETS
Goodwill activity for each of the Company’s reportable segments that carry goodwill, Specialty Chemicals and Engineered Materials (“SCEM”), Microcontamination Control (“MC”), Advanced Materials Handling (“AMH”), and Advanced Planarization Solutions (“APS”) for the years ended December 31, 2022 and 2021 is shown below:
(In thousands) SCEM MC AMH APS Total
December 31, 2020 $ 427,713 $ 247,154 $ 73,170 $ — $ 748,037
Addition due to acquisitions 42,819 — 932 — 43,751
Purchase accounting adjustments — — — — —
Foreign currency translation 343 1,571 — — 1,914
December 31, 2021 470,875 248,725 74,102 — 793,702
Addition due to acquisition 210,122 — — 3,418,335 3,628,457
Purchase accounting adjustments 5 — — — 5
Goodwill reallocation (110,798) — — 110,798 —
Goodwill included in assets held-for-sale (8,822) — — — (8,822)
Foreign currency translation (54) (6,637) — 1,680 (5,011)
December 31, 2022 $ 561,328 $ 242,088 $ 74,102 $ 3,530,813 $ 4,408,331
As of December 31, 2022, goodwill amounted to approximately $4,408.3 million, an increase of $3,614.6 million from the balance at December 31, 2021. The increase in goodwill in 2022 reflects the acquisition of CMC Materials as described in Note 3, foreign currency translation, goodwill reclassified to asset held-for-sale as described in Note 4 and goodwill reallocation. The goodwill reallocation related to the creation of our new APS segment during the third quarter of 2022, which included a transfer of some related operations in our SCEM reportable segment to our APS reportable segment. We have allocated goodwill to our reporting units using a relative fair value approach. In addition, we completed an assessment of any potential goodwill impairment for all reporting units immediately prior and subsequent to the reallocation and determined that no impairment existed. There were no goodwill impairments for any of the years presented.
The increase in goodwill in 2021 reflects the acquisition of the Precision Microchemicals business described in Note 3, other immaterial acquisition and foreign currency translation.
Identifiable intangible assets at December 31, 2022 and 2021 consist of the following:
2022
(In thousands) Gross carrying
amount Accumulated
amortization Net carrying
value Weighted
average life in
years
Developed technology $ 1,302,101 $ 313,876 $ 988,225 7.3
Trademarks and trade names 250,473 29,565 220,908 14.3
Customer relationships 863,947 273,039 590,908 15.4
In-process research and development (1)
31,100 — 31,100
Other 31,206 20,392 10,814 4.3
$ 2,478,827 $ 636,872 $ 1,841,955 10.8
(1) Intangible assets acquired in a business combination that are in-process and used in research and development activities are considered indefinite-lived until the completion or abandonment of the research and development efforts. Once the research and development efforts are completed, we determine the useful life and begin amortizing the assets.
2021
(In thousands) Gross carrying
amount Accumulated
amortization Net carrying
value Weighted
average life in
years
Developed technology $ 293,982 $ 232,722 $ 61,260 7.2
Trademarks and trade names 33,553 20,340 13,213 10.6
Customer relationships 481,674 227,350 254,324 12.4
Other 20,505 14,189 6,316 6.6
$ 829,714 $ 494,601 $ 335,113 10.3
The table below sets forth the amortization expense for finite-lived intangible assets for the years ended December 31, 2022, 2021, and 2020:
(In thousands) 2022 2021 2020
Amortization expense $ 143,953 $ 47,856 $ 53,092
The amortization expense for each of the five succeeding years and thereafter relating to finite-lived intangible assets currently recorded in the Company’s consolidated balance sheets is estimated to be the following at December 31, 2022:
(In thousands) 2023 2024 2025 2026 2027 Thereafter Total
Future amortization expense $ 230,469 211,437 204,917 203,373 199,859 791,900 $ 1,841,955

v3.22.4

Debt
12 Months Ended

Dec. 31, 2022

Debt Disclosure [Abstract]

Debt DEBTThe Company’s debt at December 31, 2022 and 2021 consists of the following:
(In thousands) 2022 2021
Senior secured term loan facility due 2029 $ 2,495,000 $ —
Senior secured notes due 2029 1,600,000 —
Senior unsecured notes due 2030 895,000 —
Senior unsecured notes due 2029 400,000 400,000
Senior unsecured notes due 2028 400,000 400,000
Bridge Credit Facility due 2023 135,000 —
Senior secured term loan facility due 2025 — 145,000
$ 5,925,000 $ 945,000
Unamortized discount and debt issuance costs 140,107 7,973
Total debt, net $ 5,784,893 $ 937,027
Less short-term debt, including current portion of long-term debt 151,965 —
Total long-term debt, net $ 5,632,928 $ 937,027
Annual maturities of long-term debt, excluding unamortized discount and issuance costs, due as of December 31, 2022 are as follows:
(In thousands) 2023 2024 2025 2026 2027 Thereafter Total
Contractual debt obligation maturities* $ 153,713 24,950 24,950 24,950 24,950 5,671,487 $ 5,925,000
*Subject to excess cash flow payments to the lenders, see discussion below.
CMC Materials Acquisition Financing
On the Closing Date, the Company completed its acquisition of CMC Materials pursuant to the Merger Agreement, by and among the Company, CMC Materials and Yosemite Merger Sub, Inc., a Delaware corporation and wholly owned subsidiary of the Company (“Merger Sub”). Pursuant to the Merger Agreement, Merger Sub merged with and into CMC Materials, with CMC Materials surviving the Merger and becoming a wholly-owned subsidiary of the Company.
On the Closing Date, the Company and certain of its subsidiaries entered into an Amendment and Restatement Agreement (the “Amendment”), which amended and restated the Credit and Guaranty Agreement, dated as of November 6, 2018 (as previously amended, restated, amended and restated, supplemented, modified and otherwise in effect prior to the effectiveness of the Amendment, the “Existing Credit Agreement” and, the Existing Credit Agreement as amended by the Amendment, the “Amended Credit Agreement”), by and among the Company, as borrower, certain subsidiaries of the Company party thereto, as guarantors, the lenders party thereto and Morgan Stanley Senior Funding, Inc., as administrative agent and collateral agent.
The Amended Credit Agreement provides for senior secured credit facilities in an aggregate principal amount equal to $3.1 billion, consisting of (a) a senior secured term loan credit facility in an aggregate principal amount equal to $2.495 billion (the “Initial Term Loan Facility”) and (b) a senior secured revolving credit facility in an aggregate amount equal to $575.0 million (the “Revolving Facility” and, together with the Initial Term Loan Facility, the “Credit Facilities”). The Revolving Facility contains sublimits for swingline loans and the issuances of letters of credit. The Company used a portion of the proceeds of the offering to repay the remaining principal amount of the $145.0 million senior secured term loan facility due 2025. In connection with the repayment of this debt, the Company incurred a pre-tax loss on extinguishment of debt of $0.9 million, which is included in Other expense (income), net on the consolidated statement of operations.
The commitments under the Revolving Facility expire on July 6, 2027, and any loans then outstanding will be payable in full at that time. All outstanding loans under Initial Term Loan Facility are due and payable on July 6, 2029.
The obligations under the Credit Facilities are guaranteed by certain of the Company’s wholly-owned domestic restricted subsidiaries (collectively, the “Subsidiary Guarantors”), subject to customary exceptions and limitations. The obligations under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company and the Subsidiary Guarantors, subject to customary exceptions and limitations, on a pari passu basis with the obligations under the Secured Notes, pursuant to customary intercreditor arrangements.
Borrowings under the Initial Term Loan Facility bear interest at a rate per annum equal to, at the Company’s option, either (i) Term Secured Overnight Financing Rate (“Term SOFR”) plus an applicable margin of 3.00% or (ii) a base rate plus an applicable margin of 2.00%. Borrowings under the Revolving Facility bear interest at a rate per annum equal to, at the Company’s option, either (i) Term SOFR, in the case of US dollar denominated borrowings, or the applicable benchmark rate as further described in the Amended Credit Agreement, in the case of any other currency, in each case, plus an applicable margin of 1.75% or (ii) a base rate, plus an applicable margin of 0.75%. The applicable margin set forth in the Amended Credit Agreement steps-down depending on the First Lien Net Leverage Ratio. The Amended Credit Agreement also contains customary unused commitment fees, letter of credit fees and agency fees. The interest rate of the Term Loan Facility is 7.5% as of December 31, 2022.
The Amended Credit Agreement contains customary representations, warranties and affirmative covenants. The Amended Credit Agreement also includes negative covenants that limit, among other things, incurring additional indebtedness, transactions with affiliates, additional liens, sales of assets, dividends, investments and advances, prepayments of debt and mergers and acquisitions, in each case, subject to certain exceptions, qualifications and baskets. The Amended Credit Agreement also includes a “springing” financial covenant that would require the Company to maintain a First Lien Net Leverage Ratio of 5.20:1.00 or less as of the end of any period of four fiscal quarters ending after December 31, 2022 if at any time the Company has revolving borrowings, unreimbursed letter of credit drawings and undrawn letters of credit (subject to certain exceptions) outstanding in an amount in excess of 35.0% of the aggregate commitments in respect of the Revolving Facility.
The Amended Credit Agreement contains customary events of default for facilities of this type. If an event of default occurs and is continuing, the Company may be required immediately to repay all amounts outstanding under the Amended Credit Agreement.
On the Closing Date, the Company and the Subsidiary Guarantors entered into a 364-Day Bridge Credit and Guaranty Agreement (the “Bridge Credit Agreement”), among the Company, as borrower, certain subsidiaries of the Company party thereto, as guarantors, the lenders party thereto and Morgan Stanley Senior Funding, Inc., as administrative agent. The Bridge Credit Agreement provides for a senior unsecured term loan facility in an aggregate principal amount equal to $275.0 million (the “Bridge Credit Facility”). All outstanding loans under the Bridge Credit Facility are due and payable on the date that is 364 days after the Closing Date. During the year, the Company made $140.0 million of principal repayments on the Bridge Credit Facility. The Company incurred debt issuance costs of $6.9 million in connection with the Bridge Credit Facility. In connection with the repayment of this debt, the Company incurred a loss on extinguishment of debt of $2.1 million which is included in Other expense (income), net on the consolidated statement of operations.
Borrowings under the Bridge Credit Facility bear interest at a rate per annum equal to, at the Company’s option, either (i) Term SOFR plus an applicable margin of 4.55% or (ii) a base rate plus an applicable margin of 3.55%. In addition to paying interest on the outstanding principal under the Bridge Credit Facility, the Company will pay to each lender under the Bridge Credit Agreement duration fees equal to 0.25% of the aggregate outstanding principal amount of such lender’s loans under the Bridge Credit Facility at 90, 180 and 270 days after the Closing Date. The interest rate of the Bridge Credit Facility is 8.9% as of December 31, 2022.
The Company’s obligations under the Bridge Credit Facility are guaranteed, on an unsecured basis, by the Subsidiary Guarantors, subject to customary exceptions and limitations. The Bridge Credit Agreement contains customary representations, warranties and affirmative covenants. The Bridge Credit Agreement also includes negative covenants that limit, among other things, additional subsidiary indebtedness, additional liens, sales of assets and mergers and acquisitions, in each case, subject to certain exceptions, qualifications and baskets.
The Bridge Credit Agreement contains customary events of default, including, but not limited to, payment defaults, breaches of representations and warranties, covenant defaults, events of bankruptcy and insolvency, and a change of control. If an event of default occurs and is continuing, the Company may be required immediately to repay all amounts outstanding under the Bridge Credit Agreement.
The Company began incurring ticking fees associated with the Initial Term Loan Facility on March 2, 2022 through the Closing Date. The ticking fees were paid in cash to the term loan lenders on the Closing Date. For the twelve months ended December 31, 2022, the Company incurred $12.0 million in ticking fees, which were recorded to interest expense, net in the consolidated statement of operations.
Senior Secured Notes Due 2029 and Senior Unsecured Notes Due 2030
On April 14, 2022, the Company, via a wholly-owned escrow subsidiary (the “Escrow Issuer”), issued $1.6 billion aggregate principal amount of 4.750% senior secured notes due April 15, 2029 (the “2029 Notes”) pursuant to an indenture dated as of April 14, 2022 (the “2029 Notes Indenture”), by and between the Escrow Issuer and Truist Bank (“Truist”), as trustee and as notes collateral agent. Interest on the 2029 Notes is payable semi-annually in arrears on April 15 and October 15 of each year, commencing on October 15, 2022. The Company incurred debt issuance costs of $28.5 million in connection with the 2029 Notes. These costs are reported in the Company’s consolidated balance sheet as a direct deduction from the face amount of the 2029 Notes, along with $7.6 million of original issue discount costs.
On June 30, 2022, the Company, via the Escrow Issuer, issued $895.0 million aggregate principal amount of 5.950% senior unsecured notes due June 15, 2030 (the “2030 Notes” and together with the 2029 Notes, the “New Notes”) pursuant to an indenture, dated as of June 30, 2022 (the “2030 Notes Indenture” and together with the 2029 Notes Indenture, the “New Notes Indentures”), by and between the Escrow Issuer and Truist. Interest on the 2030 Notes is payable semi-annually in arrears on June 15 and December 15 of each year, commencing on June 15, 2022. The Company incurred debt issuance costs of $24.1 million in connection with the 2030 Notes. These costs are reported in the Company’s consolidated balance sheet as a direct deduction from the face amount of the 2030 Notes along with $16.7 million of net original issue discount costs.
On the Closing Date, the Escrow Issuer merged with and into the Company and, in connection therewith, the Company executed a supplemental indenture to each New Notes Indenture and such Company subsidiaries agreed to guarantee the Company’s obligations under the New Notes.
Accordingly, each series of New Notes is guaranteed, jointly and severally, fully and unconditionally, on a senior basis, by the Company’s existing and future domestic subsidiaries, other than certain excluded subsidiaries, to the extent that such subsidiaries guarantee indebtedness under the Amended Credit Agreement or existing senior notes. In addition, the 2029 Notes and related guarantees are secured, subject to permitted liens and certain other exceptions, by first priority liens on substantially the same collateral that secures the obligations under the Amended Credit Agreement.
The Company may, at its option, redeem, at any time and from time to time prior to June 15, 2025, some or all of the 2029 Notes at 100% of the principal amount thereof plus the applicable “make-whole” premium as set forth in the 2029 Notes Indenture plus accrued and unpaid interest, if any, to, but excluding, the redemption date. On or after June 15, 2025, the
Company may redeem some or all of the 2029 Notes at the applicable prices set forth in the 2029 Notes Indenture plus accrued and unpaid interest, if any, to, but excluding, the redemption date. In addition, the Company may redeem up to 40% of the principal amount of the 2029 Notes before June 15, 2025 with the net proceeds from one or more equity offerings at the applicable price set forth in the 2029 Notes Indenture, plus accrued and unpaid interest, if any, to, but excluding, the redemption date.
The Company may, at its option, redeem, at any time and from time to time prior to January 15, 2029 (the “Par Call Date”), some or all of the 2029 Notes at 100% of the principal amount thereof plus accrued and unpaid interest, if any, to the redemption date plus the applicable “make-whole premium” described in the 2029 Notes Indenture. On or after the Par Call Date, the 2029 Notes will be redeemable, at the Company’s option, in whole or in part, at a redemption price equal to 100% of the principal amount of the 2029 Notes to be redeemed plus accrued and unpaid interest, if any, to, but excluding, the redemption date.
Upon the occurrence of certain change of control events accompanied by certain ratings events, the Company will be required to offer to repurchase all of the outstanding principal amount of each series of New Notes at a purchase price of 101% of the principal amount thereof, plus accrued and unpaid interest, if any, to, but not including, the date of repurchase.
Each New Notes Indenture contains covenants that, among other things, limit the Company’s ability and/or the ability of the Company’s subsidiaries to: incur liens; engage in sales-and-leaseback transactions; and consolidate, merge with or convey, transfer or lease all or substantially all of the Company’s and its subsidiaries’ assets to another person and limits the ability of any non-guarantor subsidiary of the Company to incur indebtedness. These covenants are subject to a number of other limitations and exceptions as set forth in the New Notes Indentures. The Company was in compliance with these covenants at December 31, 2022.
Each New Notes Indenture provides for customary events of default (subject in certain cases to customary grace and cure periods) which, if certain of them occur, would permit the trustee or the holders of at least 25% in aggregate principal amount of the then-outstanding applicable series of New Notes to declare the principal of, and interest or premium, if any, and any other monetary obligations on, all the then-outstanding series of New Notes to be due and payable immediately.

v3.22.4

Fair Value Measures and Disclosures
12 Months Ended

Dec. 31, 2022

Fair Value Disclosures [Abstract]

Fair Value Disclosures FAIR VALUE OF FINANCIAL INSTRUMENTS
The Company is required to record certain assets and liabilities at fair value. The valuation methods used for determining the fair value of these financial instruments by hierarchy are as follows:
Level 1 Cash and cash equivalents consist of various bank accounts used to support our operations and investments in institutional money-market funds that are traded in active markets. The restricted cash represents cash held in a “Rabbi” trust, further described in Note 5.
Level 2 Derivative financial instruments include an interest rate swap contract and foreign exchange contracts. The fair value of our derivative instruments is estimated using standard valuation models and market-based observable inputs over the contractual term, including the prevailing SOFR based yield curves for the interest rate swap, and forward rates and/or the Overnight Index Swap curve for forward foreign exchange contracts, among others. The fair value of our debt is estimated based on independent broker/dealer bids or by comparison to other debt securities having similar durations, yields and credit ratings.
Level 3 No Level 3 financial instruments
The following table presents financial instruments that we measure at fair value on a recurring basis:
Fair Value Measurements at Reporting Date Using
(In thousands) Level 1 Level 2 Level 3 Total
Assets: 2022 2021 2022 2021 2022 2021 2022 2021
Cash and cash equivalents $ 561,559 $ 402,565 $ — $ — $ — $ — $ 561,559 $ 402,565
Restricted cash 1,880 — — — — — 1,880 —
Derivative financial instruments - Interest rate swap - cash flow hedge — — 46,589 — — — 46,589 —
Derivative financial instruments -Forward exchange contracts — — 726 — — — 726 —
Total Assets $ 563,439 $ 402,565 $ 47,315 $ — $ — $ — $ 610,754 $ 402,565
Liabilities:
Derivative financial instruments - Forward exchange contracts $ — $ — $ 193 $ — $ — $ — $ 193 $ —
Total Liabilities $ — $ — $ 193 $ — $ — $ — $ 193 $ —
Other Fair Value Disclosures
The estimated fair value and carrying value of our debt as of December 31, 2022 and 2021 were as follows:
December 31, 2022 December 31, 2021
(In thousands) Carrying Value Fair Value Carrying Value Fair Value
Total debt, net $ 5,784,893 $ 5,428,900 $ 937,027 $ 952,500

v3.22.4

Derivative Instruments and Hedging Activities
12 Months Ended

Dec. 31, 2022

Derivative Instruments and Hedging Activities Disclosure [Abstract]

Derivative Instruments and Hedging Activities Disclosure DERIVATIVE INSTRUMENTS
The Company is exposed to various market risks, including risks associated with interest rates and foreign currency exchange rates. One objective of the Company's risk management program is to mitigate these risks using derivative instruments.
Cash Flow Hedges - Interest Rate Swap Contract
In July 2022, the Company entered into a floating-to-fixed swap agreement on its variable rate debt under the Term Loan Facility. For further information on the Term Loan Facility, see Note 10 Debt. The interest rate swap was designated specifically to the Term Loan Facility, is highly effective and qualifies as a cash flow hedge. The notional amount is scheduled to decrease quarterly and will expire on December 30, 2025.
Foreign Currency Contracts Not Designated as Hedges
The Company enters into foreign exchange contracts in an effort to mitigate the risks associated with currency fluctuations on certain foreign currency balance sheet exposures. These foreign exchange contracts do not qualify for hedge accounting.
The notional amounts of our derivative instruments are as follows:
(In thousands) December 31, 2022 December 31, 2021
Derivatives designated as hedging instruments:
Interest rate swap contract - Cash flow hedge $ 1,950,000 $ —
Derivatives not designated as hedging instruments:
Foreign exchange contracts to purchase U.S. dollars $ 3,995 $ —
Foreign exchange contracts to sell U.S. dollars 26,255 —
The fair values of our derivative instruments included in the consolidated balance sheets are as follows:
(In thousands) Derivative Assets Derivative Liabilities
Consolidated Balance Sheet Location December 31, 2022 December 31, 2021 December 31, 2022 December 31, 2021
Derivatives designated as hedging instruments - Interest rate swap contract -cash flow hedge
Other current assets $ 32,481 $ — $ — $ —
Other assets - long-term 14,108 — — —
Derivatives not designated as hedging instruments -Foreign exchange contracts
Other current assets $ 726 $ — $ — $ —
Other accrued liabilities — — 193 —
The following table summarizes the effects of our derivative instruments on our consolidated statements of operations for the years ended December 31, 2022, 2021 and 2020:
(In thousands)
Derivatives not designated as hedging instruments:
Consolidated Statements of Operations Location
2022 2021 2020
Foreign exchange contracts Other expense, net $ (3,435) $ — $ —
The following table summarizes the effects of our derivative instruments on Accumulated Other Comprehensive Income for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Derivatives designated as hedging instruments:
Interest rate swap contract - Cash flow hedge $ 36,069 $ — $ —
We expect approximately $32.5 million to be reclassified from Accumulated other comprehensive income into Interest expense, net during the next twelve months related to our interest rate swap based on projected rates of the SOFR forward curve as of December 31, 2022.

v3.22.4

Other Income (Expense), Net
12 Months Ended

Dec. 31, 2022

Other Income and Expenses [Abstract]

Other Income and Other Expense Disclosure [Text Block]
(13) OTHER EXPENSE (INCOME), NET
The table below sets forth the Other expense (income), net for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Loss (gain) on foreign currency remeasurement $ 23,034 $ 7,857 $ (9,751)
Loss on extinguishment of debt and modification 3,287 23,338 2,378
Other, net (2,395) 500 717
Other expense (income), net $ 23,926 $ 31,695 $ (6,656)

v3.22.4

Lease Commitments
12 Months Ended

Dec. 31, 2022

Leases [Abstract]

Lessee, Operating Leases LEASES
As of December 31, 2022, the Company was obligated under operating lease agreements for certain office space and manufacturing facilities, manufacturing equipment, vehicles, information technology equipment and warehouse space. Our leases have remaining lease terms of 1 year to 19 years, some of which may include options to extend the lease for up to 10 years, and some of which may include options to terminate the leases within 1 year.
As of December 31, 2022 and 2021, the Company’s operating lease components with initial or remaining terms in excess of one year were classified on the consolidated balance sheets as follows, together with certain supplemental balance sheet
information:
(In thousands)
Classification 2022 2021
Assets
Right-of-use assets Right-of-use assets $ 94,940 $ 66,563
Liabilities
Short-term lease liability Other accrued liabilities 19,025 10,638
Long-term lease liability Long-term lease liability 80,716 60,101
Total lease liabilities $ 99,741 $ 70,739
Lease Term and Discount Rate
Weighted average remaining lease term (years) 7.8 9.2
Weighted average discount rate 4.1 % 4.2 %
Expense for leases less than 12 months for the year ended December 31, 2022, 2021 and 2020 were not material. The components of lease expense for the year ended December 31, 2022, 2021 and 2020 are as follows:
(In thousands)
2022 2021 2020
Operating lease cost $ 17,997 $ 13,127 $ 13,576
The Company combines the amortization of the right-of-use assets and the change in the operating lease liability in the same line item in the Statement of Cash Flows. Other information related to the Company’s operating leases for the year ended December 31, 2022, 2021 and 2020 are as follows:
(In thousands)
2022 2021 2020
Cash paid for amounts included in the measurement of lease liabilities:
Operating cash flows from leases $ 14,916 $ 11,009 $ 10,806
Right-of-use assets obtained in exchange for lease obligations:
Operating leases $ 23,598 $ 31,492 $ 5,133
Future minimum lease payments for noncancellable operating leases as of December 31, 2022, were as follows:
(In thousands) 2022
One Year $ 22,817
Two Years 18,252
Three Years 13,990
Four Years 11,919
Five Years 10,455
Beyond Five Years 39,863
Total $ 117,296
Less: Interest 17,555
Present value of lease liabilities $ 99,741

v3.22.4

Asset Retirement Obligations
12 Months Ended

Dec. 31, 2022

Asset Retirement Obligation [Abstract]

Asset Retirement Obligations ASSET RETIREMENT OBLIGATIONS The Company has asset retirement obligations (“AROs”) related to environmental disposal obligations associated with cylinders used to supply customers with gas products, and certain restoration obligations associated with certain of its leased facilities.
Changes in the carrying amounts of the Company’s AROs for the years ended December 31, 2022 and 2021 are shown below:
(In thousands)
2022 2021
Balance at beginning of year $ 17,494 $ 14,500
Liabilities assumed in acquisitions 12,531 —
Liabilities settled (453) (78)
Liabilities incurred 788 3,274
Accretion expense 213 166
Disposition (2,815) —
Revision of estimate 277 (368)
Balance at end of year $ 28,035 $ 17,494
ARO liabilities expected to be settled within twelve months are included in the consolidated balance sheets in Other accrued liabilities, while all other ARO liabilities are included in Pension benefit obligations and other liabilities in the consolidated balance sheets.

v3.22.4

Income Taxes
12 Months Ended

Dec. 31, 2022

Income Tax Disclosure [Abstract]

Income Taxes INCOME TAXES
Income before income taxes for the years ended December 31, 2022, 2021 and 2020 was derived from the following sources:
(In thousands) 2022 2021 2020
Domestic $ (272,365) $ 137,145 $ 86,572
Foreign 519,445 341,931 267,715
Income before income tax expense $ 247,080 $ 479,076 $ 354,287
Income tax expense for the years ended December 31, 2022, 2021 and 2020 is summarized as follows:
(In thousands) 2022 2021 2020
Current:
Federal $ 39,216 $ 9,187 $ 8,107
State 4,077 2,939 1,151
Foreign 97,611 76,257 57,310
140,904 88,383 66,568
Deferred (net of valuation allowance):
Federal (90,238) (11,726) (592)
State (5,749) (498) (407)
Foreign (6,757) (6,209) (6,251)
(102,744) (18,433) (7,250)
Income tax expense $ 38,160 $ 69,950 $ 59,318
Income tax expense differs from the expected amounts based upon the statutory federal tax rates for the years ended December 31, 2022, 2021 and 2020 as follows:
(In thousands) 2022 2021 2020
Expected federal income tax at statutory rate $ 51,887 $ 100,606 $ 74,400
State income taxes before valuation allowance, net of federal tax effect (5,907) (1,333) (1,539)
Effect of foreign source income (7,607) (15,862) (7,877)
Tax contingencies 5,762 4,696 1,688
Valuation allowance 8,052 9,984 9,281
U.S. federal research credit (13,525) (8,469) (7,204)
Equity compensation 5,290 (8,899) (8,231)
Foreign derived intangible income (15,265) (6,496) (1,153)
Legal entity restructuring capital loss — (5,079) —
Acquisition related retention, severance, and transaction costs 8,924 — —
Other items, net 549 802 (47)
Income tax expense $ 38,160 $ 69,950 $ 59,318
The Company has made employment and spending commitments to Singapore. In return for those commitments, the Company was granted a partial tax holiday for eight years starting in 2013. During 2017, this agreement was extended to 2027 in exchange for revised employment and spending commitments. The income tax benefits attributable to the tax status are $24.8 million ($0.17 per diluted share), $13.9 million ($0.10 per diluted share) and $9.4 million ($0.07 per diluted share) for the years ending December 31, 2022, 2021 and 2020, respectively. The 2022, 2021 and 2020 effective tax rates include additional benefits of $14.2 million, $8.0 million and $5.4 million because the corporate tax rate in Singapore is lower than the U.S. rate.
At December 31, 2022, there were approximately $115.9 million of accumulated undistributed earnings of subsidiaries outside of the United States, all of which are considered to be indefinitely reinvested. Management estimates that approximately $13.3 million of withholding taxes would be incurred if these undistributed earnings were distributed.
The significant components of the Company’s deferred tax assets and deferred tax liabilities at December 31, 2022 and 2021 are as follows:
(In thousands) 2022 2021
Deferred tax assets attributable to:
Accounts receivable $ 1,239 $ 397
Inventory 14,862 6,510
Accruals not currently deductible for tax purposes 25,787 19,636
Net operating loss and credit carryforwards 57,760 42,599
Capital loss carryforward 895 485
Equity compensation 15,249 2,630
Other, net 5,670 7,786
Gross deferred tax assets 121,462 80,043
Valuation allowance (48,047) (39,383)
Total deferred tax assets 73,415 40,660
Deferred tax liabilities attributable to:
Purchased intangible assets (364,979) (33,887)
Depreciation and Amortization (2,719) (9,102)
Total deferred tax liabilities (367,698) (42,989)
Net deferred tax liabilities $ (294,283) $ (2,329)
Deferred tax assets are generally required to be reduced by a valuation allowance if it is more likely than not that some portion or all of the deferred tax assets will not be realized.
As of December 31, 2022 and 2021, the Company had net U.S. deferred tax liabilities of $298.5 million and deferred tax assets of $3.0 million, respectively, which are composed of temporary differences and various tax credit carryforwards. Management believes that it is more likely than not that the benefit from certain state net operating loss carryforwards, state credit carryforwards and certain federal foreign tax credit carryforwards will not be realized. In recognition of this risk, management has provided valuation allowances of $18.5 million and $16.1 million as of December 31, 2022 and 2021, respectively, on the related deferred tax assets. If the assumptions change and management determines the assets will be realized, the tax benefits relating to any reversal of the valuation allowance on deferred tax assets at December 31, 2022 will be recognized as a reduction of income tax expense.
At December 31, 2022, the Company had state operating loss and credit carryforwards of approximately $18.3 million, which began to expire in 2022, and foreign operating loss carryforwards of $82.7 million, which begin to expire in 2023.
As of December 31, 2022 and 2021, the Company had net non-U.S. deferred tax assets of $52.3 million and $34 million, respectively, for which management determined based upon the available evidence a valuation allowance of $29.5 million and $23.3 million as of December 31, 2022 and 2021, respectively, was required against the non-U.S. gross deferred tax assets. For other non-U.S. jurisdictions, management relies upon projections of future taxable income to utilize deferred tax assets.
Benefits from tax positions should be recognized in the financial statements only when it is more likely than not that the tax positions will be sustained upon examination by the appropriate taxing authority that would have full knowledge of all relevant information. A tax position that meets the more-likely-than-not recognition threshold is measured at the largest amount of benefit that is greater than fifty percent likely of being realized upon ultimate settlement. Tax positions that fail to meet the more-likely-than-not recognition threshold should be recognized in the first subsequent financial reporting period in which that threshold is met. Previously recognized tax positions that no longer meet the more-likely-than-not recognition threshold should be derecognized in the first subsequent financial reporting period in which that threshold is no longer met. The provisions also provide guidance on the accounting for and disclosure of unrecognized tax benefits, interest and penalties.
Reconciliations of the beginning and ending balances of the total amounts of gross unrecognized tax benefits for the years ended December 31, 2022 and 2021 are as follows:
(In thousands) 2022 2021
Gross unrecognized tax benefits at beginning of year $ 23,789 $ 17,395
Increase from acquisition 24,452 —
Increase in tax positions from prior years 175 131
Decrease in tax positions from prior years (248) (69)
Increases in tax positions for current year 13,577 8,476
Settlement of tax positions for current year (6,395) (286)
Lapse in statute of limitations (1,872) (1,858)
Gross unrecognized tax benefits at end of year $ 53,478 $ 23,789
The total amount of net unrecognized tax benefits that, if recognized, would affect the effective tax rate was $42.3 million at December 31, 2022.
Penalties and interest paid or received are recorded in other income, net in the consolidated statements of operations. As of December 31, 2022 and 2021, the Company had accrued interest and penalties related to unrecognized tax benefits of $4.2 million and $5.9 million, respectively. Expenses of $2.0 million, $1.0 million and $0.9 million were recognized as interest and penalties in the consolidated statements of operations for the years ended December 31, 2022, 2021 and 2020, respectively.
The Company files income tax returns in the U.S. and in various state, local and foreign jurisdictions. The statutes of limitations related to both the consolidated federal income tax return and state returns are closed for all years up to and including 2018 and 2018, respectively. With respect to foreign jurisdictions, the statute of limitations varies from country to country, with the earliest open year for the Company’s major foreign subsidiaries being 2016.
Due to the expiration of various statutes of limitations and settlements of audits, it is reasonably possible that the Company’s gross unrecognized tax benefit balance may decrease within the next twelve months by approximately $2.6 million.

v3.22.4

Equity
12 Months Ended

Dec. 31, 2022

Equity [Abstract]

Equity EQUITY
Dividends
Holders of the Company’s common stock are entitled to receive dividends when and if they are declared by the Company’s board of directors. The Company’s board of directors declared cash dividends of $0.10 per share during each of the first, second, third and fourth quarters of 2022, payments for which totaled $57.3 million. The Company’s board of directors declared cash dividends of $0.08 per share during each of the first, second, third and fourth quarters of 2021, payments for which totaled $43.6 million. During 2020, the Company’s board of directors declared cash dividends of $0.08 per share during each of the first and second, third and fourth quarters of 2020, payments for which totaled $43.5 million.
On January 18, 2023, the Company’s board of directors declared a quarterly cash dividend of $0.10 per share to be paid on February 22, 2023 to shareholders of record as of February 1, 2023.
Future dividend declarations, if any, as well as the record and payment dates for such dividends, are subject to the final determination of the Company’s board of directors. Furthermore, the credit agreements governing the New Credit Facilities contain restrictions that may limit our ability to pay dividends.
Share Repurchase Program
On December 14, 2020, the Company’s board of directors authorized a repurchase program, effective February 16, 2021, covering the repurchase of up to an aggregate of $125.0 million of the Company’s common stock, during a period of twelve months, in open market transactions and in accordance with one or more pre-arranged stock trading plans to be established in accordance with Rule 10b5-1 under the Securities Exchange Act of 1934, as amended. This repurchase program expired pursuant to its terms on February 15, 2022. In anticipation of its acquisition of CMC Materials, the Company suspended its previously announced share repurchase program in the fourth quarter of 2021 and does not anticipate authorizing a new repurchase program or resuming a repurchase program in 2023.
The Company repurchased $0.0 million, $67.1 million and $44.6 million of shares for the years ended December 31, 2022, 2021 and 2020, respectively.
The credit agreement governing the New Credit Facilities contains restrictions that may limit the Company’s ability to continue to repurchase shares.
2020 Stock Plan
In 2020, the Company’s board of directors and stockholders approved the Entegris, Inc. 2020 Stock Plan (the “2020 Stock Plan”). The 2020 Stock Plan replaced the Entegris, Inc. 2010 Stock Plan for future stock awards and stock option grants. The 2020 Stock Plan has a term of ten years and provides for the issuance of stock options and other share-based awards to selected employees, directors, and other individuals or entities that provide services to the Company or its affiliates. Under the 2020 Stock Plan, the board of directors or a committee selected by the board of directors will determine for each award, the term, price, number of shares, rate at which each award is exercisable and whether restrictions are imposed on the shares subject to the awards. The exercise price for option awards generally may not be less than the fair market value per share of the underlying common stock on the date granted. The 2020 Stock Plan provides that after December 31, 2019, any shares subject to stock awards that were awarded from the Company’s expired plans and that are forfeited, expired or otherwise terminated without issuance of shares will again be available for issuance under the 2020 Stock Plan.
Stock Plan assumed from CMC Materials
Subsequent to the acquisition of CMC Materials, the Company's Board of Directors approved the absorption of the CMC Materials 2021 Omnibus Incentive Plan (the “OIP”) into the Company's 2020 Stock Plan for the remainder of the term of the OIP Plan. The 2021 OIP provides for grants of equity awards in the form of stock options, restricted stock, restricted stock units, stock appreciation rights, performance-based awards, other stock-based awards such as substitute awards in connection with an acquisition, and cash incentive awards. 3.9 million additional shares became available for grant by the Company upon absorption of the OIP Plan.
Each outstanding option to purchase shares of CMC Materials common stock under CMC Materials’s stock plan became an option to acquire, on the same terms and condition as were applicable under the CMC Materials stock plan, the Company’s common stock, with the number of shares and exercise prices thereof adjusted for the exchange ratio of 1.82. Accordingly, options to purchase 0.6 million shares of CMC Materials common stock were exchanged for options to purchase 1.2 million shares of the Company’s common stock.
Each outstanding performance-based restricted stock unit of CMC Materials under CMC Materials’s stock plan became a time-based restricted stock unit with the same terms and conditions as were applicable under the CMC Materials stock plan, the Company’s common stock, with the number of shares and exercise price thereof adjusted for the exchange ratio of 1.82. Accordingly, 0.1 million shares of performance-based restricted stock units of CMC Materials common stock were exchanged for restricted stock units of 0.2 million shares of the Company’s common stock.
For all plans, exclusive of the employee stock purchase plan, the Company had shares available for future grants of 10.9 million, 8.7 million, and 9.0 million shares at December 31, 2022, 2021 and 2020, respectively.
Stock Options
Stock option activity for the years ended December 31, 2022, 2021 and 2020 is summarized as follows:
2022 2021 2020
(Shares in thousands) Number of
shares Weighted
average
exercise
price Number of
shares Weighted
average
exercise
price Number of
shares Weighted
average
exercise
price
Options outstanding, beginning of year 657 $ 55.32 1,082 $ 33.38 1,575 $ 21.39
Granted 146 128.44 167 98.11 216 55.72
Assumed in CMC acquisition 1,178 55.80 — — — —
Exercised (141) 40.00 (592) 27.32 (709) 13.60
Cancelled or forfeited (1) 61.42 — — — —
Options outstanding, end of year 1,839 $ 62.59 657 $ 55.32 1,082 $ 33.38
Options exercisable, end of year 1,386 $ 54.53 111 $ 34.54 426 $ 24.99
Options outstanding under the Company’s stock plans at December 31, 2022 are summarized as follows:
(Shares in thousands) Options outstanding Options exercisable
Range of exercise prices Number
outstanding Weighted
average
remaining life
in years Weighted-
average
exercise
price Number
exercisable Weighted
average
exercise
price
$— to $31.10
343 1.9 years $ 24.89 343 $ 24.89
$31.11 to $43.47
222 3.4 years 34.05 149 34.40
$43.48 to $55.72
260 3.7 years 53.83 151 52.47
$55.73 to $80.00
663 4.5 years 70.29 663 70.29
$80.01 to $128.44
351 5.6 years 109.43 80 92.50
1,839 4.0 years $ 62.59 1,386 $ 54.53
The weighted average remaining contractual term for options outstanding and options exercisable for all plans at December 31, 2022 was 4.0 years and 3.7 years, respectively.
Under the stock plans, the total pre-tax intrinsic value of stock options exercised during the years ended December 31, 2022 and 2021 was $11.4 million and $54.7 million, respectively. The aggregate intrinsic value, which represents the total pre-tax intrinsic value based on the Company’s closing stock price of $65.59 at December 31, 2022, which theoretically could have been received by the option holders had all option holders exercised their options as of that date, was $25.7 million and $22.3 million for options outstanding and options exercisable, respectively.
Share-based payment awards in the form of stock option awards for 0.1 million, 0.2 million and 0.2 million shares were granted to employees during the years ended December 31, 2022, 2021 and 2020, respectively. Compensation expense is based on the grant date fair value. The awards vest annually over a period of four years and have a contractual term of 7 years. The Company estimates the fair value of stock options using the Black-Scholes valuation model. Key inputs and assumptions used to estimate the fair value of stock options include the grant price of the award, the expected option term, volatility of the Company’s stock, the risk-free rate and the Company’s dividend yield. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive equity awards, and subsequent events are not indicative of reasonableness of the original estimates of fair value made by the Company.
The fair value of each stock option grant was estimated at the date of grant using a Black-Scholes option pricing model. The following table presents the weighted-average assumptions used in the valuation and the resulting weighted-average fair value per option granted for the years ended December 31, 2022, 2021 and 2020:
Employee stock options: 2022 2021 2020
Volatility 40.9 % 38.0 % 31.9 %
Risk-free interest rate 1.5 % 0.4 % 1.4 %
Dividend yield 0.3 % 0.3 % 0.6 %
Expected life (years) 4.2 4.6 4.3
Weighted average fair value per option $ 43.47 $ 30.69 $ 14.83
A historical daily measurement of volatility is determined based on the expected life of the option granted. The risk-free interest rate is determined by reference to the yield on an outstanding U.S. Treasury note with a term equal to the expected life of the option granted. Expected life is determined by reference to the Company’s historical experience. The Company determines the dividend yield by dividing the expected annual dividend on the Company’s stock by the option exercise price.
Employee Stock Purchase Plan

The Company maintains the Entegris, Inc. Amended and Restated Employee Stock Purchase Plan (“ESPP”). The ESPP allows employees to elect, at six-month intervals, to contribute up to 10% of their compensation, subject to certain limitations, to purchase shares of the Company’s common stock at a discount of 15% from the fair market value on the first day or last day of each six-month period. The Company treats the ESPP as a compensatory plan. At December 31, 2022, 1.3 million shares remained available for issuance under the ESPP. Employees purchased 0.2 million, 0.1 million and 0.2 million shares, at a weighted-average price of $65.25, $90.89, and $46.58 during the years ended December 31, 2022, 2021 and 2020, respectively.
Restricted Stock Units
Restricted stock units are awards of common stock made under the Stock Plans that are subject to a risk of forfeiture if the awardee terminates employment with the Company prior to the lapse of the restrictions. The value of such restricted stock units is determined using the market price on the grant date. Compensation expense for restricted stock units is generally recognized using the straight-line single-option method. A summary of the Company’s restricted stock unit activity for the years ended December 31, 2022, 2021 and 2020 is presented in the following table:
2022 2021 2020
(Shares in thousands)
Number
of
shares Weighted
average
grant date
fair value Number
of
shares Weighted
average
grant date
fair value Number
of
shares Weighted
average
grant date
fair value
Unvested, beginning of year 897 $ 62.69 1,083 $ 41.31 1,254 $ 27.48
Granted 366 117.82 293 101.04 437 57.46
Assumed in CMC acquisition 155 92.96 — — — —
Vested (523) 64.77 (439) 35.58 (564) 23.48
Forfeited (51) 85.16 (40) 57.39 (44) 35.86
Unvested, end of year 844 90.37 897 62.69 1,083 41.31

During the years ended December 31, 2022, 2021 and 2020, the Company awarded performance-based restricted stock units for up to 0.1 million, 0.1 million and 0.1 million shares of common stock, respectively, to be issued upon the achievement of performance conditions under the Company’s stock plans to certain officers. Compensation expense is based on the grant date fair value. The awards vest on the third anniversary of the award date. The Company estimates the fair value of the performance shares using a Monte Carlo simulation process.
As of December 31, 2022, the total compensation cost related to unvested stock options, performance-based restricted stock units and restricted stock unit awards not yet recognized was $3.7 million, $2.8 million and $43.4 million, respectively, and is expected to be recognized over the next 2.5 years on a weighted-average basis.
Modifications
During the three months ended October 1, 2022, the Company modified all employee awards of restricted share units, options, and performance-based restricted share units that were granted in the 2022 fiscal year to provide that the awards will generally vest in connection with the grantee’s qualifying retirement. The Company accounted for this as a modification of awards and recognized incremental compensation cost of $15.3 million. The incremental compensation cost is measured as the accelerated expense over the requisite service period. The fair-value-based measure of the modified awards was the same as the fair-value based measure of the original award immediately before modification because the modification only affects the service period of the award.

In addition during the three months ended October 1, 2022, the Company modified restricted share units, options, and performance-based restricted share units granted prior to the 2022 fiscal year for two employees to accelerate the unvested awards upon their respective retirements from the Company. The Company accounted for this as a modification of awards and recognized incremental compensation cost of $6.2 million. The incremental compensation cost is measured as the excess of the fair value of the modified award over the fair value of the original award immediately before its terms modified and recognized as compensation cost on the date of the modification for the vested awards.
Valuation and Expense Information
The Company recognizes compensation expense for all share-based payment awards made to employees and directors based on their estimated fair values on the date of grant. Compensation expense is recognized using the straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments recorded for forfeitures as they occur. Awards issued to employees who are retirement eligible or nearing retirement eligibility are expensed on an accelerated basis. The following table summarizes the allocation of share-based compensation expense related to employee stock options, restricted stock awards, performance-based restricted stock awards and grants under the employee stock purchase plan for the
years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Cost of sales $ 5,780 $ 3,844 $ 1,463
Engineering, research and development expenses 4,596 3,504 2,359
Selling, general and administrative expenses 56,201 22,536 19,098
Share-based compensation expense $ 66,577 $ 29,884 $ 22,920
Tax benefit 13,977 5,488 4,129
Share-based compensation expense, net of tax $ 52,600 $ 24,396 $ 18,791

v3.22.4

Benefit Plans
12 Months Ended

Dec. 31, 2022

Defined Benefit Plans and Other Postretirement Benefit Plans Disclosures [Abstract]

Benefit Plans BENEFIT PLANS
401(k) Plan
The Company has 401(k) defined contribution plans covering employees in the U.S. The related expense totaled $21.9 million, $10.1 million and $8.2 million in the fiscal years ended December 31, 2022, 2021 and 2020, respectively. The increase in the 2022 expense compared to the prior year is due primarily to the CMC Materials acquisition for the U.S. employees covered under the 401(k) defined contribution plan and under the Entegris, Inc 401(k) Savings and Profit Sharing Plan the Company’s match increased from 4% to 5%. The Company’s United Kingdom, Singapore and Korea subsidiaries also make immaterial contributions to retirement plans that function as defined contribution retirement plans.
Defined Benefit Plans
The employees of the Company’s subsidiaries in Japan, Taiwan, South Korea, France and Germany are covered in defined benefit pension plans. As part of the CMC Materials acquisition in 2022, the Company assumed $10.1 million of projected benefit obligation. The Company uses a December 31 measurement date for its pension plans. A summary of these combined plans are:
(In thousands) 2022 2021
Projected benefit obligation $ 15,253 $ 7,050
Fair value of plan assets 1,014 969
Plan assets less benefit obligation - net amount recognized (14,239) (6,081)
Accumulated benefit obligation 12,151 5,995
Cash Flows
Benefits for the combined plans were $0.7 million, $0.1 million and $0.1 million in fiscal years 2022, 2021 and 2020, respectively, consisting primarily of service costs. Net service costs are included in Cost of sales and Operating expenses, and all other costs are recorded in Other expense, net in our Consolidated Statements of Operations. The Company expects to make the following contributions and benefit payments:
(In thousands) Payments
2023 $ 735
2024 779
2025 1,264
2026 1,127
2027 922
Years 2028-2032
5,940

v3.22.4

Earning Per Share (EPS)
12 Months Ended

Dec. 31, 2022

Earnings Per Share [Abstract]

Earning Per Share (EPS) EARNINGS PER SHARE (“EPS”)Basic EPS is computed by dividing net income by the weighted average number of shares of common stock outstanding during each period. The following table presents a reconciliation of the share amounts used in the computation of basic and diluted earnings per share:
(In thousands) 2022 2021 2020
Basic earnings per share—Weighted common shares outstanding 142,294 135,411 134,837
Weighted common shares assumed upon exercise of options and vesting of restricted stock units 852 1,163 1,429
Diluted earnings per share—Weighted common shares outstanding 143,146 136,574 136,266
The Company excluded the following shares underlying stock-based awards from the calculations of diluted EPS because their inclusion would have been anti-dilutive for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Shares excluded from calculations of diluted EPS 447 136 195

v3.22.4

Segment Information
12 Months Ended

Dec. 31, 2022

Segment Reporting [Abstract]

Segment Information SEGMENT INFORMATION
Effective July 6, 2022, coincident to and in conjunction with the CMC acquisition (see Note 3 to the consolidated financial statements) the Company changed its financial segment reporting to reflect management and organizational changes made by the Company. Accordingly, our segment information was recast retroactively in the third quarter of fiscal 2022 to conform to the current year presentation.
The Company’s financial segment reporting reflects an organizational alignment intended to leverage the Company’s unique breadth of capabilities to create mission-critical microcontamination control products, advanced materials, specialty chemicals and advanced materials handling solutions that maximize manufacturing yields, reduce manufacturing costs and enable higher device performance for its customers. These segments share common business systems and processes, technology centers and technology roadmaps. The Company leverages its expertise from these four segments to create new and increasingly integrated solutions for its customers. The Company reports its financial performance in the following segments:

•Specialty Chemicals and Engineered Materials: SCEM provides high-performance and high-purity process chemistries, gases and materials, and safe and efficient materials delivery systems to support semiconductor and other advanced manufacturing processes.

•Microcontamination Control: MC offers solutions to filter and purify critical liquid and gaseous chemistries used in semiconductor manufacturing processes and other high-technology industries.

•Advanced Materials Handling: AMH develops solutions to monitor, protect, transport and deliver critical liquid chemistries, wafers and other substrates for a broad set of applications in the semiconductor industry, life sciences and other high-technology industries.

•Advanced Planarization Solutions: APS provides complementary chemical mechanical planarization solutions, advanced materials and high-purity wet chemicals; including CMP slurries, pads, formulated cleans and other electronic chemicals
.
Segment profit is defined as net sales less direct and indirect segment operating expenses, including certain general and administrative costs for the Company’s human resources, finance and information technology functions. The Company generally accounts for inter-segment sales and transfers as if the sales or transfers were to third parties, that is, at approximate market prices. Inter-segment sales are presented as an elimination below. The remaining unallocated expenses consist mainly of the Company’s corporate functions as well as interest expense, interest income, amortization of intangible assets and income tax expense.
Corporate assets consist primarily of cash and cash equivalents, deferred tax assets and deferred tax charges.
Summarized financial information for the Company’s reportable segments is shown in the following tables:
(In thousands) 2022 2021 2020
Net sales:
SCEM $ 773,594 $ 625,670 $ 530,040
MC 1,105,996 919,363 742,186
AMH 846,492 704,946 538,682
APS 606,614 85,621 79,492
Inter-segment elimination (50,663) (36,707) (31,087)
Total net sales $ 3,282,033 $ 2,298,893 $ 1,859,313
(In thousands)
2022 2021 2020
Segment profit:
SCEM $ 122,287 $ 137,392 $ 99,474
MC 411,475 321,300 248,910
AMH 183,738 159,995 111,028
APS 96,902 30,415 28,495
Total segment profit $ 814,402 $ 649,102 $ 487,907
(In thousands)
2022 2021 2020
Total assets:
SCEM $ 1,671,456 $ 971,678 $ 866,029
MC 1,161,636 946,336 819,602
AMH 801,591 598,547 437,322
APS 5,864,250 219,787 156,328
Corporate 639,924 455,548 638,415
Total assets $ 10,138,857 $ 3,191,896 $ 2,917,696
(In thousands) 2022 2021 2020
Depreciation and amortization:
SCEM $ 76,550 $ 57,995 $ 62,770
MC 42,514 41,536 39,775
AMH 33,490 29,648 25,231
APS 126,770 8,988 8,647
Corporate — — 99
Total depreciation and amortization $ 279,324 $ 138,167 $ 136,522
(In thousands) 2022 2021 2020
Capital expenditures:
SCEM $ 105,057 $ 68,058 $ 49,711
MC 178,800 69,120 40,656
AMH 136,061 67,096 36,107
APS 46,274 6,352 5,278
Total capital expenditures $ 466,192 $ 210,626 $ 131,752
The following table reconciles total segment profit to income before income taxes and equity in net loss of affiliate:
(In thousands) 2022 2021 2020
Total segment profit $ 814,402 $ 649,102 $ 487,907
Less:
Amortization of intangibles 143,953 47,856 53,092
Unallocated general and administrative expenses 190,468 49,478 39,370
Operating income $ 479,981 $ 551,768 395,445
Interest expense 212,669 41,240 48,600
Interest income (3,694) (243) (786)
Other expense (income), net 23,926 31,695 (6,656)
Income before income tax expense $ 247,080 $ 479,076 $ 354,287
In the following tables, revenue is disaggregated by country or region based on the ship to location of the customer for the years ended December 31, 2022, 2021 and 2020:
2022
(In thousands) SCEM MC AMH APS Inter-segment Total
North America $ 272,696 $ 158,627 $ 265,510 $ 149,489 $ (50,663) $ 795,659
Taiwan 111,921 305,899 151,663 90,644 — 660,127
South Korea 78,675 129,750 121,726 83,926 — 414,077
Japan 87,452 183,485 59,278 19,787 — 350,002
China 95,184 184,609 119,325 102,838 — 501,956
Europe 66,938 85,696 88,405 83,976 — 325,015
Southeast Asia 60,728 57,930 40,585 75,954 — 235,197
$ 773,594 $ 1,105,996 $ 846,492 $ 606,614 $ (50,663) $ 3,282,033
2021
(In thousands) SCEM MC AMH APS Inter-segment Total
North America $ 191,717 $ 133,653 $ 219,853 $ 17,280 $ (36,707) $ 525,796
Taiwan 96,069 225,086 111,968 20,987 — 454,110
South Korea 76,270 114,211 105,493 21,298 — 317,272
Japan 86,442 161,569 51,267 3,325 — 302,603
China 91,272 164,471 97,157 11,519 — 364,419
Europe 43,703 70,011 89,121 6,433 — 209,268
Southeast Asia 40,197 50,362 30,087 4,779 — 125,425
$ 625,670 $ 919,363 $ 704,946 $ 85,621 $ (36,707) $ 2,298,893
2020
(In thousands) SCEM MC AMH APS Inter-segment Total
North America $ 168,270 $ 144,015 $ 164,576 $ 20,739 $ (31,087) $ 466,513
Taiwan 85,406 171,201 94,339 21,259 — 372,205
South Korea 69,235 91,997 92,623 19,345 — 273,200
Japan 71,242 124,321 45,209 2,124 — 242,896
China 68,625 108,588 61,458 9,192 — 247,863
Europe 32,746 67,090 52,321 2,281 — 154,438
Southeast Asia 34,516 34,974 28,156 4,552 — 102,198
$ 530,040 $ 742,186 $ 538,682 $ 79,492 $ (31,087) $ 1,859,313
The following table summarizes property, plant and equipment, net, attributed to significant countries for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Property, plant and equipment:
North America $ 776,913 $ 417,549 $ 348,363
South Korea 84,253 58,725 55,404
Japan 104,282 56,357 41,044
Malaysia 46,703 29,443 32,727
China 253,285 32,133 29,528
Taiwan 31,592 58,444 17,050
Other 96,309 1,447 1,251
$ 1,393,337 $ 654,098 $ 525,367
The Company reported net sales of 10 percent or more for one customer in the amount of $408.6 million, $271.9 million and $208.3 million for the years ended December 31, 2022, 2021 and 2020, respectively, all of which include sales from all the Company’s segments.

v3.22.4

Commitments and Contingent Liabilities
12 Months Ended

Dec. 31, 2022

Commitments and Contingencies Disclosure [Abstract]

Commitments and Contingent Liabilities COMMITMENTS AND CONTINGENT LIABILITIESWe are involved in certain legal actions. The outcomes of these legal actions are not within our complete control and may not be known for prolonged periods of time. In some actions, the claimants seek damages, as well as other relief, that could require significant expenditures or result in lost revenues. We record a liability for these legal actions when a loss is known or considered probable and the amount can be reasonably estimated. If the reasonable estimate of a known or probable loss is a range, and no amount within the range is a better estimate than any other, the minimum amount of the range is accrued.

v3.22.4

Quarterly Information-Unaudited
12 Months Ended

Dec. 31, 2022

Selected Quarterly Financial Information [Abstract]

Quarterly Information-Unaudited QUARTERLY INFORMATION-UNAUDITED

Fiscal quarter ended
(In thousands, except per share data) April 2, 2022 July 2, 2022 October 1, 2022 December 31, 2022
Net sales $ 649,646 $ 692,489 $ 993,828 $ 946,070
Gross profit 309,820 310,397 371,671 404,525
Net income (loss) 125,705 99,491 (73,703) 57,427
Basic net income (loss) per common share 0.93 0.73 (0.50) 0.39
Diluted net income (loss) per common share 0.92 0.73 (0.50) 0.38

Fiscal quarter ended
(In thousands, except per share data) April 3, 2021 July 3, 2021 October 2, 2021 December 31, 2021
Net sales $ 512,844 $ 571,352 $ 579,493 $ 635,204
Gross profit 234,986 265,384 264,204 295,090
Net income 84,676 88,770 117,461 118,219
Basic net income per common share 0.63 0.66 0.87 0.87
Diluted net income per common share 0.62 0.65 0.86 0.87

v3.22.4

Subsequent Events
12 Months Ended

Dec. 31, 2022

Subsequent Events [Abstract]

Subsequent Events [Text Block] SUBSEQUENT EVENTS On January 20, 2023, the Company announced a definitive agreement for Quad-C Management to acquire the QED business, which became part of the Company with the recent acquisition of CMC Materials. The selling price is expected to be approximately $135.0 million, subject to customary purchase price adjustments. The sale is currently expected to close in the first quarter of 2023, subject to the satisfaction of certain customary closing conditions, including, among others, receipt of regulatory approval. The Company does not expect a material gain or loss from the sale of the QED business.

v3.22.4

Summary of Significant Accounting Policies (Policies)
12 Months Ended

Dec. 31, 2022

Accounting Policies [Abstract]

Nature of Operations Nature of Operations Entegris, Inc. (“Entegris”, “the Company”, “we”, or “our”) is a leading supplier of advanced materials and process solutions for the semiconductor and other high-technology industries.

Principles of Consolidation Principles of Consolidation The consolidated financial statements include the accounts of the Company and its majority-owned subsidiaries. Our recently acquired subsidiary, CMC Materials, Inc., follows a monthly reporting calendar and the Company follows a 5-4-4 week reporting calendar. CMC Materials, Inc.’s and the Company’s fourth quarter ends December 31, 2022. The Company believes that use of the different fiscal periods for this entity has not had a material impact on the Company’s consolidated financial position, results of operations, or cash flows. Intercompany profits, transactions and balances have been eliminated in consolidation.

Use of Estimates Use of Estimates and Basis of Presentation The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States requires management to make judgments, estimates and assumptions that affect the amounts reported in the consolidated financial statements and accompanying notes. On an ongoing basis, Entegris evaluates its estimates, including those related to receivables, inventories, property, plant and equipment, goodwill, intangible assets, accrued liabilities, income taxes and share-based compensation, among others. Actual results could differ from those estimates.

Cash and Cash Equivalents Cash and Cash Equivalents Cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less, which are valued at cost and approximate fair value.

Allowance For Doubtful Accounts Allowance for Credit Losses An allowance for uncollectible trade receivables is estimated based on a combination of write-off history, aging analysis and any specific, known troubled accounts. The Company maintains an allowance for credit losses that management believes is adequate to cover expected losses on trade receivables.

Inventories Inventories Inventories are stated at the lower of cost and net realizable value. Cost is determined by the first-in, first-out (FIFO) method.

Leases
Leases The Company determines if an arrangement is a lease at inception. Right-of-use (ROU) assets include operating leases. Lease liabilities for operating leases are classified in “Other accrued liabilities” and “Long-term lease liabilities” in our consolidated balance sheet. We do not have material finance leases.
Operating assets and liabilities are recognized at commencement date based on the present value of the lease payments over the lease term. As most of our leases do not provide an implicit rate, we use our incremental borrowing rate based on the information available at commencement date in determining the present value of lease payments. We use the implicit rate when readily determinable. The ROU assets include prepaid lease payments and exclude lease incentives. Lease terms may include options to extend or terminate the lease when it is reasonably certain that the Company will exercise that option. Lease expense for lease payments is recognized on a straight-line basis over the lease term.
Lease and non-lease components are generally accounted for separately for real estate leases. For non-real estate leases, we account for the lease and non-lease components as a single lease component.

Property, Plant, And Equipment Property, Plant and Equipment Property, plant and equipment are carried at cost and are depreciated using the straight-line method over the estimated useful lives of the assets. When assets are retired or disposed of, the cost and related accumulated depreciation are removed from the accounts, and gains or losses are recognized in the same period. Maintenance and repairs are expensed as incurred, while significant additions and improvements are capitalized. Long-lived assets, including property, plant and equipment, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset or group of assets may not be recoverable based on estimated future undiscounted cash flows. The amount of impairment, if any, is measured as the difference between the net book value and the estimated fair value of the asset(s).

Fair Value of Financial Instruments Fair Value of Financial Instruments The carrying value of cash equivalents, accounts receivable, accounts payable, accrued payroll and related benefits, and other accrued liabilities approximates fair value due to the short maturity of those instruments. Fair value is defined as the price that would be received from the sale of an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date. The three-level hierarchy for disclosure is based on the extent and level of judgment used to estimate fair value. Level 1 inputs consist of valuations based on quoted market prices in active markets for identical assets or liabilities. Level 2 inputs consist of valuations based on quoted prices for similar assets or liabilities, quoted prices for identical assets or liabilities in an inactive market, or other observable inputs. Level 3 inputs consist of valuations based on unobservable inputs that are supported by little or no market activity.

Goodwill and Intangible Assets
Goodwill and Intangible Assets Goodwill represents the excess of acquisition costs over the fair value of the net assets of businesses acquired. Goodwill is not subject to amortization, but is tested for impairment annually at August 31, the Company’s annual testing date, and whenever events or changes in circumstances indicate that impairment may have occurred. The Company compares the carrying value of its reporting units, including goodwill, to their fair value. For reporting units in which the assessment indicates that it is more likely than not that the fair value is more than its carrying value, goodwill is not considered impaired. If the carrying value of the reporting unit exceeds fair value, goodwill is considered impaired.
Based on its annual analysis, the Company determined there was no indication of impairment of goodwill and the estimated fair value of each reporting unit exceeded its carrying value.
Amortizable intangible assets include, among other items, patented, unpatented and other developed technology and customer-based intangibles, and are amortized using the straight-line method over their respective estimated useful lives. The Company reviews intangible assets and other long-lived assets for impairment if changes in circumstances or the occurrence of events suggest the remaining value may not be recoverable.

Derivative Financial Instruments
Derivative Financial Instruments The Company is exposed to various market risks, including risks associated with interest rates and foreign currency exchange rates. We enter into certain derivative transactions to mitigate the volatility associated with these exposures. We have policies in place that define acceptable instrument types we may enter into and we have established controls to limit our market risk exposure. We do not use derivative financial instruments for trading or speculative purposes. In addition, all derivatives, whether designated in hedging relationships or not, are recorded on the consolidated balance sheets at fair value on a gross basis.
Interest Rate Swap
The fair value of the interest rate swap is estimated using standard valuation models using market-based observable inputs over the contractual term, including one-month Secured Overnight Financing Rate (“SOFR”) based yield curves, among others. We consider the risk of nonperformance, including counterparty credit risk, in the calculation of the fair value. We have designated this swap agreement as a cash flow hedge. As a cash flow hedge, unrealized gains are recognized as assets and unrealized losses are recognized as liabilities. Unrealized gains and losses are designated as effective or ineffective based on a comparison of the changes in fair value of the interest rate swap and changes in fair value of the underlying exposures being hedged. The effective portion is recorded as a component of accumulated other comprehensive loss, while the ineffective portion is recorded as a component of Interest expense. Changes in the method by which we pay interest from one-month SOFR to another rate of interest could create ineffectiveness in the swap, and result in amounts being reclassified from other comprehensive income (loss) into net income. Hedge effectiveness is tested quarterly to determine if hedge treatment is appropriate. Realized gains and losses are recorded on the same financial statement line as the hedged item, which is Interest expense.
Foreign Currency Contracts Not Designated as Hedges
On a periodic basis, we enter into forward foreign exchange contracts in an effort to mitigate the risks associated with currency fluctuations on certain foreign currency balance sheet exposures. These foreign exchange contracts do not qualify for hedge accounting; therefore, the gains and losses resulting from the impact of currency exchange rate movements on our forward foreign exchange contracts are recognized as Other expense (income), net in the accompanying consolidated statements of operations in the period in which the exchange rates change.

Foreign Currency Translation Foreign Currency Translation Assets and liabilities of certain foreign subsidiaries are translated from foreign currencies into U.S. dollars at period-end exchange rates, and the resulting gains and losses arising from translation of net assets located outside the U.S. are recorded as a cumulative translation adjustment, a component of accumulated other comprehensive loss in the consolidated balance sheets. Income statement amounts are translated at the average exchange rates for the year. Translation adjustments are not adjusted for income taxes, as substantially all translation adjustments relate to permanent investments in non-U.S. subsidiaries. Gains and losses resulting from foreign currency transactions are included in Other expense (income), net, in the Company’s consolidated statements of operations.

Revenue Recognition
Revenue Recognition Revenue is measured based on consideration specified in a contract with a customer, and excludes any sales incentives and amounts collected on behalf of third parties. The Company recognizes revenue when it satisfies a performance obligation by transferring control over a product or service to a customer.
Taxes assessed by a governmental authority that are both imposed on and concurrent with a specific revenue-producing transaction, that are collected by the Company from a customer, are excluded from revenue.
Shipping and handling costs associated with outbound freight after control over a product has transferred to a customer are accounted for as a fulfillment cost and are included in cost of sales.
The Company recognizes the incremental costs of obtaining contracts as an expense when incurred if the amortization period of the assets that the Company otherwise would have recognized is one year or less.
When the Company receives consideration, or such consideration is unconditionally due, from a customer prior to transferring goods or services to the customer under the terms of a sales contract, the Company records deferred revenue, which represents a contract liability. Such deferred revenue typically results from advance payments received on sales of the Company’s products. The Company makes the required disclosures with respect to deferred revenue in Note 2 to the consolidated financial statements.
The Company does not disclose information about remaining performance obligations that have original expected durations of one year or less.
The following is a description of principal activities from which the Company generates its revenues. The Company has four reportable segments. For more detailed information about reportable segments, see Note 20 to the consolidated financial statements. For each of the four reportable segments, the recognition of revenue regarding the nature of goods and services provided by the segments are similar and described below. The Company recognizes revenue for product sales at a point in time following the transfer of control of such products to the customer, which generally occurs upon shipment or delivery, depending on the terms of the underlying contracts. For product sales contracts that contain multiple performance obligations, the Company allocates the transaction price to each performance obligation identified in the contract based on relative standalone selling prices, or estimates of such prices, and recognizes the related revenue as control of each individual product is transferred to the customer in satisfaction of the corresponding performance obligations. All material revenue is being recognized at a point in time.
The Company generally recognizes revenue for sales of services when the Company has satisfied the performance obligation. The payment terms and revenue recognized are based on time and materials.
The Company also enters into arrangements to license its intellectual property. These arrangements typically permit the customer to use a specialized manufacturing process and in return the Company receives a royalty fee. The Company recognizes revenue for a sales-based or usage-based royalty promised in exchange for a license of intellectual property when the subsequent sale or usage occurs.
The Company offers certain customers cash discounts and volume rebates as sales incentives. The discounts and volume rebates are recorded as a reduction in sales at the time revenue is recognized in an amount estimated based on historical experience and contractual obligations. The Company periodically reviews the assumptions underlying its estimates of discounts and volume rebates and adjusts its revenues accordingly.
In addition, the Company offers free product rebates to certain customers. The Company utilizes an adjusted market approach to estimate the stand-alone selling price of the loyalty program and allocates a portion of the consideration received to the free product offering. The free product offering is redeemable upon future purchases of the Company’s products. The amount associated with free product rebates is recorded as deferred revenue on the balance sheet and is recognized as revenue when the free product is redeemed or when the likelihood of redemption is remote. The Company has deemed that the amount is immaterial for disclosure.
The Company provides for the estimated costs of fulfilling its obligations under product warranties at the time the related revenue is recognized. The Company estimates the costs based on historical failure rates, projected repair costs, and knowledge of specific product failures (if any). The specific warranty terms and conditions vary depending upon the product sold and the country in which we do business, but generally include parts and labor over a period generally ranging from 90 days to one year. The Company regularly reevaluates its estimates to assess the adequacy of the recorded warranty liabilities and adjusts the amounts as necessary.
The Company’s contracts are generally short-term in nature. Most contracts do not exceed twelve months. Payment terms vary by the type and location of the Company’s customers and the products or services offered. The term between invoicing and when payment is due is not significant. For certain products or services and customer types, the Company requires payment before the products or services are delivered to the customer. Those customers that prepay are represented by the contract liabilities until the performance obligations are satisfied.

Engineering,Research and Development Expenses Engineering, Research and Development Expenses Engineering, research and development expenses are expensed as incurred.

Share-Based Compensation Share-based Compensation The Company measures the cost of employee services received in exchange for the award of equity instruments based on the fair value of the award at the date of grant. Share-based compensation expense is recognized using the straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments recorded for forfeitures as they occur. Awards issued to employees who are retirement eligible or nearing retirement eligibility are expensed on an accelerated basis.

Income Taxes Income Taxes The Company accounts for income taxes under the asset and liability method, which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been included in the financial
statements. Under this method, deferred tax assets and liabilities are determined on the basis of the differences between the financial statements and tax basis of assets and liabilities using enacted tax rates in effect for the year in which the differences are expected to reverse. The effect of a change in tax rates on deferred tax assets and liabilities is recognized in income tax expense in the period that includes the enactment date.
The Company recognizes deferred tax assets to the extent that it believes these assets are more likely than not to be realized. A valuation allowance is recorded to reduce deferred tax assets when it is more likely than not that the Company would not be able to realize all or part of its deferred tax assets. In making such a determination, the Company considers all available positive and negative evidence, including future reversals of existing temporary differences, projected future taxable income, tax-planning strategies, and results of recent operations. If the Company determines that it would be able to realize its deferred tax assets in the future in excess of their net recorded amount, the Company would make an adjustment to the deferred tax asset valuation allowance, which would reduce the provision for income taxes.
The Company’s policy for recording interest and penalties associated with audits and unrecognized tax benefits is to record such items as a component of income before taxes. Penalties and interest to be paid or received are recorded in other expense (income), net, in the statement of operations.

Comprehensive Income (Loss) Comprehensive Income Comprehensive income represents the change in equity resulting from items other than shareholder investments and distributions. The Company’s foreign currency translation adjustments, unrealized gains and losses on available-for-sale investments, interest rate swap - cash flow hedge and minimum pension liability adjustments are included in accumulated other comprehensive loss. Comprehensive income and the components of accumulated other comprehensive loss are presented in the accompanying consolidated statements of comprehensive income and consolidated statements of equity.

Recent Accounting Pronouncements
Recent Accounting Pronouncements Adopted in 2022 In October 2021, the FASB issued ASU 2021-08, Business Combinations (Topic 805), Accounting for Contract Assets and Contract Liabilities from Contracts with Customers, which requires an acquirer to recognize and measure contract assets and liabilities acquired in a business combination in accordance with Revenue from Contracts with Customers ("Topic 606") rather than adjust them to fair value at the acquisition date. The Company adopted ASU No. 2021-08 on July 3, 2022 and adopted prospectively, and there was no material effect on its consolidated financial statements.
In November 2021, the FASB issued ASU 2021-10, Government Assistance (Topic 832): Disclosures by Business Entities about Government Assistance. This update requires annual disclosures about transactions with a government that are accounted for by applying a grant or contribution accounting model by analogy. The Company adopted the ASU 2021-10 in the fourth quarter of 2022 and applied prospectively. The adoption of this standard did not have a material impact on the Company's consolidated financial statements and related disclosures.
Recent Accounting Pronouncements Yet to be Adopted
The Company currently has no material recent accounting pronouncements yet to be adopted.

v3.22.4

Revenues (Tables)
12 Months Ended

Dec. 31, 2022

Revenue from Contract with Customer [Abstract]

Contract with Customer, Asset and Liability
The following table provides information about current contract liabilities from contracts with customers. The contract liabilities are included in other accrued liabilities balance in the consolidated balance sheet.
(In thousands) 2022 2021
Balance at beginning of year $ 23,050 $ 13,852
Additions due to acquisition 11,108 —
Revenue recognized that was included in the contract liability balance at the beginning of the period (30,667) (13,819)
Increases due to cash received, excluding amounts recognized as revenue during the period 57,490 23,017
Contract liabilities included in asset held-for-sale (505) —
Balance at end of year $ 60,476 $ 23,050

v3.22.4

Business Combinations and Asset Acquisitions (Tables)
12 Months Ended

Dec. 31, 2022

CMC Materials

Business Acquisition

Schedule of Business Acquisitions by Acquisition, Equity Interest Issued or Issuable
The purchase price of CMC Materials consisted of the following:

(In thousands)
Cash paid to CMC Materials’ shareholders $ 3,836,983
Stock paid to CMC Materials’ shareholders 1,265,690
Repayment of CMC Materials’ indebtedness 918,578
Total purchase price 6,021,251
Less cash and cash equivalents acquired 280,636
Total purchase price, net of cash acquired $ 5,740,615

Schedule of Business Acquisitions, by Acquisition
The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the Merger as originally reported and as of December 31, 2022:

(In thousands) As of July 6, 2022 As of December 31, 2022
Cash and cash equivalents $ 280,636 $ 280,636
Accounts receivable and other current assets 206,887 205,395
Inventory 256,598 256,598
Property, plant and equipment 534,363 537,386
Identifiable intangible assets 1,727,119 1,729,019
Other noncurrent assets 44,149 39,741
Current liabilities (213,089) (211,046)
Deferred tax liabilities and other noncurrent liabilities (448,550) (444,935)
Net assets acquired 2,388,113 2,392,794
Goodwill 3,633,138 3,628,457
Total purchase price $ 6,021,251 $ 6,021,251

Finite-Lived and Indefinite-Lived Intangible Assets Acquired as Part of Business Combination [Table Text Block]
The Company recognized the following provisional intangible assets as part of the acquisition of CMC Materials and finite lived assets will be amortized on a straight-line basis:

(In thousands) Amount Weighted
average life in
years
Developed technology $ 1,035,600 7.3
Trademarks and trade names 236,600 14.9
Customer relationships 414,800 18.7
In-process research and development(1)
31,100
Other 10,919 1.2
$ 1,729,019 11.1

Business Acquisition, Pro Forma Information The following unaudited pro forma financial information presents the combined results of operations of the Company as if the acquisition of CMC Materials had occurred as of the beginning of the years presented. The unaudited pro forma financial information is not necessarily indicative of what the Company’s consolidated results of operations would have been had the acquisition occurred at the beginning of each year. In addition, the unaudited pro forma financial information does not attempt
to project the future results of operations of the combined company. The pro forma information does not include any potential revenue enhancements, cost synergies or other operating efficiencies that could result from the acquisition.

Year Ended
(In thousands) December 31, 2022 December 31, 2021
Net sales $ 3,920,850 $ 3,518,893
Net income (loss) 308,741 (161,756)
Per share amounts:
Net income (loss) per common share - basic $ 2.08 $ (1.09)
Net income (loss) per common share - diluted $ 2.05 $ (1.09)

Precision Microchemicals

Business Acquisition

Schedule of Business Acquisitions, by Acquisition During the quarter ended April 2, 2022, the Company finalized its fair value determination of the assets acquired and the liabilities assumed. The following table summarizes the final allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the acquisition:
(In thousands) November 30, 2021 As of April 2, 2022
Inventories, net $ 967 $ 967
Other current assets 19 19
Identifiable intangible assets 44,910 44,910
Right-of-use assets 1,912 1,912
Property, plant and equipment 1,002 1,002
Other noncurrent assets 18 18
Accounts payable and accrued liabilities (43) (30)
Short-term lease liability (170) (170)
Long-term lease liability (1,742) (1,742)
Net assets acquired 46,873 46,886
Goodwill 42,819 42,824
Total purchase price, net of cash acquired $ 89,692 $ 89,710

Finite-Lived and Indefinite-Lived Intangible Assets Acquired as Part of Business Combination [Table Text Block]
The Company recognized the following provisional finite-lived intangible assets as part of the acquisition of the Precision Microchemical business:
(In thousands) Amount Weighted
average life in
years
Developed technology $ 9,600 9.0
Trademarks and trade names 3,400 15.0
Customer relationships 31,800 15.5
Other 110
$ 44,910 14.1

v3.22.4

Cash, Cash Equivalents and Restricted Cash (Tables)
12 Months Ended

Dec. 31, 2022

Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents [Abstract]

Restrictions on Cash and Cash Equivalents
The following table provides a reconciliation of cash, cash equivalents and restricted cash reported within the consolidated balance sheet that sum to the total of the same amounts shown in the consolidated statement of cash flows.
(In thousands) December 31, 2022 December 31, 2021
Cash and cash equivalents $ 561,559 $ 402,565
Restricted cash 1,880 —
Total cash, cash equivalents and restricted cash $ 563,439 $ 402,565

v3.22.4

Assets Held For Sale (Tables)
12 Months Ended

Dec. 31, 2022

Assets Held-for-sale, Not Part of Disposal Group [Abstract]

Disclosure of Long-Lived Assets Held-for-sale [Table Text Block]
Assets-held-for sale comprise the following as of December 31, 2022:
(In thousands)
Assets: December 31, 2022
Accounts Receivable $ 16,103
Inventory 29,331
Other current assets 633
Property, Plant and Equipment, net 108,036
Intangible assets, net 76,319
Goodwill 8,822
Other assets 7,287
Total assets-held-for sale $ 246,531
Liabilities:
Accounts payable $ 4,185
Accrued expenses 5,029
Long-term liabilities 1,423
Total liabilities-held-for sale $ 10,637

v3.22.4

Trade Accounts and Notes Receivable (Tables)
12 Months Ended

Dec. 31, 2022

Accounts, Notes, Loans and Financing Receivable, Gross, Allowance, and Net [Abstract]

Trade Accounts and Notes Receivable Trade accounts and notes receivable from customers at December 31, 2022 and 2021 consist of the following:
(In thousands) 2022 2021
Accounts receivable $ 536,256 $ 347,111
Notes receivable 4,672 2,651
Total trade accounts and notes receivable 540,928 349,762
Less allowance for credit losses 5,443 2,349
Trade accounts and notes receivable, net $ 535,485 $ 347,413

v3.22.4

Inventories (Tables)
12 Months Ended

Dec. 31, 2022

Inventory Disclosure [Abstract]

Inventories
Inventories at December 31, 2022 and 2021 consist of the following:
(In thousands) 2022 2021
Raw materials $ 337,576 $ 191,986
Work-in-process 60,182 40,257
Finished goods (a)
415,057 242,970
Inventories, net $ 812,815 $ 475,213
(a) Includes consignment inventories held by customers of $46.2 million and $16.0 million at December 31, 2022 and 2021, respectively.

v3.22.4

Property, Plant and Equipment (Tables)
12 Months Ended

Dec. 31, 2022

Property, Plant and Equipment [Abstract]

Property, Plant and Equipment Property, plant and equipment at December 31, 2022 and 2021 consists of the following:
(In thousands) 2022 2021 Estimated
useful lives in
years
Land $ 62,192 $ 24,000
Buildings and improvements 490,903 281,019
5-35
Manufacturing equipment 569,224 415,985
5-10
Canisters and cylinders 168,516 142,071
3-12
Molds 76,388 77,708
3-5
Office furniture and lab equipment 330,284 189,258
3-8
Construction in progress 465,923 177,161
Total property, plant and equipment 2,163,430 1,307,202
Less accumulated depreciation 770,093 653,104
Property, plant and equipment, net $ 1,393,337 $ 654,098

Depreciation Expense The table below sets forth the depreciation expense for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Depreciation expense $ 135,371 $ 90,311 $ 83,430

v3.22.4

Goodwill and Intangible Assets (Tables)
12 Months Ended

Dec. 31, 2022

Goodwill and Intangible Assets Disclosure [Abstract]

Schedule of Goodwill Goodwill activity for each of the Company’s reportable segments that carry goodwill, Specialty Chemicals and Engineered Materials (“SCEM”), Microcontamination Control (“MC”), Advanced Materials Handling (“AMH”), and Advanced Planarization Solutions (“APS”) for the years ended December 31, 2022 and 2021 is shown below:
(In thousands) SCEM MC AMH APS Total
December 31, 2020 $ 427,713 $ 247,154 $ 73,170 $ — $ 748,037
Addition due to acquisitions 42,819 — 932 — 43,751
Purchase accounting adjustments — — — — —
Foreign currency translation 343 1,571 — — 1,914
December 31, 2021 470,875 248,725 74,102 — 793,702
Addition due to acquisition 210,122 — — 3,418,335 3,628,457
Purchase accounting adjustments 5 — — — 5
Goodwill reallocation (110,798) — — 110,798 —
Goodwill included in assets held-for-sale (8,822) — — — (8,822)
Foreign currency translation (54) (6,637) — 1,680 (5,011)
December 31, 2022 $ 561,328 $ 242,088 $ 74,102 $ 3,530,813 $ 4,408,331

Schedule of Acquired Finite-Lived Intangible Assets by Major Class
Identifiable intangible assets at December 31, 2022 and 2021 consist of the following:
2022
(In thousands) Gross carrying
amount Accumulated
amortization Net carrying
value Weighted
average life in
years
Developed technology $ 1,302,101 $ 313,876 $ 988,225 7.3
Trademarks and trade names 250,473 29,565 220,908 14.3
Customer relationships 863,947 273,039 590,908 15.4
In-process research and development (1)
31,100 — 31,100
Other 31,206 20,392 10,814 4.3
$ 2,478,827 $ 636,872 $ 1,841,955 10.8
(1) Intangible assets acquired in a business combination that are in-process and used in research and development activities are considered indefinite-lived until the completion or abandonment of the research and development efforts. Once the research and development efforts are completed, we determine the useful life and begin amortizing the assets.
2021
(In thousands) Gross carrying
amount Accumulated
amortization Net carrying
value Weighted
average life in
years
Developed technology $ 293,982 $ 232,722 $ 61,260 7.2
Trademarks and trade names 33,553 20,340 13,213 10.6
Customer relationships 481,674 227,350 254,324 12.4
Other 20,505 14,189 6,316 6.6
$ 829,714 $ 494,601 $ 335,113 10.3

Amortization of Intangibles The table below sets forth the amortization expense for finite-lived intangible assets for the years ended December 31, 2022, 2021, and 2020:
(In thousands) 2022 2021 2020
Amortization expense $ 143,953 $ 47,856 $ 53,092

Estimated Future Amortization Expense
(In thousands) 2023 2024 2025 2026 2027 Thereafter Total
Future amortization expense $ 230,469 211,437 204,917 203,373 199,859 791,900 $ 1,841,955

v3.22.4

Debt (Tables)
12 Months Ended

Dec. 31, 2022

Debt Disclosure [Abstract]

Schedule of Debt debt at December 31, 2022 and 2021 consists of the following:
(In thousands) 2022 2021
Senior secured term loan facility due 2029 $ 2,495,000 $ —
Senior secured notes due 2029 1,600,000 —
Senior unsecured notes due 2030 895,000 —
Senior unsecured notes due 2029 400,000 400,000
Senior unsecured notes due 2028 400,000 400,000
Bridge Credit Facility due 2023 135,000 —
Senior secured term loan facility due 2025 — 145,000
$ 5,925,000 $ 945,000
Unamortized discount and debt issuance costs 140,107 7,973
Total debt, net $ 5,784,893 $ 937,027
Less short-term debt, including current portion of long-term debt 151,965 —
Total long-term debt, net $ 5,632,928 $ 937,027

Schedule of Maturities of Long-term Debt Annual maturities of long-term debt, excluding unamortized discount and issuance costs, due as of December 31, 2022 are as follows:
(In thousands) 2023 2024 2025 2026 2027 Thereafter Total
Contractual debt obligation maturities* $ 153,713 24,950 24,950 24,950 24,950 5,671,487 $ 5,925,000

v3.22.4

Fair Value Measures and Disclosures (Tables)
12 Months Ended

Dec. 31, 2022

Fair Value Disclosures [Abstract]

Fair Value Measurements, Recurring and Nonrecurring [Table Text Block]
The following table presents financial instruments that we measure at fair value on a recurring basis:
Fair Value Measurements at Reporting Date Using
(In thousands) Level 1 Level 2 Level 3 Total
Assets: 2022 2021 2022 2021 2022 2021 2022 2021
Cash and cash equivalents $ 561,559 $ 402,565 $ — $ — $ — $ — $ 561,559 $ 402,565
Restricted cash 1,880 — — — — — 1,880 —
Derivative financial instruments - Interest rate swap - cash flow hedge — — 46,589 — — — 46,589 —
Derivative financial instruments -Forward exchange contracts — — 726 — — — 726 —
Total Assets $ 563,439 $ 402,565 $ 47,315 $ — $ — $ — $ 610,754 $ 402,565
Liabilities:
Derivative financial instruments - Forward exchange contracts $ — $ — $ 193 $ — $ — $ — $ 193 $ —
Total Liabilities $ — $ — $ 193 $ — $ — $ — $ 193 $ —

Schedule of Carrying Values and Estimated Fair Values of Debt Instruments
The estimated fair value and carrying value of our debt as of December 31, 2022 and 2021 were as follows:
December 31, 2022 December 31, 2021
(In thousands) Carrying Value Fair Value Carrying Value Fair Value
Total debt, net $ 5,784,893 $ 5,428,900 $ 937,027 $ 952,500

v3.22.4

Derivative Instruments and Hedging Activities (Tables)
12 Months Ended

Dec. 31, 2022

Derivative Instruments and Hedging Activities Disclosure [Abstract]

Open Forward Foreign Currency Contract
The Company enters into foreign exchange contracts in an effort to mitigate the risks associated with currency fluctuations on certain foreign currency balance sheet exposures. These foreign exchange contracts do not qualify for hedge accounting.
The notional amounts of our derivative instruments are as follows:
(In thousands) December 31, 2022 December 31, 2021
Derivatives designated as hedging instruments:
Interest rate swap contract - Cash flow hedge $ 1,950,000 $ —
Derivatives not designated as hedging instruments:
Foreign exchange contracts to purchase U.S. dollars $ 3,995 $ —
Foreign exchange contracts to sell U.S. dollars 26,255 —

Fair Value, by Balance Sheet Grouping The fair values of our derivative instruments included in the consolidated balance sheets are as follows:
(In thousands) Derivative Assets Derivative Liabilities
Consolidated Balance Sheet Location December 31, 2022 December 31, 2021 December 31, 2022 December 31, 2021
Derivatives designated as hedging instruments - Interest rate swap contract -cash flow hedge
Other current assets $ 32,481 $ — $ — $ —
Other assets - long-term 14,108 — — —
Derivatives not designated as hedging instruments -Foreign exchange contracts
Other current assets $ 726 $ — $ — $ —
Other accrued liabilities — — 193 —

Schedule of Other Operating Cost and Expense, by Component
The following table summarizes the effects of our derivative instruments on our consolidated statements of operations for the years ended December 31, 2022, 2021 and 2020:
(In thousands)
Derivatives not designated as hedging instruments:
Consolidated Statements of Operations Location
2022 2021 2020
Foreign exchange contracts Other expense, net $ (3,435) $ — $ —

Schedule of Cash Flow Hedges Included in Accumulated Other Comprehensive Income (Loss)
The following table summarizes the effects of our derivative instruments on Accumulated Other Comprehensive Income for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Derivatives designated as hedging instruments:
Interest rate swap contract - Cash flow hedge $ 36,069 $ — $ —
We expect approximately $32.5 million to be reclassified from Accumulated other comprehensive income into Interest expense, net during the next twelve months related to our interest rate swap based on projected rates of the SOFR forward curve as of December 31, 2022.

v3.22.4

Other Income (Expense), Net (Tables)
12 Months Ended

Dec. 31, 2022

Other Income and Expenses [Abstract]

Schedule of Other Nonoperating Income (Expense) [Table Text Block] The table below sets forth the Other expense (income), net for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Loss (gain) on foreign currency remeasurement $ 23,034 $ 7,857 $ (9,751)
Loss on extinguishment of debt and modification 3,287 23,338 2,378
Other, net (2,395) 500 717
Other expense (income), net $ 23,926 $ 31,695 $ (6,656)

v3.22.4

Lease Commitments (Tables)
12 Months Ended

Dec. 31, 2022

Leases [Abstract]

operating leases balance sheet As of December 31, 2022 and 2021, the Company’s operating lease components with initial or remaining terms in excess of one year were classified on the consolidated balance sheets as follows, together with certain supplemental balance sheet information:
(In thousands)
Classification 2022 2021
Assets
Right-of-use assets Right-of-use assets $ 94,940 $ 66,563
Liabilities
Short-term lease liability Other accrued liabilities 19,025 10,638
Long-term lease liability Long-term lease liability 80,716 60,101
Total lease liabilities $ 99,741 $ 70,739
Lease Term and Discount Rate
Weighted average remaining lease term (years) 7.8 9.2
Weighted average discount rate 4.1 % 4.2 %

Lease, Cost Expense for leases less than 12 months for the year ended December 31, 2022, 2021 and 2020 were not material. The components of lease expense for the year ended December 31, 2022, 2021 and 2020 are as follows:
(In thousands)
2022 2021 2020
Operating lease cost $ 17,997 $ 13,127 $ 13,576

Lease Operating Lease, Cash Flow Information The Company combines the amortization of the right-of-use assets and the change in the operating lease liability in the same line item in the Statement of Cash Flows. Other information related to the Company’s operating leases for the year ended December 31, 2022, 2021 and 2020 are as follows:
(In thousands)
2022 2021 2020
Cash paid for amounts included in the measurement of lease liabilities:
Operating cash flows from leases $ 14,916 $ 11,009 $ 10,806
Right-of-use assets obtained in exchange for lease obligations:
Operating leases $ 23,598 $ 31,492 $ 5,133

Lessee, Operating Lease, Liability, Maturity Future minimum lease payments for noncancellable operating leases as of December 31, 2022, were as follows:
(In thousands) 2022
One Year $ 22,817
Two Years 18,252
Three Years 13,990
Four Years 11,919
Five Years 10,455
Beyond Five Years 39,863
Total $ 117,296
Less: Interest 17,555
Present value of lease liabilities $ 99,741

v3.22.4

Asset Retirement Obligations (Tables)
12 Months Ended

Dec. 31, 2022

Asset Retirement Obligation [Abstract]

Schedule of Asset Retirement Obligations Changes in the carrying amounts of the Company’s AROs for the years ended December 31, 2022 and 2021 are shown below:
(In thousands)
2022 2021
Balance at beginning of year $ 17,494 $ 14,500
Liabilities assumed in acquisitions 12,531 —
Liabilities settled (453) (78)
Liabilities incurred 788 3,274
Accretion expense 213 166
Disposition (2,815) —
Revision of estimate 277 (368)
Balance at end of year $ 28,035 $ 17,494

v3.22.4

Income Taxes (Tables)
12 Months Ended

Dec. 31, 2022

Income Tax Disclosure [Abstract]

Income (Loss) Before Income Taxes Income before income taxes for the years ended December 31, 2022, 2021 and 2020 was derived from the following sources:
(In thousands) 2022 2021 2020
Domestic $ (272,365) $ 137,145 $ 86,572
Foreign 519,445 341,931 267,715
Income before income tax expense $ 247,080 $ 479,076 $ 354,287

Components of Income Tax Expense Income tax expense for the years ended December 31, 2022, 2021 and 2020 is summarized as follows:
(In thousands) 2022 2021 2020
Current:
Federal $ 39,216 $ 9,187 $ 8,107
State 4,077 2,939 1,151
Foreign 97,611 76,257 57,310
140,904 88,383 66,568
Deferred (net of valuation allowance):
Federal (90,238) (11,726) (592)
State (5,749) (498) (407)
Foreign (6,757) (6,209) (6,251)
(102,744) (18,433) (7,250)
Income tax expense $ 38,160 $ 69,950 $ 59,318

Reconciliation of Income Tax Expense With Expected Amounts Based Upon Statutory Federal Tax Rates Income tax expense differs from the expected amounts based upon the statutory federal tax rates for the years ended December 31, 2022, 2021 and 2020 as follows:
(In thousands) 2022 2021 2020
Expected federal income tax at statutory rate $ 51,887 $ 100,606 $ 74,400
State income taxes before valuation allowance, net of federal tax effect (5,907) (1,333) (1,539)
Effect of foreign source income (7,607) (15,862) (7,877)
Tax contingencies 5,762 4,696 1,688
Valuation allowance 8,052 9,984 9,281
U.S. federal research credit (13,525) (8,469) (7,204)
Equity compensation 5,290 (8,899) (8,231)
Foreign derived intangible income (15,265) (6,496) (1,153)
Legal entity restructuring capital loss — (5,079) —
Acquisition related retention, severance, and transaction costs 8,924 — —
Other items, net 549 802 (47)
Income tax expense $ 38,160 $ 69,950 $ 59,318

Deferred Tax Assets And Deferred Tax Liabilities The significant components of the Company’s deferred tax assets and deferred tax liabilities at December 31, 2022 and 2021 are as follows:
(In thousands) 2022 2021
Deferred tax assets attributable to:
Accounts receivable $ 1,239 $ 397
Inventory 14,862 6,510
Accruals not currently deductible for tax purposes 25,787 19,636
Net operating loss and credit carryforwards 57,760 42,599
Capital loss carryforward 895 485
Equity compensation 15,249 2,630
Other, net 5,670 7,786
Gross deferred tax assets 121,462 80,043
Valuation allowance (48,047) (39,383)
Total deferred tax assets 73,415 40,660
Deferred tax liabilities attributable to:
Purchased intangible assets (364,979) (33,887)
Depreciation and Amortization (2,719) (9,102)
Total deferred tax liabilities (367,698) (42,989)
Net deferred tax liabilities $ (294,283) $ (2,329)

Reconciliations of Total Amount of Gross Unrecognized Tax Benefits Reconciliations of the beginning and ending balances of the total amounts of gross unrecognized tax benefits for the years ended December 31, 2022 and 2021 are as follows:
(In thousands) 2022 2021
Gross unrecognized tax benefits at beginning of year $ 23,789 $ 17,395
Increase from acquisition 24,452 —
Increase in tax positions from prior years 175 131
Decrease in tax positions from prior years (248) (69)
Increases in tax positions for current year 13,577 8,476
Settlement of tax positions for current year (6,395) (286)
Lapse in statute of limitations (1,872) (1,858)
Gross unrecognized tax benefits at end of year $ 53,478 $ 23,789

v3.22.4

Equity (Tables)
12 Months Ended

Dec. 31, 2022

Equity [Abstract]

Summary of Option Activity Stock option activity for the years ended December 31, 2022, 2021 and 2020 is summarized as follows:
2022 2021 2020
(Shares in thousands) Number of
shares Weighted
average
exercise
price Number of
shares Weighted
average
exercise
price Number of
shares Weighted
average
exercise
price
Options outstanding, beginning of year 657 $ 55.32 1,082 $ 33.38 1,575 $ 21.39
Granted 146 128.44 167 98.11 216 55.72
Assumed in CMC acquisition 1,178 55.80 — — — —
Exercised (141) 40.00 (592) 27.32 (709) 13.60
Cancelled or forfeited (1) 61.42 — — — —
Options outstanding, end of year 1,839 $ 62.59 657 $ 55.32 1,082 $ 33.38
Options exercisable, end of year 1,386 $ 54.53 111 $ 34.54 426 $ 24.99

Summary of Options Outstanding Options outstanding under the Company’s stock plans at December 31, 2022 are summarized as follows:
(Shares in thousands) Options outstanding Options exercisable
Range of exercise prices Number
outstanding Weighted
average
remaining life
in years Weighted-
average
exercise
price Number
exercisable Weighted
average
exercise
price
$— to $31.10
343 1.9 years $ 24.89 343 $ 24.89
$31.11 to $43.47
222 3.4 years 34.05 149 34.40
$43.48 to $55.72
260 3.7 years 53.83 151 52.47
$55.73 to $80.00
663 4.5 years 70.29 663 70.29
$80.01 to $128.44
351 5.6 years 109.43 80 92.50
1,839 4.0 years $ 62.59 1,386 $ 54.53

Weighted Average Assumptions Used In Valuation And Resulting Weighted Average Fair Value Per Option Granted The fair value of each stock option grant was estimated at the date of grant using a Black-Scholes option pricing model. The following table presents the weighted-average assumptions used in the valuation and the resulting weighted-average fair value per option granted for the years ended December 31, 2022, 2021 and 2020:
Employee stock options: 2022 2021 2020
Volatility 40.9 % 38.0 % 31.9 %
Risk-free interest rate 1.5 % 0.4 % 1.4 %
Dividend yield 0.3 % 0.3 % 0.6 %
Expected life (years) 4.2 4.6 4.3
Weighted average fair value per option $ 43.47 $ 30.69 $ 14.83

Summary of Restricted Stock Activity Restricted stock units are awards of common stock made under the Stock Plans that are subject to a risk of forfeiture if the awardee terminates employment with the Company prior to the lapse of the restrictions. The value of such restricted stock units is determined using the market price on the grant date. Compensation expense for restricted stock units is generally recognized using the straight-line single-option method. A summary of the Company’s restricted stock unit activity for the years ended December 31, 2022, 2021 and 2020 is presented in the following table:
2022 2021 2020
(Shares in thousands)
Number
of
shares Weighted
average
grant date
fair value Number
of
shares Weighted
average
grant date
fair value Number
of
shares Weighted
average
grant date
fair value
Unvested, beginning of year 897 $ 62.69 1,083 $ 41.31 1,254 $ 27.48
Granted 366 117.82 293 101.04 437 57.46
Assumed in CMC acquisition 155 92.96 — — — —
Vested (523) 64.77 (439) 35.58 (564) 23.48
Forfeited (51) 85.16 (40) 57.39 (44) 35.86
Unvested, end of year 844 90.37 897 62.69 1,083 41.31

Summary of Allocation of Share Based Compensation Expense The following table summarizes the allocation of share-based compensation expense related to employee stock options, restricted stock awards, performance-based restricted stock awards and grants under the employee stock purchase plan for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Cost of sales $ 5,780 $ 3,844 $ 1,463
Engineering, research and development expenses 4,596 3,504 2,359
Selling, general and administrative expenses 56,201 22,536 19,098
Share-based compensation expense $ 66,577 $ 29,884 $ 22,920
Tax benefit 13,977 5,488 4,129
Share-based compensation expense, net of tax $ 52,600 $ 24,396 $ 18,791

v3.22.4

Benefit Plans (Tables)
12 Months Ended

Dec. 31, 2022

Defined Benefit Plans and Other Postretirement Benefit Plans Disclosures [Abstract]

Schedule of Defined Benefit Plans Disclosures
Defined Benefit Plans
The employees of the Company’s subsidiaries in Japan, Taiwan, South Korea, France and Germany are covered in defined benefit pension plans. As part of the CMC Materials acquisition in 2022, the Company assumed $10.1 million of projected benefit obligation. The Company uses a December 31 measurement date for its pension plans. A summary of these combined plans are:
(In thousands) 2022 2021
Projected benefit obligation $ 15,253 $ 7,050
Fair value of plan assets 1,014 969
Plan assets less benefit obligation - net amount recognized (14,239) (6,081)
Accumulated benefit obligation 12,151 5,995

Expected Contribution And Benefit Payments The Company expects to make the following contributions and benefit payments:
(In thousands) Payments
2023 $ 735
2024 779
2025 1,264
2026 1,127
2027 922
Years 2028-2032
5,940

v3.22.4

Earning Per Share (EPS) (Tables)
12 Months Ended

Dec. 31, 2022

Earnings Per Share [Abstract]

Reconcilation of Share Amount Used in Computaion of Basic and Diluted Earnings Per Share Basic EPS is computed by dividing net income by the weighted average number of shares of common stock outstanding during each period. The following table presents a reconciliation of the share amounts used in the computation of basic and diluted earnings per share:
(In thousands) 2022 2021 2020
Basic earnings per share—Weighted common shares outstanding 142,294 135,411 134,837
Weighted common shares assumed upon exercise of options and vesting of restricted stock units 852 1,163 1,429
Diluted earnings per share—Weighted common shares outstanding 143,146 136,574 136,266

Shares Excluded Underlying Stock Based Awards from Calculations of Diluted EPS The Company excluded the following shares underlying stock-based awards from the calculations of diluted EPS because their inclusion would have been anti-dilutive for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Shares excluded from calculations of diluted EPS 447 136 195

v3.22.4

Segment Information (Tables)
12 Months Ended

Dec. 31, 2022

Segment Reporting [Abstract]

Summary of Financial Information for Reportable Segments
Summarized financial information for the Company’s reportable segments is shown in the following tables:
(In thousands) 2022 2021 2020
Net sales:
SCEM $ 773,594 $ 625,670 $ 530,040
MC 1,105,996 919,363 742,186
AMH 846,492 704,946 538,682
APS 606,614 85,621 79,492
Inter-segment elimination (50,663) (36,707) (31,087)
Total net sales $ 3,282,033 $ 2,298,893 $ 1,859,313
(In thousands)
2022 2021 2020
Segment profit:
SCEM $ 122,287 $ 137,392 $ 99,474
MC 411,475 321,300 248,910
AMH 183,738 159,995 111,028
APS 96,902 30,415 28,495
Total segment profit $ 814,402 $ 649,102 $ 487,907
(In thousands)
2022 2021 2020
Total assets:
SCEM $ 1,671,456 $ 971,678 $ 866,029
MC 1,161,636 946,336 819,602
AMH 801,591 598,547 437,322
APS 5,864,250 219,787 156,328
Corporate 639,924 455,548 638,415
Total assets $ 10,138,857 $ 3,191,896 $ 2,917,696
(In thousands) 2022 2021 2020
Depreciation and amortization:
SCEM $ 76,550 $ 57,995 $ 62,770
MC 42,514 41,536 39,775
AMH 33,490 29,648 25,231
APS 126,770 8,988 8,647
Corporate — — 99
Total depreciation and amortization $ 279,324 $ 138,167 $ 136,522
(In thousands) 2022 2021 2020
Capital expenditures:
SCEM $ 105,057 $ 68,058 $ 49,711
MC 178,800 69,120 40,656
AMH 136,061 67,096 36,107
APS 46,274 6,352 5,278
Total capital expenditures $ 466,192 $ 210,626 $ 131,752

Reconciliation of Total Segment Profit to Operating Income The following table reconciles total segment profit to income before income taxes and equity in net loss of affiliate:
(In thousands) 2022 2021 2020
Total segment profit $ 814,402 $ 649,102 $ 487,907
Less:
Amortization of intangibles 143,953 47,856 53,092
Unallocated general and administrative expenses 190,468 49,478 39,370
Operating income $ 479,981 $ 551,768 395,445
Interest expense 212,669 41,240 48,600
Interest income (3,694) (243) (786)
Other expense (income), net 23,926 31,695 (6,656)
Income before income tax expense $ 247,080 $ 479,076 $ 354,287

Summary of Total Net Sales to External Customers
In the following tables, revenue is disaggregated by country or region based on the ship to location of the customer for the years ended December 31, 2022, 2021 and 2020:
2022
(In thousands) SCEM MC AMH APS Inter-segment Total
North America $ 272,696 $ 158,627 $ 265,510 $ 149,489 $ (50,663) $ 795,659
Taiwan 111,921 305,899 151,663 90,644 — 660,127
South Korea 78,675 129,750 121,726 83,926 — 414,077
Japan 87,452 183,485 59,278 19,787 — 350,002
China 95,184 184,609 119,325 102,838 — 501,956
Europe 66,938 85,696 88,405 83,976 — 325,015
Southeast Asia 60,728 57,930 40,585 75,954 — 235,197
$ 773,594 $ 1,105,996 $ 846,492 $ 606,614 $ (50,663) $ 3,282,033
2021
(In thousands) SCEM MC AMH APS Inter-segment Total
North America $ 191,717 $ 133,653 $ 219,853 $ 17,280 $ (36,707) $ 525,796
Taiwan 96,069 225,086 111,968 20,987 — 454,110
South Korea 76,270 114,211 105,493 21,298 — 317,272
Japan 86,442 161,569 51,267 3,325 — 302,603
China 91,272 164,471 97,157 11,519 — 364,419
Europe 43,703 70,011 89,121 6,433 — 209,268
Southeast Asia 40,197 50,362 30,087 4,779 — 125,425
$ 625,670 $ 919,363 $ 704,946 $ 85,621 $ (36,707) $ 2,298,893
2020
(In thousands) SCEM MC AMH APS Inter-segment Total
North America $ 168,270 $ 144,015 $ 164,576 $ 20,739 $ (31,087) $ 466,513
Taiwan 85,406 171,201 94,339 21,259 — 372,205
South Korea 69,235 91,997 92,623 19,345 — 273,200
Japan 71,242 124,321 45,209 2,124 — 242,896
China 68,625 108,588 61,458 9,192 — 247,863
Europe 32,746 67,090 52,321 2,281 — 154,438
Southeast Asia 34,516 34,974 28,156 4,552 — 102,198
$ 530,040 $ 742,186 $ 538,682 $ 79,492 $ (31,087) $ 1,859,313

Summary of Property, Plant and Equipment Attributed to Significant Countries The following table summarizes property, plant and equipment, net, attributed to significant countries for the years ended December 31, 2022, 2021 and 2020:
(In thousands) 2022 2021 2020
Property, plant and equipment:
North America $ 776,913 $ 417,549 $ 348,363
South Korea 84,253 58,725 55,404
Japan 104,282 56,357 41,044
Malaysia 46,703 29,443 32,727
China 253,285 32,133 29,528
Taiwan 31,592 58,444 17,050
Other 96,309 1,447 1,251
$ 1,393,337 $ 654,098 $ 525,367

v3.22.4

Quarterly Information-Unaudited (Tables)
12 Months Ended

Dec. 31, 2022

Selected Quarterly Financial Information [Abstract]

Quartely Information

Fiscal quarter ended
(In thousands, except per share data) April 2, 2022 July 2, 2022 October 1, 2022 December 31, 2022
Net sales $ 649,646 $ 692,489 $ 993,828 $ 946,070
Gross profit 309,820 310,397 371,671 404,525
Net income (loss) 125,705 99,491 (73,703) 57,427
Basic net income (loss) per common share 0.93 0.73 (0.50) 0.39
Diluted net income (loss) per common share 0.92 0.73 (0.50) 0.38

Fiscal quarter ended
(In thousands, except per share data) April 3, 2021 July 3, 2021 October 2, 2021 December 31, 2021
Net sales $ 512,844 $ 571,352 $ 579,493 $ 635,204
Gross profit 234,986 265,384 264,204 295,090
Net income 84,676 88,770 117,461 118,219
Basic net income per common share 0.63 0.66 0.87 0.87
Diluted net income per common share 0.62 0.65 0.86 0.87

v3.22.4

Revenues Revenues - Contract Liabilities (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Revenue from Contract with Customer [Abstract]

Balance at beginning of year $ 23,050 $ 13,852

Additions due to acquisition 11,108 0

Revenue recognized that was included in the contract liability balance at the beginning of the period (30,667) (13,819)

Increases due to cash received, excluding amounts recognized as revenue during the period 57,490 23,017

Contract liabilities included in asset held-for-sale (505) 0

Balance at end of year $ 60,476 $ 23,050

v3.22.4

Acquisition - Precision Microchemicals (Details) - USD ($)
$ in Thousands
12 Months Ended

Nov. 30, 2021

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Apr. 02, 2022

Business Acquisition

Total purchase price, net of cash acquired $ 4,474,925 $ 91,942 $ 111,912

Goodwill $ 4,408,331 793,702 $ 748,037

Precision Microchemicals

Business Acquisition

Date of acquisition Nov. 30, 2021

Acquisition costs 200

Total purchase price, net of cash acquired $ 89,700

Identifiable intangible assets 44,910 $ 44,910

Inventories, net 967 967

Other current assets 19 19

Right-of-use assets 1,912 1,912

Property, plant and equipment 1,002 1,002

Other noncurrent assets 18 18

Accounts payable and accrued liabilities (43) (30)

Short-term lease liability (170) (170)

Long-term lease liability (1,742) (1,742)

Net Assets Acquired 46,873 46,886

Goodwill 42,819 $ 42,800 42,824

Total purchase price, net of cash acquired $ 89,692 $ 89,710

Acquired Finite-lived Intangible Assets, Weighted Average Useful Life 14 years 1 month 6 days

Precision Microchemicals | Developed Technology

Business Acquisition

Identifiable intangible assets $ 9,600

Acquired Finite-lived Intangible Assets, Weighted Average Useful Life 9 years

Precision Microchemicals | Trademarks and Trade names

Business Acquisition

Identifiable intangible assets $ 3,400

Acquired Finite-lived Intangible Assets, Weighted Average Useful Life 15 years

Precision Microchemicals | Customer Relationships

Business Acquisition

Identifiable intangible assets $ 31,800

Acquired Finite-lived Intangible Assets, Weighted Average Useful Life 15 years 6 months

Precision Microchemicals | Other

Business Acquisition

Identifiable intangible assets $ 110

v3.22.4

Cash, Cash Equivalents and Restricted Cash (Details) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Dec. 31, 2019

Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents [Abstract]

Cash and cash equivalents $ 561,559 $ 402,565 $ 580,893 $ 351,911

Restricted cash 1,880 0

Total cash, cash equivalents and restricted cash $ 563,439 $ 402,565 $ 580,893

v3.22.4

Assets Held For Sale (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Assets Held-for-sale, Not Part of Disposal Group [Abstract]

Income (Loss) from Individually Significant Component Disposed of or Held-for-sale, Excluding Discontinued Operations, before Income Tax $ 4,800

Accounts Receivable 16,103

Inventory 29,331

Other current assets 633

Property, Plant and Equipment, net 108,036

Intangible assets, net 76,319

Goodwill 8,822

Other assets 7,287

Total assets-held-for sale 246,531

Accounts payable 4,185

Accrued expenses 5,029

Long-term liabilities 1,423

Total liabilities-held-for sale $ 10,637 $ 0

v3.22.4

Trade Accounts and Notes Receivable (Detail) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Accounts, Notes, Loans and Financing Receivable, Gross, Allowance, and Net [Abstract]

Accounts receivable $ 536,256 $ 347,111

Notes receivable 4,672 2,651

Total trade accounts and notes receivable 540,928 349,762

Less allowance for doubtful accounts 5,443 2,349

Trade accounts and notes receivable, net $ 535,485 $ 347,413

v3.22.4

Inventories (Detail) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Inventory Net

Raw materials $ 337,576 $ 191,986

Work-in-process 60,182 40,257

Finished goods ^[1] 415,057 242,970

Total inventories $ 812,815 $ 475,213

[1] (a) Includes consignment inventories held by customers of $46.2 million and $16.0 million at December 31, 2022 and 2021, respectively.

v3.22.4

Inventories Inventories - Additional Detail (Details) - USD ($)
$ in Millions

Dec. 31, 2022

Dec. 31, 2021

Inventory Disclosure [Abstract]

Consignment inventory held by customers $ 46.2 $ 16.0

v3.22.4

Property, Plant and Equipment Property, Plant and Equipment - Depreciation Expense (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Property, Plant and Equipment [Abstract]

Depreciation $ 135,371 $ 90,311 $ 83,430

v3.22.4

Goodwill and Intangible Assets Goodwill Rollforward (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Goodwill

Goodwill $ 4,408,331 $ 793,702 $ 748,037

Addition due to acquisition 3,628,457 43,751

Purchase accounting adjustments 5 0

Goodwill, Transfers 0

Assets Held-for-sale, Long-Lived, Fair Value Disclosure (8,822)

Foreign currency translation (5,011) 1,914

SCEM

Goodwill

Goodwill 561,328 470,875 427,713

Addition due to acquisition 210,122 42,819

Purchase accounting adjustments 5 0

Goodwill, Transfers (110,798)

Assets Held-for-sale, Long-Lived, Fair Value Disclosure (8,822)

Foreign currency translation (54) 343

MC

Goodwill

Goodwill 242,088 248,725 247,154

Addition due to acquisition 0 0

Purchase accounting adjustments 0 0

Goodwill, Transfers 0

Assets Held-for-sale, Long-Lived, Fair Value Disclosure 0

Foreign currency translation (6,637) 1,571

AMH

Goodwill

Goodwill 74,102 74,102 73,170

Addition due to acquisition 0 932

Purchase accounting adjustments 0 0

Goodwill, Transfers 0

Assets Held-for-sale, Long-Lived, Fair Value Disclosure 0

Foreign currency translation 0 0

APS

Goodwill

Goodwill 3,530,813 0 $ 0

Addition due to acquisition 3,418,335 0

Purchase accounting adjustments 0 0

Goodwill, Transfers 110,798

Assets Held-for-sale, Long-Lived, Fair Value Disclosure 0

Foreign currency translation $ 1,680 $ 0

v3.22.4

Goodwill and Intangible Assets Goodwill additional (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Goodwill and Intangible Assets Disclosure [Abstract]

Goodwill $ 4,408,331 $ 793,702 $ 748,037

Goodwill, Period Increase $ 3,614,600

v3.22.4

Intangible Assets (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Finite-Lived Intangible Assets

Gross carrying Amount $ 2,478,827 $ 829,714

Accumulated amortization 636,872 494,601

Net carrying value $ 1,841,955 $ 335,113

Weighted average life in years 10 years 9 months 18 days 10 years 3 months 18 days

Developed Technology

Finite-Lived Intangible Assets

Gross carrying Amount $ 1,302,101 $ 293,982

Accumulated amortization 313,876 232,722

Net carrying value $ 988,225 $ 61,260

Weighted average life in years 7 years 3 months 18 days 7 years 2 months 12 days

Trademarks and Trade names

Finite-Lived Intangible Assets

Gross carrying Amount $ 250,473 $ 33,553

Accumulated amortization 29,565 20,340

Net carrying value $ 220,908 $ 13,213

Weighted average life in years 14 years 3 months 18 days 10 years 7 months 6 days

Customer Relationships

Finite-Lived Intangible Assets

Gross carrying Amount $ 863,947 $ 481,674

Accumulated amortization 273,039 227,350

Net carrying value $ 590,908 $ 254,324

Weighted average life in years 15 years 4 months 24 days 12 years 4 months 24 days

Other

Finite-Lived Intangible Assets

Gross carrying Amount $ 31,206 $ 20,505

Accumulated amortization 20,392 14,189

Net carrying value $ 10,814 $ 6,316

Weighted average life in years 4 years 3 months 18 days 6 years 7 months 6 days

In Process Research and Development

Finite-Lived Intangible Assets

Gross carrying Amount $ 31,100

Accumulated amortization 0

Net carrying value $ 31,100

v3.22.4

Amortization Expense (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Goodwill and Intangible Assets Disclosure [Abstract]

Amortization expense $ 143,953 $ 47,856 $ 53,092

v3.22.4

Estimated Future Amortization Expense (Detail) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Goodwill and Intangible Assets Disclosure [Abstract]

2023 $ 230,469

2024 211,437

2025 204,917

2026 203,373

2027 199,859

Thereafter 791,900

Intangible assets, net $ 1,841,955 $ 335,113

v3.22.4

Debt - Maturity Schedule (Details) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Debt Disclosure [Abstract]

2023 $ 153,713

2024 24,950

2025 24,950

2026 24,950

2027 24,950

Thereafter 5,671,487

Long-term Debt, Gross $ 5,925,000 $ 945,000

v3.22.4

CMC Materials Acquistion Financing Debt (Details) - USD ($)
$ in Thousands
12 Months Ended

Jul. 06, 2022

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Debt Instrument

Total long-term debt $ 5,784,893 $ 937,027

Long-term Debt, Gross 5,925,000 945,000

Line of Credit Facility, Maximum Borrowing Capacity $ 575,000

Line of Credit Facility, Expiration Date Jul. 06, 2027

Ticking Fee 12,000

Loss on extinguishment of debt and modification (3,287) (23,338) $ (2,378)

Senior secured term loan facility due 2025

Debt Instrument

Long-term Debt, Gross $ 2,495,000 $ 0 145,000

Term Loan Rate 3.00% 7.50%

Debt Instrument, Description of Variable Rate Basis 2.00

Loss on extinguishment of debt and modification $ 900

Payments for Loans $ 145,000

Bridge Credit Facility due 2023

Debt Instrument

Term Loan Rate 4.55% 8.90%

Bridge Credit Facility due 2023 $ 275,000 $ 135,000 $ 0

Debt Instrument, Description of Variable Rate Basis 3.55

Loan Fee percent 0.25%

Debt Issuance Costs, Net 6,900

Loss on extinguishment of debt and modification 2,100

Payments for Loans $ 140,000

Revolving Credit Facility

Debt Instrument

Term Loan Rate 1.75%

Debt Instrument, Description of Variable Rate Basis 0.75

Unreimbursed letter of credit percentage 35.00%

Debt Instrument, Covenant Description 5.20:1.00

CMC Materials | Debt

Debt Instrument

Total long-term debt $ 3,100,000

v3.22.4

Debt - 2029 and 2030 Notes (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Jul. 06, 2022

Debt Instrument

Long-term Debt, Gross $ 5,925,000 $ 945,000

Debt Instrument, Covenant Compliance The Company was in compliance with these covenants at December 31, 2022.

Event of default percentage 25.00%

Payments of Debt Issuance Costs $ 99,488 5,069 $ 3,964

Loss on extinguishment of debt and modification (3,287) (23,338) $ (2,378)

Senior secured notes due 2029

Debt Instrument

Long-term Debt, Gross $ 1,600,000 0 $ 1,600,000

Debt Instrument, Interest Rate, Stated Percentage 4.75%

Debt Issuance Costs, Net $ 28,500

Debt Instrument, Unamortized Discount $ 7,600

Debt Instrument, Redemption Price, Percentage 100.00%

Redemption price, change of control 101.00%

Senior secured notes due 2029 | Equity offering [Member]

Debt Instrument

Debt Instrument, Interest Rate, Stated Percentage 40.00%

Senior unsecured notes due 2030

Debt Instrument

Long-term Debt, Gross $ 895,000 $ 0 $ 895,000

Debt Instrument, Interest Rate, Stated Percentage 5.95%

Debt Issuance Costs, Net $ 24,100

Debt Instrument, Unamortized Discount $ 16,700

v3.22.4

Other Income (Expense), Net (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Other Income and Expenses [Abstract]

Loss (gain) on foreign currency remeasurement $ 23,034 $ 7,857 $ (9,751)

Loss on extinguishment of debt and modification 3,287 23,338 2,378

Other, net (2,395) (500) (717)

Other expense (income), net $ 23,926 $ 31,695 $ (6,656)

v3.22.4

Leases - Lease Balances (Details) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Lessee, Lease, Description [Line Items]

Right-of-use assets $ 94,940 $ 66,563

Long-term lease liabilities 80,716 60,101

Present value of lease liabilities $ 99,741 $ 70,739

Operating leases 7 years 9 months 18 days 9 years 2 months 12 days

Weighted average discount rate 4.10% 4.20%

Lease renewal options 10 years

Operating Lease, Right-of-Use Asset, Statement of Financial Position [Extensible Enumeration] Right-of-use assets

Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible Enumeration] Long-term lease liabilities

Short-term lease liability

Lessee, Lease, Description [Line Items]

Short-term lease liability $ 19,025 $ 10,638

v3.22.4

Lease Commitments Leases - Components of Lease Expense (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Leases [Abstract]

Operating Lease, Cost $ 17,997 $ 13,127 $ 13,576

v3.22.4

Lease Commitments Leases - Other Information (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Lessee, Lease, Description [Line Items]

Lease renewal options 10 years

Lease terminate option options to terminate the leases within 1 year

Operating cash flows from leases $ 14,916 $ 11,009 $ 10,806

Right-of-Use Asset obtained $ 23,598 $ 31,492 $ 5,133

Minimum

Lessee, Lease, Description [Line Items]

Lease term 1 year

Maximum

Lessee, Lease, Description [Line Items]

Lease term 19 years

v3.22.4

Lease - Future Minimum Lease Payments (Details) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Leases [Abstract]

One Year $ 22,817

Two Years 18,252

Three Years 13,990

Four Years 11,919

Five Years 10,455

Beyond Five Years 39,863

Total 117,296

Less: Interest 17,555

Present value of lease liabilities $ 99,741 $ 70,739

v3.22.4

Asset Retirement Obligations (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Asset Retirement Obligation [Abstract]

Balance at beginning of year $ 17,494 $ 14,500

Liabilities assumed in acquisitions 12,531 0

Liabilities settled (453) (78)

Liabilities incurred 788 3,274

Accretion expense 213 166

Disposition (2,815) 0

Revision of estimate 277 (368)

Balance at end of year $ 28,035 $ 17,494

v3.22.4

Income Taxes - Income Before Income Taxes (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Income Tax Disclosure [Abstract]

Domestic $ (272,365) $ 137,145 $ 86,572

Foreign 519,445 341,931 267,715

Income before income tax expense $ 247,080 $ 479,076 $ 354,287

v3.22.4

Income Taxes - Components of Income Tax Expense (Benefit) (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Income Tax Disclosure [Abstract]

Current, Federal $ 39,216 $ 9,187 $ 8,107

Current, State 4,077 2,939 1,151

Current, Foreign 97,611 76,257 57,310

Current, Total 140,904 88,383 66,568

Deferred (net of valuation allowance), Federal (90,238) (11,726) (592)

Deferred (net of valuation allowance), State (5,749) (498) (407)

Deferred (net of valuation allowance), Foreign (6,757) (6,209) (6,251)

Deferred Income Tax Expense (Benefit) (102,744) (18,433) (7,250)

Income tax expense $ 38,160 $ 69,950 $ 59,318

v3.22.4

Income Taxes - Reconciliation of Income Tax Expense With Expected Amounts Based Upon Statutory Federal Tax Rates (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Income Tax Disclosure [Abstract]

Expected federal income tax at statutory rate $ 51,887 $ 100,606 $ 74,400

State income taxes before valuation allowance, net of federal tax effect (5,907) (1,333) (1,539)

Effect of foreign source income (7,607) (15,862) (7,877)

Tax contingencies 5,762 4,696 1,688

Valuation allowance 8,052 9,984 9,281

U.S. federal research credit (13,525) (8,469) (7,204)

Equity compensation 5,290 (8,899) (8,231)

Foreign derived intangible income (15,265) (6,496) (1,153)

Legal entity restructuring capital loss 0 (5,079) 0

Acquisition related retention, severance, and transaction costs 8,924 0 0

Other items, net 549 802 (47)

Income tax expense $ 38,160 $ 69,950 $ 59,318

v3.22.4

Income Taxes - Singapore subsidiary commitments (Detail) - USD ($)
$ / shares in Units, $ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Income Tax [Line Items]

Undistributed Earnings of Foreign Subsidiaries $ 115,900

withholding tax 13,300

Inland Revenue, Singapore (IRAS) [Member]

Income Tax [Line Items]

Income tax benefit estimate attributable to the tax status of subsidiary $ 24,800 $ 13,900 $ 9,400

Income tax expense benefit per diluted share $ 0.17 $ 0.10 $ 0.07

additional effective tax rate benefit $ 14,200 $ 8,000 $ 5,400

v3.22.4

Income Taxes - Deferred Tax Assets and Deferred Tax Liabilities (Detail) - USD ($)
$ in Thousands

Dec. 31, 2022

Dec. 31, 2021

Income Tax Disclosure [Abstract]

Accounts receivable $ 1,239 $ 397

Inventory 14,862 6,510

Accruals not currently deductible for tax purposes 25,787 19,636

Net operating loss and credit carryforwards 57,760 42,599

Capital loss carryforward 895 485

Equity compensation 15,249 2,630

Other, net 5,670 7,786

Gross deferred tax assets 121,462 80,043

Valuation allowance (48,047) (39,383)

Total deferred tax assets 73,415 40,660

Purchased intangible assets (364,979) (33,887)

Depreciation (2,719) (9,102)

Gross deferred tax liabilities (367,698) (42,989)

Total deferred tax liabilities $ (294,283) $ (2,329)

v3.22.4

Income Taxes Income Taxes - Deferred tax additional information (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Income Taxes [Line Items]

Deferred Tax Liabilities, Net $ 294,283 $ 2,329

Deferred Tax Assets, Valuation Allowance 48,047 39,383

Domestic Tax Authority

Income Taxes [Line Items]

Deferred Tax Liabilities, Net 298,500

Deferred Tax Assets, Valuation Allowance $ 18,500 16,100

Operating Loss Carryforwards, Expiration Date Jan. 01, 2022

Deferred Tax Assets, Net 3,000

State and Local Jurisdiction

Income Taxes [Line Items]

Deferred Tax Assets, Operating Loss Carryforwards, State and Local $ 18,300

Foreign Tax Authority

Income Taxes [Line Items]

Deferred Tax Assets, Valuation Allowance $ 29,500 23,300

Operating Loss Carryforwards, Expiration Date Jan. 01, 2023

Deferred Tax Assets, Operating Loss Carryforwards, Foreign $ 82,700

Deferred Tax Assets, Net $ 52,300 $ 34,000

v3.22.4

Income Taxes - Reconciliations of Total Amount of Gross Unrecognized Tax Benefits (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Income Tax Disclosure [Abstract]

Gross unrecognized tax benefits at beginning of year $ 23,789 $ 17,395

Increase in tax positions for prior years 175 131

Increase in tax positions from prior years (248) (69)

Increases in tax positions for current year 13,577 8,476

Increases in tax positions for current year (6,395) (286)

Lapse in statute of limitations (1,872) (1,858)

Gross unrecognized tax benefits at end of year 53,478 23,789

Unrecognized Tax Benefits, Increase Resulting from Acquisition $ 24,452 $ 0

v3.22.4

Income Taxes Income Tax - Unrecognized tax benefits additional information (Details) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Income Taxes [Line Items]

Unrecognized Tax Benefits that Would Impact Effective Tax Rate $ 42,300

Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued 4,200 $ 5,900

Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense 2,000 $ 1,000 $ 900

Significant Change in Unrecognized Tax Benefits is Reasonably Possible, Amount of Unrecorded Benefit 2,600

Undistributed Earnings of Foreign Subsidiaries 115,900

withholding tax $ 13,300

Domestic Tax Authority

Income Taxes [Line Items]

Open Tax Year 2018

State and Local Jurisdiction

Income Taxes [Line Items]

Open Tax Year 2018

Foreign Tax Authority

Income Taxes [Line Items]

Open Tax Year 2016

v3.22.4

Equity - Summary of Option Activity (Detail) - USD ($)
$ / shares in Units, shares in Thousands, $ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Number of shares

Number of shares, Options outstanding, beginning of year 657 1,082 1,575

Number of shares, Granted 146 167 216

Assumed in CMC acquisition Award, Options 1,178 0 0

Number of shares, Exercised (141) (592) (709)

Number of shares, Expired or Forfeited (1) 0 0

Number of shares, Options outstanding, end of year 1,839 657 1,082

Number of shares, Options exercisable, end of year 1,386 111 426

Weighted average exercise price

Weighted average exercise price, Options outstanding, beginning of year $ 55.32 $ 33.38 $ 21.39

Weighted average exercise price, Granted 128.44 98.11 55.72

Weighted Average Exercise Price, Options assumed in acquisition. 55.80 0 0

Weighted average exercise price, Exercised 40.00 27.32 13.60

Weighted average exercise price, Expired or Forfeited 61.42 0 0

Weighted average exercise price, Options outstanding, end of year 62.59 55.32 33.38

Weighted average exercise price, Options exercisable, end of year $ 54.53 $ 34.54 $ 24.99

Stock Repurchased and Retired During Period, Value $ 0 $ (67,109) $ (44,563)

v3.22.4

Equity - Weighted Average Assumptions Used in Valuation (Detail) - $ / shares
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Equity [Abstract]

Volatility 40.90% 38.00% 31.90%

Risk-free interest rate 1.50% 0.40% 1.40%

Dividend yield 0.30% 0.30% 0.60%

Expected life (years) 4 years 2 months 12 days 4 years 7 months 6 days 4 years 3 months 18 days

Weighted average fair value per option $ 43.47 $ 30.69 $ 14.83

v3.22.4

Summary of Restricted Stock Activity (Detail) - $ / shares
shares in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Number of shares

Number of shares, Unvested, beginning of year 897 1,083 1,254

Number of shares, Granted 366 293 437

Assumed in CMC acquisition Restricted Stock Units 155 0 0

Number of shares, Vested (523) (439) (564)

Number of shares, Forfeited (51) (40) (44)

Number of shares, Unvested, end of year 844 897 1,083

Weighted average grant date fair value, Unvested

Weighted average grant date fair value, Unvested, beginning of year $ 62.69 $ 41.31 $ 27.48

Weighted average grant date fair value, Granted 117.82 101.04 57.46

Weighted average grant date fair value, Restricted stock units assumed in acquisition. 92.96 0 0

Weighted average grant date fair value, Vested 64.77 35.58 23.48

Weighted average grant date fair value, Forfeited 85.16 57.39 35.86

Weighted average grant date fair value, Unvested, end of year $ 90.37 $ 62.69 $ 41.31

v3.22.4

Summary of Allocation of Share Based Compensation Expense (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]

Share-based compensation expense $ 66,577 $ 29,884 $ 22,920

Share-based Payment Arrangement, Expense, Tax Benefit 13,977 5,488 4,129

Share-based compensation expense, net of tax 52,600 24,396 18,791

Cost of Sales

Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]

Share-based compensation expense 5,780 3,844 1,463

Engineering, Research and Development Expense

Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]

Share-based compensation expense 4,596 3,504 2,359

Selling, General And Administrative Expenses

Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]

Share-based compensation expense $ 56,201 $ 22,536 $ 19,098

v3.22.4

Equity - Additional Information (Detail)
$ / shares in Units, shares in Thousands, $ in Thousands
3 Months Ended 6 Months Ended 12 Months Ended

Apr. 01, 2023

$ / shares

Dec. 31, 2022

USD ($)

$ / shares

shares

Oct. 01, 2022

$ / shares

Jul. 02, 2022

$ / shares

Apr. 02, 2022

$ / shares

Dec. 31, 2021

USD ($)

$ / shares

shares

Oct. 02, 2021

$ / shares

Jul. 03, 2021

$ / shares

Apr. 03, 2021

$ / shares

Dec. 31, 2020

$ / shares

shares

Sep. 26, 2020

$ / shares

Jun. 27, 2020

$ / shares

Mar. 28, 2020

$ / shares

Dec. 31, 2022

USD ($)

$ / shares

shares

Dec. 31, 2022

USD ($)

$ / shares

shares

Dec. 31, 2021

USD ($)

$ / shares

shares

Dec. 31, 2020

USD ($)

$ / shares

shares

Jul. 06, 2022

shares

Equity [Line Items]

Dividends, Common Stock, Cash $ (57,305) $ (43,611) $ (43,490)

Dividends declared per share | $ / shares $ 0.10 $ 0.10 $ 0.10 $ 0.10 $ 0.08 $ 0.08 $ 0.08 $ 0.08 $ 0.08 $ 0.08 $ 0.08 $ 0.08

Common Stock, Dividends, Per Share, Declared | $ / shares $ 0.40 $ 0.32 $ 0.32

Stock Repurchase Program, Authorized Amount $ 125,000 $ 125,000

Stock Repurchased and Retired During Period, Value $ 0 $ (67,109) $ (44,563)

Term of plan, in years 10 years

Share-Based Compensation Arrangement by Share-Based Payment Award, Non-Option Equity Instruments, Granted | shares 3,900

Ratio of Options exchanged 1.82 1.82 1.82

Options exchanged | shares 600

Common Stock exchanged for Options | shares 1,200

Ratio of common stock exchanged 1.82

RSU exchanged | shares 100 100 100

Common Stock exchanged for RSU | shares 200

Shares available for future grants | shares 10,900 8,700 9,000 10,900 10,900 8,700 9,000

Weighted average remaining contractual term option outstanding 4 years

Weighted average remaining contractual term option exercisable 3 years 8 months 12 days

Total pre-tax intrinsic value of stock options exercised $ 11,400 $ 54,700

Total pre-tax intrinsic value based on the closing stock price | $ / shares $ 65.59 $ 65.59 $ 65.59

Intrinsic value of stock options outstanding $ 25,700 $ 25,700 $ 25,700

Intrinsic value of stock options exercisable 22,300 22,300 $ 22,300

Number of shares, Granted | shares 146 167 216

Contractual term of stock options (in years) 7 years

performance shares granted | shares 100 100 100

Share-based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Period for Recognition 2 years 6 months

Employee Benefits and Share-Based Compensation $ 15,300

share based compensation modification amount $ 6,200

Subsequent Event [Member]

Equity [Line Items]

Common Stock, Dividends, Per Share, Declared | $ / shares $ 0.10

Maximum

Equity [Line Items]

Vesting period, in years 4 years

Restricted Stock

Equity [Line Items]

Total compensation cost not yet recognized 43,400 43,400 $ 43,400

Unvested Stock Options

Equity [Line Items]

Total compensation cost not yet recognized 3,700 3,700 3,700

Performance Stock

Equity [Line Items]

Total compensation cost not yet recognized $ 2,800 $ 2,800 $ 2,800

Employee Stock Purchase Plan

Equity [Line Items]

Shares available for future grants | shares 1,300 1,300 1,300

Weighted-average price per share paid by the employees | $ / shares $ 65.25 $ 90.89 $ 46.58 $ 65.25 $ 65.25 $ 90.89 $ 46.58

Percentage of employee contribution from compensation 10.00%

Rate of discount from the fair market value 15.00%

Shares purchase by employees | shares 200 100 200

v3.22.4

Benefit Plans - Additional Information (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Defined Benefit Plans and Other Postretirement Benefit Plans Disclosures [Abstract]

Employer profit sharing and matching contribution expense $ 21,900 $ 10,100 $ 8,200

Maximum matching contribution 5.00% 4.00%

Defined Benefit Plan, Benefit Obligation, Business Combination $ 10,100

Projected benefit obligation 15,253 $ 7,050

Fair value of plan assets 1,014 969

Plan assets less than benefit obligation - Net amount recognized (14,239) (6,081)

Accumulated benefit obligation 12,151 5,995

Net periodic pension benefit cost $ 700 $ 100 $ 100

v3.22.4

Expected Contribution and Benefit Payments (Detail)
$ in Thousands

Dec. 31, 2022

USD ($)

Defined Benefit Plans and Other Postretirement Benefit Plans Disclosures [Abstract]

Payments in Year 2023 $ 735

Payments in Year 2024 779

Payments in Year 2025 1,264

Payments in Year 2026 1,127

Payments in year 2027 922

Payments in years 2028-2032 $ 5,940

v3.22.4

Earnings Per Share (EPS) - Reconciliation of Share Amount Used in Computation of Basic and Diluted Earnings Per Share (Detail) - shares
shares in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Earnings Per Share [Abstract]

Basic earnings per share-Weighted common shares outstanding 142,294 135,411 134,837

Weighted common shares assumed upon exercise of options and vesting of restricted stock units 852 1,163 1,429

Diluted earnings per share-Weighted common shares outstanding 143,146 136,574 136,266

v3.22.4

Earnings Per Share (EPS) - Shares Excluded Underlying Stock Based Awards from Calculations of Diluted EPS (Detail) - shares
shares in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Earnings Per Share [Abstract]

Shares excluded from calculations of diluted EPS 447 136 195

v3.22.4

Segment information - Summary of Financial Information for Reportable Segments (Detail) - USD ($)
$ in Thousands
3 Months Ended 12 Months Ended

Dec. 31, 2022

Oct. 01, 2022

Jul. 02, 2022

Apr. 02, 2022

Dec. 31, 2021

Oct. 02, 2021

Jul. 03, 2021

Apr. 03, 2021

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Segment Reporting Information

Total net sales $ 946,070 $ 993,828 $ 692,489 $ 649,646 $ 635,204 $ 579,493 $ 571,352 $ 512,844 $ 3,282,033 $ 2,298,893 $ 1,859,313

Total segment profit 814,402 649,102 487,907

Total Assets 10,138,857 3,191,896 10,138,857 3,191,896 2,917,696

Total depreciation and amortization 279,324 138,167 136,522

Total capital expenditures 466,192 210,626 131,752

SCEM

Segment Reporting Information

Total net sales 773,594 625,670 530,040

Total segment profit 122,287 137,392 99,474

Total Assets 1,671,456 971,678 1,671,456 971,678 866,029

Total depreciation and amortization 76,550 57,995 62,770

Total capital expenditures 105,057 68,058 49,711

MC

Segment Reporting Information

Total net sales 1,105,996 919,363 742,186

Total segment profit 411,475 321,300 248,910

Total Assets 1,161,636 946,336 1,161,636 946,336 819,602

Total depreciation and amortization 42,514 41,536 39,775

Total capital expenditures 178,800 69,120 40,656

AMH

Segment Reporting Information

Total net sales 846,492 704,946 538,682

Total segment profit 183,738 159,995 111,028

Total Assets 801,591 598,547 801,591 598,547 437,322

Total depreciation and amortization 33,490 29,648 25,231

Total capital expenditures 136,061 67,096 36,107

APS

Segment Reporting Information

Total net sales 606,614 85,621 79,492

Total segment profit 96,902 30,415 28,495

Total Assets 5,864,250 219,787 5,864,250 219,787 156,328

Total depreciation and amortization 126,770 8,988 8,647

Total capital expenditures 46,274 6,352 5,278

Corporate

Segment Reporting Information

Total Assets $ 639,924 $ 455,548 639,924 455,548 638,415

Total depreciation and amortization 0 0 99

Inter-segment elimination

Segment Reporting Information

Total net sales $ (50,663) $ (36,707) $ (31,087)

v3.22.4

Segment Information - Reconciliation of Total Segment Profit to Operating Income (Detail) - USD ($)
$ in Thousands
12 Months Ended

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Segment Reporting [Abstract]

Total segment profit $ 814,402 $ 649,102 $ 487,907

Amortization 143,953 47,856 53,092

Unallocated general and administrative expenses 190,468 49,478 39,370

Operating income 479,981 551,768 395,445

Interest expense 212,669 41,240 48,600

Interest income 3,694 243 786

Other expense (income), net 23,926 31,695 (6,656)

Income before income tax expense $ 247,080 $ 479,076 $ 354,287

v3.22.4

Segment Information - Sales from Largest Customer (Details) - USD ($)
$ in Thousands
3 Months Ended 12 Months Ended

Dec. 31, 2022

Oct. 01, 2022

Jul. 02, 2022

Apr. 02, 2022

Dec. 31, 2021

Oct. 02, 2021

Jul. 03, 2021

Apr. 03, 2021

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Net sales $ 946,070 $ 993,828 $ 692,489 $ 649,646 $ 635,204 $ 579,493 $ 571,352 $ 512,844 $ 3,282,033 $ 2,298,893 $ 1,859,313

TSMC

Net sales $ 408,600 $ 271,900 $ 208,300

v3.22.4

Quarterly Information (Detail) - USD ($)
$ / shares in Units, $ in Thousands
3 Months Ended 12 Months Ended

Dec. 31, 2022

Oct. 01, 2022

Jul. 02, 2022

Apr. 02, 2022

Dec. 31, 2021

Oct. 02, 2021

Jul. 03, 2021

Apr. 03, 2021

Dec. 31, 2022

Dec. 31, 2021

Dec. 31, 2020

Selected Quarterly Financial Information [Abstract]

Net sales $ 946,070 $ 993,828 $ 692,489 $ 649,646 $ 635,204 $ 579,493 $ 571,352 $ 512,844 $ 3,282,033 $ 2,298,893 $ 1,859,313

Gross profit 404,525 371,671 310,397 309,820 295,090 264,204 265,384 234,986 1,396,413 1,059,664 849,722

Net income $ 57,427 $ (73,703) $ 99,491 $ 125,705 $ 118,219 $ 117,461 $ 88,770 $ 84,676 $ 208,920 $ 409,126 $ 294,969

Basic net income per common share $ 0.39 $ (0.50) $ 0.73 $ 0.93 $ 0.87 $ 0.87 $ 0.66 $ 0.63 $ 1.47 $ 3.02 $ 2.19

Diluted net income per common share $ 0.38 $ (0.50) $ 0.73 $ 0.92 $ 0.87 $ 0.86 $ 0.65 $ 0.62 $ 1.46 $ 3.00 $ 2.16

v3.22.4

Subsequent Events (Details)
$ in Thousands

Jan. 20, 2023

USD ($)

Subsequent Event [Member]

Subsequent Event [Line Items]

Proceeds from Divestiture of Businesses $ 135,000

{
 "instance": {
  "entg-20221231.htm": {
   "axisCustom": 0,
   "axisStandard": 22,
   "baseTaxonomies": {
    "http://fasb.org/us-gaap-sup/2022q3": 1,
    "http://fasb.org/us-gaap/2022": 1719,
    "http://xbrl.sec.gov/dei/2022": 38
   },
   "contextCount": 417,
   "dts": {
    "calculationLink": {
     "local": [
      "entg-20221231_cal.xml"
     ]
    },
    "definitionLink": {
     "local": [
      "entg-20221231_def.xml"
     ]
    },
    "inline": {
     "local": [
      "entg-20221231.htm"
     ]
    },
    "labelLink": {
     "local": [
      "entg-20221231_lab.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "entg-20221231_pre.xml"
     ]
    },
    "schema": {
     "local": [
      "entg-20221231.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/net-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/reference-2009-12-16.xsd",
      "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd",
      "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd",
      "https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd",
      "https://xbrl.fasb.org/srt/2022/elts/srt-roles-2022.xsd",
      "https://xbrl.fasb.org/srt/2022/elts/srt-types-2022.xsd",
      "https://xbrl.fasb.org/srt/2022q3/srt-sup-2022q3.xsd",
      "https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd",
      "https://xbrl.fasb.org/us-gaap/2022/elts/us-roles-2022.xsd",
      "https://xbrl.fasb.org/us-gaap/2022/elts/us-types-2022.xsd",
      "https://xbrl.fasb.org/us-gaap/2022q3/us-gaap-sup-2022q3.xsd",
      "https://xbrl.sec.gov/country/2022/country-2022.xsd",
      "https://xbrl.sec.gov/dei/2022/dei-2022.xsd",
      "https://xbrl.sec.gov/exch/2022/exch-2022.xsd"
     ]
    }
   },
   "elementCount": 748,
   "entityCount": 1,
   "hidden": {
    "http://fasb.org/us-gaap/2022": 28,
    "http://xbrl.sec.gov/dei/2022": 7,
    "total": 35
   },
   "keyCustom": 47,
   "keyStandard": 489,
   "memberCustom": 22,
   "memberStandard": 56,
   "nsprefix": "entg",
   "nsuri": "http://www.entegris.com/20221231",
   "report": {
    "R1": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "document",
     "isDefault": "true",
     "longName": "0000001 - Document - Document and Entity Information",
     "menuCat": "Cover",
     "order": "1",
     "role": "http://www.entegris.com/role/DocumentandEntityInformation",
     "shortName": "Document and Entity Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R10": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SignificantAccountingPoliciesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000010 - Disclosure - Summary of Significant Accounting Policies",
     "menuCat": "Notes",
     "order": "10",
     "role": "http://www.entegris.com/role/SummaryofSignificantAccountingPolicies",
     "shortName": "Summary of Significant Accounting Policies",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SignificantAccountingPoliciesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R100": {
     "firstAnchor": {
      "ancestors": [
       "entg:TotalSegmentProfit",
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "entg:TotalSegmentProfit",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000101 - Disclosure - Segment Information - Reconciliation of Total Segment Profit to Operating Income (Detail)",
     "menuCat": "Details",
     "order": "100",
     "role": "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail",
     "shortName": "Segment Information - Reconciliation of Total Segment Profit to Operating Income (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "entg:UnallocatedGeneralAndAdministrativeExpenses",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R101": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i9249d712f89342a1bf9c6b7d20e07755_D20221002-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000102 - Disclosure - Segment Information - Summary of Total Net Sales to External Customers (Detail)",
     "menuCat": "Details",
     "order": "101",
     "role": "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
     "shortName": "Segment Information - Summary of Total Net Sales to External Customers (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "if068512efb3741109690316c445a8be3_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R102": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:PropertyPlantAndEquipmentTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentNet",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000103 - Disclosure - Segment Information - Summary of Property, Plant and Equipment Attributed to Significant Countries (Detail)",
     "menuCat": "Details",
     "order": "102",
     "role": "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
     "shortName": "Segment Information - Summary of Property, Plant and Equipment Attributed to Significant Countries (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEntityWideDisclosureOnGeographicAreasLongLivedAssetsInIndividualForeignCountriesByCountryTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i997f1de6577948fcb5c38fd8deb64ad1_I20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentNet",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R103": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i9249d712f89342a1bf9c6b7d20e07755_D20221002-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000104 - Disclosure - Segment Information - Sales from Largest Customer (Details)",
     "menuCat": "Details",
     "order": "103",
     "role": "http://www.entegris.com/role/SegmentInformationSalesfromLargestCustomerDetails",
     "shortName": "Segment Information - Sales from Largest Customer (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0411f0b2c8f449ec8049e2aebb47114a_D20220101-20221231",
      "decimals": "-5",
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R104": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i9249d712f89342a1bf9c6b7d20e07755_D20221002-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000105 - Disclosure - Quarterly Information (Detail)",
     "menuCat": "Details",
     "order": "104",
     "role": "http://www.entegris.com/role/QuarterlyInformationDetail",
     "shortName": "Quarterly Information (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i9249d712f89342a1bf9c6b7d20e07755_D20221002-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:GrossProfit",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R105": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ib36a894a566b4dd48bfb33532aad9450_D20230120-20230120",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ProceedsFromDivestitureOfBusinesses",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000106 - Disclosure - Subsequent Events (Details)",
     "menuCat": "Details",
     "order": "105",
     "role": "http://www.entegris.com/role/SubsequentEventsDetails",
     "shortName": "Subsequent Events (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ib36a894a566b4dd48bfb33532aad9450_D20230120-20230120",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ProceedsFromDivestitureOfBusinesses",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R11": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000011 - Disclosure - Revenues",
     "menuCat": "Notes",
     "order": "11",
     "role": "http://www.entegris.com/role/Revenues",
     "shortName": "Revenues",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R12": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:BusinessCombinationDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000012 - Disclosure - Acquisition",
     "menuCat": "Notes",
     "order": "12",
     "role": "http://www.entegris.com/role/Acquisition",
     "shortName": "Acquisition",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:BusinessCombinationDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R13": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RestrictedAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000013 - Disclosure - Cash, Cash Equivalents and Restricted Cash",
     "menuCat": "Notes",
     "order": "13",
     "role": "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCash",
     "shortName": "Cash, Cash Equivalents and Restricted Cash",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RestrictedAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R14": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:MergersAcquisitionsAndDispositionsDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000014 - Disclosure - Assets Held For Sale",
     "menuCat": "Notes",
     "order": "14",
     "role": "http://www.entegris.com/role/AssetsHeldForSale",
     "shortName": "Assets Held For Sale",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:MergersAcquisitionsAndDispositionsDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R15": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000015 - Disclosure - Trade Accounts and Notes Receivable",
     "menuCat": "Notes",
     "order": "15",
     "role": "http://www.entegris.com/role/TradeAccountsandNotesReceivable",
     "shortName": "Trade Accounts and Notes Receivable",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R16": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000016 - Disclosure - Inventories",
     "menuCat": "Notes",
     "order": "16",
     "role": "http://www.entegris.com/role/Inventories",
     "shortName": "Inventories",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R17": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000017 - Disclosure - Property, Plant and Equipment",
     "menuCat": "Notes",
     "order": "17",
     "role": "http://www.entegris.com/role/PropertyPlantandEquipment",
     "shortName": "Property, Plant and Equipment",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R18": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IntangibleAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000018 - Disclosure - Goodwill and Intangible Assets",
     "menuCat": "Notes",
     "order": "18",
     "role": "http://www.entegris.com/role/GoodwillandIntangibleAssets",
     "shortName": "Goodwill and Intangible Assets",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IntangibleAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R19": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000019 - Disclosure - Debt",
     "menuCat": "Notes",
     "order": "19",
     "role": "http://www.entegris.com/role/Debt",
     "shortName": "Debt",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R2": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfRestrictedCashAndCashEquivalentsTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000002 - Statement - Consolidated Balance Sheets",
     "menuCat": "Statements",
     "order": "2",
     "role": "http://www.entegris.com/role/ConsolidatedBalanceSheets",
     "shortName": "Consolidated Balance Sheets",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "entg:Deferredtaxchargesandrefundableincometaxes",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R20": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000020 - Disclosure - Fair Value Measures and Disclosures",
     "menuCat": "Notes",
     "order": "20",
     "role": "http://www.entegris.com/role/FairValueMeasuresandDisclosures",
     "shortName": "Fair Value Measures and Disclosures",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R21": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000021 - Disclosure - Derivative Instruments and Hedging Activities",
     "menuCat": "Notes",
     "order": "21",
     "role": "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivities",
     "shortName": "Derivative Instruments and Hedging Activities",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R22": {
     "firstAnchor": {
      "ancestors": [
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OtherIncomeAndOtherExpenseDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000022 - Disclosure - Other Income (Expense), Net",
     "menuCat": "Notes",
     "order": "22",
     "role": "http://www.entegris.com/role/OtherIncomeExpenseNet",
     "shortName": "Other Income (Expense), Net",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OtherIncomeAndOtherExpenseDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R23": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeasesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000023 - Disclosure - Lease Commitments",
     "menuCat": "Notes",
     "order": "23",
     "role": "http://www.entegris.com/role/LeaseCommitments",
     "shortName": "Lease Commitments",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeasesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R24": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AssetRetirementObligationDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000024 - Disclosure - Asset Retirement Obligations",
     "menuCat": "Notes",
     "order": "24",
     "role": "http://www.entegris.com/role/AssetRetirementObligations",
     "shortName": "Asset Retirement Obligations",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AssetRetirementObligationDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R25": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000025 - Disclosure - Income Taxes",
     "menuCat": "Notes",
     "order": "25",
     "role": "http://www.entegris.com/role/IncomeTaxes",
     "shortName": "Income Taxes",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R26": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000026 - Disclosure - Equity",
     "menuCat": "Notes",
     "order": "26",
     "role": "http://www.entegris.com/role/Equity",
     "shortName": "Equity",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R27": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CompensationAndEmployeeBenefitPlansTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000027 - Disclosure - Benefit Plans",
     "menuCat": "Notes",
     "order": "27",
     "role": "http://www.entegris.com/role/BenefitPlans",
     "shortName": "Benefit Plans",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CompensationAndEmployeeBenefitPlansTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R28": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:EarningsPerShareTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000028 - Disclosure - Earning Per Share (EPS)",
     "menuCat": "Notes",
     "order": "28",
     "role": "http://www.entegris.com/role/EarningPerShareEPS",
     "shortName": "Earning Per Share (EPS)",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:EarningsPerShareTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R29": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SegmentReportingDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000029 - Disclosure - Segment Information",
     "menuCat": "Notes",
     "order": "29",
     "role": "http://www.entegris.com/role/SegmentInformation",
     "shortName": "Segment Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SegmentReportingDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R3": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:PreferredStockParOrStatedValuePerShare",
       "span",
       "div",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "2",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PreferredStockParOrStatedValuePerShare",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usdPerShare",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000003 - Statement - Consolidated Balance Sheets (Parenthetical)",
     "menuCat": "Statements",
     "order": "3",
     "role": "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical",
     "shortName": "Consolidated Balance Sheets (Parenthetical)",
     "subGroupType": "parenthetical",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:PreferredStockParOrStatedValuePerShare",
       "span",
       "div",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "2",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PreferredStockParOrStatedValuePerShare",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usdPerShare",
      "xsiNil": "false"
     }
    },
    "R30": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000030 - Disclosure - Commitments and Contingent Liabilities",
     "menuCat": "Notes",
     "order": "30",
     "role": "http://www.entegris.com/role/CommitmentsandContingentLiabilities",
     "shortName": "Commitments and Contingent Liabilities",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R31": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:QuarterlyFinancialInformationTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000031 - Disclosure - Quarterly Information-Unaudited",
     "menuCat": "Notes",
     "order": "31",
     "role": "http://www.entegris.com/role/QuarterlyInformationUnaudited",
     "shortName": "Quarterly Information-Unaudited",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:QuarterlyFinancialInformationTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R32": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SubsequentEventsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000032 - Disclosure - Subsequent Events",
     "menuCat": "Notes",
     "order": "32",
     "role": "http://www.entegris.com/role/SubsequentEvents",
     "shortName": "Subsequent Events",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SubsequentEventsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R33": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:NatureOfOperations",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000033 - Disclosure - Summary of Significant Accounting Policies (Policies)",
     "menuCat": "Policies",
     "order": "33",
     "role": "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies",
     "shortName": "Summary of Significant Accounting Policies (Policies)",
     "subGroupType": "policies",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:NatureOfOperations",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R34": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000034 - Disclosure - Revenues (Tables)",
     "menuCat": "Tables",
     "order": "34",
     "role": "http://www.entegris.com/role/RevenuesTables",
     "shortName": "Revenues (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R35": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ia11310e8e5174c61b04a39af4c775c16_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfBusinessAcquisitionsByAcquisitionEquityInterestIssuedOrIssuableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000035 - Disclosure - Business Combinations and Asset Acquisitions (Tables)",
     "menuCat": "Tables",
     "order": "35",
     "role": "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables",
     "shortName": "Business Combinations and Asset Acquisitions (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ia11310e8e5174c61b04a39af4c775c16_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfBusinessAcquisitionsByAcquisitionEquityInterestIssuedOrIssuableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R36": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfRestrictedCashAndCashEquivalentsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000036 - Disclosure - Cash, Cash Equivalents and Restricted Cash (Tables)",
     "menuCat": "Tables",
     "order": "36",
     "role": "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashTables",
     "shortName": "Cash, Cash Equivalents and Restricted Cash (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfRestrictedCashAndCashEquivalentsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R37": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisclosureOfLongLivedAssetsHeldForSaleTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000037 - Disclosure - Assets Held For Sale (Tables)",
     "menuCat": "Tables",
     "order": "37",
     "role": "http://www.entegris.com/role/AssetsHeldForSaleTables",
     "shortName": "Assets Held For Sale (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisclosureOfLongLivedAssetsHeldForSaleTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R38": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000038 - Disclosure - Trade Accounts and Notes Receivable (Tables)",
     "menuCat": "Tables",
     "order": "38",
     "role": "http://www.entegris.com/role/TradeAccountsandNotesReceivableTables",
     "shortName": "Trade Accounts and Notes Receivable (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R39": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000039 - Disclosure - Inventories (Tables)",
     "menuCat": "Tables",
     "order": "39",
     "role": "http://www.entegris.com/role/InventoriesTables",
     "shortName": "Inventories (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R4": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000004 - Statement - Consolidated Statements Of Operations",
     "menuCat": "Statements",
     "order": "4",
     "role": "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
     "shortName": "Consolidated Statements Of Operations",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:CostOfRevenue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R40": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000040 - Disclosure - Property, Plant and Equipment (Tables)",
     "menuCat": "Tables",
     "order": "40",
     "role": "http://www.entegris.com/role/PropertyPlantandEquipmentTables",
     "shortName": "Property, Plant and Equipment (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R41": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfGoodwillTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000041 - Disclosure - Goodwill and Intangible Assets (Tables)",
     "menuCat": "Tables",
     "order": "41",
     "role": "http://www.entegris.com/role/GoodwillandIntangibleAssetsTables",
     "shortName": "Goodwill and Intangible Assets (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfGoodwillTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R42": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfDebtTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000042 - Disclosure - Debt (Tables)",
     "menuCat": "Tables",
     "order": "42",
     "role": "http://www.entegris.com/role/DebtTables",
     "shortName": "Debt (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfDebtTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R43": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000043 - Disclosure - Fair Value Measures and Disclosures (Tables)",
     "menuCat": "Tables",
     "order": "43",
     "role": "http://www.entegris.com/role/FairValueMeasuresandDisclosuresTables",
     "shortName": "Fair Value Measures and Disclosures (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R44": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap-supplement:OpenForwardForeignCurrencyContractTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000044 - Disclosure - Derivative Instruments and Hedging Activities (Tables)",
     "menuCat": "Tables",
     "order": "44",
     "role": "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesTables",
     "shortName": "Derivative Instruments and Hedging Activities (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap-supplement:OpenForwardForeignCurrencyContractTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R45": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "us-gaap:OtherIncomeAndOtherExpenseDisclosureTextBlock",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000045 - Disclosure - Other Income (Expense), Net (Tables)",
     "menuCat": "Tables",
     "order": "45",
     "role": "http://www.entegris.com/role/OtherIncomeExpenseNetTables",
     "shortName": "Other Income (Expense), Net (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "us-gaap:OtherIncomeAndOtherExpenseDisclosureTextBlock",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R46": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "entg:OperatingLeasesBalanceSheetTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000046 - Disclosure - Lease Commitments (Tables)",
     "menuCat": "Tables",
     "order": "46",
     "role": "http://www.entegris.com/role/LeaseCommitmentsTables",
     "shortName": "Lease Commitments (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "entg:OperatingLeasesBalanceSheetTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R47": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAssetRetirementObligationsTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000047 - Disclosure - Asset Retirement Obligations (Tables)",
     "menuCat": "Tables",
     "order": "47",
     "role": "http://www.entegris.com/role/AssetRetirementObligationsTables",
     "shortName": "Asset Retirement Obligations (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAssetRetirementObligationsTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R48": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000048 - Disclosure - Income Taxes (Tables)",
     "menuCat": "Tables",
     "order": "48",
     "role": "http://www.entegris.com/role/IncomeTaxesTables",
     "shortName": "Income Taxes (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R49": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000049 - Disclosure - Equity (Tables)",
     "menuCat": "Tables",
     "order": "49",
     "role": "http://www.entegris.com/role/EquityTables",
     "shortName": "Equity (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R5": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:NetIncomeLoss",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000005 - Statement - Consolidated Statements Of Comprehensive Income",
     "menuCat": "Statements",
     "order": "5",
     "role": "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
     "shortName": "Consolidated Statements Of Comprehensive Income",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:OtherComprehensiveIncomeLossNetOfTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R50": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfDefinedBenefitPlansDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000050 - Disclosure - Benefit Plans (Tables)",
     "menuCat": "Tables",
     "order": "50",
     "role": "http://www.entegris.com/role/BenefitPlansTables",
     "shortName": "Benefit Plans (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfDefinedBenefitPlansDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R51": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000051 - Disclosure - Earning Per Share (EPS) (Tables)",
     "menuCat": "Tables",
     "order": "51",
     "role": "http://www.entegris.com/role/EarningPerShareEPSTables",
     "shortName": "Earning Per Share (EPS) (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R52": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000052 - Disclosure - Segment Information (Tables)",
     "menuCat": "Tables",
     "order": "52",
     "role": "http://www.entegris.com/role/SegmentInformationTables",
     "shortName": "Segment Information (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R53": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000053 - Disclosure - Quarterly Information-Unaudited (Tables)",
     "menuCat": "Tables",
     "order": "53",
     "role": "http://www.entegris.com/role/QuarterlyInformationUnauditedTables",
     "shortName": "Quarterly Information-Unaudited (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R54": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i82b8d9b2ee3b45d58276ff95b3774e0c_I20211231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ContractWithCustomerLiabilityCurrent",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000055 - Disclosure - Revenues Revenues - Contract Liabilities (Details)",
     "menuCat": "Details",
     "order": "54",
     "role": "http://www.entegris.com/role/RevenuesRevenuesContractLiabilitiesDetails",
     "shortName": "Revenues Revenues - Contract Liabilities (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i134ee63c8dcc4273bded63955cd351e1_I20201231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:ContractWithCustomerLiabilityCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R55": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i9249d712f89342a1bf9c6b7d20e07755_D20221002-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000056 - Disclosure - CMC Acquisition (Details)",
     "menuCat": "Details",
     "order": "55",
     "role": "http://www.entegris.com/role/CMCAcquisitionDetails",
     "shortName": "CMC Acquisition (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "ix:continuation",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:BusinessAcquisitionsProFormaRevenue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R56": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PaymentsToAcquireBusinessesNetOfCashAcquired",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000057 - Disclosure - Acquisition - Precision Microchemicals (Details)",
     "menuCat": "Details",
     "order": "56",
     "role": "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
     "shortName": "Acquisition - Precision Microchemicals (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "if5600d79144f401cae79810644871ca9_D20211130-20211130",
      "decimals": null,
      "lang": "en-US",
      "name": "us-gaap:BusinessAcquisitionDateOfAcquisitionAgreement1",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R57": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfRestrictedCashAndCashEquivalentsTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000058 - Disclosure - Cash, Cash Equivalents and Restricted Cash (Details)",
     "menuCat": "Details",
     "order": "57",
     "role": "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashDetails",
     "shortName": "Cash, Cash Equivalents and Restricted Cash (Details)",
     "subGroupType": "details",
     "uniqueAnchor": null
    },
    "R58": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeLossFromIndividuallySignificantComponentDisposedOfOrHeldForSaleExcludingDiscontinuedOperationsBeforeIncomeTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000059 - Disclosure - Assets Held For Sale (Details)",
     "menuCat": "Details",
     "order": "58",
     "role": "http://www.entegris.com/role/AssetsHeldForSaleDetails",
     "shortName": "Assets Held For Sale (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeLossFromIndividuallySignificantComponentDisposedOfOrHeldForSaleExcludingDiscontinuedOperationsBeforeIncomeTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R59": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AccountsReceivableGross",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000060 - Disclosure - Trade Accounts and Notes Receivable (Detail)",
     "menuCat": "Details",
     "order": "59",
     "role": "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail",
     "shortName": "Trade Accounts and Notes Receivable (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AccountsReceivableGross",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R6": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:NetIncomeLoss",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000006 - Statement - Consolidated Statements Of Comprehensive Income Paranthetical",
     "menuCat": "Statements",
     "order": "6",
     "role": "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
     "shortName": "Consolidated Statements Of Comprehensive Income Paranthetical",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:OtherComprehensiveIncomeLossTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R60": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000061 - Disclosure - Inventories (Detail)",
     "menuCat": "Details",
     "order": "60",
     "role": "http://www.entegris.com/role/InventoriesDetail",
     "shortName": "Inventories (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R61": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "link:footnote",
       "div",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-5",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000062 - Disclosure - Inventories Inventories - Additional Detail (Details)",
     "menuCat": "Details",
     "order": "61",
     "role": "http://www.entegris.com/role/InventoriesInventoriesAdditionalDetailDetails",
     "shortName": "Inventories Inventories - Additional Detail (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "link:footnote",
       "div",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-5",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R62": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:PropertyPlantAndEquipmentTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:Land",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000063 - Disclosure - Property, Plant and Equipment (Detail)",
     "menuCat": "Details",
     "order": "62",
     "role": "http://www.entegris.com/role/PropertyPlantandEquipmentDetail",
     "shortName": "Property, Plant and Equipment (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:PropertyPlantAndEquipmentTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:Land",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R63": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "entg:DepreciationExpenseTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:Depreciation",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000064 - Disclosure - Property, Plant and Equipment Property, Plant and Equipment - Depreciation Expense (Details)",
     "menuCat": "Details",
     "order": "63",
     "role": "http://www.entegris.com/role/PropertyPlantandEquipmentPropertyPlantandEquipmentDepreciationExpenseDetails",
     "shortName": "Property, Plant and Equipment Property, Plant and Equipment - Depreciation Expense (Details)",
     "subGroupType": "details",
     "uniqueAnchor": null
    },
    "R64": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:Goodwill",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000065 - Disclosure - Goodwill and Intangible Assets Goodwill Rollforward (Details)",
     "menuCat": "Details",
     "order": "64",
     "role": "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
     "shortName": "Goodwill and Intangible Assets Goodwill Rollforward (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfGoodwillTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:GoodwillAcquiredDuringPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R65": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:Goodwill",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000066 - Disclosure - Goodwill and Intangible Assets Goodwill additional (Details)",
     "menuCat": "Details",
     "order": "65",
     "role": "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwilladditionalDetails",
     "shortName": "Goodwill and Intangible Assets Goodwill additional (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-5",
      "lang": "en-US",
      "name": "us-gaap:GoodwillPeriodIncreaseDecrease",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R66": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfAcquiredFiniteLivedIntangibleAssetsByMajorClassTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiniteLivedIntangibleAssetsGross",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000067 - Disclosure - Intangible Assets (Detail)",
     "menuCat": "Details",
     "order": "66",
     "role": "http://www.entegris.com/role/IntangibleAssetsDetail",
     "shortName": "Intangible Assets (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfAcquiredFiniteLivedIntangibleAssetsByMajorClassTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiniteLivedIntangibleAssetsGross",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R67": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "entg:ScheduleOfAmortizationOfIntangiblesTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AmortizationOfIntangibleAssets",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000068 - Disclosure - Amortization Expense (Detail)",
     "menuCat": "Details",
     "order": "67",
     "role": "http://www.entegris.com/role/AmortizationExpenseDetail",
     "shortName": "Amortization Expense (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": null
    },
    "R68": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000069 - Disclosure - Estimated Future Amortization Expense (Detail)",
     "menuCat": "Details",
     "order": "68",
     "role": "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail",
     "shortName": "Estimated Future Amortization Expense (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R69": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtInstrumentCarryingAmount",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000070 - Disclosure - Debt Summary Table (Details)",
     "menuCat": "Details",
     "order": "69",
     "role": "http://www.entegris.com/role/DebtSummaryTableDetails",
     "shortName": "Debt Summary Table (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R7": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ia5530b6a662146b3ba412d459dfe3080_I20191231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000007 - Statement - Consolidated Statements Of Equity",
     "menuCat": "Statements",
     "order": "7",
     "role": "http://www.entegris.com/role/ConsolidatedStatementsOfEquity",
     "shortName": "Consolidated Statements Of Equity",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ia5530b6a662146b3ba412d459dfe3080_I20191231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R70": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfMaturitiesOfLongTermDebtTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000071 - Disclosure - Debt - Maturity Schedule (Details)",
     "menuCat": "Details",
     "order": "70",
     "role": "http://www.entegris.com/role/DebtMaturityScheduleDetails",
     "shortName": "Debt - Maturity Schedule (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfMaturitiesOfLongTermDebtTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R71": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LongTermDebt",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000072 - Disclosure - CMC Materials Acquistion Financing Debt (Details)",
     "menuCat": "Details",
     "order": "71",
     "role": "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
     "shortName": "CMC Materials Acquistion Financing Debt (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i810a8c44c2aa4e8aafbde8e6387fabb6_I20220706",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R72": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtInstrumentCarryingAmount",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000073 - Disclosure - Debt - 2029 and 2030 Notes (Details)",
     "menuCat": "Details",
     "order": "72",
     "role": "http://www.entegris.com/role/Debt2029and2030NotesDetails",
     "shortName": "Debt - 2029 and 2030 Notes (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "lang": "en-US",
      "name": "us-gaap:DebtInstrumentCovenantCompliance",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R73": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:Assets",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000074 - Disclosure - Fair Value Measures and Disclosures (Details)",
     "menuCat": "Details",
     "order": "73",
     "role": "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails",
     "shortName": "Fair Value Measures and Disclosures (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock",
       "us-gaap:ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:LongTermDebtFairValue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R74": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap-supplement:OpenForwardForeignCurrencyContractTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DerivativeNotionalAmount",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000075 - Disclosure - Derivative Instruments and Hedging Activities (Details)",
     "menuCat": "Details",
     "order": "74",
     "role": "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails",
     "shortName": "Derivative Instruments and Hedging Activities (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "us-gaap:ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:DerivativeInstrumentsGainLossReclassificationFromAccumulatedOCIToIncomeEstimatedNetAmountToBeTransferred",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R75": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock",
       "div",
       "us-gaap:OtherIncomeAndOtherExpenseDisclosureTextBlock",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ForeignCurrencyTransactionGainLossBeforeTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000076 - Disclosure - Other Income (Expense), Net (Details)",
     "menuCat": "Details",
     "order": "75",
     "role": "http://www.entegris.com/role/OtherIncomeExpenseNetDetails",
     "shortName": "Other Income (Expense), Net (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock",
       "div",
       "us-gaap:OtherIncomeAndOtherExpenseDisclosureTextBlock",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ForeignCurrencyTransactionGainLossBeforeTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R76": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OperatingLeaseRightOfUseAsset",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000077 - Disclosure - Leases - Lease Balances (Details)",
     "menuCat": "Details",
     "order": "76",
     "role": "http://www.entegris.com/role/LeasesLeaseBalancesDetails",
     "shortName": "Leases - Lease Balances (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": null,
      "lang": "en-US",
      "name": "us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R77": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:LeaseCostTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OperatingLeaseCost",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000078 - Disclosure - Lease Commitments Leases - Components of Lease Expense (Details)",
     "menuCat": "Details",
     "order": "77",
     "role": "http://www.entegris.com/role/LeaseCommitmentsLeasesComponentsofLeaseExpenseDetails",
     "shortName": "Lease Commitments Leases - Components of Lease Expense (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:LeaseCostTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OperatingLeaseCost",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R78": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseRenewalTerm",
      "reportCount": 1,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000079 - Disclosure - Lease Commitments Leases - Other Information (Details)",
     "menuCat": "Details",
     "order": "78",
     "role": "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
     "shortName": "Lease Commitments Leases - Other Information (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": null,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseOptionToTerminate",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R79": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000080 - Disclosure - Lease - Future Minimum Lease Payments (Details)",
     "menuCat": "Details",
     "order": "79",
     "role": "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails",
     "shortName": "Lease - Future Minimum Lease Payments (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R8": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "2",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CommonStockDividendsPerShareDeclared",
      "reportCount": 1,
      "unitRef": "usdPerShare",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000008 - Statement - Consolidated Statements Of Equity Consolidated Statement of Equity (Parenthetical)",
     "menuCat": "Statements",
     "order": "8",
     "role": "http://www.entegris.com/role/ConsolidatedStatementsOfEquityConsolidatedStatementofEquityParenthetical",
     "shortName": "Consolidated Statements Of Equity Consolidated Statement of Equity (Parenthetical)",
     "subGroupType": "parenthetical",
     "uniqueAnchor": null
    },
    "R80": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAssetRetirementObligationsTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i82b8d9b2ee3b45d58276ff95b3774e0c_I20211231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AssetRetirementObligation",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000081 - Disclosure - Asset Retirement Obligations (Details)",
     "menuCat": "Details",
     "order": "80",
     "role": "http://www.entegris.com/role/AssetRetirementObligationsDetails",
     "shortName": "Asset Retirement Obligations (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAssetRetirementObligationsTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i134ee63c8dcc4273bded63955cd351e1_I20201231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:AssetRetirementObligation",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R81": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000082 - Disclosure - Income Taxes - Income Before Income Taxes (Detail)",
     "menuCat": "Details",
     "order": "81",
     "role": "http://www.entegris.com/role/IncomeTaxesIncomeBeforeIncomeTaxesDetail",
     "shortName": "Income Taxes - Income Before Income Taxes (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R82": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CurrentFederalTaxExpenseBenefit",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000083 - Disclosure - Income Taxes - Components of Income Tax Expense (Benefit) (Detail)",
     "menuCat": "Details",
     "order": "82",
     "role": "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail",
     "shortName": "Income Taxes - Components of Income Tax Expense (Benefit) (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CurrentFederalTaxExpenseBenefit",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R83": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000084 - Disclosure - Income Taxes - Reconciliation of Income Tax Expense With Expected Amounts Based Upon Statutory Federal Tax Rates (Detail)",
     "menuCat": "Details",
     "order": "83",
     "role": "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail",
     "shortName": "Income Taxes - Reconciliation of Income Tax Expense With Expected Amounts Based Upon Statutory Federal Tax Rates (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R84": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:UndistributedEarningsOfForeignSubsidiaries",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000085 - Disclosure - Income Taxes - Singapore subsidiary commitments (Detail)",
     "menuCat": "Details",
     "order": "84",
     "role": "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail",
     "shortName": "Income Taxes - Singapore subsidiary commitments (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "icf6957478d88499eba90fc641074d4be_D20220101-20221231",
      "decimals": "-5",
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxHolidayAggregateDollarAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R85": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsAllowanceForDoubtfulAccounts",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000086 - Disclosure - Income Taxes - Deferred Tax Assets and Deferred Tax Liabilities (Detail)",
     "menuCat": "Details",
     "order": "85",
     "role": "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail",
     "shortName": "Income Taxes - Deferred Tax Assets and Deferred Tax Liabilities (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsAllowanceForDoubtfulAccounts",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R86": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DeferredTaxLiabilities",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000087 - Disclosure - Income Taxes Income Taxes - Deferred tax additional information (Details)",
     "menuCat": "Details",
     "order": "86",
     "role": "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails",
     "shortName": "Income Taxes Income Taxes - Deferred tax additional information (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i3afdf101ad5d40849210ac7797bc0802_I20221231",
      "decimals": "-5",
      "lang": "en-US",
      "name": "us-gaap:DeferredTaxLiabilities",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R87": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:SummaryOfIncomeTaxContingenciesTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i82b8d9b2ee3b45d58276ff95b3774e0c_I20211231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:UnrecognizedTaxBenefits",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000088 - Disclosure - Income Taxes - Reconciliations of Total Amount of Gross Unrecognized Tax Benefits (Detail)",
     "menuCat": "Details",
     "order": "87",
     "role": "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail",
     "shortName": "Income Taxes - Reconciliations of Total Amount of Gross Unrecognized Tax Benefits (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:SummaryOfIncomeTaxContingenciesTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i134ee63c8dcc4273bded63955cd351e1_I20201231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:UnrecognizedTaxBenefits",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R88": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-5",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000089 - Disclosure - Income Taxes Income Tax - Unrecognized tax benefits additional information (Details)",
     "menuCat": "Details",
     "order": "88",
     "role": "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
     "shortName": "Income Taxes Income Tax - Unrecognized tax benefits additional information (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-5",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R89": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i82b8d9b2ee3b45d58276ff95b3774e0c_I20211231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber",
      "reportCount": 1,
      "unitRef": "shares",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000090 - Disclosure - Equity - Summary of Option Activity (Detail)",
     "menuCat": "Details",
     "order": "89",
     "role": "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail",
     "shortName": "Equity - Summary of Option Activity (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ia5530b6a662146b3ba412d459dfe3080_I20191231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber",
      "reportCount": 1,
      "unique": true,
      "unitRef": "shares",
      "xsiNil": "false"
     }
    },
    "R9": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ProfitLoss",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "0000009 - Statement - Consolidated Statements Of Cash Flows",
     "menuCat": "Statements",
     "order": "9",
     "role": "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
     "shortName": "Consolidated Statements Of Cash Flows",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ProfitLoss",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R90": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions",
      "reportCount": 1,
      "unique": true,
      "unitRef": "shares",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000091 - Disclosure - Equity - Summary of Options Outstanding (Detail)",
     "menuCat": "Details",
     "order": "90",
     "role": "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail",
     "shortName": "Equity - Summary of Options Outstanding (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions",
      "reportCount": 1,
      "unique": true,
      "unitRef": "shares",
      "xsiNil": "false"
     }
    },
    "R91": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "number",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000092 - Disclosure - Equity - Weighted Average Assumptions Used in Valuation (Detail)",
     "menuCat": "Details",
     "order": "91",
     "role": "http://www.entegris.com/role/EquityWeightedAverageAssumptionsUsedinValuationDetail",
     "shortName": "Equity - Weighted Average Assumptions Used in Valuation (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "number",
      "xsiNil": "false"
     }
    },
    "R92": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationRestrictedStockUnitsAwardActivityTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i82b8d9b2ee3b45d58276ff95b3774e0c_I20211231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber",
      "reportCount": 1,
      "unitRef": "shares",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000093 - Disclosure - Summary of Restricted Stock Activity (Detail)",
     "menuCat": "Details",
     "order": "92",
     "role": "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail",
     "shortName": "Summary of Restricted Stock Activity (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationRestrictedStockUnitsAwardActivityTableTextBlock",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "ia5530b6a662146b3ba412d459dfe3080_I20191231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber",
      "reportCount": 1,
      "unique": true,
      "unitRef": "shares",
      "xsiNil": "false"
     }
    },
    "R93": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AllocatedShareBasedCompensationExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000094 - Disclosure - Summary of Allocation of Share Based Compensation Expense (Detail)",
     "menuCat": "Details",
     "order": "93",
     "role": "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail",
     "shortName": "Summary of Allocation of Share Based Compensation Expense (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AllocatedShareBasedCompensationExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R94": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DividendsCommonStockCash",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000095 - Disclosure - Equity - Additional Information (Detail)",
     "menuCat": "Details",
     "order": "94",
     "role": "http://www.entegris.com/role/EquityAdditionalInformationDetail",
     "shortName": "Equity - Additional Information (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:CommonStockDividendsPerShareCashPaid",
       "us-gaap:CommonStockDividendsPerShareCashPaid",
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i9249d712f89342a1bf9c6b7d20e07755_D20221002-20221231",
      "decimals": "2",
      "lang": "en-US",
      "name": "us-gaap:CommonStockDividendsPerShareCashPaid",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usdPerShare",
      "xsiNil": "false"
     }
    },
    "R95": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-5",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DefinedContributionPlanCostRecognized",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000096 - Disclosure - Benefit Plans - Additional Information (Detail)",
     "menuCat": "Details",
     "order": "95",
     "role": "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail",
     "shortName": "Benefit Plans - Additional Information (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-5",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DefinedContributionPlanCostRecognized",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R96": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000097 - Disclosure - Expected Contribution and Benefit Payments (Detail)",
     "menuCat": "Details",
     "order": "96",
     "role": "http://www.entegris.com/role/ExpectedContributionandBenefitPaymentsDetail",
     "shortName": "Expected Contribution and Benefit Payments (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "ix:continuation",
       "div",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i0a83edfd26c0452491b2d99e4214eb08_I20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    },
    "R97": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:WeightedAverageNumberOfSharesOutstandingBasic",
      "reportCount": 1,
      "unitRef": "shares",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000098 - Disclosure - Earnings Per Share (EPS) - Reconciliation of Share Amount Used in Computation of Basic and Diluted Earnings Per Share (Detail)",
     "menuCat": "Details",
     "order": "97",
     "role": "http://www.entegris.com/role/EarningsPerShareEPSReconciliationofShareAmountUsedinComputationofBasicandDilutedEarningsPerShareDetail",
     "shortName": "Earnings Per Share (EPS) - Reconciliation of Share Amount Used in Computation of Basic and Diluted Earnings Per Share (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment",
      "reportCount": 1,
      "unique": true,
      "unitRef": "shares",
      "xsiNil": "false"
     }
    },
    "R98": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "shares",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000099 - Disclosure - Earnings Per Share (EPS) - Shares Excluded Underlying Stock Based Awards from Calculations of Diluted EPS (Detail)",
     "menuCat": "Details",
     "order": "98",
     "role": "http://www.entegris.com/role/EarningsPerShareEPSSharesExcludedUnderlyingStockBasedAwardsfromCalculationsofDilutedEPSDetail",
     "shortName": "Earnings Per Share (EPS) - Shares Excluded Underlying Stock Based Awards from Calculations of Diluted EPS (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "shares",
      "xsiNil": "false"
     }
    },
    "R99": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock",
       "ix:continuation",
       "div",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i9249d712f89342a1bf9c6b7d20e07755_D20221002-20221231",
      "decimals": "-3",
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unitRef": "usd",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "0000100 - Disclosure - Segment information - Summary of Financial Information for Reportable Segments (Detail)",
     "menuCat": "Details",
     "order": "99",
     "role": "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail",
     "shortName": "Segment information - Summary of Financial Information for Reportable Segments (Detail)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "td",
       "tr",
       "table",
       "div",
       "us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock",
       "ix:continuation",
       "body",
       "html"
      ],
      "baseRef": "entg-20221231.htm",
      "contextRef": "i6258593356484d55b2f74e90d8554150_D20220101-20221231",
      "decimals": "-3",
      "lang": "en-US",
      "name": "us-gaap:DepreciationDepletionAndAmortization",
      "reportCount": 1,
      "unique": true,
      "unitRef": "usd",
      "xsiNil": "false"
     }
    }
   },
   "segmentCount": 79,
   "tag": {
    "country_CN": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "CHINA",
        "terseLabel": "CHINA"
       }
      }
     },
     "localname": "CN",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "country_JP": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "JAPAN",
        "terseLabel": "JAPAN"
       }
      }
     },
     "localname": "JP",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "country_KR": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "KOREA, REPUBLIC OF",
        "terseLabel": "SOUTH KOREA"
       }
      }
     },
     "localname": "KR",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "country_MY": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "MALAYSIA",
        "terseLabel": "MALAYSIA"
       }
      }
     },
     "localname": "MY",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "country_TW": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "TAIWAN",
        "terseLabel": "TAIWAN"
       }
      }
     },
     "localname": "TW",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "country_US": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "UNITED STATES",
        "terseLabel": "NORTH AMERICA"
       }
      }
     },
     "localname": "US",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "dei_AmendmentFlag": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.",
        "label": "Amendment Flag",
        "terseLabel": "Amendment Flag"
       }
      }
     },
     "localname": "AmendmentFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_AuditorFirmId": {
     "auth_ref": [
      "r759",
      "r760",
      "r761"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "PCAOB issued Audit Firm Identifier",
        "label": "Auditor Firm ID",
        "terseLabel": "Auditor Firm ID"
       }
      }
     },
     "localname": "AuditorFirmId",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "nonemptySequenceNumberItemType"
    },
    "dei_AuditorLocation": {
     "auth_ref": [
      "r759",
      "r760",
      "r761"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Auditor Location",
        "terseLabel": "Auditor Location"
       }
      }
     },
     "localname": "AuditorLocation",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "internationalNameItemType"
    },
    "dei_AuditorName": {
     "auth_ref": [
      "r759",
      "r760",
      "r761"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Auditor Name",
        "terseLabel": "Auditor Name"
       }
      }
     },
     "localname": "AuditorName",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "internationalNameItemType"
    },
    "dei_CityAreaCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Area code of city",
        "label": "City Area Code",
        "terseLabel": "City Area Code"
       }
      }
     },
     "localname": "CityAreaCode",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CoverAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cover page.",
        "label": "Cover [Abstract]",
        "terseLabel": "Cover page."
       }
      }
     },
     "localname": "CoverAbstract",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "xbrltype": "stringItemType"
    },
    "dei_CurrentFiscalYearEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "End date of current fiscal year in the format --MM-DD.",
        "label": "Current Fiscal Year End Date",
        "terseLabel": "Current Fiscal Year End Date"
       }
      }
     },
     "localname": "CurrentFiscalYearEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "gMonthDayItemType"
    },
    "dei_DocumentAnnualReport": {
     "auth_ref": [
      "r759",
      "r760",
      "r761"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as an annual report.",
        "label": "Document Annual Report",
        "terseLabel": "Document Annual Report"
       }
      }
     },
     "localname": "DocumentAnnualReport",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentFiscalPeriodFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.",
        "label": "Document Fiscal Period Focus",
        "terseLabel": "Document Fiscal Period Focus"
       }
      }
     },
     "localname": "DocumentFiscalPeriodFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "fiscalPeriodItemType"
    },
    "dei_DocumentFiscalYearFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.",
        "label": "Document Fiscal Year Focus",
        "terseLabel": "Document Fiscal Year Focus"
       }
      }
     },
     "localname": "DocumentFiscalYearFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "gYearItemType"
    },
    "dei_DocumentPeriodEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.",
        "label": "Document Period End Date",
        "terseLabel": "Document Period End Date"
       }
      }
     },
     "localname": "DocumentPeriodEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentTransitionReport": {
     "auth_ref": [
      "r762"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as a transition report.",
        "label": "Document Transition Report",
        "terseLabel": "Document Transition Report"
       }
      }
     },
     "localname": "DocumentTransitionReport",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentType": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.",
        "label": "Document Type",
        "terseLabel": "Document Type"
       }
      }
     },
     "localname": "DocumentType",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "submissionTypeItemType"
    },
    "dei_EntityAddressAddressLine1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name",
        "label": "Entity Address, Address Line One",
        "terseLabel": "Entity Address, Address Line One"
       }
      }
     },
     "localname": "EntityAddressAddressLine1",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCityOrTown": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the City or Town",
        "label": "Entity Address, City or Town",
        "terseLabel": "Entity Address, City or Town"
       }
      }
     },
     "localname": "EntityAddressCityOrTown",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressPostalZipCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Code for the postal or zip code",
        "label": "Entity Address, Postal Zip Code",
        "terseLabel": "Entity Address, Postal Zip Code"
       }
      }
     },
     "localname": "EntityAddressPostalZipCode",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressStateOrProvince": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the state or province.",
        "label": "Entity Address, State or Province",
        "terseLabel": "Entity Address, State or Province"
       }
      }
     },
     "localname": "EntityAddressStateOrProvince",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "stateOrProvinceItemType"
    },
    "dei_EntityCentralIndexKey": {
     "auth_ref": [
      "r757"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.",
        "label": "Entity Central Index Key",
        "terseLabel": "Entity Central Index Key"
       }
      }
     },
     "localname": "EntityCentralIndexKey",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "centralIndexKeyItemType"
    },
    "dei_EntityCommonStockSharesOutstanding": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.",
        "label": "Entity Common Stock, Shares Outstanding",
        "terseLabel": "Entity Common Stock, Shares Outstanding"
       }
      }
     },
     "localname": "EntityCommonStockSharesOutstanding",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "sharesItemType"
    },
    "dei_EntityCurrentReportingStatus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Current Reporting Status",
        "terseLabel": "Entity Current Reporting Status"
       }
      }
     },
     "localname": "EntityCurrentReportingStatus",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "All the names of the entities being reported upon in a document. Any legal structure used to conduct activities or to hold assets. Some examples of such structures are corporations, partnerships, limited liability companies, grantor trusts, and other trusts. This item does not include business and geographical segments which are included in the geographical or business segments domains.",
        "label": "Entity [Domain]",
        "terseLabel": "Entity [Domain]"
       }
      }
     },
     "localname": "EntityDomain",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "domainItemType"
    },
    "dei_EntityEmergingGrowthCompany": {
     "auth_ref": [
      "r757"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate if registrant meets the emerging growth company criteria.",
        "label": "Entity Emerging Growth Company",
        "terseLabel": "Entity Emerging Growth Company"
       }
      }
     },
     "localname": "EntityEmergingGrowthCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityFileNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.",
        "label": "Entity File Number",
        "terseLabel": "Entity File Number"
       }
      }
     },
     "localname": "EntityFileNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "fileNumberItemType"
    },
    "dei_EntityFilerCategory": {
     "auth_ref": [
      "r757"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Filer Category",
        "terseLabel": "Entity Filer Category"
       }
      }
     },
     "localname": "EntityFilerCategory",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "filerCategoryItemType"
    },
    "dei_EntityIncorporationStateCountryCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Two-character EDGAR code representing the state or country of incorporation.",
        "label": "Entity Incorporation, State or Country Code",
        "terseLabel": "Entity Incorporation, State or Country Code"
       }
      }
     },
     "localname": "EntityIncorporationStateCountryCode",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "edgarStateCountryItemType"
    },
    "dei_EntityInteractiveDataCurrent": {
     "auth_ref": [
      "r763"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).",
        "label": "Entity Interactive Data Current",
        "terseLabel": "Entity Interactive Data Current"
       }
      }
     },
     "localname": "EntityInteractiveDataCurrent",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityPublicFloat": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter.",
        "label": "Entity Public Float",
        "terseLabel": "Entity Public Float"
       }
      }
     },
     "localname": "EntityPublicFloat",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "monetaryItemType"
    },
    "dei_EntityRegistrantName": {
     "auth_ref": [
      "r757"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.",
        "label": "Entity Registrant Name",
        "terseLabel": "Entity Registrant Name"
       }
      }
     },
     "localname": "EntityRegistrantName",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityShellCompany": {
     "auth_ref": [
      "r757"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.",
        "label": "Entity Shell Company",
        "terseLabel": "Entity Shell Company"
       }
      }
     },
     "localname": "EntityShellCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntitySmallBusiness": {
     "auth_ref": [
      "r757"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates that the company is a Smaller Reporting Company (SRC).",
        "label": "Entity Small Business",
        "terseLabel": "Entity Small Business"
       }
      }
     },
     "localname": "EntitySmallBusiness",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityTaxIdentificationNumber": {
     "auth_ref": [
      "r757"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.",
        "label": "Entity Tax Identification Number",
        "terseLabel": "Entity Tax Identification Number"
       }
      }
     },
     "localname": "EntityTaxIdentificationNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "employerIdItemType"
    },
    "dei_EntityVoluntaryFilers": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.",
        "label": "Entity Voluntary Filers",
        "terseLabel": "Entity Voluntary Filers"
       }
      }
     },
     "localname": "EntityVoluntaryFilers",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityWellKnownSeasonedIssuer": {
     "auth_ref": [
      "r764"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.",
        "label": "Entity Well-known Seasoned Issuer",
        "terseLabel": "Entity Well-known Seasoned Issuer"
       }
      }
     },
     "localname": "EntityWellKnownSeasonedIssuer",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_IcfrAuditorAttestationFlag": {
     "auth_ref": [
      "r759",
      "r760",
      "r761"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "ICFR Auditor Attestation Flag",
        "terseLabel": "ICFR Auditor Attestation Flag"
       }
      }
     },
     "localname": "IcfrAuditorAttestationFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_LegalEntityAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The set of legal entities associated with a report.",
        "label": "Legal Entity [Axis]",
        "terseLabel": "Legal Entity [Axis]"
       }
      }
     },
     "localname": "LegalEntityAxis",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "dei_LocalPhoneNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Local phone number for entity.",
        "label": "Local Phone Number",
        "terseLabel": "Local Phone Number"
       }
      }
     },
     "localname": "LocalPhoneNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_Security12bTitle": {
     "auth_ref": [
      "r756"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Title of a 12(b) registered security.",
        "label": "Title of 12(b) Security",
        "terseLabel": "Title of 12(b) Security"
       }
      }
     },
     "localname": "Security12bTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_SecurityExchangeName": {
     "auth_ref": [
      "r758"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the Exchange on which a security is registered.",
        "label": "Security Exchange Name",
        "terseLabel": "Security Exchange Name"
       }
      }
     },
     "localname": "SecurityExchangeName",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "edgarExchangeCodeItemType"
    },
    "dei_TradingSymbol": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Trading symbol of an instrument as listed on an exchange.",
        "label": "Trading Symbol",
        "terseLabel": "Trading Symbol"
       }
      }
     },
     "localname": "TradingSymbol",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.entegris.com/role/DocumentandEntityInformation"
     ],
     "xbrltype": "tradingSymbolItemType"
    },
    "entg_AccountsAndNotesReceivableGross": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_AccountsNotesAndLoansReceivableNetCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accounts and notes receivable, gross.",
        "label": "Accounts And Notes Receivable Gross",
        "totalLabel": "Total trade accounts and notes receivable"
       }
      }
     },
     "localname": "AccountsAndNotesReceivableGross",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_Additionaleffectivetaxratebenefit": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Effective tax rate benefit over tax holiday benefit.",
        "label": "additional effective tax rate benefit",
        "terseLabel": "additional effective tax rate benefit"
       }
      }
     },
     "localname": "Additionaleffectivetaxratebenefit",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_AdvancedMaterialsHandlingAMHMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Advanced Materials Handling (AMH)",
        "label": "Advanced Materials Handling AMH [Member]",
        "terseLabel": "AMH"
       }
      }
     },
     "localname": "AdvancedMaterialsHandlingAMHMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_AdvancedPlanarizationSolutionsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Advanced Planarization Solutions",
        "label": "Advanced Planarization Solutions [Member]",
        "terseLabel": "APS"
       }
      }
     },
     "localname": "AdvancedPlanarizationSolutionsMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_AssetRetirementObligationDispositions": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Asset Retirement Obligation Dispositions",
        "label": "Asset Retirement Obligation Dispositions",
        "negatedTerseLabel": "Disposition"
       }
      }
     },
     "localname": "AssetRetirementObligationDispositions",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_AssumedInCMCAcquisitionAwardOptions": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Assumed in CMC acquisition Award, Options",
        "label": "Assumed in CMC acquisition Award, Options",
        "terseLabel": "Assumed in CMC acquisition Award, Options"
       }
      }
     },
     "localname": "AssumedInCMCAcquisitionAwardOptions",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_AssumedInCMCAcquisitionAwardOptionsWeightedAverageExercisePrice": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Assumed in CMC acquisition Award, Options, Grants in Period, Weighted Average Fair Value",
        "label": "Assumed in CMC acquisition Award, Options, Weighted Average Exercise Price",
        "terseLabel": "Weighted Average Exercise Price, Options assumed in acquisition."
       }
      }
     },
     "localname": "AssumedInCMCAcquisitionAwardOptionsWeightedAverageExercisePrice",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "entg_AssumedInCMCAcquisitionRestrictedStockUnits": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Assumed in CMC acquisition Restricted Stock Units",
        "label": "Assumed in CMC acquisition Restricted Stock Units",
        "terseLabel": "Assumed in CMC acquisition Restricted Stock Units"
       }
      }
     },
     "localname": "AssumedInCMCAcquisitionRestrictedStockUnits",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_AssumedInCMCAcquisitionRestrictedStockUnitsWeightedAverageExercisePriceFairValue": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Assumed in CMC acquisition, Restricted Stock Units, Weighted Average Exercise Price Fair Value",
        "label": "Assumed in CMC acquisition, Restricted Stock Units, Weighted Average Exercise Price Fair Value",
        "terseLabel": "Weighted average grant date fair value, Restricted stock units assumed in acquisition."
       }
      }
     },
     "localname": "AssumedInCMCAcquisitionRestrictedStockUnitsWeightedAverageExercisePriceFairValue",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "entg_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumed": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed",
        "label": "Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed",
        "terseLabel": "Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumed",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_Businessacquisitiondeferredpaymentnetpresentvalue": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Business acquisition deferred payment, net present value",
        "label": "Business acquisition deferred payment, net present value",
        "terseLabel": "Deferred acquisition payments, net"
       }
      }
     },
     "localname": "Businessacquisitiondeferredpaymentnetpresentvalue",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_Businesscombinationrightofuseasset": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "business combination right of use asset",
        "label": "business combination right of use asset",
        "terseLabel": "Right-of-use assets"
       }
      }
     },
     "localname": "Businesscombinationrightofuseasset",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_Businesscombinationsrecognizedleaseliability": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "business combinations, recognized lease liability",
        "label": "business combinations, recognized lease liability",
        "negatedTerseLabel": "Long-term lease liability"
       }
      }
     },
     "localname": "Businesscombinationsrecognizedleaseliability",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_CMCMaterialsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "CMC Materials",
        "label": "CMC Materials [Member]",
        "terseLabel": "CMC Materials"
       }
      }
     },
     "localname": "CMCMaterialsMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_Canistersandcylinders": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 4.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Canisters and cylinders",
        "label": "Canisters and cylinders",
        "terseLabel": "Canisters and cylinders"
       }
      }
     },
     "localname": "Canistersandcylinders",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_ChargeForFairValueMarkUpOfAcquiredInventorySold": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 15.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Charge for fair value mark-up of acquired inventory sold",
        "label": "Charge for fair value mark-up of acquired inventory sold",
        "terseLabel": "Charge for fair value mark-up of acquired inventory sold"
       }
      }
     },
     "localname": "ChargeForFairValueMarkUpOfAcquiredInventorySold",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_CommonStockExchangedForOptions": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Common Stock exchanged for Options",
        "label": "Common Stock exchanged for Options",
        "terseLabel": "Common Stock exchanged for Options"
       }
      }
     },
     "localname": "CommonStockExchangedForOptions",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_CommonStockExchangedForRSU": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Common Stock exchanged for RSU",
        "label": "Common Stock exchanged for RSU",
        "terseLabel": "Common Stock exchanged for RSU"
       }
      }
     },
     "localname": "CommonStockExchangedForRSU",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_ContractLiabilitiesIncludedInAssetHeldForSale": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Contract liabilities included in asset held-for-sale",
        "label": "Contract liabilities included in asset held-for-sale",
        "negatedTerseLabel": "Contract liabilities included in asset held-for-sale"
       }
      }
     },
     "localname": "ContractLiabilitiesIncludedInAssetHeldForSale",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/RevenuesRevenuesContractLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_ContractualTermOfStockOptionAwards": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The contractual term of the company's stock option awards.",
        "label": "Contractual Term Of Stock Option Awards",
        "terseLabel": "Contractual term of stock options (in years)"
       }
      }
     },
     "localname": "ContractualTermOfStockOptionAwards",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "entg_Deferredtaxchargesandrefundableincometaxes": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Deferred tax charges and refundable income taxes",
        "label": "Deferred tax charges and refundable income taxes",
        "terseLabel": "Deferred tax charges and refundable income taxes"
       }
      }
     },
     "localname": "Deferredtaxchargesandrefundableincometaxes",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_DepreciationExpenseTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Depreciation Expense Table [Text Block]",
        "label": "Depreciation Expense Table [Text Block]",
        "terseLabel": "Depreciation Expense"
       }
      }
     },
     "localname": "DepreciationExpenseTableTextBlock",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "entg_EffectiveIncomeRateReconciliationlegalentityrestructuring": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 10.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to legal entity restructuring.",
        "label": "Effective Income Rate Reconciliation, legal entity restructuring",
        "terseLabel": "Legal entity restructuring capital loss"
       }
      }
     },
     "localname": "EffectiveIncomeRateReconciliationlegalentityrestructuring",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_EffectiveIncometaxReconciliationForeignDerivedIntangibleIncome": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 9.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Effective Income tax Reconciliation, Foreign Derived Intangible Income",
        "label": "Effective Income tax Reconciliation, Foreign Derived Intangible Income",
        "terseLabel": "Foreign derived intangible income"
       }
      }
     },
     "localname": "EffectiveIncometaxReconciliationForeignDerivedIntangibleIncome",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_EmployeeStockPurchasePlanMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Employee Stock Purchase Plan [Member]",
        "label": "Employee Stock Purchase Plan [Member]",
        "terseLabel": "Employee Stock Purchase Plan"
       }
      }
     },
     "localname": "EmployeeStockPurchasePlanMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_EquityLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Equity [Line Items]",
        "label": "Equity [Line Items]",
        "terseLabel": "Equity [Line Items]"
       }
      }
     },
     "localname": "EquityLineItems",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "entg_EquityOfferingMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Equity offering",
        "label": "Equity offering [Member]",
        "terseLabel": "Equity offering [Member]"
       }
      }
     },
     "localname": "EquityOfferingMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_Eventofdefaultpercentage": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of aggregate principal amount of the then total outstanding notes to declare the principal, premium, if any, interest and any other monetary obligations on all the then-outstanding notes to be due and payable immediately upon event of default",
        "label": "Event of default percentage",
        "terseLabel": "Event of default percentage"
       }
      }
     },
     "localname": "Eventofdefaultpercentage",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "entg_IncomeTaxLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Income Tax [Line Items]",
        "label": "Income Tax [Line Items]",
        "terseLabel": "Income Tax [Line Items]"
       }
      }
     },
     "localname": "IncomeTaxLineItems",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "entg_IncomeTaxTable": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Income Tax [Table]",
        "label": "Income Tax [Table]",
        "terseLabel": "Income Tax [Table]"
       }
      }
     },
     "localname": "IncomeTaxTable",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "entg_IncomeTaxesLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Income Taxes [Line Items]",
        "label": "Income Taxes [Line Items]",
        "terseLabel": "Income Taxes [Line Items]"
       }
      }
     },
     "localname": "IncomeTaxesLineItems",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "entg_IncomeTaxesTable": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Income Taxes [Table]",
        "label": "Income Taxes [Table]",
        "terseLabel": "Income Taxes [Table]"
       }
      }
     },
     "localname": "IncomeTaxesTable",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "entg_Increasesduetocashreceivedexcludingamountsrecognizedasrevenueduringtheperiod": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Increases due to cash received, excluding amounts recognized as revenue during the period",
        "label": "Increases due to cash received, excluding amounts recognized as revenue during the period",
        "terseLabel": "Increases due to cash received, excluding amounts recognized as revenue during the period"
       }
      }
     },
     "localname": "Increasesduetocashreceivedexcludingamountsrecognizedasrevenueduringtheperiod",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/RevenuesRevenuesContractLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_IntersegmentSalesEliminationMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "intersegment sales elimination",
        "label": "intersegment sales elimination [Member]",
        "terseLabel": "Inter-segment elimination"
       }
      }
     },
     "localname": "IntersegmentSalesEliminationMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_LeaseOperatingLeaseCashFlowInformationTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Lease Operating Lease, Cash Flow Information",
        "label": "Lease Operating Lease, Cash Flow Information [Table Text Block]",
        "terseLabel": "Lease Operating Lease, Cash Flow Information"
       }
      }
     },
     "localname": "LeaseOperatingLeaseCashFlowInformationTableTextBlock",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "entg_Legalentityrestructuringdividendsreceiveddeduction": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 11.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Legal entity restructuring dividends received deduction",
        "label": "Legal entity restructuring dividends received deduction",
        "terseLabel": "Acquisition related retention, severance, and transaction costs"
       }
      }
     },
     "localname": "Legalentityrestructuringdividendsreceiveddeduction",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_LoanFeePercent": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Loan Fee percent",
        "label": "Loan Fee percent",
        "terseLabel": "Loan Fee percent"
       }
      }
     },
     "localname": "LoanFeePercent",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "entg_MicrocontaminationControlMCMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Microcontamination Control MC [Member]",
        "label": "Microcontamination Control MC [Member]",
        "terseLabel": "MC"
       }
      }
     },
     "localname": "MicrocontaminationControlMCMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_Molds": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 5.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Molds.",
        "label": "Molds",
        "terseLabel": "Molds"
       }
      }
     },
     "localname": "Molds",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_OperatingLeasesBalanceSheetTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "operating leases balance sheet",
        "label": "operating leases balance sheet [Table Text Block]",
        "terseLabel": "operating leases balance sheet"
       }
      }
     },
     "localname": "OperatingLeasesBalanceSheetTableTextBlock",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "entg_OptionsExchanged": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Options exchanged",
        "label": "Options exchanged",
        "terseLabel": "Options exchanged"
       }
      }
     },
     "localname": "OptionsExchanged",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_PaymentsForDeferredAcquisitions": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 6.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "payments for deferred acquisitions",
        "label": "payments for deferred acquisitions",
        "negatedTerseLabel": "Deferred acquisition payment"
       }
      }
     },
     "localname": "PaymentsForDeferredAcquisitions",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_PercentEmployeeContributionMaximumUnderEmployeeStockPurchasePlan": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The maximum employee contribution percentage of eligible compensation under the Employee stock purchase plan.",
        "label": "Percent Employee Contribution Maximum Under Employee Stock Purchase Plan",
        "terseLabel": "Percentage of employee contribution from compensation"
       }
      }
     },
     "localname": "PercentEmployeeContributionMaximumUnderEmployeeStockPurchasePlan",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "percentItemType"
    },
    "entg_Performancesharesgranted": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Maximum number of shares to be awarded upon the achievement of performance conditions",
        "label": "performance shares granted",
        "terseLabel": "performance shares granted"
       }
      }
     },
     "localname": "Performancesharesgranted",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_PrecisionMicrochemicalsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Precision Microchemicals",
        "label": "Precision Microchemicals [Member]",
        "terseLabel": "Precision Microchemicals"
       }
      }
     },
     "localname": "PrecisionMicrochemicalsMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_RSUExchanged": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Restricted Stock exchanged",
        "label": "RSU exchanged",
        "terseLabel": "RSU exchanged"
       }
      }
     },
     "localname": "RSUExchanged",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_RangeFiveMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Range Five [Member]",
        "label": "Range Five [Member]",
        "terseLabel": "$80.01 to $128.44"
       }
      }
     },
     "localname": "RangeFiveMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_RangeFourMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Range Four [Member]",
        "label": "Range Four [Member]",
        "terseLabel": "$55.73 to $80.00"
       }
      }
     },
     "localname": "RangeFourMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_RangeOneMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Range One [Member]",
        "label": "Range One [Member]",
        "terseLabel": "$\u2014 to $31.10"
       }
      }
     },
     "localname": "RangeOneMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_RangeThreeMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Range Three [Member]",
        "label": "Range Three [Member]",
        "terseLabel": "$43.48 to $55.72"
       }
      }
     },
     "localname": "RangeThreeMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_RangeTwoMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Range Two [Member]",
        "label": "Range Two [Member]",
        "terseLabel": "$31.11 to $43.47"
       }
      }
     },
     "localname": "RangeTwoMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_RatioOfCommonStockExchanged": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Ratio of common stock exchanged",
        "label": "Ratio of common stock exchanged",
        "terseLabel": "Ratio of common stock exchanged"
       }
      }
     },
     "localname": "RatioOfCommonStockExchanged",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "pureItemType"
    },
    "entg_RatioOfOptionsExchanged": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Ratio of Options exchanged",
        "label": "Ratio of Options exchanged",
        "terseLabel": "Ratio of Options exchanged"
       }
      }
     },
     "localname": "RatioOfOptionsExchanged",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "pureItemType"
    },
    "entg_Redemptionpricechangeofcontrol": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage price of original principal amount of debt at which debt can be redeemed by the issuer upon a change of control",
        "label": "Redemption price, change of control",
        "terseLabel": "Redemption price, change of control"
       }
      }
     },
     "localname": "Redemptionpricechangeofcontrol",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "entg_ScheduleOfAmortizationOfIntangiblesTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule Of Amortization Of Intangibles [Table Text Block]",
        "label": "Schedule Of Amortization Of Intangibles Table [Text Block]",
        "verboseLabel": "Amortization of Intangibles"
       }
      }
     },
     "localname": "ScheduleOfAmortizationOfIntangiblesTableTextBlock",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "entg_ScheduleOfEquityTable": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule Of Equity [Table]",
        "label": "Schedule Of Equity [Table]",
        "terseLabel": "Schedule Of Equity [Table]"
       }
      }
     },
     "localname": "ScheduleOfEquityTable",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "entg_ScheduleofinterestandincometaxespaidAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule of interest and income taxes paid [Abstract]",
        "label": "Schedule of interest and income taxes paid [Abstract]",
        "terseLabel": "Schedule of interest and income taxes paid:"
       }
      }
     },
     "localname": "ScheduleofinterestandincometaxespaidAbstract",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "entg_SeniorDebtDue2029Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Senior debt due 2029",
        "label": "Senior debt due 2029 [Member]",
        "terseLabel": "Senior secured term loan facility due 2029"
       }
      }
     },
     "localname": "SeniorDebtDue2029Member",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_SeniorSecuredNotesDue2029Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Senior Secured Notes Due 2029",
        "label": "Senior Secured Notes Due 2029 [Member]",
        "terseLabel": "Senior secured notes due 2029"
       }
      }
     },
     "localname": "SeniorSecuredNotesDue2029Member",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_SeniorUnsecuredNotes2028Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Senior Unsecured Notes 2028",
        "label": "Senior Unsecured Notes 2028 [Member]",
        "terseLabel": "Senior unsecured notes due 2028"
       }
      }
     },
     "localname": "SeniorUnsecuredNotes2028Member",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_SeniorUnsecuredNotes2029Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Senior Unsecured Notes 2029",
        "label": "Senior Unsecured Notes 2029 [Member]",
        "terseLabel": "Senior unsecured notes due 2029"
       }
      }
     },
     "localname": "SeniorUnsecuredNotes2029Member",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_SeniorUnsecuredNotesDue2030Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Senior Unsecured Notes Due 2030",
        "label": "Senior Unsecured Notes Due 2030 [Member]",
        "terseLabel": "Senior unsecured notes due 2030"
       }
      }
     },
     "localname": "SeniorUnsecuredNotesDue2030Member",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_ShareBasedCompensationArrangementByShareBasedPaymentAwardTermOfPlan": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Share-based compensation arrangement by share-based payment award, term of plan.",
        "label": "Share Based Compensation Arrangement By Share Based Payment Award Term Of Plan",
        "terseLabel": "Term of plan, in years"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardTermOfPlan",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "entg_ShareBasedCompensationModificationAmount": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "share based compensation modification amount",
        "label": "share based compensation modification amount",
        "terseLabel": "share based compensation modification amount"
       }
      }
     },
     "localname": "ShareBasedCompensationModificationAmount",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_SharesOfStockIssuedDuringPeriodShareBasedCompensationNetOfSharesWithheldForTaxes": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Shares of stock issued during the period as a result of any share-based compensation plan other than an employee stock ownership plan (ESOP), net of shares withheld for employee taxes.",
        "label": "Shares Of Stock Issued During Period Share Based Compensation Net Of Shares Withheld For Taxes",
        "terseLabel": "Shares issued under stock plans (in shares)"
       }
      }
     },
     "localname": "SharesOfStockIssuedDuringPeriodShareBasedCompensationNetOfSharesWithheldForTaxes",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "entg_SoutheastAsiaMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Southeast Asia [Member]",
        "label": "Southeast Asia [Member]",
        "terseLabel": "SOUTHEAST ASIA"
       }
      }
     },
     "localname": "SoutheastAsiaMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_SpecialtyChemicalsandElectronicMaterialsSCEMMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Specialty Chemicals and Electronic Materials (SCEM)",
        "label": "Specialty Chemicals and Electronic Materials SCEM [Member]",
        "terseLabel": "SCEM"
       }
      }
     },
     "localname": "SpecialtyChemicalsandElectronicMaterialsSCEMMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_StockIssuedDuringPeriodValueShareBasedCompensationNetOfSharesWithheldForTaxes": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value of stock issued during the period as a result of any share-based compensation plan other than an employee stock ownership plan (ESOP), net of shares withheld for employee taxes.",
        "label": "Stock Issued During Period Value Share Based Compensation Net Of Shares Withheld For Taxes",
        "terseLabel": "Shares issued under stock plans"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodValueShareBasedCompensationNetOfSharesWithheldForTaxes",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_TSMCMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Customer",
        "label": "TSMC [Member]",
        "terseLabel": "TSMC"
       }
      }
     },
     "localname": "TSMCMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSalesfromLargestCustomerDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_TickingFee": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Ticking Fee",
        "label": "Ticking Fee",
        "terseLabel": "Ticking Fee"
       }
      }
     },
     "localname": "TickingFee",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_TotalSegmentProfit": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total segment profit",
        "label": "Total Segment Profit",
        "terseLabel": "Total segment profit"
       }
      }
     },
     "localname": "TotalSegmentProfit",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_UnallocatedGeneralAndAdministrativeExpenses": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail": {
       "order": 3.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "General and administrative expenses not allocated to segment profit of company's business segments",
        "label": "Unallocated General And Administrative Expenses",
        "terseLabel": "Unallocated general and administrative expenses"
       }
      }
     },
     "localname": "UnallocatedGeneralAndAdministrativeExpenses",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_UnreimbursedLetterOfCreditPercentage": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Unreimbursed letter of credit percentage",
        "label": "Unreimbursed letter of credit percentage",
        "terseLabel": "Unreimbursed letter of credit percentage"
       }
      }
     },
     "localname": "UnreimbursedLetterOfCreditPercentage",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "entg_UnvestedStockOptionsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Unvested Stock Options [Member]",
        "label": "Unvested Stock Options [Member]",
        "terseLabel": "Unvested Stock Options"
       }
      }
     },
     "localname": "UnvestedStockOptionsMember",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "entg_WithholdingTax": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "withholding tax",
        "label": "withholding tax",
        "terseLabel": "withholding tax"
       }
      }
     },
     "localname": "WithholdingTax",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "entg_YearEndStockPrice": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The closing stock price of the company at year end.",
        "label": "Year End Stock Price",
        "terseLabel": "Total pre-tax intrinsic value based on the closing stock price"
       }
      }
     },
     "localname": "YearEndStockPrice",
     "nsuri": "http://www.entegris.com/20221231",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "exch_GSXC": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "GSX CHINA [Member]",
        "terseLabel": "CHINA"
       }
      }
     },
     "localname": "GSXC",
     "nsuri": "http://xbrl.sec.gov/exch/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_EuropeMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Europe [Member]",
        "terseLabel": "EUROPE"
       }
      }
     },
     "localname": "EuropeMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_MajorCustomersAxis": {
     "auth_ref": [
      "r382",
      "r738",
      "r808",
      "r865"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Customer [Axis]",
        "terseLabel": "Customer"
       }
      }
     },
     "localname": "MajorCustomersAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSalesfromLargestCustomerDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_MaximumMember": {
     "auth_ref": [
      "r435",
      "r436",
      "r437",
      "r438",
      "r524",
      "r667",
      "r687",
      "r708",
      "r709",
      "r735",
      "r745",
      "r755",
      "r804",
      "r855",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Maximum [Member]",
        "terseLabel": "Maximum"
       }
      }
     },
     "localname": "MaximumMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_MinimumMember": {
     "auth_ref": [
      "r435",
      "r436",
      "r437",
      "r438",
      "r524",
      "r667",
      "r687",
      "r708",
      "r709",
      "r735",
      "r745",
      "r755",
      "r804",
      "r855",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Minimum [Member]",
        "terseLabel": "Minimum"
       }
      }
     },
     "localname": "MinimumMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_NameOfMajorCustomerDomain": {
     "auth_ref": [
      "r382",
      "r738",
      "r808",
      "r865"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Customer [Domain]",
        "terseLabel": "Customer"
       }
      }
     },
     "localname": "NameOfMajorCustomerDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSalesfromLargestCustomerDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_RangeAxis": {
     "auth_ref": [
      "r435",
      "r436",
      "r437",
      "r438",
      "r511",
      "r524",
      "r551",
      "r552",
      "r553",
      "r666",
      "r667",
      "r687",
      "r708",
      "r709",
      "r735",
      "r745",
      "r755",
      "r800",
      "r804",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statistical Measurement [Axis]",
        "terseLabel": "Range"
       }
      }
     },
     "localname": "RangeAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_RangeMember": {
     "auth_ref": [
      "r435",
      "r436",
      "r437",
      "r438",
      "r511",
      "r524",
      "r551",
      "r552",
      "r553",
      "r666",
      "r667",
      "r687",
      "r708",
      "r709",
      "r735",
      "r745",
      "r755",
      "r800",
      "r804",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statistical Measurement [Domain]",
        "terseLabel": "Range"
       }
      }
     },
     "localname": "RangeMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_SegmentGeographicalDomain": {
     "auth_ref": [
      "r379",
      "r380",
      "r699",
      "r700",
      "r701",
      "r702",
      "r703",
      "r704",
      "r705",
      "r706",
      "r707",
      "r737",
      "r754",
      "r808"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Geographical [Domain]",
        "terseLabel": "Segment, Geographical"
       }
      }
     },
     "localname": "SegmentGeographicalDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_StatementGeographicalAxis": {
     "auth_ref": [
      "r379",
      "r380",
      "r694",
      "r699",
      "r700",
      "r701",
      "r702",
      "r703",
      "r704",
      "r705",
      "r706",
      "r707",
      "r737",
      "r754",
      "r808"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Geographical [Axis]",
        "terseLabel": "Geographical"
       }
      }
     },
     "localname": "StatementGeographicalAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccountingPoliciesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounting Policies [Abstract]",
        "terseLabel": "Accounting Policies [Abstract]"
       }
      }
     },
     "localname": "AccountingPoliciesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccountsNotesAndLoansReceivableNetCurrent": {
     "auth_ref": [
      "r384",
      "r681",
      "r726"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      },
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after allowance for credit loss, of accounts and financing receivables, classified as current. Includes, but is not limited to, notes and loan receivable.",
        "label": "Accounts and Financing Receivable, after Allowance for Credit Loss, Current",
        "terseLabel": "Trade accounts and notes receivable, net",
        "totalLabel": "Trade accounts and notes receivable, net"
       }
      }
     },
     "localname": "AccountsNotesAndLoansReceivableNetCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccountsNotesLoansAndFinancingReceivableGrossAllowanceAndNetAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounts, Notes, Loans and Financing Receivable, Gross, Allowance, and Net [Abstract]",
        "terseLabel": "Accounts, Notes, Loans and Financing Receivable, Gross, Allowance, and Net [Abstract]"
       }
      }
     },
     "localname": "AccountsNotesLoansAndFinancingReceivableGrossAllowanceAndNetAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccountsPayableCurrent": {
     "auth_ref": [
      "r19",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Accounts Payable, Current",
        "terseLabel": "Accounts payable"
       }
      }
     },
     "localname": "AccountsPayableCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccountsReceivableGross": {
     "auth_ref": [
      "r273",
      "r384"
     ],
     "calculation": {
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail": {
       "order": 1.0,
       "parentTag": "entg_AccountsAndNotesReceivableGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business.",
        "label": "Accounts Receivable, before Allowance for Credit Loss",
        "terseLabel": "Accounts receivable"
       }
      }
     },
     "localname": "AccountsReceivableGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccruedIncomeTaxesCurrent": {
     "auth_ref": [
      "r6",
      "r224",
      "r241"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 7.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.",
        "label": "Accrued Income Taxes, Current",
        "terseLabel": "Income taxes payable"
       }
      }
     },
     "localname": "AccruedIncomeTaxesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccruedLiabilitiesMember": {
     "auth_ref": [
      "r22"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "This item represents obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered.",
        "label": "Accrued Liabilities [Member]",
        "terseLabel": "Short-term lease liability"
       }
      }
     },
     "localname": "AccruedLiabilitiesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember": {
     "auth_ref": [
      "r31",
      "r36",
      "r183",
      "r768",
      "r769",
      "r770"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated other comprehensive (income) loss related to defined benefit plans attributable to the parent.",
        "label": "Accumulated Defined Benefit Plans Adjustment Attributable to Parent [Member]",
        "terseLabel": "Defined benefit pension adjustments"
       }
      }
     },
     "localname": "AccumulatedDefinedBenefitPlansAdjustmentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment": {
     "auth_ref": [
      "r98",
      "r267"
     ],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentNet",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services.",
        "label": "Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment",
        "terseLabel": "Less accumulated depreciation"
       }
      }
     },
     "localname": "AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember": {
     "auth_ref": [
      "r285",
      "r294",
      "r295",
      "r613",
      "r718",
      "r768"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated other comprehensive income (loss) from gain (loss) of derivative instrument designated and qualifying as cash flow hedge included in assessment of hedge effectiveness, attributable to parent.",
        "label": "Accumulated Gain (Loss), Net, Cash Flow Hedge, Parent [Member]",
        "terseLabel": "Accumulated Gain (Loss), Net, Cash Flow Hedge, Parent [Member]"
       }
      }
     },
     "localname": "AccumulatedGainLossNetCashFlowHedgeParentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax": {
     "auth_ref": [
      "r33",
      "r35",
      "r36",
      "r275",
      "r682",
      "r692",
      "r693"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.",
        "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax",
        "terseLabel": "Accumulated other comprehensive loss"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccumulatedTranslationAdjustmentMember": {
     "auth_ref": [
      "r30",
      "r36",
      "r183",
      "r294",
      "r295",
      "r635",
      "r636",
      "r637",
      "r638",
      "r640",
      "r768"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated other comprehensive income (loss) resulting from foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to the parent.",
        "label": "Accumulated Foreign Currency Adjustment Attributable to Parent [Member]",
        "terseLabel": "Foreign currency translation adjustments"
       }
      }
     },
     "localname": "AccumulatedTranslationAdjustmentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AcquiredFiniteLivedIntangibleAssetsWeightedAverageUsefulLife": {
     "auth_ref": [
      "r88"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Acquired Finite-Lived Intangible Assets, Weighted Average Useful Life",
        "terseLabel": "Acquired Finite-lived Intangible Assets, Weighted Average Useful Life"
       }
      }
     },
     "localname": "AcquiredFiniteLivedIntangibleAssetsWeightedAverageUsefulLife",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_AdditionalPaidInCapitalCommonStock": {
     "auth_ref": [
      "r13"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value received from shareholders in common stock-related transactions that are in excess of par value or stated value and amounts received from other stock-related transactions. Includes only common stock transactions (excludes preferred stock transactions). May be called contributed capital, capital in excess of par, capital surplus, or paid-in capital.",
        "label": "Additional Paid in Capital, Common Stock",
        "terseLabel": "Additional paid-in capital"
       }
      }
     },
     "localname": "AdditionalPaidInCapitalCommonStock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AdditionalPaidInCapitalMember": {
     "auth_ref": [
      "r557",
      "r558",
      "r559",
      "r781",
      "r782",
      "r783",
      "r847"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders.",
        "label": "Additional Paid-in Capital [Member]",
        "terseLabel": "Additional paid-in capital"
       }
      }
     },
     "localname": "AdditionalPaidInCapitalMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue": {
     "auth_ref": [
      "r149",
      "r150",
      "r525"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement.",
        "label": "APIC, Share-Based Payment Arrangement, Increase for Cost Recognition",
        "terseLabel": "Share-based compensation expense"
       }
      }
     },
     "localname": "AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]",
        "terseLabel": "Adjustments to reconcile net income to net cash provided by operating activities:"
       }
      }
     },
     "localname": "AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AllOtherSegmentsMember": {
     "auth_ref": [
      "r350",
      "r366",
      "r367",
      "r368",
      "r369",
      "r370"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Operating segments classified as other. Excludes intersegment elimination and reconciling items.",
        "label": "Other Segments [Member]",
        "terseLabel": "All Other Segments"
       }
      }
     },
     "localname": "AllOtherSegmentsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AllocatedShareBasedCompensationExpense": {
     "auth_ref": [
      "r555"
     ],
     "calculation": {
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.",
        "label": "Share-Based Payment Arrangement, Expense",
        "terseLabel": "Share-based compensation expense"
       }
      }
     },
     "localname": "AllocatedShareBasedCompensationExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after tax, of expense for award under share-based payment arrangement.",
        "label": "Share-Based Payment Arrangement, Expense, after Tax",
        "totalLabel": "Share-based compensation expense, net of tax"
       }
      }
     },
     "localname": "AllocatedShareBasedCompensationExpenseNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AllowanceForDoubtfulAccountsReceivable": {
     "auth_ref": [
      "r276",
      "r387",
      "r392",
      "r393",
      "r394"
     ],
     "calculation": {
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_AccountsNotesAndLoansReceivableNetCurrent",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of allowance for credit loss on accounts receivable.",
        "label": "Accounts Receivable, Allowance for Credit Loss",
        "terseLabel": "Less allowance for doubtful accounts"
       }
      }
     },
     "localname": "AllowanceForDoubtfulAccountsReceivable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AmortizationOfIntangibleAssets": {
     "auth_ref": [
      "r61",
      "r86",
      "r91"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      },
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 4.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0
      },
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate expense charged against earnings to allocate the cost of intangible assets (nonphysical assets not used in production) in a systematic and rational manner to the periods expected to benefit from such assets. As a noncash expense, this element is added back to net income when calculating cash provided by or used in operations using the indirect method.",
        "label": "Amortization of Intangible Assets",
        "terseLabel": "Amortization",
        "verboseLabel": "Amortization expense"
       }
      }
     },
     "localname": "AmortizationOfIntangibleAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AmortizationExpenseDetail",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount": {
     "auth_ref": [
      "r335"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.",
        "label": "Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount",
        "terseLabel": "Shares excluded from calculations of diluted EPS"
       }
      }
     },
     "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EarningsPerShareEPSSharesExcludedUnderlyingStockBasedAwardsfromCalculationsofDilutedEPSDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_AssetRetirementObligation": {
     "auth_ref": [
      "r420",
      "r423"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The carrying amount of a liability for an asset retirement obligation. An asset retirement obligation is a legal obligation associated with the disposal or retirement of a tangible long-lived asset that results from the acquisition, construction or development, or the normal operations of a long-lived asset, except for certain obligations of lessees.",
        "label": "Asset Retirement Obligation",
        "periodEndLabel": "Balance at end of year",
        "periodStartLabel": "Balance at beginning of year"
       }
      }
     },
     "localname": "AssetRetirementObligation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetRetirementObligationAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Asset Retirement Obligation [Abstract]",
        "terseLabel": "Asset Retirement Obligation [Abstract]"
       }
      }
     },
     "localname": "AssetRetirementObligationAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_AssetRetirementObligationAccretionExpense": {
     "auth_ref": [
      "r421",
      "r426"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accretion expense recognized during the period that is associated with an asset retirement obligation. Accretion expense measures and incorporates changes due to the passage of time into the carrying amount of the liability.",
        "label": "Asset Retirement Obligation, Accretion Expense",
        "terseLabel": "Accretion expense"
       }
      }
     },
     "localname": "AssetRetirementObligationAccretionExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetRetirementObligationDisclosureTextBlock": {
     "auth_ref": [
      "r422",
      "r428",
      "r429"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for an asset retirement obligation and the associated long-lived asset. An asset retirement obligation is a legal obligation associated with the disposal or retirement from service of a tangible long-lived asset that results from the acquisition, construction or development, or the normal operations of a long-lived asset, except for certain obligations of lessees.",
        "label": "Asset Retirement Obligation Disclosure [Text Block]",
        "terseLabel": "Asset Retirement Obligations"
       }
      }
     },
     "localname": "AssetRetirementObligationDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligations"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_AssetRetirementObligationLiabilitiesIncurred": {
     "auth_ref": [
      "r424"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of asset retirement obligations incurred during the period.",
        "label": "Asset Retirement Obligation, Liabilities Incurred",
        "terseLabel": "Liabilities incurred"
       }
      }
     },
     "localname": "AssetRetirementObligationLiabilitiesIncurred",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetRetirementObligationLiabilitiesSettled": {
     "auth_ref": [
      "r425"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of asset retirement obligations settled, or otherwise disposed of, during the period. This may include asset retirement obligations transferred to third parties associated with the sale of a long-lived asset.",
        "label": "Asset Retirement Obligation, Liabilities Settled",
        "negatedTerseLabel": "Liabilities settled"
       }
      }
     },
     "localname": "AssetRetirementObligationLiabilitiesSettled",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetRetirementObligationRevisionOfEstimate": {
     "auth_ref": [
      "r427"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in the asset retirement obligation from changes in the amount or timing of the estimated cash flows associated with the settlement of the obligation.",
        "label": "Asset Retirement Obligation, Revision of Estimate",
        "terseLabel": "Revision of estimate"
       }
      }
     },
     "localname": "AssetRetirementObligationRevisionOfEstimate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_Assets": {
     "auth_ref": [
      "r222",
      "r239",
      "r271",
      "r309",
      "r362",
      "r368",
      "r374",
      "r390",
      "r439",
      "r440",
      "r441",
      "r442",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r609",
      "r614",
      "r628",
      "r753",
      "r802",
      "r803",
      "r853"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.",
        "label": "Assets",
        "terseLabel": "Total Assets",
        "totalLabel": "Total assets"
       }
      }
     },
     "localname": "Assets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets [Abstract]",
        "terseLabel": "ASSETS"
       }
      }
     },
     "localname": "AssetsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AssetsCurrent": {
     "auth_ref": [
      "r262",
      "r280",
      "r309",
      "r390",
      "r439",
      "r440",
      "r441",
      "r442",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r609",
      "r614",
      "r628",
      "r753",
      "r802",
      "r803",
      "r853"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.",
        "label": "Assets, Current",
        "totalLabel": "Total current assets"
       }
      }
     },
     "localname": "AssetsCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsCurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets, Current [Abstract]",
        "terseLabel": "Current assets:"
       }
      }
     },
     "localname": "AssetsCurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AssetsHeldForSaleLongLivedFairValueDisclosure": {
     "auth_ref": [
      "r751"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of assets classified as held for sale.",
        "label": "Assets Held-for-sale, Long-Lived, Fair Value Disclosure",
        "negatedTerseLabel": "Assets Held-for-sale, Long-Lived, Fair Value Disclosure"
       }
      }
     },
     "localname": "AssetsHeldForSaleLongLivedFairValueDisclosure",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsHeldForSaleNotPartOfDisposalGroup": {
     "auth_ref": [
      "r93"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of assets held-for-sale that are not part of a disposal group.",
        "label": "Assets Held-for-sale, Not Part of Disposal Group",
        "terseLabel": "Assets held-for-sale"
       }
      }
     },
     "localname": "AssetsHeldForSaleNotPartOfDisposalGroup",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsHeldForSaleNotPartOfDisposalGroupAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets Held-for-sale, Not Part of Disposal Group [Abstract]"
       }
      }
     },
     "localname": "AssetsHeldForSaleNotPartOfDisposalGroupAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_AssetsNoncurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets, Noncurrent [Abstract]",
        "terseLabel": "Other assets:"
       }
      }
     },
     "localname": "AssetsNoncurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100",
      "r260",
      "r261"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as assets attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Assets",
        "totalLabel": "Total assets-held-for sale"
       }
      }
     },
     "localname": "AssetsOfDisposalGroupIncludingDiscontinuedOperation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AwardTypeAxis": {
     "auth_ref": [
      "r526",
      "r527",
      "r528",
      "r530",
      "r531",
      "r532",
      "r533",
      "r534",
      "r535",
      "r536",
      "r537",
      "r538",
      "r539",
      "r540",
      "r541",
      "r542",
      "r543",
      "r544",
      "r545",
      "r546",
      "r547",
      "r550",
      "r551",
      "r552",
      "r553",
      "r554"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of award under share-based payment arrangement.",
        "label": "Award Type [Axis]",
        "terseLabel": "Award Type"
       }
      }
     },
     "localname": "AwardTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BalanceSheetLocationAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by location on balance sheet (statement of financial position).",
        "label": "Balance Sheet Location [Axis]",
        "terseLabel": "Balance Sheet Location [Axis]"
       }
      }
     },
     "localname": "BalanceSheetLocationAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BalanceSheetLocationDomain": {
     "auth_ref": [
      "r190",
      "r193"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Location in the balance sheet (statement of financial position).",
        "label": "Balance Sheet Location [Domain]",
        "terseLabel": "Balance Sheet Location [Domain]"
       }
      }
     },
     "localname": "BalanceSheetLocationDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BridgeLoan": {
     "auth_ref": [
      "r5",
      "r223",
      "r242"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Short-Term financing which is expected to be paid back relatively quickly, such as by a subsequent longer-term loan. Also called swing loan or bridge financing.",
        "label": "Bridge Loan",
        "terseLabel": "Bridge Credit Facility due 2023"
       }
      }
     },
     "localname": "BridgeLoan",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BridgeLoanMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Financing which is expected to be replaced by a medium to long-term loan. The loan \"bridges\" the gap in time when otherwise no financing would be in place.",
        "label": "Bridge Loan [Member]",
        "terseLabel": "Bridge Credit Facility due 2023"
       }
      }
     },
     "localname": "BridgeLoanMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BuildingAndBuildingImprovementsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Facility held for productive use including, but not limited to, office, production, storage and distribution facilities and any addition, improvement, or renovation to the structure, for example, but not limited to, interior masonry, interior flooring, electrical, and plumbing.",
        "label": "Building and Building Improvements [Member]",
        "terseLabel": "Building and Building Improvements"
       }
      }
     },
     "localname": "BuildingAndBuildingImprovementsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BuildingsAndImprovementsGross": {
     "auth_ref": [
      "r97"
     ],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accumulated depreciation of building structures held for productive use including addition, improvement, or renovation to the structure, including, but not limited to, interior masonry, interior flooring, electrical, and plumbing.",
        "label": "Buildings and Improvements, Gross",
        "terseLabel": "Buildings and improvements"
       }
      }
     },
     "localname": "BuildingsAndImprovementsGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessAcquisitionAcquireeDomain": {
     "auth_ref": [
      "r606",
      "r743",
      "r744"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Identification of the acquiree in a material business combination (or series of individually immaterial business combinations), which may include the name or other type of identification of the acquiree.",
        "label": "Business Acquisition, Acquiree [Domain]",
        "terseLabel": "Business Acquisition, Acquiree"
       }
      }
     },
     "localname": "BusinessAcquisitionAcquireeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BusinessAcquisitionAxis": {
     "auth_ref": [
      "r169",
      "r170",
      "r606",
      "r743",
      "r744"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by business combination or series of individually immaterial business combinations.",
        "label": "Business Acquisition [Axis]",
        "terseLabel": "Business Acquisition"
       }
      }
     },
     "localname": "BusinessAcquisitionAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Date when the business acquisition agreement was executed, in YYYY-MM-DD format.",
        "label": "Business Acquisition, Date of Acquisition Agreement",
        "terseLabel": "Date of acquisition"
       }
      }
     },
     "localname": "BusinessAcquisitionDateOfAcquisitionAgreement1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "dateItemType"
    },
    "us-gaap_BusinessAcquisitionLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Business Acquisition [Line Items]",
        "terseLabel": "Business Acquisition"
       }
      }
     },
     "localname": "BusinessAcquisitionLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BusinessAcquisitionProFormaEarningsPerShareBasic": {
     "auth_ref": [
      "r843",
      "r844"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The pro forma basic net income per share for a period as if the business combination or combinations had been completed at the beginning of a period.",
        "label": "Business Acquisition, Pro Forma Earnings Per Share, Basic",
        "terseLabel": "Business Acquisition, Pro Forma Earnings Per Share, Basic"
       }
      }
     },
     "localname": "BusinessAcquisitionProFormaEarningsPerShareBasic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_BusinessAcquisitionProFormaEarningsPerShareDiluted": {
     "auth_ref": [
      "r843",
      "r844"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The pro forma diluted net income per share for a period as if the business combination or combinations had been completed at the beginning of a period.",
        "label": "Business Acquisition, Pro Forma Earnings Per Share, Diluted",
        "terseLabel": "Business Acquisition, Pro Forma Earnings Per Share, Diluted"
       }
      }
     },
     "localname": "BusinessAcquisitionProFormaEarningsPerShareDiluted",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_BusinessAcquisitionProFormaInformationTextBlock": {
     "auth_ref": [
      "r843",
      "r844"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of pro forma results of operations for a material business acquisition or series of individually immaterial business acquisitions that are material in the aggregate.",
        "label": "Business Acquisition, Pro Forma Information [Table Text Block]",
        "terseLabel": "Business Acquisition, Pro Forma Information"
       }
      }
     },
     "localname": "BusinessAcquisitionProFormaInformationTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_BusinessAcquisitionSharePrice": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Price of a single share of a number of saleable stocks paid or offered to be paid in a business combination.",
        "label": "Business Acquisition, Share Price",
        "terseLabel": "Business Acquisition, Share Price"
       }
      }
     },
     "localname": "BusinessAcquisitionSharePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_BusinessAcquisitionsProFormaNetIncomeLoss": {
     "auth_ref": [
      "r603",
      "r604"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The pro forma net Income or Loss for the period as if the business combination or combinations had been completed at the beginning of a period.",
        "label": "Business Acquisition, Pro Forma Net Income (Loss)",
        "terseLabel": "Business Acquisition, Pro Forma Net Income (Loss)"
       }
      }
     },
     "localname": "BusinessAcquisitionsProFormaNetIncomeLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessAcquisitionsProFormaRevenue": {
     "auth_ref": [
      "r603",
      "r604"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The pro forma revenue for a period as if the business combination or combinations had been completed at the beginning of the period.",
        "label": "Business Acquisition, Pro Forma Revenue",
        "terseLabel": "Business Acquisition, Pro Forma Revenue"
       }
      }
     },
     "localname": "BusinessAcquisitionsProFormaRevenue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationAcquiredReceivablesFairValue": {
     "auth_ref": [
      "r605"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value of acquired receivable from business combination, excluding certain loans and debt securities acquired in transfer.",
        "label": "Business Combination, Acquired Receivable, Fair Value",
        "terseLabel": "Accounts receivable and other current assets"
       }
      }
     },
     "localname": "BusinessCombinationAcquiredReceivablesFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationAcquisitionRelatedCosts": {
     "auth_ref": [
      "r167"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "This element represents acquisition-related costs incurred to effect a business combination which costs have been expensed during the period. Such costs include finder's fees; advisory, legal, accounting, valuation, and other professional or consulting fees; general administrative costs, including the costs of maintaining an internal acquisitions department; and may include costs of registering and issuing debt and equity securities.",
        "label": "Business Combination, Acquisition Related Costs",
        "terseLabel": "Business Combination, Acquisition Related Costs"
       }
      }
     },
     "localname": "BusinessCombinationAcquisitionRelatedCosts",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationAndAssetAcquisitionAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Business Combination and Asset Acquisition [Abstract]"
       }
      }
     },
     "localname": "BusinessCombinationAndAssetAcquisitionAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_BusinessCombinationConsiderationTransferredEquityInterestsIssuedAndIssuable": {
     "auth_ref": [
      "r176",
      "r177"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of equity interests of the acquirer, including instruments or interests issued or issuable in consideration for the business combination.",
        "label": "Business Combination, Consideration Transferred, Equity Interests Issued and Issuable",
        "terseLabel": "Equity consideration on acquisition of CMC Materials, Inc."
       }
      }
     },
     "localname": "BusinessCombinationConsiderationTransferredEquityInterestsIssuedAndIssuable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationDisclosureTextBlock": {
     "auth_ref": [
      "r179",
      "r607"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for a business combination (or series of individually immaterial business combinations) completed during the period, including background, timing, and recognized assets and liabilities. The disclosure may include leverage buyout transactions (as applicable).",
        "label": "Business Combination Disclosure [Text Block]",
        "terseLabel": "Business Combination Disclosure"
       }
      }
     },
     "localname": "BusinessCombinationDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Acquisition"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCapitalLeaseObligation": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lease obligation assumed in business combination.",
        "label": "Business Combination, Recognized Identifiable Asset Acquired and Liability Assumed, Lease Obligation",
        "negatedTerseLabel": "Short-term lease liability"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCapitalLeaseObligation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCashAndEquivalents": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of currency on hand as well as demand deposits with banks or financial institutions, acquired at the acquisition date. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Cash and Equivalents",
        "terseLabel": "Cash and cash equivalents"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCashAndEquivalents",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of other assets expected to be realized or consumed before one year or the normal operating cycle, if longer, acquired at the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Current Assets, Other",
        "terseLabel": "Other current assets"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilities": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities due within one year or within the normal operating cycle, if longer, assumed at the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Current Liabilities",
        "negatedTerseLabel": "Current liabilities"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayable": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities incurred for goods and services received that are used in an entity's business and related party payables, assumed at the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Current Liabilities, Accounts Payable",
        "negatedTerseLabel": "Accounts payable and accrued liabilities"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of intangible assets, excluding goodwill, acquired at the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Intangible Assets, Other than Goodwill",
        "terseLabel": "Identifiable intangible assets"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory": {
     "auth_ref": [
      "r171",
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of inventory recognized as of the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Inventory",
        "terseLabel": "Inventories, net"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet": {
     "auth_ref": [
      "r171",
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount recognized as of the acquisition date for the identifiable assets acquired in excess of (less than) the aggregate liabilities assumed.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Net",
        "terseLabel": "Net Assets Acquired"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesOther": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of other liabilities due after one year or the normal operating cycle, if longer, assumed at the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Noncurrent Liabilities, Other",
        "negatedTerseLabel": "Deferred tax liabilities and noncurrent liabilities"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesOther",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of other assets expected to be realized or consumed after one year or the normal operating cycle, if longer, acquired at the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Other Noncurrent Assets",
        "terseLabel": "Other noncurrent assets"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment": {
     "auth_ref": [
      "r171",
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of property, plant, and equipment recognized as of the acquisition date.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Property, Plant, and Equipment",
        "terseLabel": "Property, plant and equipment"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet": {
     "auth_ref": [
      "r172"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount recognized for assets, including goodwill, in excess of (less than) the aggregate liabilities assumed.",
        "label": "Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net",
        "terseLabel": "Total purchase price, net of cash acquired"
       }
      }
     },
     "localname": "BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationSeparatelyRecognizedTransactionsExpensesAndLossesRecognized": {
     "auth_ref": [
      "r168"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The expenses and losses recorded for each transaction with the acquiree that was recognized separately from the acquisition of assets and assumptions of liabilities in the business combination.",
        "label": "Business Combination, Separately Recognized Transactions, Expenses and Losses Recognized",
        "terseLabel": "Acquisition costs"
       }
      }
     },
     "localname": "BusinessCombinationSeparatelyRecognizedTransactionsExpensesAndLossesRecognized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Business Combinations [Abstract]",
        "terseLabel": "Business Combinations [Abstract]"
       }
      }
     },
     "localname": "BusinessCombinationsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_CapitalExpendituresIncurredButNotYetPaid": {
     "auth_ref": [
      "r66",
      "r67",
      "r68"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Future cash outflow to pay for purchases of fixed assets that have occurred.",
        "label": "Capital Expenditures Incurred but Not yet Paid",
        "terseLabel": "Equipment purchases in accounts payable"
       }
      }
     },
     "localname": "CapitalExpendituresIncurredButNotYetPaid",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashAcquiredFromAcquisition": {
     "auth_ref": [
      "r48"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow associated with the acquisition of business during the period (for example, cash that was held by the acquired business).",
        "label": "Cash Acquired from Acquisition",
        "terseLabel": "Less cash and cash equivalents acquired"
       }
      }
     },
     "localname": "CashAcquiredFromAcquisition",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashAndCashEquivalentsAtCarryingValue": {
     "auth_ref": [
      "r63",
      "r265",
      "r712"
     ],
     "calculation": {
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
       "weight": 1.0
      },
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.",
        "label": "Cash and Cash Equivalents, at Carrying Value",
        "periodStartLabel": "Cash, cash equivalents and restricted cash at beginning of year",
        "terseLabel": "Cash and cash equivalents"
       }
      }
     },
     "localname": "CashAndCashEquivalentsAtCarryingValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashDetails",
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashAndCashEquivalentsFairValueDisclosure": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash and Cash Equivalents, Fair Value Disclosure",
        "terseLabel": "Cash and cash equivalents"
       }
      }
     },
     "localname": "CashAndCashEquivalentsFairValueDisclosure",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashAndCashEquivalentsPolicyTextBlock": {
     "auth_ref": [
      "r64"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for cash and cash equivalents, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value.",
        "label": "Cash and Cash Equivalents, Policy [Policy Text Block]",
        "terseLabel": "Cash and Cash Equivalents"
       }
      }
     },
     "localname": "CashAndCashEquivalentsPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents": {
     "auth_ref": [
      "r57",
      "r63",
      "r69"
     ],
     "calculation": {
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents",
        "terseLabel": "Cash, cash equivalents and restricted cash at end of year",
        "totalLabel": "Total cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashDetails",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents [Abstract]"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect": {
     "auth_ref": [
      "r57",
      "r215"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect",
        "totalLabel": "Increase (decrease) in cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashFlowHedgeDerivativeInstrumentAssetsAtFairValue": {
     "auth_ref": [
      "r192"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value of all asset derivatives designated as cash flow hedging instruments.",
        "label": "Cash Flow Hedge Derivative Instrument Assets at Fair Value",
        "terseLabel": "Derivative financial instruments - Interest rate swap - cash flow hedge"
       }
      }
     },
     "localname": "CashFlowHedgeDerivativeInstrumentAssetsAtFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Commitments and Contingencies Disclosure [Abstract]",
        "terseLabel": "Commitments and Contingencies Disclosure [Abstract]"
       }
      }
     },
     "localname": "CommitmentsAndContingenciesDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureTextBlock": {
     "auth_ref": [
      "r105",
      "r433",
      "r434",
      "r695",
      "r801"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for commitments and contingencies.",
        "label": "Commitments and Contingencies Disclosure [Text Block]",
        "terseLabel": "Commitments and Contingent Liabilities"
       }
      }
     },
     "localname": "CommitmentsAndContingenciesDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CommitmentsandContingentLiabilities"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_CommonStockDividendsPerShareCashPaid": {
     "auth_ref": [
      "r117"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate dividends paid during the period for each share of common stock outstanding.",
        "label": "Common Stock, Dividends, Per Share, Cash Paid",
        "terseLabel": "Dividends declared per share"
       }
      }
     },
     "localname": "CommonStockDividendsPerShareCashPaid",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_CommonStockDividendsPerShareDeclared": {
     "auth_ref": [
      "r117"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate dividends declared during the period for each share of common stock outstanding.",
        "label": "Common Stock, Dividends, Per Share, Declared",
        "terseLabel": "Common Stock, Dividends, Per Share, Declared"
       }
      }
     },
     "localname": "CommonStockDividendsPerShareDeclared",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquityConsolidatedStatementofEquityParenthetical",
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_CommonStockMember": {
     "auth_ref": [
      "r781",
      "r782",
      "r847"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Stock that is subordinate to all other stock of the issuer.",
        "label": "Common Stock [Member]",
        "terseLabel": "Common stock"
       }
      }
     },
     "localname": "CommonStockMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CommonStockParOrStatedValuePerShare": {
     "auth_ref": [
      "r12"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Face amount or stated value per share of common stock.",
        "label": "Common Stock, Par or Stated Value Per Share",
        "terseLabel": "Common stock, par value"
       }
      }
     },
     "localname": "CommonStockParOrStatedValuePerShare",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_CommonStockSharesAuthorized": {
     "auth_ref": [
      "r12"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The maximum number of common shares permitted to be issued by an entity's charter and bylaws.",
        "label": "Common Stock, Shares Authorized",
        "terseLabel": "Common stock, shares authorized"
       }
      }
     },
     "localname": "CommonStockSharesAuthorized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockSharesIssued": {
     "auth_ref": [
      "r12"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.",
        "label": "Common Stock, Shares, Issued",
        "terseLabel": "Common stock, shares issued"
       }
      }
     },
     "localname": "CommonStockSharesIssued",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockSharesOutstanding": {
     "auth_ref": [
      "r12",
      "r112"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.",
        "label": "Common Stock, Shares, Outstanding",
        "terseLabel": "Common stock, shares outstanding"
       }
      }
     },
     "localname": "CommonStockSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockValue": {
     "auth_ref": [
      "r12",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate par or stated value of issued nonredeemable common stock (or common stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable common shares, par value and other disclosure concepts are in another section within stockholders' equity.",
        "label": "Common Stock, Value, Issued",
        "terseLabel": "Common stock, par value $.01; 400,000,000 shares authorized; issued and outstanding shares as of December\u00a031, 2022: 149,339,486 and 149,137,086, respectively; issued and outstanding shares as of December\u00a031, 2021: 135,719,366 and 135,516,966, respectively"
       }
      }
     },
     "localname": "CommonStockValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CompensationAndEmployeeBenefitPlansTextBlock": {
     "auth_ref": [
      "r122",
      "r123",
      "r133",
      "r151"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for an entity's employee compensation and benefit plans, including, but not limited to, postemployment and postretirement benefit plans, defined benefit pension plans, defined contribution plans, non-qualified and supplemental benefit plans, deferred compensation, share-based compensation, life insurance, severance, health care, unemployment and other benefit plans.",
        "label": "Compensation and Employee Benefit Plans [Text Block]",
        "terseLabel": "Benefit Plans"
       }
      }
     },
     "localname": "CompensationAndEmployeeBenefitPlansTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlans"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ComprehensiveIncomeNetOfTax": {
     "auth_ref": [
      "r37",
      "r289",
      "r291",
      "r298",
      "r677",
      "r684"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.",
        "label": "Comprehensive Income (Loss), Net of Tax, Attributable to Parent",
        "totalLabel": "Comprehensive income"
       }
      }
     },
     "localname": "ComprehensiveIncomeNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ConsolidationPolicyTextBlock": {
     "auth_ref": [
      "r182",
      "r719"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy regarding (1) the principles it follows in consolidating or combining the separate financial statements, including the principles followed in determining the inclusion or exclusion of subsidiaries or other entities in the consolidated or combined financial statements and (2) its treatment of interests (for example, common stock, a partnership interest or other means of exerting influence) in other entities, for example consolidation or use of the equity or cost methods of accounting. The accounting policy may also address the accounting treatment for intercompany accounts and transactions, noncontrolling interest, and the income statement treatment in consolidation for issuances of stock by a subsidiary.",
        "label": "Consolidation, Policy [Policy Text Block]",
        "terseLabel": "Principles of Consolidation"
       }
      }
     },
     "localname": "ConsolidationPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ConstructionInProgressGross": {
     "auth_ref": [
      "r97"
     ],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 7.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of structure or a modification to a structure under construction. Includes recently completed structures or modifications to structures that have not been placed into service.",
        "label": "Construction in Progress, Gross",
        "terseLabel": "Construction in progress"
       }
      }
     },
     "localname": "ConstructionInProgressGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContainersMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Assets commonly used in the storage and transportation of goods.",
        "label": "Containers [Member]",
        "terseLabel": "Canisters and cylinders"
       }
      }
     },
     "localname": "ContainersMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock": {
     "auth_ref": [
      "r807"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of receivable, contract asset, and contract liability from contract with customer. Includes, but is not limited to, change in contract asset and contract liability.",
        "label": "Contract with Customer, Contract Asset, Contract Liability, and Receivable [Table Text Block]",
        "terseLabel": "Contract with Customer, Asset and Liability"
       }
      }
     },
     "localname": "ContractWithCustomerAssetAndLiabilityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/RevenuesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ContractWithCustomerLiabilityCurrent": {
     "auth_ref": [
      "r492",
      "r493",
      "r504"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as current.",
        "label": "Contract with Customer, Liability, Current",
        "periodEndLabel": "Balance at end of year",
        "periodStartLabel": "Balance at beginning of year"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/RevenuesRevenuesContractLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContractWithCustomerLiabilityIncreaseDecreaseForContractAcquiredInBusinessCombination": {
     "auth_ref": [
      "r736"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration from customer has been received or is due, from business combination.",
        "label": "Contract with Customer, Liability, Increase (Decrease) for Contract Acquired in Business Combination",
        "terseLabel": "Additions due to acquisition"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityIncreaseDecreaseForContractAcquiredInBusinessCombination",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/RevenuesRevenuesContractLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContractWithCustomerLiabilityRevenueRecognized": {
     "auth_ref": [
      "r505"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.",
        "label": "Contract with Customer, Liability, Revenue Recognized",
        "terseLabel": "Revenue recognized that was included in the contract liability balance at the beginning of the period"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityRevenueRecognized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/RevenuesRevenuesContractLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CorporateMember": {
     "auth_ref": [
      "r785"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Component of an entity that usually provides financial, operational and administrative support and is considered an operating segment. Excludes intersegment elimination and reconciling items.",
        "label": "Corporate Segment [Member]",
        "terseLabel": "Corporate"
       }
      }
     },
     "localname": "CorporateMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CostOfRevenue": {
     "auth_ref": [
      "r43",
      "r309",
      "r390",
      "r439",
      "r440",
      "r441",
      "r442",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r628",
      "r802"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_GrossProfit",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate cost of goods produced and sold and services rendered during the reporting period.",
        "label": "Cost of Revenue",
        "terseLabel": "Cost of sales"
       }
      }
     },
     "localname": "CostOfRevenue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CostOfSalesMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing cost of sales.",
        "label": "Cost of Sales [Member]",
        "terseLabel": "Cost of Sales"
       }
      }
     },
     "localname": "CostOfSalesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CurrentFederalTaxExpenseBenefit": {
     "auth_ref": [
      "r779",
      "r840",
      "r842"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current national tax expense (benefit) for non-US (United States of America) jurisdiction.",
        "label": "Current Federal Tax Expense (Benefit)",
        "terseLabel": "Current, Federal"
       }
      }
     },
     "localname": "CurrentFederalTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CurrentForeignTaxExpenseBenefit": {
     "auth_ref": [
      "r779",
      "r840"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail": {
       "order": 3.0,
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.",
        "label": "Current Foreign Tax Expense (Benefit)",
        "terseLabel": "Current, Foreign"
       }
      }
     },
     "localname": "CurrentForeignTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CurrentIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r165",
      "r584",
      "r592",
      "r779"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current income tax expense (benefit) pertaining to taxable income (loss) from continuing operations.",
        "label": "Current Income Tax Expense (Benefit)",
        "totalLabel": "Current, Total"
       }
      }
     },
     "localname": "CurrentIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CurrentStateAndLocalTaxExpenseBenefit": {
     "auth_ref": [
      "r779",
      "r840",
      "r842"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.",
        "label": "Current State and Local Tax Expense (Benefit)",
        "terseLabel": "Current, State"
       }
      }
     },
     "localname": "CurrentStateAndLocalTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CustomerRelationshipsMember": {
     "auth_ref": [
      "r174"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Customer relationship that exists between an entity and its customer, for example, but not limited to, tenant relationships.",
        "label": "Customer Relationships [Member]",
        "terseLabel": "Customer Relationships"
       }
      }
     },
     "localname": "CustomerRelationshipsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DebtDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Debt Disclosure [Abstract]",
        "terseLabel": "Debt Disclosure [Abstract]"
       }
      }
     },
     "localname": "DebtDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtDisclosureTextBlock": {
     "auth_ref": [
      "r110",
      "r307",
      "r453",
      "r454",
      "r455",
      "r456",
      "r457",
      "r458",
      "r459",
      "r464",
      "r471",
      "r472",
      "r474"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants.",
        "label": "Debt Disclosure [Text Block]",
        "terseLabel": "Debt"
       }
      }
     },
     "localname": "DebtDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Debt"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DebtInstrumentCarryingAmount": {
     "auth_ref": [
      "r7",
      "r227",
      "r238",
      "r475"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtMaturityScheduleDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before unamortized (discount) premium and debt issuance costs, of long-term debt. Includes, but is not limited to, notes payable, bonds payable, commercial loans, mortgage loans, convertible debt, subordinated debt and other types of debt.",
        "label": "Long-Term Debt, Gross",
        "terseLabel": "Long-term Debt, Gross",
        "totalLabel": "Long-term Debt, Gross"
       }
      }
     },
     "localname": "DebtInstrumentCarryingAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/DebtMaturityScheduleDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtInstrumentCovenantCompliance": {
     "auth_ref": [
      "r7",
      "r233"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "States whether the entity was in compliance with the debt covenants throughout the reporting period, and describes facts and circumstances of any compliance failure.",
        "label": "Debt Instrument, Covenant Compliance",
        "terseLabel": "Debt Instrument, Covenant Compliance"
       }
      }
     },
     "localname": "DebtInstrumentCovenantCompliance",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentCovenantDescription": {
     "auth_ref": [
      "r7",
      "r233"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Description of minimum financial levels (for example, tangible net worth and working capital) and achievement of certain financial ratios (for example, working capital ratio and debt service coverage ratio), and adherence to certain clauses which generally require or restrict certain actions (for example, entering into a debt arrangement with equal or greater seniority, and selling or discontinuing a certain business segment or material subsidiary) to be in compliance with the covenant clauses of the debt agreement. May also include a discussion of the adverse consequences that would result if the entity violates or fails to satisfy the covenants.",
        "label": "Debt Instrument, Covenant Description",
        "terseLabel": "Debt Instrument, Covenant Description"
       }
      }
     },
     "localname": "DebtInstrumentCovenantDescription",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentDescriptionOfVariableRateBasis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Description of reference rate used for variable rate of debt instrument.",
        "label": "Debt Instrument, Description of Variable Rate Basis",
        "terseLabel": "Debt Instrument, Description of Variable Rate Basis"
       }
      }
     },
     "localname": "DebtInstrumentDescriptionOfVariableRateBasis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentInterestRateStatedPercentage": {
     "auth_ref": [
      "r24",
      "r449"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Contractual interest rate for funds borrowed, under the debt agreement.",
        "label": "Debt Instrument, Interest Rate, Stated Percentage",
        "terseLabel": "Debt Instrument, Interest Rate, Stated Percentage"
       }
      }
     },
     "localname": "DebtInstrumentInterestRateStatedPercentage",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_DebtInstrumentLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Debt Instrument [Line Items]",
        "terseLabel": "Debt Instrument"
       }
      }
     },
     "localname": "DebtInstrumentLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentRedemptionPeriodAxis": {
     "auth_ref": [
      "r234"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information about timing of debt redemption features under terms of the debt agreement.",
        "label": "Debt Instrument, Redemption, Period [Axis]",
        "terseLabel": "Debt Instrument, Redemption, Period [Axis]"
       }
      }
     },
     "localname": "DebtInstrumentRedemptionPeriodAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentRedemptionPeriodDomain": {
     "auth_ref": [
      "r234"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period as defined under terms of the debt agreement for debt redemption features.",
        "label": "Debt Instrument, Redemption, Period [Domain]",
        "terseLabel": "Debt Instrument, Redemption, Period [Domain]"
       }
      }
     },
     "localname": "DebtInstrumentRedemptionPeriodDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DebtInstrumentRedemptionPricePercentage": {
     "auth_ref": [
      "r234"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage price of original principal amount of debt at which debt can be redeemed by the issuer.",
        "label": "Debt Instrument, Redemption Price, Percentage",
        "terseLabel": "Debt Instrument, Redemption Price, Percentage"
       }
      }
     },
     "localname": "DebtInstrumentRedemptionPricePercentage",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_DebtInstrumentTable": {
     "auth_ref": [
      "r25",
      "r113",
      "r114",
      "r115",
      "r116",
      "r216",
      "r217",
      "r219",
      "r235",
      "r314",
      "r448",
      "r449",
      "r450",
      "r451",
      "r452",
      "r454",
      "r460",
      "r461",
      "r462",
      "r463",
      "r465",
      "r466",
      "r467",
      "r468",
      "r469",
      "r470",
      "r473",
      "r644",
      "r730",
      "r731",
      "r732",
      "r733",
      "r734",
      "r777"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A table or schedule providing information pertaining to long-term debt instruments or arrangements, including identification, terms, features, collateral requirements and other information necessary to a fair presentation. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer.",
        "label": "Schedule of Long-Term Debt Instruments [Table]",
        "terseLabel": "Schedule of Long-term Debt Instruments"
       }
      }
     },
     "localname": "DebtInstrumentTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentUnamortizedDiscount": {
     "auth_ref": [
      "r216",
      "r219",
      "r805"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after accumulated amortization, of debt discount.",
        "label": "Debt Instrument, Unamortized Discount",
        "terseLabel": "Debt Instrument, Unamortized Discount"
       }
      }
     },
     "localname": "DebtInstrumentUnamortizedDiscount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet": {
     "auth_ref": [
      "r218",
      "r460",
      "r476",
      "r731",
      "r732"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of unamortized debt discount (premium) and debt issuance costs.",
        "label": "Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net",
        "terseLabel": "Unamortized discount and debt issuance costs"
       }
      }
     },
     "localname": "DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Contractual obligation to pay money on demand or on fixed or determinable dates.",
        "label": "Debt [Member]",
        "terseLabel": "Debt"
       }
      }
     },
     "localname": "DebtMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DeferredFederalIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r779",
      "r841",
      "r842"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred national tax expense (benefit) for non-US (United States of America) jurisdiction.",
        "label": "Deferred Federal Income Tax Expense (Benefit)",
        "terseLabel": "Deferred (net of valuation allowance), Federal"
       }
      }
     },
     "localname": "DeferredFederalIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredFinanceCostsNet": {
     "auth_ref": [
      "r218",
      "r805"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after accumulated amortization, of debt issuance costs. Includes, but is not limited to, legal, accounting, underwriting, printing, and registration costs.",
        "label": "Debt Issuance Costs, Net",
        "terseLabel": "Debt Issuance Costs, Net"
       }
      }
     },
     "localname": "DeferredFinanceCostsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredForeignIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r165",
      "r779",
      "r841"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.",
        "label": "Deferred Foreign Income Tax Expense (Benefit)",
        "terseLabel": "Deferred (net of valuation allowance), Foreign"
       }
      }
     },
     "localname": "DeferredForeignIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r61",
      "r165",
      "r585",
      "r591",
      "r592",
      "r779"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 5.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      },
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.",
        "label": "Deferred Income Tax Expense (Benefit)",
        "terseLabel": "Deferred Income Tax Expense (Benefit)",
        "verboseLabel": "Provision for deferred income taxes"
       }
      }
     },
     "localname": "DeferredIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxLiabilities": {
     "auth_ref": [
      "r9",
      "r10",
      "r225",
      "r237",
      "r579"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredTaxLiabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences.",
        "label": "Deferred Tax Liabilities, Gross",
        "negatedTerseLabel": "Gross deferred tax liabilities"
       }
      }
     },
     "localname": "DeferredIncomeTaxLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxesAndOtherAssetsNoncurrent": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and other assets expected to be realized or consumed after one year or normal operating cycle, if longer.",
        "label": "Deferred Income Taxes and Other Assets, Noncurrent",
        "terseLabel": "Deferred tax assets and other noncurrent tax assets"
       }
      }
     },
     "localname": "DeferredIncomeTaxesAndOtherAssetsNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r779",
      "r841",
      "r842"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.",
        "label": "Deferred State and Local Income Tax Expense (Benefit)",
        "terseLabel": "Deferred (net of valuation allowance), State"
       }
      }
     },
     "localname": "DeferredStateAndLocalIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAndOtherLiabilitiesNoncurrent": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences, with jurisdictional netting, and liabilities classified as noncurrent and other.",
        "label": "Deferred Tax and Other Liabilities, Noncurrent",
        "terseLabel": "Deferred tax liabilities and other noncurrent tax liabilities"
       }
      }
     },
     "localname": "DeferredTaxAndOtherLiabilitiesNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsCapitalLossCarryforwards": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 4.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible capital loss carryforwards.",
        "label": "Deferred Tax Assets, Capital Loss Carryforwards",
        "terseLabel": "Capital loss carryforward"
       }
      }
     },
     "localname": "DeferredTaxAssetsCapitalLossCarryforwards",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsGross": {
     "auth_ref": [
      "r580"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredTaxAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.",
        "label": "Deferred Tax Assets, Gross",
        "totalLabel": "Gross deferred tax assets"
       }
      }
     },
     "localname": "DeferredTaxAssetsGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsInventory": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 5.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.",
        "label": "Deferred Tax Assets, Inventory",
        "terseLabel": "Inventory"
       }
      }
     },
     "localname": "DeferredTaxAssetsInventory",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsLiabilitiesNet": {
     "auth_ref": [
      "r838"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, without jurisdictional netting.",
        "label": "Deferred Tax Assets, Net",
        "terseLabel": "Deferred Tax Assets, Net"
       }
      }
     },
     "localname": "DeferredTaxAssetsLiabilitiesNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsNet": {
     "auth_ref": [
      "r838"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredTaxLiabilities",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.",
        "label": "Deferred Tax Assets, Net of Valuation Allowance",
        "totalLabel": "Total deferred tax assets"
       }
      }
     },
     "localname": "DeferredTaxAssetsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsOperatingLossCarryforwards": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 6.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible operating loss carryforwards.",
        "label": "Deferred Tax Assets, Operating Loss Carryforwards",
        "terseLabel": "Net operating loss and credit carryforwards"
       }
      }
     },
     "localname": "DeferredTaxAssetsOperatingLossCarryforwards",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible foreign operating loss carryforwards.",
        "label": "Deferred Tax Assets, Operating Loss Carryforwards, Foreign",
        "terseLabel": "Deferred Tax Assets, Operating Loss Carryforwards, Foreign"
       }
      }
     },
     "localname": "DeferredTaxAssetsOperatingLossCarryforwardsForeign",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible state and local operating loss carryforwards.",
        "label": "Deferred Tax Assets, Operating Loss Carryforwards, State and Local",
        "terseLabel": "Deferred Tax Assets, Operating Loss Carryforwards, State and Local"
       }
      }
     },
     "localname": "DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsOther": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 7.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before allocation of valuation allowance, of deferred tax asset attributable to deductible temporary differences, classified as other.",
        "label": "Deferred Tax Assets, Other",
        "terseLabel": "Other, net"
       }
      }
     },
     "localname": "DeferredTaxAssetsOther",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from share-based compensation.",
        "label": "Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-Based Compensation Cost",
        "terseLabel": "Equity compensation"
       }
      }
     },
     "localname": "DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccruals": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from reserves and accruals.",
        "label": "Deferred Tax Assets, Tax Deferred Expense, Reserves and Accruals",
        "terseLabel": "Accruals not currently deductible for tax purposes"
       }
      }
     },
     "localname": "DeferredTaxAssetsTaxDeferredExpenseReservesAndAccruals",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsAllowanceForDoubtfulAccounts": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 3.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before allocation of valuation allowance, of deferred tax asset attributable to deductible temporary difference from allowance for credit loss on accounts receivable.",
        "label": "Deferred Tax Asset, Tax Deferred Expense, Reserve and Accrual, Accounts Receivable, Allowance for Credit Loss",
        "terseLabel": "Accounts receivable"
       }
      }
     },
     "localname": "DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsAllowanceForDoubtfulAccounts",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsValuationAllowance": {
     "auth_ref": [
      "r581"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredTaxAssetsNet",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.",
        "label": "Deferred Tax Assets, Valuation Allowance",
        "negatedLabel": "Valuation allowance",
        "terseLabel": "Deferred Tax Assets, Valuation Allowance"
       }
      }
     },
     "localname": "DeferredTaxAssetsValuationAllowance",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilities": {
     "auth_ref": [
      "r154",
      "r838"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences without jurisdictional netting.",
        "label": "Deferred Tax Liabilities, Net",
        "negatedTotalLabel": "Total deferred tax liabilities",
        "terseLabel": "Deferred Tax Liabilities, Net"
       }
      }
     },
     "localname": "DeferredTaxLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from intangible assets other than goodwill.",
        "label": "Deferred Tax Liabilities, Intangible Assets",
        "negatedLabel": "Purchased intangible assets"
       }
      }
     },
     "localname": "DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment": {
     "auth_ref": [
      "r163",
      "r839"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from property, plant, and equipment.",
        "label": "Deferred Tax Liabilities, Property, Plant and Equipment",
        "negatedTerseLabel": "Depreciation"
       }
      }
     },
     "localname": "DeferredTaxLiabilitiesPropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesDeferredTaxAssetsandDeferredTaxLiabilitiesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation": {
     "auth_ref": [
      "r509"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in benefit obligation of defined benefit plan from business combination.",
        "label": "Defined Benefit Plan, Benefit Obligation, Business Combination",
        "terseLabel": "Defined Benefit Plan, Benefit Obligation, Business Combination"
       }
      }
     },
     "localname": "DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsFiveFiscalYearsThereafter": {
     "auth_ref": [
      "r518"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of benefit for defined benefit plan expected to be paid in five fiscal years after fifth fiscal year following current fiscal year.",
        "label": "Defined Benefit Plan, Expected Future Benefit Payment, after Year Five for Next Five Years",
        "terseLabel": "Payments in years 2028-2032"
       }
      }
     },
     "localname": "DefinedBenefitPlanExpectedFutureBenefitPaymentsFiveFiscalYearsThereafter",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ExpectedContributionandBenefitPaymentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths": {
     "auth_ref": [
      "r518"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of benefit for defined benefit plan expected to be paid in next fiscal year following current fiscal year.",
        "label": "Defined Benefit Plan, Expected Future Benefit Payment, Year One",
        "terseLabel": "Payments in Year 2023"
       }
      }
     },
     "localname": "DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ExpectedContributionandBenefitPaymentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive": {
     "auth_ref": [
      "r518"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of benefit for defined benefit plan expected to be paid in fifth fiscal year following current fiscal year.",
        "label": "Defined Benefit Plan, Expected Future Benefit Payment, Year Five",
        "terseLabel": "Payments in year 2027"
       }
      }
     },
     "localname": "DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ExpectedContributionandBenefitPaymentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour": {
     "auth_ref": [
      "r518"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of benefit for defined benefit plan expected to be paid in fourth fiscal year following current fiscal year.",
        "label": "Defined Benefit Plan, Expected Future Benefit Payment, Year Four",
        "terseLabel": "Payments in Year 2026"
       }
      }
     },
     "localname": "DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ExpectedContributionandBenefitPaymentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree": {
     "auth_ref": [
      "r518"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of benefit for defined benefit plan expected to be paid in third fiscal year following current fiscal year.",
        "label": "Defined Benefit Plan, Expected Future Benefit Payment, Year Three",
        "terseLabel": "Payments in Year 2025"
       }
      }
     },
     "localname": "DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ExpectedContributionandBenefitPaymentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo": {
     "auth_ref": [
      "r518"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of benefit for defined benefit plan expected to be paid in second fiscal year following current fiscal year.",
        "label": "Defined Benefit Plan, Expected Future Benefit Payment, Year Two",
        "terseLabel": "Payments in Year 2024"
       }
      }
     },
     "localname": "DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ExpectedContributionandBenefitPaymentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanFundedStatusOfPlan": {
     "auth_ref": [
      "r508",
      "r510",
      "r741"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of funded (unfunded) status of defined benefit plan, measured as difference between fair value of plan assets and benefit obligation. Includes, but is not limited to, overfunded (underfunded) status.",
        "label": "Defined Benefit Plan, Funded (Unfunded) Status of Plan",
        "terseLabel": "Plan assets less than benefit obligation - Net amount recognized"
       }
      }
     },
     "localname": "DefinedBenefitPlanFundedStatusOfPlan",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost": {
     "auth_ref": [
      "r519",
      "r522",
      "r741",
      "r742"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of net periodic benefit cost (credit) for defined benefit plan.",
        "label": "Defined Benefit Plan, Net Periodic Benefit Cost (Credit)",
        "terseLabel": "Net periodic pension benefit cost"
       }
      }
     },
     "localname": "DefinedBenefitPlanNetPeriodicBenefitCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanPensionPlansWithAccumulatedBenefitObligationsInExcessOfPlanAssetsAggregateAccumulatedBenefitObligation": {
     "auth_ref": [
      "r520",
      "r521",
      "r741"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated benefit obligation for defined benefit plan with accumulated benefit obligation in excess of plan assets.",
        "label": "Defined Benefit Plan, Plan with Accumulated Benefit Obligation in Excess of Plan Assets, Accumulated Benefit Obligation",
        "terseLabel": "Accumulated benefit obligation"
       }
      }
     },
     "localname": "DefinedBenefitPlanPensionPlansWithAccumulatedBenefitObligationsInExcessOfPlanAssetsAggregateAccumulatedBenefitObligation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanPensionPlansWithAccumulatedBenefitObligationsInExcessOfPlanAssetsAggregateFairValueOfPlanAssets": {
     "auth_ref": [
      "r520",
      "r521",
      "r741"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of plan asset for defined benefit plan with accumulated benefit obligation in excess of plan assets.",
        "label": "Defined Benefit Plan, Plan with Accumulated Benefit Obligation in Excess of Plan Assets, Plan Assets",
        "terseLabel": "Fair value of plan assets"
       }
      }
     },
     "localname": "DefinedBenefitPlanPensionPlansWithAccumulatedBenefitObligationsInExcessOfPlanAssetsAggregateFairValueOfPlanAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlanPensionPlansWithAccumulatedBenefitObligationsInExcessOfPlanAssetsAggregateProjectedBenefitObligation": {
     "auth_ref": [
      "r810"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of projected benefit obligation for defined benefit pension plan with accumulated benefit obligation in excess of plan assets.",
        "label": "Defined Benefit Plan, Pension Plan with Accumulated Benefit Obligation in Excess of Plan Assets, Projected Benefit Obligation",
        "terseLabel": "Projected benefit obligation"
       }
      }
     },
     "localname": "DefinedBenefitPlanPensionPlansWithAccumulatedBenefitObligationsInExcessOfPlanAssetsAggregateProjectedBenefitObligation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedBenefitPlansAndOtherPostretirementBenefitPlansDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined Benefit Plans and Other Postretirement Benefit Plans Disclosures [Abstract]"
       }
      }
     },
     "localname": "DefinedBenefitPlansAndOtherPostretirementBenefitPlansDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_DefinedContributionPlanCostRecognized": {
     "auth_ref": [
      "r523"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cost for defined contribution plan.",
        "label": "Defined Contribution Plan, Cost",
        "terseLabel": "Employer profit sharing and matching contribution expense"
       }
      }
     },
     "localname": "DefinedContributionPlanCostRecognized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan.",
        "label": "Defined Contribution Plan, Employer Matching Contribution, Percent of Employees' Gross Pay",
        "terseLabel": "Maximum matching contribution"
       }
      }
     },
     "localname": "DefinedContributionPlanEmployerMatchingContributionPercent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansAdditionalInformationDetail"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_Depreciation": {
     "auth_ref": [
      "r61",
      "r96"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.",
        "label": "Depreciation",
        "terseLabel": "Depreciation"
       }
      }
     },
     "localname": "Depreciation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/PropertyPlantandEquipmentPropertyPlantandEquipmentDepreciationExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DepreciationDepletionAndAmortization": {
     "auth_ref": [
      "r61",
      "r357"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.",
        "label": "Depreciation, Depletion and Amortization",
        "terseLabel": "Total depreciation and amortization"
       }
      }
     },
     "localname": "DepreciationDepletionAndAmortization",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DerivativeAssetCurrentStatementOfFinancialPositionExtensibleEnumeration": {
     "auth_ref": [
      "r616"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes derivative asset classified as current.",
        "label": "Derivative Asset, Current, Statement of Financial Position [Extensible Enumeration]",
        "terseLabel": "Derivative Asset, Current, Statement of Financial Position [Extensible Enumeration]"
       }
      }
     },
     "localname": "DerivativeAssetCurrentStatementOfFinancialPositionExtensibleEnumeration",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_DerivativeAssets": {
     "auth_ref": [
      "r281",
      "r282",
      "r627",
      "r717"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value, after the effects of master netting arrangements, of a financial asset or other contract with one or more underlyings, notional amount or payment provision or both, and the contract can be net settled by means outside the contract or delivery of an asset. Includes assets not subject to a master netting arrangement and not elected to be offset.",
        "label": "Derivative Asset",
        "terseLabel": "Derivative Asset"
       }
      }
     },
     "localname": "DerivativeAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DerivativeAssetsCurrent": {
     "auth_ref": [
      "r281"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value, after the effects of master netting arrangements, of a financial asset or other contract with one or more underlyings, notional amount or payment provision or both, and the contract can be net settled by means outside the contract or delivery of an asset, expected to be settled within one year or normal operating cycle, if longer. Includes assets not subject to a master netting arrangement and not elected to be offset.",
        "label": "Derivative Asset, Current",
        "terseLabel": "Derivative financial instruments -Forward exchange contracts"
       }
      }
     },
     "localname": "DerivativeAssetsCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DerivativeContractTypeDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Financial instrument or contract with one or more underlyings, notional amount or payment provision or both, and the contract can be net settled by means outside the contract or delivery of an asset.",
        "label": "Derivative Contract [Domain]",
        "terseLabel": "Derivative Contract [Domain]"
       }
      }
     },
     "localname": "DerivativeContractTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DerivativeInstrumentRiskAxis": {
     "auth_ref": [
      "r191",
      "r192",
      "r196",
      "r197",
      "r717"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of derivative contract.",
        "label": "Derivative Instrument [Axis]",
        "terseLabel": "Derivative Instrument [Axis]"
       }
      }
     },
     "localname": "DerivativeInstrumentRiskAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Derivative Instruments and Hedging Activities Disclosure [Abstract]"
       }
      }
     },
     "localname": "DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock": {
     "auth_ref": [
      "r203",
      "r620"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for derivative instruments and hedging activities including, but not limited to, risk management strategies, non-hedging derivative instruments, assets, liabilities, revenue and expenses, and methodologies and assumptions used in determining the amounts.",
        "label": "Derivative Instruments and Hedging Activities Disclosure [Text Block]",
        "terseLabel": "Derivative Instruments and Hedging Activities Disclosure"
       }
      }
     },
     "localname": "DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivities"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DerivativeInstrumentsGainLossReclassificationFromAccumulatedOCIToIncomeEstimatedNetAmountToBeTransferred": {
     "auth_ref": [
      "r619"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The estimated value of gains (losses), net anticipated to be transferred in the future from accumulated other comprehensive income into earnings.",
        "label": "Derivative Instruments, Gain (Loss) Reclassification from Accumulated OCI to Income, Estimated Net Amount to be Transferred",
        "terseLabel": "Derivative Instruments, Gain (Loss) Reclassification from Accumulated OCI to Income, Estimated Net Amount to be Transferred"
       }
      }
     },
     "localname": "DerivativeInstrumentsGainLossReclassificationFromAccumulatedOCIToIncomeEstimatedNetAmountToBeTransferred",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DerivativeLiabilities": {
     "auth_ref": [
      "r281",
      "r282",
      "r627",
      "r717"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value, after the effects of master netting arrangements, of a financial liability or contract with one or more underlyings, notional amount or payment provision or both, and the contract can be net settled by means outside the contract or delivery of an asset. Includes liabilities not subject to a master netting arrangement and not elected to be offset.",
        "label": "Derivative Liability",
        "terseLabel": "Total Liabilities"
       }
      }
     },
     "localname": "DerivativeLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DerivativeLiabilityCurrentStatementOfFinancialPositionExtensibleEnumeration": {
     "auth_ref": [
      "r616"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes derivative liability classified as current.",
        "label": "Derivative Liability, Current, Statement of Financial Position [Extensible Enumeration]",
        "terseLabel": "Derivative financial instruments - Forward exchange contracts"
       }
      }
     },
     "localname": "DerivativeLiabilityCurrentStatementOfFinancialPositionExtensibleEnumeration",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration": {
     "auth_ref": [
      "r616"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes derivative liability.",
        "label": "Derivative Liability, Statement of Financial Position [Extensible Enumeration]",
        "terseLabel": "Derivative Liability, Statement of Financial Position [Extensible Enumeration]"
       }
      }
     },
     "localname": "DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_DerivativeLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Derivative [Line Items]",
        "terseLabel": "Derivative [Line Items]"
       }
      }
     },
     "localname": "DerivativeLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DerivativeNotionalAmount": {
     "auth_ref": [
      "r845",
      "r846"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Nominal or face amount used to calculate payment on derivative.",
        "label": "Derivative, Notional Amount",
        "terseLabel": "Derivative, Notional Amount"
       }
      }
     },
     "localname": "DerivativeNotionalAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DerivativeTable": {
     "auth_ref": [
      "r185",
      "r186",
      "r187",
      "r188",
      "r189",
      "r194",
      "r196",
      "r198",
      "r200",
      "r202",
      "r620"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule that describes and identifies a derivative or group of derivatives on a disaggregated basis, such as for individual instruments, or small groups of similar instruments. May include a combination of the type of instrument, risks being hedged, notional amount, hedge designation, related hedged item, inception date, maturity date, or other relevant item.",
        "label": "Derivative [Table]",
        "terseLabel": "Derivative [Table]"
       }
      }
     },
     "localname": "DerivativeTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DerivativesPolicyTextBlock": {
     "auth_ref": [
      "r185",
      "r186",
      "r188",
      "r189",
      "r199",
      "r313"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for its derivative instruments and hedging activities.",
        "label": "Derivatives, Policy [Policy Text Block]",
        "terseLabel": "Derivative Financial Instruments"
       }
      }
     },
     "localname": "DerivativesPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DesignatedAsHedgingInstrumentMember": {
     "auth_ref": [
      "r188"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Derivative instrument designated as hedging instrument under Generally Accepted Accounting Principles (GAAP).",
        "label": "Designated as Hedging Instrument [Member]",
        "terseLabel": "Designated as Hedging Instrument"
       }
      }
     },
     "localname": "DesignatedAsHedgingInstrumentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DevelopedTechnologyRightsMember": {
     "auth_ref": [
      "r175"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Rights to developed technology, which can include the right to develop, use, market, sell, or offer for sale products, compounds, or intellectual property.",
        "label": "Developed Technology Rights [Member]",
        "terseLabel": "Developed Technology"
       }
      }
     },
     "localname": "DevelopedTechnologyRightsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DisclosureOfLongLivedAssetsHeldForSaleTextBlock": {
     "auth_ref": [
      "r101"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of long lived assets held for sale. Disclosure may include the description of the facts and circumstances leading to the expected disposal, manner and timing of disposal, the carrying value of the assets held for sale, the gain (loss) recognized in the income statement and the income statement caption that includes that gain (loss).",
        "label": "Disclosure of Long-Lived Assets Held-for-sale [Table Text Block]",
        "terseLabel": "Disclosure of Long-Lived Assets Held-for-sale [Table Text Block]"
       }
      }
     },
     "localname": "DisclosureOfLongLivedAssetsHeldForSaleTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationAccountsNotesAndLoansReceivableNet": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 6.0,
       "parentTag": "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as accounts, notes and loans receivable attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Accounts, Notes and Loans Receivable, Net",
        "terseLabel": "Accounts Receivable"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationAccountsNotesAndLoansReceivableNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationAccountsPayable": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_LiabilitiesOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as accounts payable attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Accounts Payable",
        "terseLabel": "Accounts payable"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationAccountsPayable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationAccruedLiabilities": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_LiabilitiesOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as accrued liabilities attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Accrued Liabilities",
        "terseLabel": "Accrued expenses"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationAccruedLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as goodwill attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Goodwill",
        "terseLabel": "Goodwill"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationGoodwill1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as intangible assets, excluding goodwill, attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Intangible Assets",
        "terseLabel": "Intangible assets, net"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationIntangibleAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 7.0,
       "parentTag": "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as inventory attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Inventory",
        "terseLabel": "Inventory"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationInventory1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationOtherCurrentAssets": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r95",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as other assets attributable to disposal group held for sale or disposed of, expected to be disposed of within one year or the normal operating cycle, if longer.",
        "label": "Disposal Group, Including Discontinued Operation, Other Assets, Current",
        "terseLabel": "Other current assets"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationOtherCurrentAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationOtherLiabilities": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_LiabilitiesOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as other liabilities attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Other Liabilities",
        "terseLabel": "Long-term liabilities"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationOtherLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationOtherNoncurrentAssets": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r94",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as other assets attributable to disposal group held for sale or disposed of, expected to be disposed of after one year or the normal operating cycle, if longer.",
        "label": "Disposal Group, Including Discontinued Operation, Other Assets, Noncurrent",
        "terseLabel": "Other assets"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationOtherNoncurrentAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": 5.0,
       "parentTag": "us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as property, plant and equipment attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Property, Plant and Equipment",
        "terseLabel": "Property, Plant and Equipment, net"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DividendsCommonStockCash": {
     "auth_ref": [
      "r117"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of paid and unpaid common stock dividends declared with the form of settlement in cash.",
        "label": "Dividends, Common Stock, Cash",
        "negatedLabel": "Dividends, Common Stock, Cash",
        "negatedTerseLabel": "Dividends, Common Stock, Cash"
       }
      }
     },
     "localname": "DividendsCommonStockCash",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity",
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DividendsPayableCurrentAndNoncurrent": {
     "auth_ref": [
      "r6",
      "r8",
      "r226",
      "r240"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of dividends declared but unpaid on equity securities issued by the entity and outstanding.",
        "label": "Dividends Payable",
        "terseLabel": "Dividends payable"
       }
      }
     },
     "localname": "DividendsPayableCurrentAndNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DomesticCountryMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designated tax department of the government that is entitled to levy and collect income taxes from the entity in its country of domicile.",
        "label": "Domestic Tax Authority [Member]",
        "terseLabel": "Domestic Tax Authority"
       }
      }
     },
     "localname": "DomesticCountryMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EarningsPerShareAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Earnings Per Share [Abstract]",
        "terseLabel": "Earnings Per Share:"
       }
      }
     },
     "localname": "EarningsPerShareAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareBasic": {
     "auth_ref": [
      "r299",
      "r320",
      "r321",
      "r322",
      "r323",
      "r324",
      "r328",
      "r330",
      "r332",
      "r333",
      "r334",
      "r338",
      "r623",
      "r624",
      "r678",
      "r685",
      "r724"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.",
        "label": "Earnings Per Share, Basic",
        "terseLabel": "Basic net income per common share",
        "verboseLabel": "Basic net income per common share"
       }
      }
     },
     "localname": "EarningsPerShareBasic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/QuarterlyInformationDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_EarningsPerShareDiluted": {
     "auth_ref": [
      "r299",
      "r320",
      "r321",
      "r322",
      "r323",
      "r324",
      "r330",
      "r332",
      "r333",
      "r334",
      "r338",
      "r623",
      "r624",
      "r678",
      "r685",
      "r724"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.",
        "label": "Earnings Per Share, Diluted",
        "terseLabel": "Diluted net income per common share",
        "verboseLabel": "Diluted net income per common share"
       }
      }
     },
     "localname": "EarningsPerShareDiluted",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/QuarterlyInformationDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_EarningsPerShareTextBlock": {
     "auth_ref": [
      "r335",
      "r336",
      "r337",
      "r339"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for earnings per share.",
        "label": "Earnings Per Share [Text Block]",
        "terseLabel": "Earning Per Share (EPS)"
       }
      }
     },
     "localname": "EarningsPerShareTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EarningPerShareEPS"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents": {
     "auth_ref": [
      "r633"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies. Excludes amounts for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Continuing Operations",
        "terseLabel": "Effect of exchange rate changes on cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate": {
     "auth_ref": [
      "r311",
      "r567",
      "r594"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of domestic federal statutory tax rate applicable to pretax income (loss).",
        "label": "Effective Income Tax Rate Reconciliation, at Federal Statutory Income Tax Rate, Percent",
        "terseLabel": "Effective Income Tax Rate Reconciliation, at Federal Statutory Income Tax Rate, Percent"
       }
      }
     },
     "localname": "EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_EmployeeBenefitsAndShareBasedCompensation": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expense for employee benefit and equity-based compensation.",
        "label": "Employee Benefits and Share-Based Compensation",
        "terseLabel": "Employee Benefits and Share-Based Compensation"
       }
      }
     },
     "localname": "EmployeeBenefitsAndShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeRelatedLiabilitiesCurrent": {
     "auth_ref": [
      "r22"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Employee-related Liabilities, Current",
        "terseLabel": "Accrued payroll and related benefits"
       }
      }
     },
     "localname": "EmployeeRelatedLiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Line Items]",
        "terseLabel": "Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized": {
     "auth_ref": [
      "r556"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cost not yet recognized for nonvested award under share-based payment arrangement.",
        "label": "Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Amount",
        "terseLabel": "Total compensation cost not yet recognized"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1": {
     "auth_ref": [
      "r556"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted-average period over which cost not yet recognized is expected to be recognized for award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Period for Recognition",
        "terseLabel": "Share-based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Period for Recognition"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense": {
     "auth_ref": [
      "r555"
     ],
     "calculation": {
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of tax benefit for recognition of expense of award under share-based payment arrangement.",
        "label": "Share-Based Payment Arrangement, Expense, Tax Benefit",
        "terseLabel": "Share-based Payment Arrangement, Expense, Tax Benefit"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EquipmentMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tangible personal property used to produce goods and services.",
        "label": "Equipment [Member]",
        "terseLabel": "Manufacturing Equipment"
       }
      }
     },
     "localname": "EquipmentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Equity [Abstract]",
        "terseLabel": "Equity [Abstract]"
       }
      }
     },
     "localname": "EquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_EquityComponentDomain": {
     "auth_ref": [
      "r112",
      "r257",
      "r293",
      "r294",
      "r295",
      "r315",
      "r316",
      "r317",
      "r319",
      "r325",
      "r327",
      "r343",
      "r391",
      "r491",
      "r557",
      "r558",
      "r559",
      "r587",
      "r588",
      "r622",
      "r634",
      "r635",
      "r636",
      "r637",
      "r638",
      "r640",
      "r659",
      "r688",
      "r689",
      "r690"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Components of equity are the parts of the total Equity balance including that which is allocated to common, preferred, treasury stock, retained earnings, etc.",
        "label": "Equity Component [Domain]",
        "terseLabel": "Equity Component"
       }
      }
     },
     "localname": "EquityComponentDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTableTextBlock": {
     "auth_ref": [
      "r204",
      "r205",
      "r206",
      "r209",
      "r210"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of financial instruments measured at fair value, including those classified in shareholders' equity measured on a recurring or nonrecurring basis. Disclosures include, but are not limited to, fair value measurements recorded and the reasons for the measurements, level within the fair value hierarchy in which the fair value measurements are categorized and transfers between levels 1 and 2. Nonrecurring fair value measurements are those that are required or permitted in the statement of financial position in particular circumstances.",
        "label": "Fair Value Measurements, Recurring and Nonrecurring [Table Text Block]",
        "terseLabel": "Fair Value Measurements, Recurring and Nonrecurring [Table Text Block]"
       }
      }
     },
     "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain": {
     "auth_ref": [
      "r207"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Class of asset.",
        "label": "Asset Class [Domain]",
        "terseLabel": "Asset Class [Domain]"
       }
      }
     },
     "localname": "FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueBalanceSheetGroupingFinancialStatementCaptionsLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Fair Value, Balance Sheet Grouping, Financial Statement Captions [Line Items]",
        "terseLabel": "Fair Value, Balance Sheet Grouping, Financial Statement Captions [Line Items]"
       }
      }
     },
     "localname": "FairValueBalanceSheetGroupingFinancialStatementCaptionsLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByAssetClassAxis": {
     "auth_ref": [
      "r204",
      "r210"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by class of asset.",
        "label": "Asset Class [Axis]",
        "terseLabel": "Asset Class [Axis]"
       }
      }
     },
     "localname": "FairValueByAssetClassAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByBalanceSheetGroupingTable": {
     "auth_ref": [
      "r204",
      "r213",
      "r214"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about the fair value of financial instruments, including financial assets and financial liabilities, and the measurements of those instruments, assets, and liabilities.",
        "label": "Fair Value, by Balance Sheet Grouping [Table]",
        "terseLabel": "Fair Value, by Balance Sheet Grouping [Table]"
       }
      }
     },
     "localname": "FairValueByBalanceSheetGroupingTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByBalanceSheetGroupingTextBlock": {
     "auth_ref": [
      "r204",
      "r213"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the fair value of financial instruments, including financial assets and financial liabilities, and the measurements of those instruments, assets, and liabilities.",
        "label": "Fair Value, by Balance Sheet Grouping [Table Text Block]",
        "terseLabel": "Fair Value, by Balance Sheet Grouping"
       }
      }
     },
     "localname": "FairValueByBalanceSheetGroupingTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FairValueByFairValueHierarchyLevelAxis": {
     "auth_ref": [
      "r462",
      "r512",
      "r513",
      "r514",
      "r515",
      "r516",
      "r517",
      "r625",
      "r663",
      "r664",
      "r665",
      "r731",
      "r732",
      "r739",
      "r740",
      "r741"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by level within fair value hierarchy and fair value measured at net asset value per share as practical expedient.",
        "label": "Fair Value Hierarchy and NAV [Axis]",
        "terseLabel": "Fair Value Hierarchy and NAV"
       }
      }
     },
     "localname": "FairValueByFairValueHierarchyLevelAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByLiabilityClassAxis": {
     "auth_ref": [
      "r208",
      "r210"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by class of liability.",
        "label": "Liability Class [Axis]",
        "terseLabel": "Liability Class [Axis]"
       }
      }
     },
     "localname": "FairValueByLiabilityClassAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value Disclosures [Abstract]"
       }
      }
     },
     "localname": "FairValueDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueDisclosuresTextBlock": {
     "auth_ref": [
      "r626"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.",
        "label": "Fair Value Disclosures [Text Block]",
        "terseLabel": "Fair Value Disclosures"
       }
      }
     },
     "localname": "FairValueDisclosuresTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosures"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FairValueInputsLevel12And3Member": {
     "auth_ref": [
      "r809"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value measurement input including quoted price in active market for identical asset or liability reporting entity can access at measurement date (level 1), input other than quoted price included within level 1 either directly or indirectly observable for asset or liability (level 2) and unobservable input reflecting entity's own assumption (level 3).",
        "label": "Fair Value, Inputs, Level 1, Level 2, and Level 3 [Member]",
        "terseLabel": "Fair Value, Inputs, Level 1, Level 2, and Level 3 [Member]"
       }
      }
     },
     "localname": "FairValueInputsLevel12And3Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueInputsLevel1Member": {
     "auth_ref": [
      "r462",
      "r512",
      "r517",
      "r625",
      "r663",
      "r739",
      "r740",
      "r741"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Quoted prices in active markets for identical assets or liabilities that the reporting entity can access at the measurement date.",
        "label": "Fair Value, Inputs, Level 1 [Member]",
        "terseLabel": "Fair Value, Inputs, Level 1"
       }
      }
     },
     "localname": "FairValueInputsLevel1Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueInputsLevel2Member": {
     "auth_ref": [
      "r462",
      "r512",
      "r517",
      "r625",
      "r664",
      "r731",
      "r732",
      "r739",
      "r740",
      "r741"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Inputs other than quoted prices included within level 1 that are observable for an asset or liability, either directly or indirectly, including, but not limited to, quoted prices for similar assets or liabilities in active markets, or quoted prices for identical or similar assets or liabilities in inactive markets.",
        "label": "Fair Value, Inputs, Level 2 [Member]",
        "terseLabel": "Fair Value, Inputs, Level 2 [Member]"
       }
      }
     },
     "localname": "FairValueInputsLevel2Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueInputsLevel3Member": {
     "auth_ref": [
      "r462",
      "r512",
      "r513",
      "r514",
      "r515",
      "r516",
      "r517",
      "r625",
      "r665",
      "r731",
      "r732",
      "r739",
      "r740",
      "r741"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing.",
        "label": "Fair Value, Inputs, Level 3 [Member]",
        "terseLabel": "Fair Value, Inputs, Level 3 [Member]"
       }
      }
     },
     "localname": "FairValueInputsLevel3Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationByLiabilityClassDomain": {
     "auth_ref": [
      "r207"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents classes of liabilities measured and disclosed at fair value.",
        "label": "Fair Value by Liability Class [Domain]",
        "terseLabel": "Fair Value by Liability Class [Domain]"
       }
      }
     },
     "localname": "FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationByLiabilityClassDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueMeasurementsFairValueHierarchyDomain": {
     "auth_ref": [
      "r462",
      "r512",
      "r513",
      "r514",
      "r515",
      "r516",
      "r517",
      "r663",
      "r664",
      "r665",
      "r731",
      "r732",
      "r739",
      "r740",
      "r741"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Categories used to prioritize the inputs to valuation techniques to measure fair value.",
        "label": "Fair Value Hierarchy and NAV [Domain]",
        "terseLabel": "Fair Value Hierarchy and NAV"
       }
      }
     },
     "localname": "FairValueMeasurementsFairValueHierarchyDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueOfFinancialInstrumentsPolicy": {
     "auth_ref": [
      "r211",
      "r212"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for determining the fair value of financial instruments.",
        "label": "Fair Value of Financial Instruments, Policy [Policy Text Block]",
        "terseLabel": "Fair Value of Financial Instruments"
       }
      }
     },
     "localname": "FairValueOfFinancialInstrumentsPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FiniteLivedAndIndefiniteLivedIntangibleAssetsAcquiredAsPartOfBusinessCombinationTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of finite-lived and indefinite-lived intangible assets acquired as part of a business combination.",
        "label": "Finite-Lived and Indefinite-Lived Intangible Assets Acquired as Part of Business Combination [Table Text Block]",
        "terseLabel": "Finite-Lived and Indefinite-Lived Intangible Assets Acquired as Part of Business Combination [Table Text Block]"
       }
      }
     },
     "localname": "FiniteLivedAndIndefiniteLivedIntangibleAssetsAcquiredAsPartOfBusinessCombinationTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetUsefulLife": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Finite-Lived Intangible Asset, Useful Life",
        "verboseLabel": "Weighted average life in years"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetUsefulLife",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization": {
     "auth_ref": [
      "r269",
      "r415"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated amount of amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.",
        "label": "Finite-Lived Intangible Assets, Accumulated Amortization",
        "terseLabel": "Accumulated amortization"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAccumulatedAmortization",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail": {
       "order": 6.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for asset, excluding financial asset and goodwill, lacking physical substance with finite life expected to be recognized after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Asset, Expected Amortization, after Year Five",
        "terseLabel": "Thereafter"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths": {
     "auth_ref": [
      "r92"
     ],
     "calculation": {
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Asset, Expected Amortization, Year One",
        "terseLabel": "2023"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive": {
     "auth_ref": [
      "r92"
     ],
     "calculation": {
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail": {
       "order": 5.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Asset, Expected Amortization, Year Five",
        "terseLabel": "2027"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour": {
     "auth_ref": [
      "r92"
     ],
     "calculation": {
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail": {
       "order": 4.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Asset, Expected Amortization, Year Four",
        "terseLabel": "2026"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearFour",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree": {
     "auth_ref": [
      "r92"
     ],
     "calculation": {
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail": {
       "order": 3.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Asset, Expected Amortization, Year Three",
        "terseLabel": "2025"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearThree",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo": {
     "auth_ref": [
      "r92"
     ],
     "calculation": {
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Asset, Expected Amortization, Year Two",
        "terseLabel": "2024"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis": {
     "auth_ref": [
      "r413",
      "r414",
      "r415",
      "r416",
      "r673",
      "r674"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by major type or class of finite-lived intangible assets.",
        "label": "Finite-Lived Intangible Assets by Major Class [Axis]",
        "terseLabel": "Finite-Lived Intangible Assets by Major Class [Axis]"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsByMajorClassAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsGross": {
     "auth_ref": [
      "r90",
      "r674"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.",
        "label": "Finite-Lived Intangible Assets, Gross",
        "terseLabel": "Gross carrying Amount"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Finite-Lived Intangible Assets [Line Items]",
        "terseLabel": "Finite-Lived Intangible Assets"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain": {
     "auth_ref": [
      "r87",
      "r89"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The major class of finite-lived intangible asset (for example, patents, trademarks, copyrights, etc.) A major class is composed of intangible assets that can be grouped together because they are similar, either by their nature or by their use in the operations of a company.",
        "label": "Finite-Lived Intangible Assets, Major Class Name [Domain]",
        "terseLabel": "Finite-Lived Intangible Assets, Major Class Name [Domain]"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsMajorClassNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsNet": {
     "auth_ref": [
      "r90",
      "r673"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      },
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.",
        "label": "Finite-Lived Intangible Assets, Net",
        "terseLabel": "Intangible assets, net",
        "totalLabel": "Intangible assets, net",
        "verboseLabel": "Net carrying value"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/EstimatedFutureAmortizationExpenseDetail",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ForeignCountryMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designated tax departments of governments entitled to levy and collect income taxes from the entity outside the entity's country of domicile.",
        "label": "Foreign Tax Authority [Member]",
        "terseLabel": "Foreign Tax Authority"
       }
      }
     },
     "localname": "ForeignCountryMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ForeignCurrencyTransactionGainLossBeforeTax": {
     "auth_ref": [
      "r629",
      "r630",
      "r631",
      "r632"
     ],
     "calculation": {
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_OtherNonoperatingIncomeExpense",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before tax of foreign currency transaction realized and unrealized gain (loss) recognized in the income statement.",
        "label": "Foreign Currency Transaction Gain (Loss), before Tax",
        "negatedTerseLabel": "Loss (gain) on foreign currency remeasurement"
       }
      }
     },
     "localname": "ForeignCurrencyTransactionGainLossBeforeTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock": {
     "auth_ref": [
      "r642"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for (1) transactions denominated in a currency other than the reporting enterprise's functional currency, (2) translating foreign currency financial statements that are incorporated into the financial statements of the reporting enterprise by consolidation, combination, or the equity method of accounting, and (3) remeasurement of the financial statements of a foreign reporting enterprise in a hyperinflationary economy.",
        "label": "Foreign Currency Transactions and Translations Policy [Policy Text Block]",
        "terseLabel": "Foreign Currency Translation"
       }
      }
     },
     "localname": "ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ForeignExchangeContractMember": {
     "auth_ref": [
      "r717",
      "r739",
      "r750"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Derivative instrument whose primary underlying risk is tied to foreign exchange rates.",
        "label": "Foreign Exchange Contract [Member]",
        "terseLabel": "Foreign Exchange Contract"
       }
      }
     },
     "localname": "ForeignExchangeContractMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FurnitureAndFixturesGross": {
     "auth_ref": [
      "r97"
     ],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 6.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accumulated depreciation of equipment commonly used in offices and stores that have no permanent connection to the structure of a building or utilities. Examples include, but are not limited to, desks, chairs, tables, and bookcases.",
        "label": "Furniture and Fixtures, Gross",
        "terseLabel": "Office furniture and equipment"
       }
      }
     },
     "localname": "FurnitureAndFixturesGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GainsLossesOnExtinguishmentOfDebt": {
     "auth_ref": [
      "r61",
      "r108",
      "r109"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 7.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      },
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_OtherNonoperatingIncomeExpense",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Difference between the fair value of payments made and the carrying amount of debt which is extinguished prior to maturity.",
        "label": "Gain (Loss) on Extinguishment of Debt",
        "negatedTerseLabel": "Loss on extinguishment of debt and modification",
        "terseLabel": "Loss on extinguishment of debt and modification"
       }
      }
     },
     "localname": "GainsLossesOnExtinguishmentOfDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_Goodwill": {
     "auth_ref": [
      "r268",
      "r401",
      "r675",
      "r729",
      "r753",
      "r789",
      "r796"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill",
        "terseLabel": "Goodwill"
       }
      }
     },
     "localname": "Goodwill",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwilladditionalDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillAcquiredDuringPeriod": {
     "auth_ref": [
      "r403",
      "r729"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination.",
        "label": "Goodwill, Acquired During Period",
        "terseLabel": "Addition due to acquisition"
       }
      }
     },
     "localname": "GoodwillAcquiredDuringPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Goodwill and Intangible Assets Disclosure [Abstract]",
        "terseLabel": "Goodwill and Intangible Assets Disclosure [Abstract]"
       }
      }
     },
     "localname": "GoodwillAndIntangibleAssetsDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_GoodwillFairValueDisclosure": {
     "auth_ref": [
      "r848"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Fair Value Disclosure",
        "terseLabel": "Goodwill, Fair Value Disclosure"
       }
      }
     },
     "localname": "GoodwillFairValueDisclosure",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillForeignCurrencyTranslationGainLoss": {
     "auth_ref": [
      "r407"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of foreign currency translation gain (loss) which increases (decreases) an asset representing future economic benefits from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Foreign Currency Translation Gain (Loss)",
        "terseLabel": "Foreign currency translation"
       }
      }
     },
     "localname": "GoodwillForeignCurrencyTranslationGainLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Goodwill [Line Items]",
        "terseLabel": "Goodwill"
       }
      }
     },
     "localname": "GoodwillLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_GoodwillPeriodIncreaseDecrease": {
     "auth_ref": [
      "r797"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Period Increase (Decrease)",
        "terseLabel": "Goodwill, Period Increase"
       }
      }
     },
     "localname": "GoodwillPeriodIncreaseDecrease",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwilladditionalDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillPurchaseAccountingAdjustments": {
     "auth_ref": [
      "r166",
      "r795"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) from adjustments after acquisition date under purchase accounting of an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Purchase Accounting Adjustments",
        "terseLabel": "Purchase accounting adjustments"
       }
      }
     },
     "localname": "GoodwillPurchaseAccountingAdjustments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillTransfers": {
     "auth_ref": [
      "r795"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of transfers into (out of) an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Transfers",
        "terseLabel": "Goodwill, Transfers"
       }
      }
     },
     "localname": "GoodwillTransfers",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GrossProfit": {
     "auth_ref": [
      "r42",
      "r309",
      "r362",
      "r367",
      "r373",
      "r376",
      "r390",
      "r439",
      "r440",
      "r441",
      "r442",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r628",
      "r725",
      "r802"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.",
        "label": "Gross Profit",
        "terseLabel": "Gross profit",
        "totalLabel": "Gross profit"
       }
      }
     },
     "localname": "GrossProfit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/QuarterlyInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_HedgingDesignationAxis": {
     "auth_ref": [
      "r188",
      "r618"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by designation of purpose of derivative instrument.",
        "label": "Hedging Designation [Axis]",
        "terseLabel": "Hedging Designation [Axis]"
       }
      }
     },
     "localname": "HedgingDesignationAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_HedgingDesignationDomain": {
     "auth_ref": [
      "r188"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designation of purpose of derivative instrument.",
        "label": "Hedging Designation [Domain]",
        "terseLabel": "Hedging Designation [Domain]"
       }
      }
     },
     "localname": "HedgingDesignationDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_InProcessResearchAndDevelopmentMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "In process investigation of new knowledge useful in developing new product or service or new process or technique or improvement to existing product or process, and translation of knowledge into plan or design for new product or process or for improvement to existing product or process.",
        "label": "In Process Research and Development [Member]",
        "terseLabel": "In Process Research and Development"
       }
      }
     },
     "localname": "InProcessResearchAndDevelopmentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic": {
     "auth_ref": [
      "r310",
      "r593"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesIncomeBeforeIncomeTaxesDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations.",
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Domestic",
        "terseLabel": "Domestic"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeBeforeIncomeTaxesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest": {
     "auth_ref": [
      "r39",
      "r220",
      "r230",
      "r250",
      "r362",
      "r367",
      "r373",
      "r376",
      "r679",
      "r725"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_NetIncomeLoss",
       "weight": 1.0
      },
      "http://www.entegris.com/role/IncomeTaxesIncomeBeforeIncomeTaxesDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.",
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest",
        "terseLabel": "Income before income tax expense",
        "totalLabel": "Income before income tax expense"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/IncomeTaxesIncomeBeforeIncomeTaxesDetail",
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign": {
     "auth_ref": [
      "r310",
      "r593"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesIncomeBeforeIncomeTaxesDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile.",
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Foreign",
        "terseLabel": "Foreign"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeBeforeIncomeTaxesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromIndividuallySignificantComponentDisposedOfOrHeldForSaleExcludingDiscontinuedOperationsBeforeIncomeTax": {
     "auth_ref": [
      "r102"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before tax of income (loss) from an individually significant component disposed of or held-for-sale including the portion attributable to the noncontrolling interest. Excludes discontinued operations.",
        "label": "Income (Loss) from Individually Significant Component Disposed of or Held-for-sale, Excluding Discontinued Operations, before Income Tax",
        "terseLabel": "Income (Loss) from Individually Significant Component Disposed of or Held-for-sale, Excluding Discontinued Operations, before Income Tax"
       }
      }
     },
     "localname": "IncomeLossFromIndividuallySignificantComponentDisposedOfOrHeldForSaleExcludingDiscontinuedOperationsBeforeIncomeTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromSubsidiariesNetOfTax": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax of income (loss) of subsidiary attributable to the parent entity.",
        "label": "Income (Loss) from Subsidiaries, Net of Tax",
        "terseLabel": "Income (Loss) from Subsidiaries, Net of Tax"
       }
      }
     },
     "localname": "IncomeLossFromSubsidiariesNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeStatementAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Statement [Abstract]",
        "terseLabel": "Income Statement [Abstract]"
       }
      }
     },
     "localname": "IncomeStatementAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementLocationAxis": {
     "auth_ref": [
      "r418",
      "r430"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by location in the income statement.",
        "label": "Income Statement Location [Axis]",
        "terseLabel": "Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs, by Report Line"
       }
      }
     },
     "localname": "IncomeStatementLocationAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementLocationDomain": {
     "auth_ref": [
      "r430"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Location in the income statement.",
        "label": "Income Statement Location [Domain]",
        "terseLabel": "Employee Service Share-based Compensation, Allocation of Recognized Period Costs, Report Line"
       }
      }
     },
     "localname": "IncomeStatementLocationDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_IncomeTaxAuthorityAxis": {
     "auth_ref": [
      "r157"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by tax jurisdiction.",
        "label": "Income Tax Authority [Axis]",
        "terseLabel": "Income Tax Authority"
       }
      }
     },
     "localname": "IncomeTaxAuthorityAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeTaxAuthorityDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Agency, division or body classification that levies income taxes, examines tax returns for compliance, or grants exemptions from or makes other decisions pertaining to income taxes.",
        "label": "Income Tax Authority [Domain]",
        "terseLabel": "Income Tax Authority"
       }
      }
     },
     "localname": "IncomeTaxAuthorityDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_IncomeTaxDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Tax Disclosure [Abstract]",
        "terseLabel": "Income Tax Disclosure [Abstract]"
       }
      }
     },
     "localname": "IncomeTaxDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeTaxDisclosureTextBlock": {
     "auth_ref": [
      "r311",
      "r568",
      "r577",
      "r583",
      "r589",
      "r595",
      "r599",
      "r600",
      "r602"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.",
        "label": "Income Tax Disclosure [Text Block]",
        "terseLabel": "Income Taxes"
       }
      }
     },
     "localname": "IncomeTaxDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxes"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_IncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r312",
      "r326",
      "r327",
      "r360",
      "r566",
      "r590",
      "r597",
      "r686"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_NetIncomeLoss",
       "weight": -1.0
      },
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.",
        "label": "Income Tax Expense (Benefit)",
        "terseLabel": "Income tax expense",
        "totalLabel": "Income tax expense"
       }
      }
     },
     "localname": "IncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/IncomeTaxesComponentsofIncomeTaxExpenseBenefitDetail",
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxHolidayAggregateDollarAmount": {
     "auth_ref": [
      "r595"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of income taxes from which a reporting entity is exempt or for which it will receive a reduction in income taxes as a result of the income tax holiday granted by the taxing jurisdiction.",
        "label": "Income Tax Holiday, Aggregate Dollar Amount",
        "terseLabel": "Income tax benefit estimate attributable to the tax status of subsidiary"
       }
      }
     },
     "localname": "IncomeTaxHolidayAggregateDollarAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxHolidayIncomeTaxBenefitsPerShare": {
     "auth_ref": [
      "r595"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Per share amount effect of the income tax benefit resulting from the income tax holidays granted by taxing jurisdictions.",
        "label": "Income Tax Holiday, Income Tax Benefits Per Share",
        "terseLabel": "Income tax expense benefit per diluted share"
       }
      }
     },
     "localname": "IncomeTaxHolidayIncomeTaxBenefitsPerShare",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_IncomeTaxPolicyTextBlock": {
     "auth_ref": [
      "r292",
      "r564",
      "r565",
      "r577",
      "r578",
      "r582",
      "r586"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for income taxes, which may include its accounting policies for recognizing and measuring deferred tax assets and liabilities and related valuation allowances, recognizing investment tax credits, operating loss carryforwards, tax credit carryforwards, and other carryforwards, methodologies for determining its effective income tax rate and the characterization of interest and penalties in the financial statements.",
        "label": "Income Tax, Policy [Policy Text Block]",
        "terseLabel": "Income Taxes"
       }
      }
     },
     "localname": "IncomeTaxPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance": {
     "auth_ref": [
      "r837"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 5.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets.",
        "label": "Effective Income Tax Rate Reconciliation, Change in Deferred Tax Assets Valuation Allowance, Amount",
        "terseLabel": "Valuation allowance"
       }
      }
     },
     "localname": "IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential": {
     "auth_ref": [
      "r837"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 3.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to foreign income tax expense (benefit).",
        "label": "Effective Income Tax Rate Reconciliation, Foreign Income Tax Rate Differential, Amount",
        "terseLabel": "Effect of foreign source income"
       }
      }
     },
     "localname": "IncomeTaxReconciliationForeignIncomeTaxRateDifferential",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate": {
     "auth_ref": [
      "r567"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of income tax expense or benefit for the period computed by applying the domestic federal statutory tax rates to pretax income from continuing operations.",
        "label": "Effective Income Tax Rate Reconciliation at Federal Statutory Income Tax Rate, Amount",
        "terseLabel": "Expected federal income tax at statutory rate"
       }
      }
     },
     "localname": "IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost": {
     "auth_ref": [
      "r837"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 7.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of reported income tax expense (benefit) in excess of (less than) expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operation, attributable to nondeductible expense for award under share-based payment arrangement. Includes, but is not limited to, expense determined to be nondeductible upon grant or after for award under share-based payment arrangement.",
        "label": "Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-Based Payment Arrangement, Amount",
        "terseLabel": "Equity compensation"
       }
      }
     },
     "localname": "IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationOtherAdjustments": {
     "auth_ref": [
      "r837"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 8.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to other adjustments.",
        "label": "Effective Income Tax Rate Reconciliation, Other Adjustments, Amount",
        "terseLabel": "Other items, net"
       }
      }
     },
     "localname": "IncomeTaxReconciliationOtherAdjustments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes": {
     "auth_ref": [
      "r837"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to state and local income tax expense (benefit).",
        "label": "Effective Income Tax Rate Reconciliation, State and Local Income Taxes, Amount",
        "terseLabel": "State income taxes before valuation allowance, net of federal tax effect"
       }
      }
     },
     "localname": "IncomeTaxReconciliationStateAndLocalIncomeTaxes",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationTaxContingencies": {
     "auth_ref": [
      "r837"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 4.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in income tax contingencies. Including, but not limited to, domestic tax contingency, foreign tax contingency, state and local tax contingency, and other contingencies.",
        "label": "Effective Income Tax Rate Reconciliation, Tax Contingency, Amount",
        "terseLabel": "Tax contingencies"
       }
      }
     },
     "localname": "IncomeTaxReconciliationTaxContingencies",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationTaxCreditsResearch": {
     "auth_ref": [
      "r837"
     ],
     "calculation": {
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail": {
       "order": 6.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to research tax credit.",
        "label": "Effective Income Tax Rate Reconciliation, Tax Credit, Research, Amount",
        "negatedLabel": "U.S. federal research credit"
       }
      }
     },
     "localname": "IncomeTaxReconciliationTaxCreditsResearch",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationofIncomeTaxExpenseWithExpectedAmountsBasedUponStatutoryFederalTaxRatesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxesPaidNet": {
     "auth_ref": [
      "r65"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes.",
        "label": "Income Taxes Paid, Net",
        "terseLabel": "Income taxes, net of refunds received"
       }
      }
     },
     "localname": "IncomeTaxesPaidNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAccountsAndNotesReceivable": {
     "auth_ref": [
      "r60"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 9.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period of the sum of amounts due within one year (or one business cycle) from customers for the credit sale of goods and services; and from note holders for outstanding loans.",
        "label": "Increase (Decrease) in Accounts and Notes Receivable",
        "negatedLabel": "Trade accounts receivable and notes receivable"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccountsAndNotesReceivable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities": {
     "auth_ref": [
      "r60"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 11.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.",
        "label": "Increase (Decrease) in Accounts Payable and Accrued Liabilities",
        "terseLabel": "Accounts payable and other accrued liabilities"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccountsPayableAndAccruedLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable": {
     "auth_ref": [
      "r60"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 13.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.",
        "label": "Increase (Decrease) in Income Taxes Payable",
        "terseLabel": "Income taxes payable and refundable income taxes"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccruedIncomeTaxesPayable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAssetRetirementObligations": {
     "auth_ref": [
      "r60"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the carrying amount of asset retirement obligations.",
        "label": "Increase (Decrease) in Asset Retirement Obligations",
        "terseLabel": "Liabilities assumed in acquisitions"
       }
      }
     },
     "localname": "IncreaseDecreaseInAssetRetirementObligations",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInInventories": {
     "auth_ref": [
      "r60"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 10.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.",
        "label": "Increase (Decrease) in Inventories",
        "negatedLabel": "Inventories"
       }
      }
     },
     "localname": "IncreaseDecreaseInInventories",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInOperatingCapitalAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Operating Capital [Abstract]",
        "terseLabel": "Changes in operating assets and liabilities, net of effects of acquisitions:"
       }
      }
     },
     "localname": "IncreaseDecreaseInOperatingCapitalAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncreaseDecreaseInOtherOperatingAssets": {
     "auth_ref": [
      "r60"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 12.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in operating assets classified as other.",
        "label": "Increase (Decrease) in Other Operating Assets",
        "negatedLabel": "Other current assets"
       }
      }
     },
     "localname": "IncreaseDecreaseInOtherOperatingAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet": {
     "auth_ref": [
      "r60"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 14.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other.",
        "label": "Increase (Decrease) in Other Operating Assets and Liabilities, Net",
        "negatedLabel": "Other"
       }
      }
     },
     "localname": "IncreaseDecreaseInOtherOperatingCapitalNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InlandRevenueSingaporeIRASMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designated tax department of the government of Singapore.",
        "label": "Inland Revenue, Singapore (IRAS) [Member]",
        "terseLabel": "Inland Revenue, Singapore (IRAS) [Member]"
       }
      }
     },
     "localname": "InlandRevenueSingaporeIRASMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_IntangibleAssetsDisclosureTextBlock": {
     "auth_ref": [
      "r417"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for all or part of the information related to intangible assets.",
        "label": "Intangible Assets Disclosure [Text Block]",
        "terseLabel": "Intangible Assets"
       }
      }
     },
     "localname": "IntangibleAssetsDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssets"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_IntangibleAssetsFiniteLivedPolicy": {
     "auth_ref": [
      "r89",
      "r669",
      "r670",
      "r671",
      "r673",
      "r720"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for finite-lived intangible assets. This accounting policy also might address: (1) the amortization method used; (2) the useful lives of such assets; and (3) how the entity assesses and measures impairment of such assets.",
        "label": "Intangible Assets, Finite-Lived, Policy [Policy Text Block]",
        "terseLabel": "Goodwill and Intangible Assets"
       }
      }
     },
     "localname": "IntangibleAssetsFiniteLivedPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InterestExpense": {
     "auth_ref": [
      "r218",
      "r232",
      "r296",
      "r356",
      "r643"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the cost of borrowed funds accounted for as interest expense.",
        "label": "Interest Expense",
        "terseLabel": "Interest expense"
       }
      }
     },
     "localname": "InterestExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestIncomeOther": {
     "auth_ref": [],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 3.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of interest income earned from interest bearing assets classified as other.",
        "label": "Interest Income, Other",
        "negatedTerseLabel": "Interest income",
        "terseLabel": "Interest income"
       }
      }
     },
     "localname": "InterestIncomeOther",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestPaidNet": {
     "auth_ref": [
      "r301",
      "r304",
      "r305"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash paid for interest, excluding capitalized interest, classified as operating activity. Includes, but is not limited to, payment to settle zero-coupon bond for accreted interest of debt discount and debt instrument with insignificant coupon interest rate in relation to effective interest rate of borrowing attributable to accreted interest of debt discount.",
        "label": "Interest Paid, Excluding Capitalized Interest, Operating Activities",
        "terseLabel": "Interest paid"
       }
      }
     },
     "localname": "InterestPaidNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestPayableCurrentAndNoncurrent": {
     "auth_ref": [
      "r229",
      "r248"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of interest payable on debt, including, but not limited to, trade payables.",
        "label": "Interest Payable",
        "terseLabel": "Accrued interest payable"
       }
      }
     },
     "localname": "InterestPayableCurrentAndNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestRateSwapMember": {
     "auth_ref": [
      "r749"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Forward based contracts in which two parties agree to swap periodic payments that are fixed at the outset of the swap contract with variable payments based on a market interest rate (index rate) over a specified period.",
        "label": "Interest Rate Swap [Member]",
        "terseLabel": "Interest Rate Swap"
       }
      }
     },
     "localname": "InterestRateSwapMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_InventoryDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory Disclosure [Abstract]",
        "terseLabel": "Inventory Disclosure [Abstract]"
       }
      }
     },
     "localname": "InventoryDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_InventoryDisclosureTextBlock": {
     "auth_ref": [
      "r400"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory.",
        "label": "Inventory Disclosure [Text Block]",
        "terseLabel": "Inventories"
       }
      }
     },
     "localname": "InventoryDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Inventories"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InventoryFinishedGoodsNetOfReserves": {
     "auth_ref": [
      "r84",
      "r714"
     ],
     "calculation": {
      "http://www.entegris.com/role/InventoriesDetail": {
       "order": 3.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.",
        "label": "Inventory, Finished Goods, Net of Reserves",
        "terseLabel": "Finished goods"
       }
      }
     },
     "localname": "InventoryFinishedGoodsNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/InventoriesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryNet": {
     "auth_ref": [
      "r278",
      "r713",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      },
      "http://www.entegris.com/role/InventoriesDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.",
        "label": "Inventory, Net",
        "terseLabel": "Inventories, net",
        "totalLabel": "Total inventories"
       }
      }
     },
     "localname": "InventoryNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/InventoriesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryNetAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Net [Abstract]",
        "terseLabel": "Inventory Net"
       }
      }
     },
     "localname": "InventoryNetAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/InventoriesDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_InventoryNoncurrentFairValueDisclosure": {
     "auth_ref": [
      "r848"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of inventory expected to be realized or consumed after one year or normal operating cycle, if longer.",
        "label": "Inventory, Noncurrent, Fair Value Disclosure",
        "terseLabel": "Inventory, Noncurrent, Fair Value Disclosure"
       }
      }
     },
     "localname": "InventoryNoncurrentFairValueDisclosure",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryPolicyTextBlock": {
     "auth_ref": [
      "r264",
      "r277",
      "r340",
      "r397",
      "r399",
      "r400",
      "r668",
      "r721"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of inventory accounting policy for inventory classes, including, but not limited to, basis for determining inventory amounts, methods by which amounts are added and removed from inventory classes, loss recognition on impairment of inventories, and situations in which inventories are stated above cost.",
        "label": "Inventory, Policy [Policy Text Block]",
        "terseLabel": "Inventories"
       }
      }
     },
     "localname": "InventoryPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InventoryRawMaterialsNetOfReserves": {
     "auth_ref": [
      "r84",
      "r716"
     ],
     "calculation": {
      "http://www.entegris.com/role/InventoriesDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.",
        "label": "Inventory, Raw Materials, Net of Reserves",
        "terseLabel": "Raw materials"
       }
      }
     },
     "localname": "InventoryRawMaterialsNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/InventoriesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryWorkInProcessNetOfReserves": {
     "auth_ref": [
      "r84",
      "r715"
     ],
     "calculation": {
      "http://www.entegris.com/role/InventoriesDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.",
        "label": "Inventory, Work in Process, Net of Reserves",
        "terseLabel": "Work-in-process"
       }
      }
     },
     "localname": "InventoryWorkInProcessNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/InventoriesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryWriteDown": {
     "auth_ref": [
      "r398"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 6.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of loss from reductions in inventory due to subsequent measurement adjustments, including, but not limited to, physical deterioration, obsolescence, or changes in price levels.",
        "label": "Inventory Write-down",
        "terseLabel": "Charge for excess and obsolete inventory"
       }
      }
     },
     "localname": "InventoryWriteDown",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_Land": {
     "auth_ref": [
      "r766"
     ],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accumulated depletion of real estate held for productive use, excluding land held for sale.",
        "label": "Land",
        "terseLabel": "Land"
       }
      }
     },
     "localname": "Land",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LeaseCostTableTextBlock": {
     "auth_ref": [
      "r851"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of lessee's lease cost. Includes, but is not limited to, interest expense for finance lease, amortization of right-of-use asset for finance lease, operating lease cost, short-term lease cost, variable lease cost and sublease income.",
        "label": "Lease, Cost [Table Text Block]",
        "terseLabel": "Lease, Cost"
       }
      }
     },
     "localname": "LeaseCostTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LeasesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Leases [Abstract]",
        "terseLabel": "Leases [Abstract]"
       }
      }
     },
     "localname": "LeasesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeLeaseDescriptionLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Lessee, Lease, Description [Line Items]",
        "terseLabel": "Lessee, Lease, Description [Line Items]"
       }
      }
     },
     "localname": "LesseeLeaseDescriptionLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeLeaseDescriptionTable": {
     "auth_ref": [
      "r651"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about lessee's leases.",
        "label": "Lessee, Lease, Description [Table]",
        "terseLabel": "Lessee, Lease, Description [Table]"
       }
      }
     },
     "localname": "LesseeLeaseDescriptionTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeLeasesPolicyTextBlock": {
     "auth_ref": [
      "r649"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for leasing arrangement entered into by lessee.",
        "label": "Lessee, Leases [Policy Text Block]",
        "terseLabel": "Leases"
       }
      }
     },
     "localname": "LesseeLeasesPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of undiscounted cash flows of lessee's operating lease liability. Includes, but is not limited to, reconciliation of undiscounted cash flows to operating lease liability recognized in statement of financial position.",
        "label": "Lessee, Operating Lease, Liability, Maturity [Table Text Block]",
        "terseLabel": "Lessee, Operating Lease, Liability, Maturity"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityMaturityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue": {
     "auth_ref": [
      "r657"
     ],
     "calculation": {
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease.",
        "label": "Lessee, Operating Lease, Liability, to be Paid",
        "totalLabel": "Total"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive": {
     "auth_ref": [
      "r657"
     ],
     "calculation": {
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails": {
       "order": 5.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, to be Paid, after Year Five",
        "terseLabel": "Beyond Five Years"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "auth_ref": [
      "r657"
     ],
     "calculation": {
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, to be Paid, Year One",
        "terseLabel": "One Year"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive": {
     "auth_ref": [
      "r657"
     ],
     "calculation": {
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails": {
       "order": 6.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, to be Paid, Year Five",
        "terseLabel": "Five Years"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour": {
     "auth_ref": [
      "r657"
     ],
     "calculation": {
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, to be Paid, Year Four",
        "terseLabel": "Four Years"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFour",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree": {
     "auth_ref": [
      "r657"
     ],
     "calculation": {
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, to be Paid, Year Three",
        "terseLabel": "Three Years"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearThree",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo": {
     "auth_ref": [
      "r657"
     ],
     "calculation": {
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, to be Paid, Year Two",
        "terseLabel": "Two Years"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount": {
     "auth_ref": [
      "r657"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.",
        "label": "Lessee, Operating Lease, Liability, Undiscounted Excess Amount",
        "terseLabel": "Less: Interest"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityUndiscountedExcessAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseOptionToTerminate": {
     "auth_ref": [
      "r650"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Description of terms and conditions of option to terminate lessee's operating lease. Includes, but is not limited to, information about option recognized as part of right-of-use asset and lease liability.",
        "label": "Lessee, Operating Lease, Option to Terminate",
        "terseLabel": "Lease terminate option"
       }
      }
     },
     "localname": "LesseeOperatingLeaseOptionToTerminate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeOperatingLeaseRenewalTerm": {
     "auth_ref": [
      "r850"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Lessee, Operating Lease, Renewal Term",
        "terseLabel": "Lease renewal options"
       }
      }
     },
     "localname": "LesseeOperatingLeaseRenewalTerm",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_LesseeOperatingLeaseTermOfContract": {
     "auth_ref": [
      "r850"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Lessee, Operating Lease, Term of Contract",
        "terseLabel": "Lease term"
       }
      }
     },
     "localname": "LesseeOperatingLeaseTermOfContract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_LesseeOperatingLeasesTextBlock": {
     "auth_ref": [
      "r658"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for operating leases of lessee. Includes, but is not limited to, description of operating lease and maturity analysis of operating lease liability.",
        "label": "Lessee, Operating Leases [Text Block]",
        "terseLabel": "Lessee, Operating Leases"
       }
      }
     },
     "localname": "LesseeOperatingLeasesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitments"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LiabilitiesAndStockholdersEquity": {
     "auth_ref": [
      "r15",
      "r228",
      "r246",
      "r753",
      "r778",
      "r787",
      "r849"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.",
        "label": "Liabilities and Equity",
        "totalLabel": "Total liabilities and equity"
       }
      }
     },
     "localname": "LiabilitiesAndStockholdersEquity",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesAndStockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities and Equity [Abstract]",
        "terseLabel": "LIABILITIES AND EQUITY"
       }
      }
     },
     "localname": "LiabilitiesAndStockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LiabilitiesCurrent": {
     "auth_ref": [
      "r23",
      "r263",
      "r309",
      "r390",
      "r439",
      "r440",
      "r441",
      "r442",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r610",
      "r614",
      "r615",
      "r628",
      "r753",
      "r802",
      "r853",
      "r854"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.",
        "label": "Liabilities, Current",
        "totalLabel": "Total current liabilities"
       }
      }
     },
     "localname": "LiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesCurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities, Current [Abstract]",
        "terseLabel": "Current liabilities:"
       }
      }
     },
     "localname": "LiabilitiesCurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LiabilitiesOfDisposalGroupIncludingDiscontinuedOperation": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r100",
      "r260",
      "r261"
     ],
     "calculation": {
      "http://www.entegris.com/role/AssetsHeldForSaleDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount classified as liabilities attributable to disposal group held for sale or disposed of.",
        "label": "Disposal Group, Including Discontinued Operation, Liabilities",
        "terseLabel": "Liabilities held-for-sale",
        "totalLabel": "Total liabilities-held-for sale"
       }
      }
     },
     "localname": "LiabilitiesOfDisposalGroupIncludingDiscontinuedOperation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSaleDetails",
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LineOfCreditFacilityExpirationDate1": {
     "auth_ref": [
      "r20"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Date the credit facility terminates, in YYYY-MM-DD format.",
        "label": "Line of Credit Facility, Expiration Date",
        "terseLabel": "Line of Credit Facility, Expiration Date"
       }
      }
     },
     "localname": "LineOfCreditFacilityExpirationDate1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "dateItemType"
    },
    "us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity": {
     "auth_ref": [
      "r20"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.",
        "label": "Line of Credit Facility, Maximum Borrowing Capacity",
        "terseLabel": "Line of Credit Facility, Maximum Borrowing Capacity"
       }
      }
     },
     "localname": "LineOfCreditFacilityMaximumBorrowingCapacity",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock": {
     "auth_ref": [
      "r786"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for claims held for amounts due a entity, excluding financing receivables. Examples include, but are not limited to, trade accounts receivables, notes receivables, loans receivables. Includes disclosure for allowance for credit losses.",
        "label": "Loans, Notes, Trade and Other Receivables Disclosure [Text Block]",
        "terseLabel": "Trade Accounts and Notes Receivable"
       }
      }
     },
     "localname": "LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/TradeAccountsandNotesReceivable"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LongMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates an ownership position in, or purchase of, a security.",
        "label": "Long [Member]",
        "terseLabel": "Long"
       }
      }
     },
     "localname": "LongMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_LongTermDebt": {
     "auth_ref": [
      "r7",
      "r227",
      "r243",
      "r461",
      "r477",
      "r731",
      "r732"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtSummaryTableDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, excluding unamortized premium (discount) and debt issuance cost, of long-term debt. Excludes lease obligation.",
        "label": "Long-Term Debt",
        "terseLabel": "Total long-term debt",
        "totalLabel": "Total debt, net"
       }
      }
     },
     "localname": "LongTermDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails",
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtCurrent": {
     "auth_ref": [
      "r21"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      },
      "http://www.entegris.com/role/DebtSummaryTableDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_LongTermDebt",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after unamortized (discount) premium and debt issuance costs, of long-term debt, classified as current. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.",
        "label": "Long-Term Debt, Current Maturities",
        "terseLabel": "Short-term debt, including current portion of long-term debt",
        "verboseLabel": "Less short-term debt, including current portion of long-term debt"
       }
      }
     },
     "localname": "LongTermDebtCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtFairValue": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The fair value amount of long-term debt whether such amount is presented as a separate caption or as a parenthetical disclosure. Additionally, this element may be used in connection with the fair value disclosures required in the footnote disclosures to the financial statements. The element may be used in both the balance sheet and disclosure in the same submission.",
        "label": "Long-Term Debt, Fair Value",
        "terseLabel": "Long-term Debt, Fair Value"
       }
      }
     },
     "localname": "LongTermDebtFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive": {
     "auth_ref": [
      "r106",
      "r314",
      "r806"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtMaturityScheduleDetails": {
       "order": 6.0,
       "parentTag": "us-gaap_DebtInstrumentCarryingAmount",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of long-term debt payable, sinking fund requirement, and other securities issued that are redeemable by holder at fixed or determinable price and date, maturing after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Long-Term Debt, Maturity, after Year Five",
        "terseLabel": "Thereafter"
       }
      }
     },
     "localname": "LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtMaturityScheduleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths": {
     "auth_ref": [
      "r106",
      "r314",
      "r466"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtMaturityScheduleDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_DebtInstrumentCarryingAmount",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of long-term debt payable, sinking fund requirement, and other securities issued that are redeemable by holder at fixed or determinable price and date, maturing in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Long-Term Debt, Maturity, Year One",
        "terseLabel": "2023"
       }
      }
     },
     "localname": "LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtMaturityScheduleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInRollingYearFive": {
     "auth_ref": [
      "r780"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtMaturityScheduleDetails": {
       "order": 5.0,
       "parentTag": "us-gaap_DebtInstrumentCarryingAmount",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of long-term debt payable, sinking fund requirements, and other securities issued that are redeemable by holder at fixed or determinable prices and dates maturing in the fifth rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.",
        "label": "Long-Term Debt, Maturities, Repayments of Principal in Rolling Year Five",
        "terseLabel": "2027"
       }
      }
     },
     "localname": "LongTermDebtMaturitiesRepaymentsOfPrincipalInRollingYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtMaturityScheduleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInRollingYearFour": {
     "auth_ref": [
      "r780"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtMaturityScheduleDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_DebtInstrumentCarryingAmount",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of long-term debt payable, sinking fund requirements, and other securities issued that are redeemable by holder at fixed or determinable prices and dates maturing in the fourth rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.",
        "label": "Long-Term Debt, Maturities, Repayments of Principal in Rolling Year Four",
        "terseLabel": "2026"
       }
      }
     },
     "localname": "LongTermDebtMaturitiesRepaymentsOfPrincipalInRollingYearFour",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtMaturityScheduleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree": {
     "auth_ref": [
      "r106",
      "r314",
      "r466"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtMaturityScheduleDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_DebtInstrumentCarryingAmount",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of long-term debt payable, sinking fund requirement, and other securities issued that are redeemable by holder at fixed or determinable price and date, maturing in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Long-Term Debt, Maturity, Year Three",
        "terseLabel": "2025"
       }
      }
     },
     "localname": "LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtMaturityScheduleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo": {
     "auth_ref": [
      "r106",
      "r314",
      "r466"
     ],
     "calculation": {
      "http://www.entegris.com/role/DebtMaturityScheduleDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_DebtInstrumentCarryingAmount",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of long-term debt payable, sinking fund requirement, and other securities issued that are redeemable by holder at fixed or determinable price and date, maturing in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Long-Term Debt, Maturity, Year Two",
        "terseLabel": "2024"
       }
      }
     },
     "localname": "LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtMaturityScheduleDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtNoncurrent": {
     "auth_ref": [
      "r272"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      },
      "http://www.entegris.com/role/DebtSummaryTableDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_LongTermDebt",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, excluding unamortized premium (discount) and debt issuance cost, of long-term debt classified as noncurrent. Excludes lease obligation.",
        "label": "Long-Term Debt, Excluding Current Maturities",
        "terseLabel": "Long-term debt, excluding current maturities",
        "verboseLabel": "Total long-term debt, net"
       }
      }
     },
     "localname": "LongTermDebtNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtPercentageBearingVariableInterestRate": {
     "auth_ref": [
      "r24"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The interest rate applicable to the portion of the carrying amount of long-term borrowings outstanding as of the balance sheet date, including current maturities, which accrues interest at a rate subject to change from time to time.",
        "label": "Long-Term Debt, Percentage Bearing Variable Interest, Percentage Rate",
        "terseLabel": "Term Loan Rate"
       }
      }
     },
     "localname": "LongTermDebtPercentageBearingVariableInterestRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_LongtermDebtTypeAxis": {
     "auth_ref": [
      "r25"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of long-term debt.",
        "label": "Long-Term Debt, Type [Axis]",
        "terseLabel": "Long-term Debt, Type"
       }
      }
     },
     "localname": "LongtermDebtTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LongtermDebtTypeDomain": {
     "auth_ref": [
      "r25",
      "r107"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Type of long-term debt arrangement, such as notes, line of credit, commercial paper, asset-based financing, project financing, letter of credit financing. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer.",
        "label": "Long-Term Debt, Type [Domain]",
        "terseLabel": "Long-term Debt, Type"
       }
      }
     },
     "localname": "LongtermDebtTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_MachineryAndEquipmentGross": {
     "auth_ref": [
      "r97"
     ],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 3.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accumulated depreciation of tangible personal property used to produce goods and services, including, but is not limited to, tools, dies and molds, computer and office equipment.",
        "label": "Machinery and Equipment, Gross",
        "terseLabel": "Manufacturing equipment"
       }
      }
     },
     "localname": "MachineryAndEquipmentGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_MergersAcquisitionsAndDispositionsDisclosuresTextBlock": {
     "auth_ref": [
      "r3",
      "r179"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for business combinations, including leverage buyout transactions (as applicable), and divestitures. This may include a description of a business combination or divestiture (or series of individually immaterial business combinations or divestitures) completed during the period, including background, timing, and assets and liabilities recognized and reclassified or sold. This element does not include fixed asset sales and plant closings.",
        "label": "Mergers, Acquisitions and Dispositions Disclosures [Text Block]",
        "terseLabel": "Assets Held for Sale"
       }
      }
     },
     "localname": "MergersAcquisitionsAndDispositionsDisclosuresTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetsHeldForSale"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_NatureOfOperations": {
     "auth_ref": [
      "r344",
      "r349"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for the nature of an entity's business, major products or services, principal markets including location, and the relative importance of its operations in each business and the basis for the determination, including but not limited to, assets, revenues, or earnings. For an entity that has not commenced principal operations, disclosures about the risks and uncertainties related to the activities in which the entity is currently engaged and an understanding of what those activities are being directed toward.",
        "label": "Nature of Operations [Text Block]",
        "terseLabel": "Nature of Operations"
       }
      }
     },
     "localname": "NatureOfOperations",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivities": {
     "auth_ref": [
      "r303"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.",
        "label": "Net Cash Provided by (Used in) Financing Activities",
        "totalLabel": "Net cash provided by (used in) financing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInFinancingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Financing Activities [Abstract]",
        "terseLabel": "Financing activities:"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInFinancingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivities": {
     "auth_ref": [
      "r303"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.",
        "label": "Net Cash Provided by (Used in) Investing Activities",
        "totalLabel": "Net cash used in investing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInInvestingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Investing Activities [Abstract]",
        "terseLabel": "Investing activities:"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInInvestingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivities": {
     "auth_ref": [
      "r57",
      "r59",
      "r62"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.",
        "label": "Net Cash Provided by (Used in) Operating Activities",
        "totalLabel": "Net cash provided by operating activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInOperatingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Operating Activities [Abstract]",
        "terseLabel": "Operating activities:"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInOperatingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetIncomeLoss": {
     "auth_ref": [
      "r40",
      "r62",
      "r231",
      "r249",
      "r261",
      "r287",
      "r290",
      "r295",
      "r309",
      "r318",
      "r320",
      "r321",
      "r322",
      "r323",
      "r326",
      "r327",
      "r331",
      "r362",
      "r367",
      "r373",
      "r376",
      "r390",
      "r439",
      "r440",
      "r441",
      "r442",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r624",
      "r628",
      "r725",
      "r802"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome": {
       "order": 1.0,
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0
      },
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.",
        "label": "Net Income (Loss) Attributable to Parent",
        "terseLabel": "Net income",
        "totalLabel": "Net income"
       }
      }
     },
     "localname": "NetIncomeLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/QuarterlyInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact.",
        "label": "New Accounting Pronouncements, Policy [Policy Text Block]",
        "terseLabel": "Recent Accounting Pronouncements"
       }
      }
     },
     "localname": "NewAccountingPronouncementsPolicyPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_NondesignatedMember": {
     "auth_ref": [
      "r188"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Derivative instrument not designated as hedging instrument under Generally Accepted Accounting Principles (GAAP).",
        "label": "Not Designated as Hedging Instrument [Member]",
        "terseLabel": "Not Designated as Hedging Instrument"
       }
      }
     },
     "localname": "NondesignatedMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_NotesReceivableGross": {
     "auth_ref": [
      "r274",
      "r388",
      "r395",
      "r396",
      "r710",
      "r711",
      "r727",
      "r728",
      "r788",
      "r866"
     ],
     "calculation": {
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail": {
       "order": 2.0,
       "parentTag": "entg_AccountsAndNotesReceivableGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amortized cost, before allowance for credit loss, of financing receivable. Excludes financing receivable covered under loss sharing agreement and net investment in lease.",
        "label": "Financing Receivable, before Allowance for Credit Loss",
        "terseLabel": "Notes receivable"
       }
      }
     },
     "localname": "NotesReceivableGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OfficeEquipmentMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tangible personal property used in an office setting. Examples include, but are not limited to, computers, copiers and fax machine.",
        "label": "Office Equipment [Member]",
        "terseLabel": "Office Furniture and Equipment"
       }
      }
     },
     "localname": "OfficeEquipmentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_OpenForwardForeignCurrencyContractTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Open Forward Foreign Currency Contract [Table Text Block]",
        "terseLabel": "Open Forward Foreign Currency Contract"
       }
      }
     },
     "localname": "OpenForwardForeignCurrencyContractTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap-sup/2022q3",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_OpenTaxYear": {
     "auth_ref": [
      "r570"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tax year that remains open to examination under enacted tax laws, in YYYY format.",
        "label": "Open Tax Year",
        "terseLabel": "Open Tax Year"
       }
      }
     },
     "localname": "OpenTaxYear",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails"
     ],
     "xbrltype": "gYearListItemType"
    },
    "us-gaap_OperatingIncomeLoss": {
     "auth_ref": [
      "r362",
      "r367",
      "r373",
      "r376",
      "r725"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      },
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The net result for the period of deducting operating expenses from operating revenues.",
        "label": "Operating Income (Loss)",
        "totalLabel": "Operating income"
       }
      }
     },
     "localname": "OperatingIncomeLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseCost": {
     "auth_ref": [
      "r652",
      "r752"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability.",
        "label": "Operating Lease, Cost",
        "terseLabel": "Operating Lease, Cost"
       }
      }
     },
     "localname": "OperatingLeaseCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesComponentsofLeaseExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiability": {
     "auth_ref": [
      "r646"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease.",
        "label": "Operating Lease, Liability",
        "terseLabel": "Present value of lease liabilities"
       }
      }
     },
     "localname": "OperatingLeaseLiability",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseFutureMinimumLeasePaymentsDetails",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityCurrent": {
     "auth_ref": [
      "r646"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.",
        "label": "Operating Lease, Liability, Current",
        "terseLabel": "Short-term lease liability"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityNoncurrent": {
     "auth_ref": [
      "r646"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.",
        "label": "Operating Lease, Liability, Noncurrent",
        "terseLabel": "Long-term lease liabilities"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r647"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes noncurrent operating lease liability.",
        "label": "Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible Enumeration]",
        "terseLabel": "Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible Enumeration]"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_OperatingLeasePayments": {
     "auth_ref": [
      "r648",
      "r653"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.",
        "label": "Operating Lease, Payments",
        "terseLabel": "Operating cash flows from leases"
       }
      }
     },
     "localname": "OperatingLeasePayments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseRightOfUseAsset": {
     "auth_ref": [
      "r645"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 7.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's right to use underlying asset under operating lease.",
        "label": "Operating Lease, Right-of-Use Asset",
        "terseLabel": "Right-of-use assets"
       }
      }
     },
     "localname": "OperatingLeaseRightOfUseAsset",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r647"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes operating lease right-of-use asset.",
        "label": "Operating Lease, Right-of-Use Asset, Statement of Financial Position [Extensible Enumeration]",
        "terseLabel": "Operating Lease, Right-of-Use Asset, Statement of Financial Position [Extensible Enumeration]"
       }
      }
     },
     "localname": "OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent": {
     "auth_ref": [
      "r656",
      "r752"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average discount rate for operating lease calculated at point in time.",
        "label": "Operating Lease, Weighted Average Discount Rate, Percent",
        "terseLabel": "Weighted average discount rate"
       }
      }
     },
     "localname": "OperatingLeaseWeightedAverageDiscountRatePercent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1": {
     "auth_ref": [
      "r655",
      "r752"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Operating Lease, Weighted Average Remaining Lease Term",
        "terseLabel": "Operating leases"
       }
      }
     },
     "localname": "OperatingLeaseWeightedAverageRemainingLeaseTerm1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeasesLeaseBalancesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_OperatingLossCarryforwardsExpirationDate": {
     "auth_ref": [
      "r161"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Expiration date of each operating loss carryforward included in operating loss carryforward, in YYYY-MM-DD format.",
        "label": "Operating Loss Carryforwards, Expiration Date",
        "terseLabel": "Operating Loss Carryforwards, Expiration Date"
       }
      }
     },
     "localname": "OperatingLossCarryforwardsExpirationDate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "dateItemType"
    },
    "us-gaap_OtherAssetsCurrent": {
     "auth_ref": [
      "r279",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current assets classified as other.",
        "label": "Other Assets, Current",
        "terseLabel": "Other current assets"
       }
      }
     },
     "localname": "OtherAssetsCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherAssetsNoncurrent": {
     "auth_ref": [
      "r270"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of noncurrent assets classified as other.",
        "label": "Other Assets, Noncurrent",
        "terseLabel": "Other noncurrent assets"
       }
      }
     },
     "localname": "OtherAssetsNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTax": {
     "auth_ref": [
      "r283",
      "r284"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after tax and reclassification, of gain (loss) from derivative instrument designated and qualifying as cash flow hedge included in assessment of hedge effectiveness.",
        "label": "Other Comprehensive Income (Loss), Cash Flow Hedge, Gain (Loss), after Reclassification and Tax",
        "terseLabel": "Interest Rate Swap - Cash flow hedge"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossReclassificationBeforeTax": {
     "auth_ref": [
      "r284",
      "r286",
      "r617"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome": {
       "order": 3.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTax",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before tax, of reclassification of gain (loss) from accumulated other comprehensive income (AOCI) for derivative instrument designated and qualifying as cash flow hedge included in assessment of hedge effectiveness.",
        "label": "Other Comprehensive Income (Loss), Cash Flow Hedge, Gain (Loss), Reclassification, before Tax",
        "terseLabel": "Interest rate swap - cash flow hedge, net of tax expense of $10,520"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossCashFlowHedgeGainLossReclassificationBeforeTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax": {
     "auth_ref": [
      "r29"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome": {
       "order": 1.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTax",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature.",
        "label": "Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax",
        "terseLabel": "Foreign currency translation",
        "verboseLabel": "Foreign currency translation adjustments"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTax": {
     "auth_ref": [
      "r38",
      "r112",
      "r288",
      "r291",
      "r297",
      "r634",
      "r639",
      "r640",
      "r676",
      "r683",
      "r768",
      "r769"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome": {
       "order": 2.0,
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax and reclassification adjustments of other comprehensive income (loss).",
        "label": "Other Comprehensive Income (Loss), Net of Tax",
        "totalLabel": "Other comprehensive income (loss)"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Net of Tax [Abstract]",
        "terseLabel": "Other comprehensive income (loss), net of tax"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax": {
     "auth_ref": [
      "r32",
      "r33"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome": {
       "order": 2.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTax",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after tax and reclassification adjustment, of (increase) decrease in accumulated other comprehensive income for defined benefit plan.",
        "label": "Other Comprehensive (Income) Loss, Defined Benefit Plan, after Reclassification Adjustment, after Tax",
        "negatedLabel": "Pension liability adjustments",
        "negatedTerseLabel": "Pension liability adjustment"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossPensionAndOtherPostretirementBenefitPlansAdjustmentNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossTax": {
     "auth_ref": [
      "r34",
      "r293",
      "r297",
      "r566",
      "r596",
      "r598",
      "r634",
      "r637",
      "r640",
      "r676",
      "r683"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of tax expense (benefit) allocated to other comprehensive income (loss).",
        "label": "Other Comprehensive Income (Loss), Tax",
        "terseLabel": "Other Comprehensive Income (Loss), Tax"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherCurrentAssetsMember": {
     "auth_ref": [
      "r190",
      "r201"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing other current assets.",
        "label": "Other Current Assets [Member]",
        "terseLabel": "Other Current Assets"
       }
      }
     },
     "localname": "OtherCurrentAssetsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_OtherExpenses": {
     "auth_ref": [
      "r46",
      "r251"
     ],
     "calculation": {
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_OtherNonoperatingIncomeExpense",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expense classified as other.",
        "label": "Other Expenses",
        "negatedTerseLabel": "Other, net"
       }
      }
     },
     "localname": "OtherExpenses",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherIncomeAndExpensesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Income and Expenses [Abstract]",
        "terseLabel": "Other Income and Expenses [Abstract]"
       }
      }
     },
     "localname": "OtherIncomeAndExpensesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_OtherIncomeAndOtherExpenseDisclosureTextBlock": {
     "auth_ref": [
      "r121",
      "r152"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for other income or other expense items (both operating and nonoperating). Sources of nonoperating income or nonoperating expense that may be disclosed, include amounts earned from dividends, interest on securities, profits (losses) on securities, net and miscellaneous other income or income deductions.",
        "label": "Other Income and Other Expense Disclosure [Text Block]",
        "terseLabel": "Other Income and Other Expense Disclosure [Text Block]"
       }
      }
     },
     "localname": "OtherIncomeAndOtherExpenseDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/OtherIncomeExpenseNet"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_OtherIntangibleAssetsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Intangible assets classified as other.",
        "label": "Other Intangible Assets [Member]",
        "terseLabel": "Other"
       }
      }
     },
     "localname": "OtherIntangibleAssetsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment": {
     "auth_ref": [
      "r767"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Gross amount of inventory owned by the entity but in the hands of a customer, typically a reseller.",
        "label": "Other Inventory, Materials, Supplies and Merchandise under Consignment, Gross",
        "terseLabel": "Consignment inventory held by customers"
       }
      }
     },
     "localname": "OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/InventoriesInventoriesAdditionalDetailDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherLiabilitiesCurrent": {
     "auth_ref": [
      "r22",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.",
        "label": "Other Liabilities, Current",
        "terseLabel": "Other accrued liabilities"
       }
      }
     },
     "localname": "OtherLiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherNoncashIncomeExpense": {
     "auth_ref": [
      "r62"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 8.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of income (expense) included in net income that results in no cash inflow (outflow), classified as other.",
        "label": "Other Noncash Income (Expense)",
        "negatedLabel": "Other"
       }
      }
     },
     "localname": "OtherNoncashIncomeExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherNoncurrentAssetsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing other noncurrent assets.",
        "label": "Other Noncurrent Assets [Member]",
        "terseLabel": "Other Noncurrent Assets"
       }
      }
     },
     "localname": "OtherNoncurrentAssetsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_OtherNonoperatingIncomeExpense": {
     "auth_ref": [
      "r47"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 4.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      },
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of income (expense) related to nonoperating activities, classified as other.",
        "label": "Other Nonoperating Income (Expense)",
        "negatedLabel": "Other expense (income), net",
        "negatedTotalLabel": "Other expense (income), net"
       }
      }
     },
     "localname": "OtherNonoperatingIncomeExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/OtherIncomeExpenseNetDetails",
      "http://www.entegris.com/role/SegmentInformationReconciliationofTotalSegmentProfittoOperatingIncomeDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherPaymentsToAcquireBusinesses": {
     "auth_ref": [
      "r49"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow associated with other payments to acquire businesses including deposit on pending acquisitions and preacquisition costs.",
        "label": "Other Payments to Acquire Businesses",
        "terseLabel": "Cash paid to CMC Materials\u2019 shareholders"
       }
      }
     },
     "localname": "OtherPaymentsToAcquireBusinesses",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsForDepositsAppliedToDebtRetirements": {
     "auth_ref": [
      "r774"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cash outflow during the period as a deposit on account for application (deposits to retire or pay down) against an amount of debt owed by the entity.",
        "label": "Payments for Deposits Applied to Debt Retirements",
        "terseLabel": "Repayment of CMC Materials\u2019 indebtedness"
       }
      }
     },
     "localname": "PaymentsForDepositsAppliedToDebtRetirements",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsForLoans": {
     "auth_ref": [
      "r58"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cash payments for and related to principal collection on loans related to operating activities.",
        "label": "Payments for Loans",
        "terseLabel": "Payments for Loans"
       }
      }
     },
     "localname": "PaymentsForLoans",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsForProceedsFromOtherInvestingActivities": {
     "auth_ref": [
      "r771",
      "r772"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash (inflow) outflow from investing activities classified as other.",
        "label": "Payments for (Proceeds from) Other Investing Activities",
        "negatedLabel": "Other"
       }
      }
     },
     "localname": "PaymentsForProceedsFromOtherInvestingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsForRepurchaseOfCommonStock": {
     "auth_ref": [
      "r53"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow to reacquire common stock during the period.",
        "label": "Payments for Repurchase of Common Stock",
        "negatedTerseLabel": "Repurchase and retirement of common stock"
       }
      }
     },
     "localname": "PaymentsForRepurchaseOfCommonStock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsOfDebtExtinguishmentCosts": {
     "auth_ref": [
      "r56"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow for cost from early extinguishment and prepayment of debt. Includes, but is not limited to, third-party cost, premium paid, and other fee paid to lender directly for debt extinguishment or debt prepayment. Excludes accrued interest.",
        "label": "Payment for Debt Extinguishment or Debt Prepayment Cost",
        "negatedTerseLabel": "Payments for debt extinguishment costs"
       }
      }
     },
     "localname": "PaymentsOfDebtExtinguishmentCosts",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsOfDebtIssuanceCosts": {
     "auth_ref": [
      "r55"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 5.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt.",
        "label": "Payments of Debt Issuance Costs",
        "negatedTerseLabel": "Payments for debt issuance costs",
        "terseLabel": "Payments of Debt Issuance Costs"
       }
      }
     },
     "localname": "PaymentsOfDebtIssuanceCosts",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/Debt2029and2030NotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsOfDividends": {
     "auth_ref": [
      "r53"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 12.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cash outflow in the form of capital distributions and dividends to common shareholders, preferred shareholders and noncontrolling interests.",
        "label": "Payments of Dividends",
        "negatedTerseLabel": "Payments for dividends"
       }
      }
     },
     "localname": "PaymentsOfDividends",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation": {
     "auth_ref": [
      "r300"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 9.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow to satisfy grantee's tax withholding obligation for award under share-based payment arrangement.",
        "label": "Payment, Tax Withholding, Share-Based Payment Arrangement",
        "negatedTerseLabel": "Taxes paid related to net share settlement of equity awards"
       }
      }
     },
     "localname": "PaymentsRelatedToTaxWithholdingForShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired": {
     "auth_ref": [
      "r49"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase.",
        "label": "Payments to Acquire Businesses, Net of Cash Acquired",
        "negatedTerseLabel": "Acquisition of business, net of cash acquired",
        "terseLabel": "Total purchase price, net of cash acquired"
       }
      }
     },
     "localname": "PaymentsToAcquireBusinessesNetOfCashAcquired",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsToAcquirePropertyPlantAndEquipment": {
     "auth_ref": [
      "r50"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.",
        "label": "Payments to Acquire Property, Plant, and Equipment",
        "negatedLabel": "Acquisition of property and equipment",
        "terseLabel": "Total capital expenditures"
       }
      }
     },
     "localname": "PaymentsToAcquirePropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PensionAndOtherPostretirementAndPostemploymentBenefitPlansLiabilitiesNoncurrent": {
     "auth_ref": [
      "r8",
      "r124",
      "r125",
      "r126"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liability, recognized in statement of financial position, for pension, other postretirement and postemployment benefits, classified as noncurrent.",
        "label": "Liability, Pension and Other Postretirement and Postemployment Benefits, Noncurrent",
        "terseLabel": "Pension benefit obligations and other liabilities"
       }
      }
     },
     "localname": "PensionAndOtherPostretirementAndPostemploymentBenefitPlansLiabilitiesNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PerformanceSharesMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Share-based payment arrangement awarded for meeting performance target.",
        "label": "Performance Shares [Member]",
        "terseLabel": "Performance Stock"
       }
      }
     },
     "localname": "PerformanceSharesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PlanNameAxis": {
     "auth_ref": [
      "r811",
      "r812",
      "r813",
      "r814",
      "r815",
      "r816",
      "r817",
      "r818",
      "r819",
      "r820",
      "r821",
      "r822",
      "r823",
      "r824",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829",
      "r830",
      "r831",
      "r832",
      "r833",
      "r834",
      "r835",
      "r836"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by plan name for share-based payment arrangement.",
        "label": "Plan Name [Axis]",
        "terseLabel": "Plan Name"
       }
      }
     },
     "localname": "PlanNameAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PlanNameDomain": {
     "auth_ref": [
      "r811",
      "r812",
      "r813",
      "r814",
      "r815",
      "r816",
      "r817",
      "r818",
      "r819",
      "r820",
      "r821",
      "r822",
      "r823",
      "r824",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829",
      "r830",
      "r831",
      "r832",
      "r833",
      "r834",
      "r835",
      "r836"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Plan name for share-based payment arrangement.",
        "label": "Plan Name [Domain]",
        "terseLabel": "Plan Name"
       }
      }
     },
     "localname": "PlanNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PositionAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by position taken for a security.",
        "label": "Position [Axis]",
        "terseLabel": "Position [Axis]"
       }
      }
     },
     "localname": "PositionAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PositionDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates position taken for a security.",
        "label": "Position [Domain]",
        "terseLabel": "Position [Domain]"
       }
      }
     },
     "localname": "PositionDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PreferredStockParOrStatedValuePerShare": {
     "auth_ref": [
      "r11",
      "r478"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Face amount or stated value per share of preferred stock nonredeemable or redeemable solely at the option of the issuer.",
        "label": "Preferred Stock, Par or Stated Value Per Share",
        "terseLabel": "Preferred stock, par value"
       }
      }
     },
     "localname": "PreferredStockParOrStatedValuePerShare",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_PreferredStockSharesAuthorized": {
     "auth_ref": [
      "r11"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.",
        "label": "Preferred Stock, Shares Authorized",
        "terseLabel": "Preferred stock, shares authorized"
       }
      }
     },
     "localname": "PreferredStockSharesAuthorized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_PreferredStockSharesIssued": {
     "auth_ref": [
      "r11",
      "r478"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.",
        "label": "Preferred Stock, Shares Issued",
        "terseLabel": "Preferred stock, shares issued"
       }
      }
     },
     "localname": "PreferredStockSharesIssued",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_PreferredStockSharesOutstanding": {
     "auth_ref": [
      "r11"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate share number for all nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer) held by stockholders. Does not include preferred shares that have been repurchased.",
        "label": "Preferred Stock, Shares Outstanding",
        "terseLabel": "Preferred stock, shares outstanding"
       }
      }
     },
     "localname": "PreferredStockSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_PreferredStockValue": {
     "auth_ref": [
      "r11",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity.",
        "label": "Preferred Stock, Value, Issued",
        "terseLabel": "Preferred stock, par value $.01; 5,000,000 shares authorized; none issued and outstanding as of December\u00a031, 2022 and December\u00a031, 2021"
       }
      }
     },
     "localname": "PreferredStockValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromDivestitureOfBusinesses": {
     "auth_ref": [
      "r48"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow associated with the amount received from the sale of a portion of the company's business, for example a segment, division, branch or other business, during the period.",
        "label": "Proceeds from Divestiture of Businesses",
        "terseLabel": "Proceeds from Divestiture of Businesses"
       }
      }
     },
     "localname": "ProceedsFromDivestitureOfBusinesses",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SubsequentEventsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromIssuanceOfLongTermDebt": {
     "auth_ref": [
      "r52"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 11.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow from a debt initially having maturity due after one year or beyond the operating cycle, if longer.",
        "label": "Proceeds from Issuance of Long-Term Debt",
        "terseLabel": "Proceeds from long-term debt"
       }
      }
     },
     "localname": "ProceedsFromIssuanceOfLongTermDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions": {
     "auth_ref": [
      "r51",
      "r147"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 10.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow from issuance of shares under share-based payment arrangement. Includes, but is not limited to, option exercised.",
        "label": "Proceeds, Issuance of Shares, Share-Based Payment Arrangement, Including Option Exercised",
        "terseLabel": "Issuance of common stock from employee stock plans"
       }
      }
     },
     "localname": "ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromPaymentsForOtherFinancingActivities": {
     "auth_ref": [
      "r773",
      "r775"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 7.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from financing activities classified as other.",
        "label": "Proceeds from (Payments for) Other Financing Activities",
        "terseLabel": "Other"
       }
      }
     },
     "localname": "ProceedsFromPaymentsForOtherFinancingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromShortTermDebt": {
     "auth_ref": [
      "r52"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow from a borrowing having initial term of repayment within one year or the normal operating cycle, if longer.",
        "label": "Proceeds from Short-Term Debt",
        "terseLabel": "Proceeds from revolving credit facility and short-term debt"
       }
      }
     },
     "localname": "ProceedsFromShortTermDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProfitLoss": {
     "auth_ref": [
      "r261",
      "r287",
      "r290",
      "r302",
      "r309",
      "r318",
      "r326",
      "r327",
      "r362",
      "r367",
      "r373",
      "r376",
      "r390",
      "r439",
      "r440",
      "r441",
      "r442",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r608",
      "r611",
      "r612",
      "r624",
      "r628",
      "r679",
      "r725",
      "r747",
      "r748",
      "r770",
      "r802"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.",
        "label": "Net Income (Loss), Including Portion Attributable to Noncontrolling Interest",
        "terseLabel": "Net income"
       }
      }
     },
     "localname": "ProfitLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment [Abstract]",
        "terseLabel": "Property, Plant and Equipment [Abstract]"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentByTypeAxis": {
     "auth_ref": [
      "r99"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of long-lived, physical assets used to produce goods and services and not intended for resale.",
        "label": "Long-Lived Tangible Asset [Axis]",
        "terseLabel": "Property, Plant and Equipment, Type [Axis]"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentByTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock": {
     "auth_ref": [
      "r103",
      "r696",
      "r697",
      "r698"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections.",
        "label": "Property, Plant and Equipment Disclosure [Text Block]",
        "terseLabel": "Property, Plant and Equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipment"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentFairValueDisclosure": {
     "auth_ref": [
      "r848"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.",
        "label": "Property, Plant, and Equipment, Fair Value Disclosure",
        "terseLabel": "Property, Plant, and Equipment, Fair Value Disclosure"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentFairValueDisclosure",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentGross": {
     "auth_ref": [
      "r97",
      "r266"
     ],
     "calculation": {
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.",
        "label": "Property, Plant and Equipment, Gross",
        "totalLabel": "Total property, plant and equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Property, Plant and Equipment [Line Items]",
        "terseLabel": "Property, Plant and Equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentNet": {
     "auth_ref": [
      "r99",
      "r247",
      "r680",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      },
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.",
        "label": "Property, Plant and Equipment, Net",
        "terseLabel": "Property, plant and equipment",
        "totalLabel": "Property, plant and equipment, net",
        "verboseLabel": "Property, plant and equipment, net"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentPolicyTextBlock": {
     "auth_ref": [
      "r99",
      "r696",
      "r697"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections.",
        "label": "Property, Plant and Equipment, Policy [Policy Text Block]",
        "terseLabel": "Property, Plant, And Equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentTextBlock": {
     "auth_ref": [
      "r99"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.",
        "label": "Property, Plant and Equipment [Table Text Block]",
        "terseLabel": "Property, Plant and Equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentTypeDomain": {
     "auth_ref": [
      "r97"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Listing of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale. Examples include land, buildings, machinery and equipment, and other types of furniture and equipment including, but not limited to, office equipment, furniture and fixtures, and computer equipment and software.",
        "label": "Long-Lived Tangible Asset [Domain]",
        "terseLabel": "Property, Plant and Equipment, Type [Domain]"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentUsefulLife": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.",
        "label": "Property, Plant and Equipment, Useful Life",
        "terseLabel": "Estimated useful lives in years"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentUsefulLife",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_QuarterlyFinancialInformationTextBlock": {
     "auth_ref": [
      "r72",
      "r342"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for quarterly financial data. Includes, but is not limited to, tabular presentation of financial information for fiscal quarters, effect of year-end adjustments, and an explanation of matters or transactions that affect comparability of the information.",
        "label": "Quarterly Financial Information [Text Block]",
        "terseLabel": "Quarterly Information-Unaudited"
       }
      }
     },
     "localname": "QuarterlyFinancialInformationTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/QuarterlyInformationUnaudited"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock": {
     "auth_ref": [
      "r78",
      "r80"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the reconciliation of profit (loss) from reportable segments to the consolidated income (loss) before income tax expense (benefit) and discontinued operations. Includes, but is not limited to, reconciliation after income tax if income tax is allocated to the reportable segment.",
        "label": "Reconciliation of Operating Profit (Loss) from Segments to Consolidated [Table Text Block]",
        "terseLabel": "Reconciliation of Total Segment Profit to Operating Income"
       }
      }
     },
     "localname": "ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_RepaymentsOfDebt": {
     "auth_ref": [
      "r774"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow during the period from the repayment of aggregate short-term and long-term debt. Excludes payment of capital lease obligations.",
        "label": "Repayments of Debt",
        "terseLabel": "Repayments of Debt"
       }
      }
     },
     "localname": "RepaymentsOfDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RepaymentsOfLongTermDebt": {
     "auth_ref": [
      "r54"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 8.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow for debt initially having maturity due after one year or beyond the normal operating cycle, if longer.",
        "label": "Repayments of Long-Term Debt",
        "negatedTerseLabel": "Payments of long-term debt"
       }
      }
     },
     "localname": "RepaymentsOfLongTermDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RepaymentsOfShortTermDebt": {
     "auth_ref": [
      "r54"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow for a borrowing having initial term of repayment within one year or the normal operating cycle, if longer.",
        "label": "Repayments of Short-Term Debt",
        "negatedTerseLabel": "Payments of revolving credit facility and short-term debt"
       }
      }
     },
     "localname": "RepaymentsOfShortTermDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpense": {
     "auth_ref": [
      "r153",
      "r253",
      "r861"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 3.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.",
        "label": "Research and Development Expense",
        "terseLabel": "Engineering, research and development expenses"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpenseMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption in which the reported facts about research and development expense have been included.",
        "label": "Research and Development Expense [Member]",
        "terseLabel": "Engineering, Research and Development Expense"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpenseMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpensePolicy": {
     "auth_ref": [
      "r153"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for costs it has incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process.",
        "label": "Research and Development Expense, Policy [Policy Text Block]",
        "terseLabel": "Engineering,Research and Development Expenses"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpensePolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_RestrictedAssetsDisclosureTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for assets that are restricted in their use, generally by contractual agreements or regulatory requirements. This would include, but not limited to, a description of the restricted assets and the terms of the restriction.",
        "label": "Restricted Assets Disclosure [Text Block]",
        "terseLabel": "Restricted Assets Disclosure"
       }
      }
     },
     "localname": "RestrictedAssetsDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCash"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_RestrictedCash": {
     "auth_ref": [
      "r765",
      "r776",
      "r862",
      "r863"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash restricted as to withdrawal or usage. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits.",
        "label": "Restricted Cash",
        "terseLabel": "Restricted cash"
       }
      }
     },
     "localname": "RestrictedCash",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RestrictedCashCurrent": {
     "auth_ref": [
      "r765",
      "r776"
     ],
     "calculation": {
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
       "weight": 1.0
      },
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 7.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash restricted as to withdrawal or usage, classified as current. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits.",
        "label": "Restricted Cash, Current",
        "terseLabel": "Restricted cash"
       }
      }
     },
     "localname": "RestrictedCashCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashDetails",
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RestrictedStockMember": {
     "auth_ref": [
      "r71"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Stock including a provision that prohibits sale or substantive sale of an equity instrument for a specified period of time or until specified performance conditions are met.",
        "label": "Restricted Stock [Member]",
        "terseLabel": "Restricted Stock"
       }
      }
     },
     "localname": "RestrictedStockMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RetainedEarningsAccumulatedDeficit": {
     "auth_ref": [
      "r14",
      "r117",
      "r245",
      "r691",
      "r693",
      "r753"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of the reporting entity's undistributed earnings or deficit.",
        "label": "Retained Earnings (Accumulated Deficit)",
        "terseLabel": "Retained earnings"
       }
      }
     },
     "localname": "RetainedEarningsAccumulatedDeficit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RetainedEarningsMember": {
     "auth_ref": [
      "r257",
      "r315",
      "r316",
      "r317",
      "r319",
      "r325",
      "r327",
      "r391",
      "r557",
      "r558",
      "r559",
      "r587",
      "r588",
      "r622",
      "r688",
      "r690"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of the reporting entity's undistributed earnings or deficit.",
        "label": "Retained Earnings [Member]",
        "terseLabel": "Retained earnings (deficit)"
       }
      }
     },
     "localname": "RetainedEarningsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue from Contract with Customer [Abstract]",
        "terseLabel": "Revenue from Contract with Customer [Abstract]"
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax": {
     "auth_ref": [
      "r353",
      "r354",
      "r366",
      "r371",
      "r372",
      "r378",
      "r379",
      "r382",
      "r502",
      "r503",
      "r672"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_GrossProfit",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.",
        "label": "Revenue from Contract with Customer, Excluding Assessed Tax",
        "terseLabel": "Net sales",
        "verboseLabel": "Total net sales"
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerExcludingAssessedTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/QuarterlyInformationDetail",
      "http://www.entegris.com/role/SegmentInformationSalesfromLargestCustomerDetails",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerTextBlock": {
     "auth_ref": [
      "r494",
      "r495",
      "r496",
      "r497",
      "r498",
      "r499",
      "r500",
      "r501",
      "r506",
      "r507"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure of revenue from contract with customer to transfer good or service and to transfer nonfinancial asset. Includes, but is not limited to, disaggregation of revenue, credit loss recognized from contract with customer, judgment and change in judgment related to contract with customer, and asset recognized from cost incurred to obtain or fulfill contract with customer. Excludes insurance and lease contracts.",
        "label": "Revenue from Contract with Customer [Text Block]",
        "terseLabel": "Revenue from Contract with Customer"
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Revenues"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_RevenueRecognitionPolicyTextBlock": {
     "auth_ref": [
      "r722",
      "r723"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for revenue. Includes revenue from contract with customer and from other sources.",
        "label": "Revenue [Policy Text Block]",
        "terseLabel": "Revenue Recognition"
       }
      }
     },
     "localname": "RevenueRecognitionPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_RevolvingCreditFacilityMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Arrangement in which loan proceeds can continuously be obtained following repayments, but the total amount borrowed cannot exceed a specified maximum amount.",
        "label": "Revolving Credit Facility [Member]",
        "terseLabel": "Revolving Credit Facility"
       }
      }
     },
     "localname": "RevolvingCreditFacilityMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability": {
     "auth_ref": [
      "r654",
      "r752"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in right-of-use asset obtained in exchange for operating lease liability.",
        "label": "Right-of-Use Asset Obtained in Exchange for Operating Lease Liability",
        "terseLabel": "Right-of-Use Asset obtained"
       }
      }
     },
     "localname": "RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/LeaseCommitmentsLeasesOtherInformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock": {
     "auth_ref": [
      "r28"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the various types of trade accounts and notes receivable and for each the gross carrying value, allowance, and net carrying value as of the balance sheet date. Presentation is categorized by current, noncurrent and unclassified receivables.",
        "label": "Schedule of Accounts, Notes, Loans and Financing Receivable [Table Text Block]",
        "terseLabel": "Trade Accounts and Notes Receivable"
       }
      }
     },
     "localname": "ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/TradeAccountsandNotesReceivableTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfAcquiredFiniteLivedIntangibleAssetsByMajorClassTextBlock": {
     "auth_ref": [
      "r87"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the characteristics, including initial carrying value, residual amount, weighted average useful life, of finite-lived intangible assets acquired during the period by major class. A major class is composed of intangible assets that can be grouped together because they are similar, either by nature or by their use in the operations of the company.",
        "label": "Schedule of Acquired Finite-Lived Intangible Assets by Major Class [Table Text Block]",
        "terseLabel": "Schedule of Acquired Finite-Lived Intangible Assets by Major Class"
       }
      }
     },
     "localname": "ScheduleOfAcquiredFiniteLivedIntangibleAssetsByMajorClassTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTextBlock": {
     "auth_ref": [
      "r71"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) in the future that were not included in the computation of diluted EPS because to do so would increase EPS amounts or decrease loss per share amounts for the period presented, by antidilutive securities.",
        "label": "Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table Text Block]",
        "terseLabel": "Shares Excluded Underlying Stock Based Awards from Calculations of Diluted EPS"
       }
      }
     },
     "localname": "ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EarningPerShareEPSTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfAssetRetirementObligationsTableTextBlock": {
     "auth_ref": [
      "r104"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the carrying amount of a liability for asset retirement obligations.",
        "label": "Schedule of Asset Retirement Obligations [Table Text Block]",
        "terseLabel": "Schedule of Asset Retirement Obligations"
       }
      }
     },
     "localname": "ScheduleOfAssetRetirementObligationsTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AssetRetirementObligationsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionEquityInterestIssuedOrIssuableTextBlock": {
     "auth_ref": [
      "r178"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the equity interest issued or issuable in a business acquisition (or series of individually immaterial business acquisitions) planned, initiated, or completed during the period.",
        "label": "Schedule of Business Acquisitions by Acquisition, Equity Interest Issued or Issuable [Table Text Block]",
        "terseLabel": "Schedule of Business Acquisitions by Acquisition, Equity Interest Issued or Issuable"
       }
      }
     },
     "localname": "ScheduleOfBusinessAcquisitionsByAcquisitionEquityInterestIssuedOrIssuableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable": {
     "auth_ref": [
      "r169",
      "r170",
      "r606"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule reflecting each material business combination (or series of individually immaterial business combinations) completed during the period, including background, timing, and recognized assets and liabilities.",
        "label": "Schedule of Business Acquisitions, by Acquisition [Table]",
        "terseLabel": "Schedule of Business Acquisitions, by Acquisition [Table]"
       }
      }
     },
     "localname": "ScheduleOfBusinessAcquisitionsByAcquisitionTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables",
      "http://www.entegris.com/role/CMCAcquisitionDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTextBlock": {
     "auth_ref": [
      "r169",
      "r170"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of a material business combination completed during the period, including background, timing, and recognized assets and liabilities. This table does not include leveraged buyouts.",
        "label": "Schedule of Business Acquisitions, by Acquisition [Table Text Block]",
        "terseLabel": "Schedule of Business Acquisitions, by Acquisition"
       }
      }
     },
     "localname": "ScheduleOfBusinessAcquisitionsByAcquisitionTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BusinessCombinationsandAssetAcquisitionsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of information pertaining to carrying amount and estimated fair value of short-term and long-term debt instruments or arrangements, including but not limited to, identification of terms, features, and collateral requirements.",
        "label": "Schedule of Carrying Values and Estimated Fair Values of Debt Instruments [Table Text Block]",
        "terseLabel": "Schedule of Carrying Values and Estimated Fair Values of Debt Instruments"
       }
      }
     },
     "localname": "ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/FairValueMeasuresandDisclosuresTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock": {
     "auth_ref": [
      "r195"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of gain (loss) on derivative and nonderivative instruments designated and qualifying as cash flow hedge recorded in accumulated other comprehensive income (AOCI) and reclassified into earnings.",
        "label": "Schedule of Cash Flow Hedges Included in Accumulated Other Comprehensive Income (Loss) [Table Text Block]",
        "terseLabel": "Schedule of Cash Flow Hedges Included in Accumulated Other Comprehensive Income (Loss)"
       }
      }
     },
     "localname": "ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock": {
     "auth_ref": [
      "r145"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of cost recognized for award under share-based payment arrangement by plan. Includes, but is not limited to, related tax benefit.",
        "label": "Share-Based Payment Arrangement, Cost by Plan [Table Text Block]",
        "terseLabel": "Summary of Allocation of Share Based Compensation Expense"
       }
      }
     },
     "localname": "ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock": {
     "auth_ref": [
      "r164"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of income tax expense attributable to continuing operations for each year presented including, but not limited to: current tax expense (benefit), deferred tax expense (benefit), investment tax credits, government grants, the benefits of operating loss carryforwards, tax expense that results from allocating certain tax benefits either directly to contributed capital or to reduce goodwill or other noncurrent intangible assets of an acquired entity, adjustments of a deferred tax liability or asset for enacted changes in tax laws or rates or a change in the tax status of the entity, and adjustments of the beginning-of-the-year balances of a valuation allowance because of a change in circumstances that causes a change in judgment about the realizability of the related deferred tax asset in future years.",
        "label": "Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]",
        "terseLabel": "Components of Income Tax Expense"
       }
      }
     },
     "localname": "ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfDebtTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of information pertaining to short-term and long-debt instruments or arrangements, including but not limited to identification of terms, features, collateral requirements and other information necessary to a fair presentation.",
        "label": "Schedule of Debt [Table Text Block]",
        "terseLabel": "Schedule of Debt"
       }
      }
     },
     "localname": "ScheduleOfDebtTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock": {
     "auth_ref": [
      "r160"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of net deferred tax asset or liability recognized in an entity's statement of financial position, including the following: the total of all deferred tax liabilities, the total of all deferred tax assets, the total valuation allowance recognized for deferred tax assets.",
        "label": "Schedule of Deferred Tax Assets and Liabilities [Table Text Block]",
        "terseLabel": "Deferred Tax Assets And Deferred Tax Liabilities"
       }
      }
     },
     "localname": "ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock": {
     "auth_ref": [
      "r128",
      "r129",
      "r130",
      "r131",
      "r132"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of one or more of the entity's defined benefit pension plans or one or more other defined benefit postretirement plans, separately for pension plans and other postretirement benefit plans including the entity's schedule of fair value of plan assets for defined benefit or other postretirement plans.",
        "label": "Schedule of Defined Benefit Plans Disclosures [Table Text Block]",
        "terseLabel": "Schedule of Defined Benefit Plans Disclosures"
       }
      }
     },
     "localname": "ScheduleOfDefinedBenefitPlansDisclosuresTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock": {
     "auth_ref": [
      "r784"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.",
        "label": "Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]",
        "terseLabel": "Reconcilation of Share Amount Used in Computaion of Basic and Diluted Earnings Per Share"
       }
      }
     },
     "localname": "ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EarningPerShareEPSTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock": {
     "auth_ref": [
      "r155"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the reconciliation using percentage or dollar amounts of the reported amount of income tax expense attributable to continuing operations for the year to the amount of income tax expense that would result from applying domestic federal statutory tax rates to pretax income from continuing operations.",
        "label": "Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]",
        "terseLabel": "Reconciliation of Income Tax Expense With Expected Amounts Based Upon Statutory Federal Tax Rates"
       }
      }
     },
     "localname": "ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable": {
     "auth_ref": [
      "r145",
      "r148"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about amount recognized for award under share-based payment arrangement. Includes, but is not limited to, amount expensed in statement of income or comprehensive income, amount capitalized in statement of financial position, and corresponding reporting line item in financial statements.",
        "label": "Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Table]",
        "terseLabel": "Share-based Payment Arrangement, Expensed and Capitalized, Amount [Table]"
       }
      }
     },
     "localname": "ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfEntityWideDisclosureOnGeographicAreasLongLivedAssetsInIndividualForeignCountriesByCountryTextBlock": {
     "auth_ref": [
      "r82"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the names of foreign countries in which material long-lived assets other than financial instruments, long-term customer relationships of a financial institution, mortgage and other servicing rights, deferred policy acquisition costs, and deferred tax assets are located, and amount of such long-lived assets located in that country or foreign geographic area.",
        "label": "Schedule of Disclosure on Geographic Areas, Long-Lived Assets in Individual Foreign Countries by Country [Table Text Block]",
        "terseLabel": "Summary of Property, Plant and Equipment Attributed to Significant Countries"
       }
      }
     },
     "localname": "ScheduleOfEntityWideDisclosureOnGeographicAreasLongLivedAssetsInIndividualForeignCountriesByCountryTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable": {
     "auth_ref": [
      "r83"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure about the extent of the entity's reliance on its major customers.",
        "label": "Schedule of Revenue by Major Customers, by Reporting Segments [Table]",
        "terseLabel": "Schedule of Revenue by Major Customers, by Reporting Segments [Table]"
       }
      }
     },
     "localname": "ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSalesfromLargestCustomerDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock": {
     "auth_ref": [
      "r127"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of benefits expected to be paid by pension plans and/or other employee benefit plans in each of the next five fiscal years and in the aggregate for the five fiscal years thereafter.",
        "label": "Schedule of Expected Benefit Payments [Table Text Block]",
        "terseLabel": "Expected Contribution And Benefit Payments"
       }
      }
     },
     "localname": "ScheduleOfExpectedBenefitPaymentsTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/BenefitPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable": {
     "auth_ref": [
      "r87",
      "r89",
      "r673"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.",
        "label": "Schedule of Finite-Lived Intangible Assets [Table]",
        "terseLabel": "Schedule of Finite-Lived Intangible Assets [Table]"
       }
      }
     },
     "localname": "ScheduleOfFiniteLivedIntangibleAssetsTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfGoodwillTable": {
     "auth_ref": [
      "r402",
      "r403",
      "r404",
      "r405",
      "r406",
      "r407",
      "r408",
      "r409",
      "r410",
      "r411",
      "r412",
      "r729"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule of goodwill and the changes during the year due to acquisition, sale, impairment or for other reasons.",
        "label": "Schedule of Goodwill [Table]",
        "terseLabel": "Schedule of Goodwill [Table]"
       }
      }
     },
     "localname": "ScheduleOfGoodwillTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfGoodwillTextBlock": {
     "auth_ref": [
      "r729",
      "r789",
      "r790",
      "r791",
      "r792",
      "r793",
      "r794",
      "r795",
      "r796",
      "r797",
      "r798",
      "r799"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of goodwill by reportable segment and in total which includes a rollforward schedule.",
        "label": "Schedule of Goodwill [Table Text Block]",
        "terseLabel": "Schedule of Goodwill"
       }
      }
     },
     "localname": "ScheduleOfGoodwillTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock": {
     "auth_ref": [
      "r779"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of income before income tax between domestic and foreign jurisdictions.",
        "label": "Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]",
        "terseLabel": "Income (Loss) Before Income Taxes"
       }
      }
     },
     "localname": "ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfInventoryCurrentTableTextBlock": {
     "auth_ref": [
      "r4",
      "r16",
      "r17",
      "r18"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.",
        "label": "Schedule of Inventory, Current [Table Text Block]",
        "terseLabel": "Inventories"
       }
      }
     },
     "localname": "ScheduleOfInventoryCurrentTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/InventoriesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock": {
     "auth_ref": [
      "r106"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of maturity and sinking fund requirement for long-term debt.",
        "label": "Schedule of Maturities of Long-Term Debt [Table Text Block]",
        "terseLabel": "Schedule of Maturities of Long-term Debt"
       }
      }
     },
     "localname": "ScheduleOfMaturitiesOfLongTermDebtTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DebtTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of non-operating income or non-operating expense that may include amounts earned from dividends, interest on securities, gains (losses) on securities sold, equity earnings of unconsolidated affiliates, net gain (loss) on sales of business, interest expense and other miscellaneous income or expense items.",
        "label": "Schedule of Other Nonoperating Income (Expense) [Table Text Block]",
        "terseLabel": "Schedule of Other Nonoperating Income (Expense) [Table Text Block]"
       }
      }
     },
     "localname": "ScheduleOfOtherNonoperatingIncomeExpenseTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/OtherIncomeExpenseNetTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfOtherOperatingCostAndExpenseByComponentTextBlock": {
     "auth_ref": [
      "r44"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of each detailed component of other operating costs and expenses that are applicable to sales and revenues, but not included in the cost of sales in the income statement.",
        "label": "Schedule of Other Operating Cost and Expense, by Component [Table Text Block]",
        "terseLabel": "Schedule of Other Operating Cost and Expense, by Component"
       }
      }
     },
     "localname": "ScheduleOfOtherOperatingCostAndExpenseByComponentTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfPropertyPlantAndEquipmentTable": {
     "auth_ref": [
      "r99"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.",
        "label": "Property, Plant and Equipment [Table]",
        "terseLabel": "Schedule of Property, Plant and Equipment [Table]"
       }
      }
     },
     "localname": "ScheduleOfPropertyPlantAndEquipmentTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfQuarterlyFinancialInformationTableTextBlock": {
     "auth_ref": [
      "r341"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of quarterly financial data. Includes, but is not limited to, financial information for fiscal quarters, cumulative effect of a change in accounting principle and earnings per share data.",
        "label": "Quarterly Financial Information [Table Text Block]",
        "terseLabel": "Quartely Information"
       }
      }
     },
     "localname": "ScheduleOfQuarterlyFinancialInformationTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/QuarterlyInformationUnauditedTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfRestrictedCashAndCashEquivalentsTextBlock": {
     "auth_ref": [
      "r69",
      "r221",
      "r244"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of cash and cash equivalents restricted as to withdrawal or usage.",
        "label": "Restrictions on Cash and Cash Equivalents [Table Text Block]",
        "terseLabel": "Restrictions on Cash and Cash Equivalents"
       }
      }
     },
     "localname": "ScheduleOfRestrictedCashAndCashEquivalentsTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CashCashEquivalentsandRestrictedCashTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock": {
     "auth_ref": [
      "r41",
      "r81"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the names of foreign countries from which revenue is material and the amount of revenue from external customers attributed to those countries. An entity may also provide subtotals of geographic information about groups of countries.",
        "label": "Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]",
        "terseLabel": "Summary of Total Net Sales to External Customers"
       }
      }
     },
     "localname": "ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable": {
     "auth_ref": [
      "r76",
      "r77",
      "r79",
      "r85"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A table disclosing the profit or loss and total assets for each reportable segment of the entity. An entity discloses certain information on each reportable segment if the amounts (a) are included in the measure of segment profit or loss reviewed by the chief operating decision maker or (b) are otherwise regularly provided to the chief operating decision maker, even if not included in that measure of segment profit or loss.",
        "label": "Schedule of Segment Reporting Information, by Segment [Table]",
        "terseLabel": "Schedule of Segment Reporting Information, by Segment"
       }
      }
     },
     "localname": "ScheduleOfSegmentReportingInformationBySegmentTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock": {
     "auth_ref": [
      "r76",
      "r77",
      "r79",
      "r85"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the profit or loss and total assets for each reportable segment. An entity discloses certain information on each reportable segment if the amounts (a) are included in the measure of segment profit or loss reviewed by the chief operating decision maker or (b) are otherwise regularly provided to the chief operating decision maker, even if not included in that measure of segment profit or loss.",
        "label": "Schedule of Segment Reporting Information, by Segment [Table Text Block]",
        "terseLabel": "Summary of Financial Information for Reportable Segments"
       }
      }
     },
     "localname": "ScheduleOfSegmentReportingInformationBySegmentTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationRestrictedStockUnitsAwardActivityTableTextBlock": {
     "auth_ref": [
      "r134"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the number and weighted-average grant date fair value for restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock units that were granted, vested, or forfeited during the year.",
        "label": "Share-Based Payment Arrangement, Restricted Stock Unit, Activity [Table Text Block]",
        "terseLabel": "Summary of Restricted Stock Activity"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationRestrictedStockUnitsAwardActivityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable": {
     "auth_ref": [
      "r146"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Details comprising a table providing supplementary information on outstanding and exercisable share awards as of the balance sheet date which stratifies outstanding options by ranges of exercise prices.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range [Table]",
        "terseLabel": "Share-based Payment Arrangement, Option, Exercise Price Range [Table]"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock": {
     "auth_ref": [
      "r146"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of option exercise prices, by grouped ranges, including the upper and lower limits of the price range, the number of shares under option, weighted average exercise price and remaining contractual option terms.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range [Table Text Block]",
        "terseLabel": "Summary of Options Outstanding"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock": {
     "auth_ref": [
      "r134",
      "r139",
      "r140"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure for stock option plans. Includes, but is not limited to, outstanding awards at beginning and end of year, grants, exercises, forfeitures, and weighted-average grant date fair value.",
        "label": "Share-Based Payment Arrangement, Option, Activity [Table Text Block]",
        "terseLabel": "Summary of Option Activity"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock": {
     "auth_ref": [
      "r143"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the significant assumptions used during the year to estimate the fair value of stock options, including, but not limited to: (a) expected term of share options and similar instruments, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.",
        "label": "Schedule of Share-Based Payment Award, Stock Options, Valuation Assumptions [Table Text Block]",
        "terseLabel": "Weighted Average Assumptions Used In Valuation And Resulting Weighted Average Fair Value Per Option Granted"
       }
      }
     },
     "localname": "ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock": {
     "auth_ref": [
      "r89"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the amount of amortization expense expected to be recorded in succeeding fiscal years for finite-lived intangible assets.",
        "label": "Schedule of Finite-Lived Intangible Assets, Future Amortization Expense [Table Text Block]",
        "terseLabel": "Estimated Future Amortization Expense"
       }
      }
     },
     "localname": "ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SecuredDebtMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Collateralized debt obligation backed by, for example, but not limited to, pledge, mortgage or other lien on the entity's assets.",
        "label": "Secured Debt [Member]",
        "terseLabel": "Senior secured term loan facility due 2025"
       }
      }
     },
     "localname": "SecuredDebtMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/CMCMaterialsAcquistionFinancingDebtDetails",
      "http://www.entegris.com/role/DebtSummaryTableDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SegmentDomain": {
     "auth_ref": [
      "r350",
      "r353",
      "r354",
      "r355",
      "r356",
      "r357",
      "r358",
      "r359",
      "r360",
      "r361",
      "r362",
      "r363",
      "r364",
      "r366",
      "r367",
      "r368",
      "r369",
      "r370",
      "r371",
      "r372",
      "r373",
      "r374",
      "r376",
      "r382",
      "r402",
      "r403",
      "r404",
      "r405",
      "r406",
      "r407",
      "r408",
      "r409",
      "r410",
      "r431",
      "r432",
      "r729",
      "r864"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Components of an entity that engage in business activities from which they may earn revenue and incur expenses, including transactions with other components of the same entity.",
        "label": "Segments [Domain]",
        "terseLabel": "Segments"
       }
      }
     },
     "localname": "SegmentDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SegmentReportingAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Segment Reporting [Abstract]",
        "terseLabel": "Segment Reporting [Abstract]"
       }
      }
     },
     "localname": "SegmentReportingAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_SegmentReportingDisclosureTextBlock": {
     "auth_ref": [
      "r350",
      "r351",
      "r352",
      "r362",
      "r365",
      "r370",
      "r374",
      "r375",
      "r376",
      "r377",
      "r378",
      "r381",
      "r382",
      "r383"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.",
        "label": "Segment Reporting Disclosure [Text Block]",
        "terseLabel": "Segment Information"
       }
      }
     },
     "localname": "SegmentReportingDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformation"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SegmentReportingInformationLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Segment Reporting Information [Line Items]",
        "terseLabel": "Segment Reporting Information"
       }
      }
     },
     "localname": "SegmentReportingInformationLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SegmentInformationSummaryofPropertyPlantandEquipmentAttributedtoSignificantCountriesDetail",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SelectedQuarterlyFinancialInformationAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Selected Quarterly Financial Information [Abstract]",
        "terseLabel": "Selected Quarterly Financial Information [Abstract]"
       }
      }
     },
     "localname": "SelectedQuarterlyFinancialInformationAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_SellingGeneralAndAdministrativeExpense": {
     "auth_ref": [
      "r45"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate total costs related to selling a firm's product and services, as well as all other general and administrative expenses. Direct selling expenses (for example, credit, warranty, and advertising) are expenses that can be directly linked to the sale of specific products. Indirect selling expenses are expenses that cannot be directly linked to the sale of specific products, for example telephone expenses, Internet, and postal charges. General and administrative expenses include salaries of non-sales personnel, rent, utilities, communication, etc.",
        "label": "Selling, General and Administrative Expense",
        "terseLabel": "Selling, general and administrative expenses"
       }
      }
     },
     "localname": "SellingGeneralAndAdministrativeExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_SellingGeneralAndAdministrativeExpensesMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing selling, general and administrative expense.",
        "label": "Selling, General and Administrative Expenses [Member]",
        "terseLabel": "Selling, General And Administrative Expenses"
       }
      }
     },
     "localname": "SellingGeneralAndAdministrativeExpensesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofAllocationofShareBasedCompensationExpenseDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ShareBasedCompensation": {
     "auth_ref": [
      "r60"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of noncash expense for share-based payment arrangement.",
        "label": "Share-Based Payment Arrangement, Noncash Expense",
        "terseLabel": "Share-based compensation expense"
       }
      }
     },
     "localname": "ShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1": {
     "auth_ref": [
      "r746"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Award Vesting Period",
        "terseLabel": "Vesting period, in years"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardDiscountFromMarketPricePurchaseDate": {
     "auth_ref": [
      "r146"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Discount rate from fair value on purchase date that participants pay for shares.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Discount from Market Price, Purchase Date",
        "terseLabel": "Rate of discount from the fair market value"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardDiscountFromMarketPricePurchaseDate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod": {
     "auth_ref": [
      "r543"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Forfeited in Period",
        "negatedLabel": "Number of shares, Forfeited"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r543"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value",
        "terseLabel": "Weighted average grant date fair value, Forfeited"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod": {
     "auth_ref": [
      "r541"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period",
        "terseLabel": "Number of shares, Granted"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r541"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value",
        "terseLabel": "Weighted average grant date fair value, Granted"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber": {
     "auth_ref": [
      "r538",
      "r539"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number",
        "periodEndLabel": "Number of shares, Unvested, end of year",
        "periodStartLabel": "Number of shares, Unvested, beginning of year"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]",
        "terseLabel": "Number of shares"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r538",
      "r539"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Per share or unit weighted-average fair value of nonvested award under share-based payment arrangement. Excludes share and unit options.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value",
        "periodEndLabel": "Weighted average grant date fair value, Unvested, end of year",
        "periodStartLabel": "Weighted average grant date fair value, Unvested, beginning of year"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Abstract]",
        "terseLabel": "Weighted average grant date fair value, Unvested"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod": {
     "auth_ref": [
      "r542"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Vested in Period",
        "negatedLabel": "Number of shares, Vested"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r542"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value",
        "terseLabel": "Weighted average grant date fair value, Vested"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofRestrictedStockActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate": {
     "auth_ref": [
      "r552"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Expected Dividend Rate",
        "terseLabel": "Dividend yield"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityWeightedAverageAssumptionsUsedinValuationDetail"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate": {
     "auth_ref": [
      "r553"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The risk-free interest rate assumption that is used in valuing an option on its own shares.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Risk Free Interest Rate",
        "terseLabel": "Risk-free interest rate"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityWeightedAverageAssumptionsUsedinValuationDetail"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate": {
     "auth_ref": [
      "r551"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Rate of weighted-average expected volatility for award under share-based payment arrangement.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Weighted Average Volatility Rate",
        "terseLabel": "Volatility"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityWeightedAverageAssumptionsUsedinValuationDetail"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsGranted": {
     "auth_ref": [
      "r137"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Net number of non-option equity instruments granted to participants.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Non-Option Equity Instruments, Granted",
        "terseLabel": "Share-Based Compensation Arrangement by Share-Based Payment Award, Non-Option Equity Instruments, Granted"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsGranted",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant": {
     "auth_ref": [
      "r146"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Number of Shares Available for Grant",
        "terseLabel": "Shares available for future grants"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber": {
     "auth_ref": [
      "r532"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercisable, Number",
        "terseLabel": "Number of shares, Options exercisable, end of year"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice": {
     "auth_ref": [
      "r532"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted-average price as of the balance sheet date at which grantees can acquire the shares reserved for issuance on vested portions of options outstanding and currently exercisable under the stock option plan.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercisable, Weighted Average Exercise Price",
        "terseLabel": "Weighted average exercise price, Options exercisable, end of year"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue": {
     "auth_ref": [
      "r545"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercises in Period, Intrinsic Value",
        "terseLabel": "Total pre-tax intrinsic value of stock options exercised"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod": {
     "auth_ref": [
      "r817"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For presentations that combine terminations, the number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan or that expired.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Forfeitures and Expirations in Period",
        "negatedLabel": "Number of shares, Expired or Forfeited"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice": {
     "auth_ref": [
      "r817"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average price of options that were either forfeited or expired.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Forfeitures and Expirations in Period, Weighted Average Exercise Price",
        "terseLabel": "Weighted average exercise price, Expired or Forfeited"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod": {
     "auth_ref": [
      "r818"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Net number of share options (or share units) granted during the period.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Grants in Period, Net of Forfeitures",
        "terseLabel": "Number of shares, Granted"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r544"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average grant-date fair value of options granted during the reporting period as calculated by applying the disclosed option pricing methodology.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value",
        "terseLabel": "Weighted average fair value per option"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityWeightedAverageAssumptionsUsedinValuationDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue": {
     "auth_ref": [
      "r146"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount by which the current fair value of the underlying stock exceeds the exercise price of options outstanding.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Intrinsic Value",
        "terseLabel": "Intrinsic value of stock options outstanding"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber": {
     "auth_ref": [
      "r530",
      "r531"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of options outstanding, including both vested and non-vested options.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Number",
        "periodEndLabel": "Number of shares, Options outstanding, end of year",
        "periodStartLabel": "Number of shares, Options outstanding, beginning of year"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding [Roll Forward]",
        "terseLabel": "Number of shares"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice": {
     "auth_ref": [
      "r530",
      "r531"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Weighted Average Exercise Price",
        "periodEndLabel": "Weighted average exercise price, Options outstanding, end of year",
        "periodStartLabel": "Weighted average exercise price, Options outstanding, beginning of year"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Abstract]",
        "terseLabel": "Weighted average exercise price"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardPerShareWeightedAveragePriceOfSharesPurchased": {
     "auth_ref": [
      "r146"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Per share weighted-average price paid for shares purchased on open market for issuance under share-based payment arrangement.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Per Share Weighted Average Price of Shares Purchased",
        "terseLabel": "Weighted-average price per share paid by the employees"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardPerShareWeightedAveragePriceOfSharesPurchased",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain": {
     "auth_ref": [
      "r526",
      "r527",
      "r528",
      "r530",
      "r531",
      "r532",
      "r533",
      "r534",
      "r535",
      "r536",
      "r537",
      "r538",
      "r539",
      "r540",
      "r541",
      "r542",
      "r543",
      "r544",
      "r545",
      "r546",
      "r547",
      "r550",
      "r551",
      "r552",
      "r553",
      "r554"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Award under share-based payment arrangement.",
        "label": "Award Type [Domain]",
        "terseLabel": "Award Type"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice": {
     "auth_ref": [
      "r535"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average price at which option holders acquired shares when converting their stock options into shares.",
        "label": "Share-Based Compensation Arrangements by Share-Based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price",
        "terseLabel": "Weighted average exercise price, Exercised"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice": {
     "auth_ref": [
      "r534"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average per share amount at which grantees can acquire shares of common stock by exercise of options.",
        "label": "Share-Based Compensation Arrangements by Share-Based Payment Award, Options, Grants in Period, Weighted Average Exercise Price",
        "terseLabel": "Weighted average exercise price, Granted"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy": {
     "auth_ref": [
      "r529",
      "r548",
      "r549",
      "r550",
      "r551",
      "r554",
      "r560",
      "r561"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for award under share-based payment arrangement. Includes, but is not limited to, methodology and assumption used in measuring cost.",
        "label": "Share-Based Payment Arrangement [Policy Text Block]",
        "terseLabel": "Share-Based Compensation"
       }
      }
     },
     "localname": "ShareBasedCompensationOptionAndIncentivePlansPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis": {
     "auth_ref": [
      "r142"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by range of option prices pertaining to options granted.",
        "label": "Exercise Price Range [Axis]",
        "terseLabel": "Exercise Price Range"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain": {
     "auth_ref": [
      "r144"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Supplementary information on outstanding and exercisable share awards as of the balance sheet date which stratifies outstanding options by ranges of exercise prices.",
        "label": "Exercise Price Range [Domain]",
        "terseLabel": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range [Line Items]",
        "terseLabel": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit": {
     "auth_ref": [
      "r144"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The floor of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range, Lower Range Limit",
        "terseLabel": "Range of exercise prices, minimum"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions": {
     "auth_ref": [
      "r138"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of shares reserved for issuance pertaining to the outstanding exercisable stock options as of the balance sheet date in the customized range of exercise prices for which the market and performance vesting condition has been satisfied.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range, Shares Exercisable",
        "terseLabel": "Number of Options exercisable"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions": {
     "auth_ref": [
      "r135"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of shares reserved for issuance pertaining to the outstanding stock options as of the balance sheet date for all option plans in the customized range of exercise prices.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range, Shares Outstanding",
        "terseLabel": "Number of Options outstanding"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit": {
     "auth_ref": [
      "r144"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The ceiling of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range, Upper Range Limit",
        "terseLabel": "Range of exercise prices, maximum"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1": {
     "auth_ref": [
      "r550"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Expected Term",
        "terseLabel": "Expected life (years)"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityWeightedAverageAssumptionsUsedinValuationDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1": {
     "auth_ref": [
      "r146"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of difference between fair value of the underlying shares reserved for issuance and exercise price of vested portions of options outstanding and currently exercisable.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercisable, Intrinsic Value",
        "terseLabel": "Intrinsic value of stock options exercisable"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1": {
     "auth_ref": [
      "r146"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining contractual term for vested portions of options outstanding and currently exercisable or convertible, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term",
        "terseLabel": "Weighted average remaining contractual term option exercisable"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2": {
     "auth_ref": [
      "r141"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining contractual term for option awards outstanding, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term",
        "terseLabel": "Weighted average remaining contractual term option outstanding"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1": {
     "auth_ref": [
      "r136"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average exercise price as of the balance sheet date for those equity-based payment arrangements exercisable and outstanding.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range, Exercisable, Weighted Average Exercise Price",
        "terseLabel": "Options exercisable, Weighted average exercise price"
       }
      }
     },
     "localname": "SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1": {
     "auth_ref": [
      "r135"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average price as of the balance sheet date at which grantees could acquire the underlying shares with respect to all outstanding stock options which are in the customized range of exercise prices.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range, Outstanding, Weighted Average Exercise Price",
        "terseLabel": "Options outstanding, Weighted-average exercise price"
       }
      }
     },
     "localname": "SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2": {
     "auth_ref": [
      "r141"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining contractual term of outstanding stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Share-Based Payment Arrangement, Option, Exercise Price Range, Outstanding, Weighted Average Remaining Contractual Term",
        "terseLabel": "Options outstanding, Weighted average remaining life in years"
       }
      }
     },
     "localname": "SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionsOutstandingDetail"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharesOutstanding": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares issued which are neither cancelled nor held in the treasury.",
        "label": "Shares, Outstanding",
        "periodEndLabel": "Balance (in shares)",
        "periodStartLabel": "Balance (in shares)"
       }
      }
     },
     "localname": "SharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShortMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates the sale of a borrowed security or written option.",
        "label": "Short [Member]",
        "terseLabel": "Short"
       }
      }
     },
     "localname": "ShortMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SignificantAccountingPoliciesTextBlock": {
     "auth_ref": [
      "r70",
      "r306"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for all significant accounting policies of the reporting entity.",
        "label": "Significant Accounting Policies [Text Block]",
        "terseLabel": "Summary of Significant Accounting Policies"
       }
      }
     },
     "localname": "SignificantAccountingPoliciesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SignificantChangeInUnrecognizedTaxBenefitsIsReasonablyPossibleAmountOfUnrecordedBenefit": {
     "auth_ref": [
      "r156"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of the unrecognized tax benefit of a position taken for which it is reasonably possible that the total amount thereof will significantly increase or decrease within twelve months of the balance sheet date.",
        "label": "Significant Change in Unrecognized Tax Benefits is Reasonably Possible, Amount of Unrecorded Benefit",
        "terseLabel": "Significant Change in Unrecognized Tax Benefits is Reasonably Possible, Amount of Unrecorded Benefit"
       }
      }
     },
     "localname": "SignificantChangeInUnrecognizedTaxBenefitsIsReasonablyPossibleAmountOfUnrecordedBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StateAndLocalJurisdictionMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designated tax department of a state or local government entitled to levy and collect income taxes from the entity.",
        "label": "State and Local Jurisdiction [Member]",
        "terseLabel": "State and Local Jurisdiction"
       }
      }
     },
     "localname": "StateAndLocalJurisdictionMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_StatementBusinessSegmentsAxis": {
     "auth_ref": [
      "r259",
      "r350",
      "r353",
      "r354",
      "r355",
      "r356",
      "r357",
      "r358",
      "r359",
      "r360",
      "r361",
      "r362",
      "r363",
      "r364",
      "r366",
      "r367",
      "r368",
      "r369",
      "r370",
      "r371",
      "r372",
      "r373",
      "r374",
      "r376",
      "r382",
      "r402",
      "r403",
      "r404",
      "r405",
      "r406",
      "r407",
      "r408",
      "r409",
      "r410",
      "r419",
      "r431",
      "r432",
      "r729",
      "r864"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by business segments.",
        "label": "Segments [Axis]",
        "terseLabel": "Segments"
       }
      }
     },
     "localname": "StatementBusinessSegmentsAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/GoodwillandIntangibleAssetsGoodwillRollforwardDetails",
      "http://www.entegris.com/role/SegmentInformationSummaryofTotalNetSalestoExternalCustomersDetail",
      "http://www.entegris.com/role/SegmentinformationSummaryofFinancialInformationforReportableSegmentsDetail"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementEquityComponentsAxis": {
     "auth_ref": [
      "r27",
      "r112",
      "r257",
      "r293",
      "r294",
      "r295",
      "r315",
      "r316",
      "r317",
      "r319",
      "r325",
      "r327",
      "r343",
      "r391",
      "r491",
      "r557",
      "r558",
      "r559",
      "r587",
      "r588",
      "r622",
      "r634",
      "r635",
      "r636",
      "r637",
      "r638",
      "r640",
      "r659",
      "r688",
      "r689",
      "r690"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by component of equity.",
        "label": "Equity Components [Axis]",
        "terseLabel": "Equity Components"
       }
      }
     },
     "localname": "StatementEquityComponentsAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Statement [Line Items]",
        "terseLabel": "Statement [Line Items]"
       }
      }
     },
     "localname": "StatementLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/SegmentInformationSalesfromLargestCustomerDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfCashFlowsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statement of Cash Flows [Abstract]",
        "terseLabel": "Statement of Cash Flows [Abstract]"
       }
      }
     },
     "localname": "StatementOfCashFlowsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfFinancialPositionAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statement of Financial Position [Abstract]",
        "terseLabel": "Statement of Financial Position [Abstract]"
       }
      }
     },
     "localname": "StatementOfFinancialPositionAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statement of Comprehensive Income [Abstract]",
        "terseLabel": "Statement of Comprehensive Income [Abstract]"
       }
      }
     },
     "localname": "StatementOfIncomeAndComprehensiveIncomeAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfStockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statement of Stockholders' Equity [Abstract]",
        "terseLabel": "Statement of Stockholders' Equity [Abstract]"
       }
      }
     },
     "localname": "StatementOfStockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementTable": {
     "auth_ref": [
      "r315",
      "r316",
      "r317",
      "r343",
      "r672"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule reflecting a Statement of Income, Statement of Cash Flows, Statement of Financial Position, Statement of Shareholders' Equity and Other Comprehensive Income, or other statement as needed.",
        "label": "Statement [Table]",
        "terseLabel": "Statement [Table]"
       }
      }
     },
     "localname": "StatementTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncome",
      "http://www.entegris.com/role/ConsolidatedStatementsOfComprehensiveIncomeParanthetical",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity",
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesAcquisitions": {
     "auth_ref": [
      "r11",
      "r12",
      "r117"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares of stock issued during the period pursuant to acquisitions.",
        "label": "Stock Issued During Period, Shares, Acquisitions",
        "terseLabel": "Issuance of common stock in connection with CMC Materials acquisition"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesAcquisitions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity",
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans": {
     "auth_ref": [
      "r11",
      "r12",
      "r112",
      "r117"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares issued during the period as a result of an employee stock purchase plan.",
        "label": "Stock Issued During Period, Shares, Employee Stock Purchase Plans",
        "terseLabel": "Shares purchase by employees"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised": {
     "auth_ref": [
      "r11",
      "r12",
      "r112",
      "r117",
      "r535"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of share options (or share units) exercised during the current period.",
        "label": "Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Exercises in Period",
        "negatedLabel": "Number of shares, Exercised"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesStockOptionsExercised",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodValueAcquisitions": {
     "auth_ref": [
      "r27",
      "r112",
      "r117"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value of stock issued pursuant to acquisitions during the period.",
        "label": "Stock Issued During Period, Value, Acquisitions",
        "terseLabel": "Issuance of common stock in connection with CMC Materials acquisition"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodValueAcquisitions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockRepurchaseProgramAuthorizedAmount1": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of stock repurchase plan authorized.",
        "label": "Stock Repurchase Program, Authorized Amount",
        "terseLabel": "Stock Repurchase Program, Authorized Amount"
       }
      }
     },
     "localname": "StockRepurchaseProgramAuthorizedAmount1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockRepurchasedAndRetiredDuringPeriodShares": {
     "auth_ref": [
      "r11",
      "r12",
      "r112",
      "r117"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares that have been repurchased and retired during the period.",
        "label": "Stock Repurchased and Retired During Period, Shares",
        "negatedTerseLabel": "Repurchase and retirement of common stock (in shares)"
       }
      }
     },
     "localname": "StockRepurchasedAndRetiredDuringPeriodShares",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockRepurchasedAndRetiredDuringPeriodValue": {
     "auth_ref": [
      "r11",
      "r12",
      "r112",
      "r117"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Equity impact of the value of stock that has been repurchased and retired during the period. The excess of the purchase price over par value can be charged against retained earnings (once the excess is fully allocated to additional paid in capital).",
        "label": "Stock Repurchased and Retired During Period, Value",
        "negatedLabel": "Repurchase and retirement of common stock",
        "negatedTerseLabel": "Stock Repurchased and Retired During Period, Value"
       }
      }
     },
     "localname": "StockRepurchasedAndRetiredDuringPeriodValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity",
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/EquitySummaryofOptionActivityDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest": {
     "auth_ref": [
      "r180",
      "r181",
      "r184",
      "r257",
      "r258",
      "r294",
      "r315",
      "r316",
      "r317",
      "r319",
      "r325",
      "r391",
      "r491",
      "r557",
      "r558",
      "r559",
      "r587",
      "r588",
      "r622",
      "r634",
      "r635",
      "r640",
      "r659",
      "r689",
      "r690",
      "r778",
      "r787",
      "r849"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of stockholders' equity (deficit), net of receivables from officers, directors, owners, and affiliates of the entity, attributable to both the parent and noncontrolling interests. Amount excludes temporary equity. Alternate caption for the concept is permanent equity.",
        "label": "Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest",
        "terseLabel": "Balance",
        "totalLabel": "Total equity"
       }
      }
     },
     "localname": "StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets",
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest [Abstract]",
        "terseLabel": "Equity:"
       }
      }
     },
     "localname": "StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockholdersEquityNoteDisclosureTextBlock": {
     "auth_ref": [
      "r120",
      "r308",
      "r479",
      "r480",
      "r481",
      "r482",
      "r483",
      "r484",
      "r485",
      "r486",
      "r487",
      "r488",
      "r489",
      "r490",
      "r491",
      "r621"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.",
        "label": "Stockholders' Equity Note Disclosure [Text Block]",
        "terseLabel": "Equity"
       }
      }
     },
     "localname": "StockholdersEquityNoteDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/Equity"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_StockholdersEquityPolicyTextBlock": {
     "auth_ref": [
      "r111"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for its capital stock transactions, including dividends and accumulated other comprehensive income.",
        "label": "Stockholders' Equity, Policy [Policy Text Block]",
        "terseLabel": "Comprehensive Income (Loss)"
       }
      }
     },
     "localname": "StockholdersEquityPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SubsequentEventLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.",
        "label": "Subsequent Event [Line Items]",
        "terseLabel": "Subsequent Event [Line Items]"
       }
      }
     },
     "localname": "SubsequentEventLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventMember": {
     "auth_ref": [
      "r641",
      "r661"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Identifies event that occurred after the balance sheet date but before financial statements are issued or available to be issued.",
        "label": "Subsequent Event [Member]",
        "terseLabel": "Subsequent Event [Member]"
       }
      }
     },
     "localname": "SubsequentEventMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/SubsequentEventsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SubsequentEventTable": {
     "auth_ref": [
      "r641",
      "r661"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Discloses pertinent information about one or more significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued.",
        "label": "Subsequent Event [Table]",
        "terseLabel": "Subsequent Event [Table]"
       }
      }
     },
     "localname": "SubsequentEventTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventTypeAxis": {
     "auth_ref": [
      "r641",
      "r661"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by event that occurred after the balance sheet date but before financial statements are issued or available to be issued.",
        "label": "Subsequent Event Type [Axis]",
        "terseLabel": "Subsequent Event Type [Axis]"
       }
      }
     },
     "localname": "SubsequentEventTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/SubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventTypeDomain": {
     "auth_ref": [
      "r641",
      "r661"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Event that occurred after the balance sheet date but before financial statements are issued or available to be issued.",
        "label": "Subsequent Event Type [Domain]",
        "terseLabel": "Subsequent Event Type [Domain]"
       }
      }
     },
     "localname": "SubsequentEventTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EquityAdditionalInformationDetail",
      "http://www.entegris.com/role/SubsequentEventsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SubsequentEventsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Subsequent Events [Abstract]",
        "terseLabel": "Subsequent Events [Abstract]"
       }
      }
     },
     "localname": "SubsequentEventsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventsTextBlock": {
     "auth_ref": [
      "r660",
      "r662"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued. Examples include: the sale of a capital stock issue, purchase of a business, settlement of litigation, catastrophic loss, significant foreign exchange rate changes, loans to insiders or affiliates, and transactions not in the ordinary course of business.",
        "label": "Subsequent Events [Text Block]",
        "terseLabel": "Subsequent Events [Text Block]"
       }
      }
     },
     "localname": "SubsequentEventsTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SubsequentEvents"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SummaryOfIncomeTaxContingenciesTextBlock": {
     "auth_ref": [
      "r156",
      "r158",
      "r159"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure for tax positions taken in the tax returns filed or to be filed for which it is more likely than not that the tax position will not be sustained upon examination by taxing authorities and other income tax contingencies. Includes, but is not limited to, interest and penalties, reconciliation of unrecognized tax benefits, unrecognized tax benefits that would affect the effective tax rate, tax years that remain subject to examination by tax jurisdictions, and information about positions for which it is reasonably possible that amounts unrecognized will significantly change within 12 months.",
        "label": "Summary of Income Tax Contingencies [Table Text Block]",
        "terseLabel": "Reconciliations of Total Amount of Gross Unrecognized Tax Benefits"
       }
      }
     },
     "localname": "SummaryOfIncomeTaxContingenciesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SupplementalCashFlowInformationAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Supplemental Cash Flow Information [Abstract]",
        "terseLabel": "Supplemental Cash Flow Information"
       }
      }
     },
     "localname": "SupplementalCashFlowInformationAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SupplementalIncomeStatementElementsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Supplemental Income Statement Elements [Abstract]"
       }
      }
     },
     "localname": "SupplementalIncomeStatementElementsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_TaxCreditCarryforwardAxis": {
     "auth_ref": [
      "r162"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by specific tax credit related to an unused tax credit.",
        "label": "Tax Credit Carryforward [Axis]",
        "terseLabel": "Tax Credit Carryforward [Axis]"
       }
      }
     },
     "localname": "TaxCreditCarryforwardAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_TaxCreditCarryforwardNameDomain": {
     "auth_ref": [
      "r162"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The name of the tax credit carryforward.",
        "label": "Tax Credit Carryforward, Name [Domain]",
        "terseLabel": "Tax Credit Carryforward, Name [Domain]"
       }
      }
     },
     "localname": "TaxCreditCarryforwardNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxesDeferredtaxadditionalinformationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ToolsDiesAndMoldsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Equipment commonly used to cut, shape, and form metal and other materials into goods for sale.",
        "label": "Tools, Dies and Molds [Member]",
        "terseLabel": "Molds"
       }
      }
     },
     "localname": "ToolsDiesAndMoldsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/PropertyPlantandEquipmentDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_TradeAndOtherAccountsReceivablePolicy": {
     "auth_ref": [
      "r254",
      "r255",
      "r256",
      "r385",
      "r386",
      "r389"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for accounts receivable.",
        "label": "Accounts Receivable [Policy Text Block]",
        "terseLabel": "Allowance For Doubtful Accounts"
       }
      }
     },
     "localname": "TradeAndOtherAccountsReceivablePolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_TrademarksAndTradeNamesMember": {
     "auth_ref": [
      "r173"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Rights acquired through registration of a trademark to gain or protect exclusive use of a business name, symbol or other device or style, or rights either acquired through registration of a business name to gain or protect exclusive use thereof.",
        "label": "Trademarks and Trade Names [Member]",
        "terseLabel": "Trademarks and Trade names"
       }
      }
     },
     "localname": "TrademarksAndTradeNamesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/AcquisitionPrecisionMicrochemicalsDetails",
      "http://www.entegris.com/role/CMCAcquisitionDetails",
      "http://www.entegris.com/role/IntangibleAssetsDetail"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_TreasuryStockCommonMember": {
     "auth_ref": [
      "r118"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Previously issued common shares repurchased by the issuing entity and held in treasury.",
        "label": "Treasury Stock, Common [Member]",
        "terseLabel": "Treasury Stock, Common"
       }
      }
     },
     "localname": "TreasuryStockCommonMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_TreasuryStockShares": {
     "auth_ref": [
      "r26",
      "r118"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of common and preferred shares that were previously issued and that were repurchased by the issuing entity and held in treasury on the financial statement date. This stock has no voting rights and receives no dividends.",
        "label": "Treasury Stock, Shares",
        "terseLabel": "Treasury Stock, Shares"
       }
      }
     },
     "localname": "TreasuryStockShares",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_TreasuryStockValue": {
     "auth_ref": [
      "r26",
      "r118",
      "r119"
     ],
     "calculation": {
      "http://www.entegris.com/role/ConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount allocated to treasury stock. Treasury stock is common and preferred shares of an entity that were issued, repurchased by the entity, and are held in its treasury.",
        "label": "Treasury Stock, Value",
        "negatedTerseLabel": "Treasury stock, common, at cost: 202,400 shares held as of December\u00a031, 2022 and December\u00a031, 2021"
       }
      }
     },
     "localname": "TreasuryStockValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UndistributedEarningsOfForeignSubsidiaries": {
     "auth_ref": [
      "r236",
      "r252",
      "r562",
      "r601"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of undistributed earnings of foreign subsidiaries intended to be permanently reinvested outside the country of domicile.",
        "label": "Undistributed Earnings of Foreign Subsidiaries",
        "terseLabel": "Undistributed Earnings of Foreign Subsidiaries"
       }
      }
     },
     "localname": "UndistributedEarningsOfForeignSubsidiaries",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails",
      "http://www.entegris.com/role/IncomeTaxesSingaporesubsidiarycommitmentsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrealizedGainLossOnDerivatives": {
     "auth_ref": [
      "r61"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The net change in the difference between the fair value and the carrying value, or in the comparative fair values, of derivative instruments, including options, swaps, futures, and forward contracts, held at each balance sheet date, that was included in earnings for the period.",
        "label": "Unrealized Gain (Loss) on Derivatives",
        "terseLabel": "Unrealized Gain (Loss) on Derivatives"
       }
      }
     },
     "localname": "UnrealizedGainLossOnDerivatives",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/DerivativeInstrumentsandHedgingActivitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefits": {
     "auth_ref": [
      "r563",
      "r571"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of unrecognized tax benefits.",
        "label": "Unrecognized Tax Benefits",
        "periodEndLabel": "Gross unrecognized tax benefits at end of year",
        "periodStartLabel": "Gross unrecognized tax benefits at beginning of year"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefits",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions": {
     "auth_ref": [
      "r572"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.",
        "label": "Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions",
        "negatedTerseLabel": "Increase in tax positions from prior years"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities": {
     "auth_ref": [
      "r574"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from settlements with taxing authorities.",
        "label": "Unrecognized Tax Benefits, Decrease Resulting from Settlements with Taxing Authorities",
        "negatedTerseLabel": "Increases in tax positions for current year"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued": {
     "auth_ref": [
      "r569"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount accrued for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.",
        "label": "Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued",
        "terseLabel": "Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense": {
     "auth_ref": [
      "r569"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expense for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.",
        "label": "Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense",
        "terseLabel": "Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromAcquisition": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in unrecognized tax benefits resulting from acquisitions.",
        "label": "Unrecognized Tax Benefits, Increase Resulting from Acquisition",
        "terseLabel": "Unrecognized Tax Benefits, Increase Resulting from Acquisition"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncreasesResultingFromAcquisition",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions": {
     "auth_ref": [
      "r573"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in unrecognized tax benefits resulting from tax positions that have been or will be taken in current period tax return.",
        "label": "Unrecognized Tax Benefits, Increase Resulting from Current Period Tax Positions",
        "terseLabel": "Increases in tax positions for current year"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions": {
     "auth_ref": [
      "r572"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.",
        "label": "Unrecognized Tax Benefits, Increase Resulting from Prior Period Tax Positions",
        "terseLabel": "Increase in tax positions for prior years"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations": {
     "auth_ref": [
      "r575"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from lapses of applicable statutes of limitations.",
        "label": "Unrecognized Tax Benefits, Reduction Resulting from Lapse of Applicable Statute of Limitations",
        "negatedLabel": "Lapse in statute of limitations"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesReconciliationsofTotalAmountofGrossUnrecognizedTaxBenefitsDetail"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate": {
     "auth_ref": [
      "r576"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate.",
        "label": "Unrecognized Tax Benefits that Would Impact Effective Tax Rate",
        "terseLabel": "Unrecognized Tax Benefits that Would Impact Effective Tax Rate"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/IncomeTaxesIncomeTaxUnrecognizedtaxbenefitsadditionalinformationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UseOfEstimates": {
     "auth_ref": [
      "r73",
      "r74",
      "r75",
      "r345",
      "r346",
      "r347",
      "r348"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.",
        "label": "Use of Estimates, Policy [Policy Text Block]",
        "terseLabel": "Use of Estimates"
       }
      }
     },
     "localname": "UseOfEstimates",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/SummaryofSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment": {
     "auth_ref": [
      "r784"
     ],
     "calculation": {
      "http://www.entegris.com/role/EarningsPerShareEPSReconciliationofShareAmountUsedinComputationofBasicandDilutedEarningsPerShareDetail": {
       "order": 2.0,
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The sum of dilutive potential common shares or units used in the calculation of the diluted per-share or per-unit computation.",
        "label": "Weighted Average Number of Shares Outstanding, Diluted, Adjustment",
        "terseLabel": "Weighted common shares assumed upon exercise of options and vesting of restricted stock units"
       }
      }
     },
     "localname": "WeightedAverageNumberDilutedSharesOutstandingAdjustment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/EarningsPerShareEPSReconciliationofShareAmountUsedinComputationofBasicandDilutedEarningsPerShareDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding": {
     "auth_ref": [
      "r329",
      "r334"
     ],
     "calculation": {
      "http://www.entegris.com/role/EarningsPerShareEPSReconciliationofShareAmountUsedinComputationofBasicandDilutedEarningsPerShareDetail": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.",
        "label": "Weighted Average Number of Shares Outstanding, Diluted",
        "terseLabel": "Diluted",
        "totalLabel": "Diluted earnings per share-Weighted common shares outstanding"
       }
      }
     },
     "localname": "WeightedAverageNumberOfDilutedSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/EarningsPerShareEPSReconciliationofShareAmountUsedinComputationofBasicandDilutedEarningsPerShareDetail"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Weighted Average Number of Shares Outstanding, Diluted [Abstract]",
        "terseLabel": "Weighted average shares outstanding"
       }
      }
     },
     "localname": "WeightedAverageNumberOfSharesOutstandingAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingBasic": {
     "auth_ref": [
      "r328",
      "r334"
     ],
     "calculation": {
      "http://www.entegris.com/role/EarningsPerShareEPSReconciliationofShareAmountUsedinComputationofBasicandDilutedEarningsPerShareDetail": {
       "order": 1.0,
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.",
        "label": "Weighted Average Number of Shares Outstanding, Basic",
        "terseLabel": "Basic",
        "verboseLabel": "Basic earnings per share-Weighted common shares outstanding"
       }
      }
     },
     "localname": "WeightedAverageNumberOfSharesOutstandingBasic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.entegris.com/role/ConsolidatedStatementsOfOperations",
      "http://www.entegris.com/role/EarningsPerShareEPSReconciliationofShareAmountUsedinComputationofBasicandDilutedEarningsPerShareDetail"
     ],
     "xbrltype": "sharesItemType"
    }
   },
   "unitCount": 5
  }
 },
 "std_ref": {
  "r0": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222160&loc=d3e1107-107759",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r1": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222160&loc=SL51721533-107759",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r10": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(26)(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r100": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=d3e2941-110230",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r101": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=d3e2941-110230",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r102": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=SL51724579-110230",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r103": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "360",
   "URI": "https://asc.fasb.org/topic&trid=2155823",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r104": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r105": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "440",
   "URI": "https://asc.fasb.org/topic&trid=2144648",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r106": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123465755&loc=d3e1835-112601",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r107": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123465755&loc=SL6230698-112601",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r108": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "40",
   "SubTopic": "50",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126972273&loc=d3e12317-112629",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r109": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "40",
   "SubTopic": "50",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126972273&loc=d3e12355-112629",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r11": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(28))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r110": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "470",
   "URI": "https://asc.fasb.org/topic&trid=2208564",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r111": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21459-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r112": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21463-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r113": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21475-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r114": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21506-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r115": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21521-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r116": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21538-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r117": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.3-04)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=120397183&loc=d3e187085-122770",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r118": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=6405813&loc=d3e23239-112655",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r119": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=6405834&loc=d3e23315-112656",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r12": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(29))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r120": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "505",
   "URI": "https://asc.fasb.org/topic&trid=2208762",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r121": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "610",
   "URI": "https://asc.fasb.org/topic&trid=49130413",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r122": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "710",
   "URI": "https://asc.fasb.org/topic&trid=2127225",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r123": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "712",
   "URI": "https://asc.fasb.org/topic&trid=2197446",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r124": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123453770&loc=d3e1703-114919",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r125": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123453770&loc=d3e1731-114919",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r126": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r127": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r128": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r129": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e2410-114920",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r13": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r130": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e2417-114920",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r131": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e2439-114920",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r132": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123450688&loc=d3e4179-114921",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r133": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "715",
   "URI": "https://asc.fasb.org/topic&trid=2235017",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r134": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r135": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(i)-(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r136": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r137": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r138": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r139": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r14": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(3))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r140": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r141": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r142": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r143": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r144": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r145": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r146": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r147": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=SL79508275-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r148": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 14.F)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=122041274&loc=d3e301413-122809",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r149": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126964447&loc=d3e11149-113907",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r15": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(32))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r150": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126964447&loc=d3e11178-113907",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r151": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "718",
   "URI": "https://asc.fasb.org/topic&trid=2228938",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r152": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "720",
   "URI": "https://asc.fasb.org/topic&trid=2122503",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r153": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "730",
   "URI": "https://asc.fasb.org/extlink&oid=6420194&loc=d3e21568-108373",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r154": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e31931-109318",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r155": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32687-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r156": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32718-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r157": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32718-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r158": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r159": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32840-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r16": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r160": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r161": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32559-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r162": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32559-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r163": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32632-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r164": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r165": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.7)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r166": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "10",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123586518&loc=d3e961-128460",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r167": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "10",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123586518&loc=d3e1043-128460",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r168": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(3)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r169": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r17": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r170": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1486-128463",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r171": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "37",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123455525&loc=d3e2207-128464",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r172": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092470&loc=d3e4845-128472",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r173": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123410050&loc=d3e5263-128473",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r174": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123410050&loc=d3e5333-128473",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r175": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "38",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123410050&loc=d3e5504-128473",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r176": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "30",
   "SubTopic": "30",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=126966197&loc=d3e6578-128477",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r177": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "30",
   "SubTopic": "30",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=126966197&loc=d3e6613-128477",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r178": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(b)(4)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r179": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "805",
   "URI": "https://asc.fasb.org/topic&trid=2303972",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r18": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(c))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r180": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=126929396&loc=SL4568447-111683",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r181": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=126929396&loc=SL4568740-111683",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r182": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=d3e5614-111684",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r183": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c),(3)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r184": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4I",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=120409616&loc=SL4590271-111686",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r185": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5579240-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r186": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5579245-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r187": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5580258-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r188": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=d3e41620-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r189": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=d3e41638-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r19": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19(a))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r190": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5618551-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r191": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5618551-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r192": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624163-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r193": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624163-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r194": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624163-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r195": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624171-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r196": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624171-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r197": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624177-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r198": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=d3e41641-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r199": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=d3e41675-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r2": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(e)",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721673-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r20": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19(b),22(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r200": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=d3e41678-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r201": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "182",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=127000641&loc=SL5629052-113961",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r202": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "25",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=121577467&loc=d3e76258-113986",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r203": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "815",
   "URI": "https://asc.fasb.org/topic&trid=2229140",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r204": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r205": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r206": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bb)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r207": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r208": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r209": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=SL7498348-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r21": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19,20)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r210": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19279-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r211": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "60",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=7493716&loc=d3e21868-110260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r212": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13279-108611",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r213": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13467-108611",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r214": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13476-108611",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r215": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "230",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=123444420&loc=d3e33268-110906",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r216": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124435984&loc=d3e28541-108399",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r217": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124435984&loc=d3e28551-108399",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r218": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124435984&loc=d3e28555-108399",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r219": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=114775985&loc=d3e28878-108400",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r22": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.20)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r220": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "20",
   "Topic": "940",
   "URI": "https://asc.fasb.org/extlink&oid=126941158&loc=d3e41242-110953",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r221": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(1)(a))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r222": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(11))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r223": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(13))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r224": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(15)(1))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r225": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(15)(2))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r226": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(15)(5))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r227": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(16))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r228": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(23))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r229": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03.15(5))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r23": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.21)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r230": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(15))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r231": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(22))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r232": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04.9)",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r233": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "470",
   "Subparagraph": "(g)",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=123599511&loc=d3e64711-112823",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r234": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "470",
   "Subparagraph": "e",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=123599511&loc=d3e64711-112823",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r235": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "470",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=123599511&loc=d3e64711-112823",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r236": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "740",
   "Subparagraph": "(b)",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=6479915&loc=d3e66715-112838",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r237": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(15)(b)(2))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r238": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(16))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r239": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(12))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r24": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.22(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r240": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(15)(5))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r241": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(15)(b)(1))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r242": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(16)(a)(1))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r243": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(16))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r244": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(2))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r245": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(4))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r246": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(25))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r247": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(8))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r248": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03.15(a))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r249": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(18))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r25": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.22)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r250": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(8))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r251": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04.7)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r252": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "740",
   "Subparagraph": "(b)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=6487024&loc=d3e29054-158556",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r253": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "985",
   "URI": "https://asc.fasb.org/extlink&oid=6501960&loc=d3e128462-111756",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r254": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=SL6953423-111524",
   "role": "http://fasb.org/us-gaap/role/ref/otherTransitionRef"
  },
  "r255": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=d3e5212-111524",
   "role": "http://fasb.org/us-gaap/role/ref/otherTransitionRef"
  },
  "r256": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=d3e5093-111524",
   "role": "http://fasb.org/us-gaap/role/ref/otherTransitionRef"
  },
  "r257": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r258": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r259": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=d3e1361-107760",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r26": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.29,30)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r260": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)(2)",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721675-107760",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r261": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721683-107760",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r262": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6676-107765",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r263": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6904-107765",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r264": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=6361739&loc=d3e7789-107766",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r265": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r266": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(13))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r267": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(14))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r268": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(15))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r269": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(16))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r27": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.29-31)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r270": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(17))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r271": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(18))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r272": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(22))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r273": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(3)(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r274": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(3)(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r275": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(4))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r276": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(4))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r277": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r278": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r279": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(8))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r28": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.3,4)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r280": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(9))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r281": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=51824906&loc=SL20225862-175312",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r282": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=99393222&loc=SL20226008-175313",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r283": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r284": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e637-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r285": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669686-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r286": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e689-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r287": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669619-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r288": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669619-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r289": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669619-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r29": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r290": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669625-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r291": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669625-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r292": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL116659661-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r293": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442407-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r294": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442411-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r295": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124452729-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r296": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(210.5-03(11))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r297": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(21))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r298": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(24))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r299": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(25))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r3": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/subtopic&trid=2122178",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r30": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a),(b),(c)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r300": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r301": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3367-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r302": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3000-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r303": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3521-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r304": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3536-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r305": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4297-108586",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r306": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18726-107790",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r307": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(c))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r308": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(e)(1))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r309": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(g)(1)(ii))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r31": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(i),(j),(k)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r310": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h)(1))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r311": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h)(2))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r312": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r313": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(n))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r314": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-04(a))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24072-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r315": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21914-107793",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r316": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21930-107793",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r317": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21711-107793",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r318": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(2)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r319": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(3)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r32": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(i-k)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r320": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22694-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r321": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22694-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r322": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22583-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r323": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22595-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r324": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22644-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r325": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22644-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r326": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22658-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r327": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22663-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r328": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1448-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r329": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1505-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r33": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e637-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r330": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1252-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r331": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "60B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=SL5780133-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r332": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "60B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=SL5780133-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r333": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1337-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r334": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r335": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r336": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3630-109257",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r337": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=109243012&loc=SL65017193-207537",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r338": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=128363288&loc=d3e3842-109258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r339": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "260",
   "URI": "https://asc.fasb.org/topic&trid=2144383",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r34": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e640-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r340": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "270",
   "URI": "https://asc.fasb.org/extlink&oid=126900757&loc=d3e543-108305",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r341": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "270",
   "URI": "https://asc.fasb.org/extlink&oid=126900988&loc=d3e1280-108306",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r342": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "270",
   "URI": "https://asc.fasb.org/extlink&oid=126900988&loc=SL124452896-108306",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r343": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "272",
   "URI": "https://asc.fasb.org/extlink&oid=125520817&loc=d3e70191-108054",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r344": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e5967-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r345": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e5967-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r346": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e5967-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r347": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6161-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r348": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6191-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r349": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "275",
   "URI": "https://asc.fasb.org/topic&trid=2134479",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r35": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e681-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r350": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8657-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r351": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8721-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r352": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8721-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r353": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r354": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r355": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r356": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r357": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r358": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r359": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r36": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669686-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r360": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r361": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(j)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r362": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r363": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8813-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r364": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8813-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r365": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "26",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8844-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r366": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r367": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r368": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r369": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r37": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e557-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r370": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "31",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8924-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r371": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r372": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r373": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r374": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r375": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r376": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r377": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "34",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8981-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r378": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9031-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r379": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r38": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124507222&loc=d3e1436-108581",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r380": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r381": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r382": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "42",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9054-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r383": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "280",
   "URI": "https://asc.fasb.org/topic&trid=2134510",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r384": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=124259787&loc=d3e4428-111522",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r385": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=d3e4975-111524",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r386": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=d3e5033-111524",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r387": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=d3e5074-111524",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r388": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=SL6953401-111524",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r389": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=84159169&loc=d3e10133-111534",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r39": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(10))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r390": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "323",
   "URI": "https://asc.fasb.org/extlink&oid=114001798&loc=d3e33918-111571",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r391": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r392": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255206&loc=SL82895884-210446",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r393": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919249-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r394": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919249-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r395": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919253-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r396": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919230-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r397": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "330",
   "URI": "https://asc.fasb.org/extlink&oid=116847112&loc=d3e4492-108314",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r398": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "330",
   "URI": "https://asc.fasb.org/extlink&oid=116847112&loc=d3e4542-108314",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r399": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "330",
   "URI": "https://asc.fasb.org/extlink&oid=116847112&loc=d3e4556-108314",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r4": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=6361739&loc=d3e7789-107766",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r40": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(20))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r400": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "330",
   "URI": "https://asc.fasb.org/topic&trid=2126998",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r401": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=99380562&loc=d3e13770-109266",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r402": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r403": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r404": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r405": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r406": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(e)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r407": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r408": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r409": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(h)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r41": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.1)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r410": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r411": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=SL108378252-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r412": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13854-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r413": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r414": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(d)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r415": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(1)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r416": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(d)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r417": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "30",
   "Topic": "350",
   "URI": "https://asc.fasb.org/subtopic&trid=2144471",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r418": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=d3e2941-110230",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r419": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=d3e2941-110230",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r42": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.1,2)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r420": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "20",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=116646717&loc=d3e6290-110844",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r421": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392676&loc=d3e7480-110848",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r422": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r423": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r424": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(1)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r425": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(2)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r426": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(3)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r427": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(4)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r428": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7569-110849",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r429": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "20",
   "Topic": "410",
   "URI": "https://asc.fasb.org/subtopic&trid=2175671",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r43": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.2)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r430": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "420",
   "URI": "https://asc.fasb.org/extlink&oid=6394359&loc=d3e17939-110869",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r431": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "420",
   "URI": "https://asc.fasb.org/extlink&oid=6394359&loc=d3e17939-110869",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r432": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 5.P.4(d))",
   "Topic": "420",
   "URI": "https://asc.fasb.org/extlink&oid=115931487&loc=d3e140904-122747",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r433": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "440",
   "URI": "https://asc.fasb.org/extlink&oid=123406679&loc=d3e25336-109308",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r434": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "440",
   "URI": "https://asc.fasb.org/extlink&oid=123406679&loc=d3e25336-109308",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r435": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14435-108349",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r436": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14557-108349",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r437": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "20",
   "Subparagraph": "(SAB Topic 5.Y.Q2)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=27011672&loc=d3e149879-122751",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r438": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "20",
   "Subparagraph": "(SAB Topic 5.Y.Q4)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=27011672&loc=d3e149879-122751",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r439": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(i))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r44": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.3)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r440": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(iii)(A))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r441": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(iv))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r442": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(5))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r443": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(i))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r444": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(iii)(A))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r445": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(iii)(B))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r446": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(iv))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r447": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(5))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r448": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r449": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r45": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.4)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r450": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r451": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(e)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r452": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r453": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r454": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(h)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r455": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(i)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r456": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r457": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495334-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r458": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495334-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r459": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495334-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r46": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.4,6)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r460": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r461": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r462": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r463": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r464": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r465": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r466": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r467": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r468": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r469": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r47": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.9)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r470": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r471": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r472": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r473": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r474": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r475": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466204&loc=SL6031897-161870",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r476": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466204&loc=SL6031897-161870",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r477": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(3)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466204&loc=SL6031897-161870",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r478": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r479": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r48": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3179-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r480": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r481": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r482": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(i)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r483": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r484": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496171-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r485": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496171-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r486": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496171-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r487": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496180-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r488": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496189-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r489": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496189-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r49": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r490": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496189-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r491": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.3-04)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=120397183&loc=d3e187085-122770",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r492": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126919976&loc=SL49130531-203044",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r493": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126919976&loc=SL49130532-203044",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r494": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130551-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r495": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130554-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r496": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130554-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r497": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130554-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r498": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130554-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r499": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130554-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r5": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(19)(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r50": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r500": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(2)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130556-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r501": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130558-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r502": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130543-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r503": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130545-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r504": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130549-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r505": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130549-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r506": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130550-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r507": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "606",
   "URI": "https://asc.fasb.org/topic&trid=49130388",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r508": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123453770&loc=d3e1703-114919",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r509": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)(8)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r51": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3255-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r510": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r511": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(i)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r512": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(01)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r513": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r514": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(A)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r515": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(B)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r516": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(C)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r517": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(03)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r518": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r519": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(h)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r52": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3255-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r520": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e2417-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r521": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e2417-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r522": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e2709-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r523": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "70",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=49170846&loc=d3e28014-114942",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r524": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(d)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=65877416&loc=SL14450657-114947",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r525": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "35",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126961718&loc=d3e4534-113899",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r526": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r527": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r528": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r529": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r53": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r530": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r531": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r532": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r533": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r534": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r535": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r536": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r537": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(04)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r538": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r539": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r54": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r540": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r541": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r542": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r543": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r544": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r545": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r546": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r547": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r548": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r549": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r55": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r550": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r551": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r552": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r553": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r554": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(v)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r555": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(1)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r556": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r557": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r558": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r559": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r56": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r560": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 14.D.2.Q6)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=122041274&loc=d3e301413-122809",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r561": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "718",
   "URI": "https://asc.fasb.org/topic&trid=2228938",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r562": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126928070&loc=d3e28200-109314",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r563": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=SL37586934-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r564": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e32247-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r565": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e32280-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r566": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32672-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r567": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32687-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r568": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32705-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r569": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32718-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r57": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3521-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r570": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32718-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r571": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r572": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r573": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r574": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r575": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(4)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r576": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r577": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32809-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r578": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32840-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r579": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r58": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3536-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r580": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r581": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r582": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32847-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r583": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32857-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r584": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r585": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r586": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r587": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r588": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(3)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r589": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB TOPIC 6.I.5.Q1)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r59": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3536-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r590": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB TOPIC 6.I.7)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r591": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.1)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r592": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.2)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r593": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.3)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r594": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.4)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r595": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.C)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330215-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r596": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123586238&loc=d3e39076-109324",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r597": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123586238&loc=d3e38679-109324",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r598": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123586238&loc=d3e38679-109324",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r599": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "270",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=6424409&loc=d3e44925-109338",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r6": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(20))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r60": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r600": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=6424122&loc=d3e41874-109331",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r601": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=6424122&loc=d3e41874-109331",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r602": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "740",
   "URI": "https://asc.fasb.org/topic&trid=2144680",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r603": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(2)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r604": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(3)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r605": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092470&loc=d3e4845-128472",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r606": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092470&loc=d3e4946-128472",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r607": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092470&loc=d3e4946-128472",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r608": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=126929396&loc=SL4569616-111683",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r609": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=116870748&loc=SL6758485-165988",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r61": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r610": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=116870748&loc=SL6758485-165988",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r611": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r612": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r613": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(3)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r614": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bb)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=123419778&loc=d3e5710-111685",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r615": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=123419778&loc=d3e5710-111685",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r616": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5618551-113959",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r617": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624171-113959",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r618": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624181-113959",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r619": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=121549185&loc=d3e80845-113994",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r62": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r620": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Subparagraph": "(f)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126731327&loc=d3e90205-114008",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r621": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Subparagraph": "(a)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126731327&loc=SL126733271-114008",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r622": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(3)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r623": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(4)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r624": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r625": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r626": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r627": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13433-108611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r628": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123596393&loc=d3e14064-108612",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r629": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=126980362&loc=d3e28228-110885",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r63": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3044-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r630": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "35",
   "SubTopic": "20",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=123602790&loc=d3e30226-110892",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r631": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=125521441&loc=d3e30690-110894",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r632": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=124440516&loc=d3e30840-110895",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r633": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "230",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=123444420&loc=d3e33268-110906",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r634": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32136-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r635": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r636": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(b)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r637": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(c)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r638": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(d)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r639": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r64": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4273-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r640": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=6450520&loc=d3e32583-110901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r641": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=6450520&loc=d3e32618-110901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r642": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "830",
   "URI": "https://asc.fasb.org/topic&trid=2175825",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r643": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=6450988&loc=d3e26243-108391",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r644": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124429444&loc=SL124452920-239629",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r645": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918627-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r646": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918627-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r647": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918631-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r648": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918643-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r649": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918666-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r65": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4297-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r650": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)(3)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r651": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r652": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r653": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(1)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r654": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(2)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r655": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(3)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r656": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(4)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r657": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918701-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r658": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/subtopic&trid=77888251",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r659": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)(iii)(03)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL125981372-237846",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r66": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4304-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r660": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "855",
   "URI": "https://asc.fasb.org/extlink&oid=6842918&loc=SL6314017-165662",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r661": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "855",
   "URI": "https://asc.fasb.org/extlink&oid=6842918&loc=SL6314017-165662",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r662": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "855",
   "URI": "https://asc.fasb.org/topic&trid=2122774",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r663": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r664": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r665": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r666": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r667": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "910",
   "URI": "https://asc.fasb.org/extlink&oid=126937589&loc=SL119991595-234733",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r668": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "330",
   "Topic": "912",
   "URI": "https://asc.fasb.org/extlink&oid=6471895&loc=d3e55923-109411",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r669": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "350",
   "Subparagraph": "(a)",
   "Topic": "920",
   "URI": "https://asc.fasb.org/extlink&oid=120155617&loc=SL120155628-234783",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r67": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4313-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r670": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "350",
   "Subparagraph": "(b)",
   "Topic": "920",
   "URI": "https://asc.fasb.org/extlink&oid=120155617&loc=SL120155628-234783",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r671": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "350",
   "Subparagraph": "(a)",
   "Topic": "920",
   "URI": "https://asc.fasb.org/extlink&oid=120155617&loc=SL120155638-234783",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r672": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.L)",
   "Topic": "924",
   "URI": "https://asc.fasb.org/extlink&oid=6472922&loc=d3e499488-122856",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r673": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "926",
   "URI": "https://asc.fasb.org/extlink&oid=120154696&loc=d3e54445-107959",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r674": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "340",
   "Topic": "928",
   "URI": "https://asc.fasb.org/extlink&oid=6473545&loc=d3e61844-108004",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r675": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(10)(1))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r676": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(23))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r677": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(26))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r678": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(27))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r679": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "235",
   "Subparagraph": "(SX 210.9-05(b)(2))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399901&loc=d3e537907-122884",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r68": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4332-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r680": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=124429447&loc=SL124453093-239630",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r681": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(5))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r682": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(3))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r683": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(19))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r684": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(22))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r685": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(23))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r686": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(9))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r687": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Subparagraph": "(d)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124506351&loc=SL117782755-158439",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r688": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r689": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)(1)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r69": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=SL98516268-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r690": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)(2)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r691": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(i)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r692": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(ii)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r693": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(h)(2)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r694": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "310",
   "Subparagraph": "(SX 210.12-29(Footnote 4))",
   "Topic": "948",
   "URI": "https://asc.fasb.org/extlink&oid=120402547&loc=d3e617274-123014",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r695": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "440",
   "Subparagraph": "(a)",
   "Topic": "954",
   "URI": "https://asc.fasb.org/extlink&oid=6491277&loc=d3e6429-115629",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r696": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Subparagraph": "(d)",
   "Topic": "958",
   "URI": "https://asc.fasb.org/extlink&oid=126982197&loc=d3e99779-112916",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r697": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Topic": "958",
   "URI": "https://asc.fasb.org/extlink&oid=126982197&loc=d3e99893-112916",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r698": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Topic": "958",
   "URI": "https://asc.fasb.org/extlink&oid=126982197&loc=SL120174063-112916",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r699": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column B))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r7": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(22))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r70": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "235",
   "URI": "https://asc.fasb.org/topic&trid=2122369",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r700": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column C))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r701": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column D))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r702": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column E))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r703": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column F))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r704": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column G))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r705": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column H))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r706": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column I))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r707": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Footnote 2))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r708": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "310",
   "Subparagraph": "(c)",
   "Topic": "976",
   "URI": "https://asc.fasb.org/extlink&oid=6497875&loc=d3e22274-108663",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r709": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "310",
   "Subparagraph": "(b)",
   "Topic": "978",
   "URI": "https://asc.fasb.org/extlink&oid=126945304&loc=d3e27327-108691",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r71": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r710": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(a)",
   "Publisher": "SEC",
   "Section": "1405",
   "Subparagraph": "(1)",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r711": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(a)",
   "Publisher": "SEC",
   "Section": "1405",
   "Subparagraph": "(2)",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r712": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6676-107765",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r713": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6676-107765",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r714": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r715": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(3))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r716": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(4))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r717": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=99393222&loc=SL20226052-175313",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r718": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124507222&loc=d3e1436-108581",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r719": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r72": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "270",
   "URI": "https://asc.fasb.org/topic&trid=2126967",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r720": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r721": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r722": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r723": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r724": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "52",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=128363288&loc=d3e4984-109258",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r725": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "31",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8924-108599",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r726": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=124259787&loc=d3e4531-111522",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r727": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "79",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124267575&loc=SL82922352-210448",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r728": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "80",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124267575&loc=SL82922355-210448",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r729": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=122137925&loc=d3e14258-109268",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r73": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6061-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r730": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r731": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69B",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495735-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r732": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69C",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495737-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r733": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69E",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495743-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r734": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69F",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495745-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r735": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r736": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130551-203045",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r737": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920602&loc=SL49130690-203046-203046",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r738": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920602&loc=SL49130690-203046-203046",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r739": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(ii)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r74": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6132-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r740": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(01)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r741": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123450688&loc=d3e4179-114921",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r742": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123450688&loc=d3e4587-114921",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r743": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(a)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=65877416&loc=SL14450702-114947",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r744": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(a)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=65877416&loc=SL14450673-114947",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r745": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "80",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=35742348&loc=SL14450788-114948",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r746": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r747": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4J",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=120409616&loc=SL4591551-111686",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r748": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4K",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=120409616&loc=SL4591552-111686",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r749": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624177-113959",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r75": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6143-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r750": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624177-113959",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r751": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r752": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "53",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123414884&loc=SL77918982-209971",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r753": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "852",
   "URI": "https://asc.fasb.org/extlink&oid=84165509&loc=d3e56426-112766",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r754": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(b)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126561865&loc=SL117783719-158441",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r755": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "29F",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126561865&loc=SL117819544-158441",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r756": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r757": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-2",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r758": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "d1-1",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r759": {
   "Name": "Form 10-K",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "310",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r76": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r760": {
   "Name": "Form 20-F",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "220",
   "Subsection": "f",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r761": {
   "Name": "Form 40-F",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "240",
   "Subsection": "f",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r762": {
   "Name": "Forms 10-K, 10-Q, 20-F",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13",
   "Subsection": "a-1",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r763": {
   "Name": "Regulation S-T",
   "Number": "232",
   "Publisher": "SEC",
   "Section": "405",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r764": {
   "Name": "Securities Act",
   "Number": "230",
   "Publisher": "SEC",
   "Section": "405",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r765": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r766": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(13))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r767": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r768": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442407-227067",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r769": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442411-227067",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r77": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8813-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r770": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124452729-227067",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r771": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3179-108585",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r772": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r773": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3255-108585",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r774": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r775": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r776": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=SL98516268-108586",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r777": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(f))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r778": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(g)(1)(ii))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r779": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h)(1)(Note 1))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r78": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r780": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-04(a))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24072-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r781": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21914-107793",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r782": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21930-107793",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r783": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21711-107793",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r784": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r785": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8657-108599",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r786": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/subtopic&trid=2196772",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r787": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "323",
   "URI": "https://asc.fasb.org/extlink&oid=114001798&loc=d3e33918-111571",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r788": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255206&loc=SL82895884-210446",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r789": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r79": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r790": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r791": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r792": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r793": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(e)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r794": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r795": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r796": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(h)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r797": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r798": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=SL108378252-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r799": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13854-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r8": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(24))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r80": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "31",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8924-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r800": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(c)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6393242&loc=d3e13237-110859",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r801": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "450",
   "URI": "https://asc.fasb.org/topic&trid=2127136",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r802": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(ii))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r803": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(iii))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r804": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r805": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r806": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r807": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130551-203045",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r808": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130545-203045",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r809": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(01)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r81": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r810": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e2417-114920",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r811": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r812": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r813": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r814": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r815": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r816": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r817": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r818": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r819": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r82": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r820": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r821": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(04)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r822": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r823": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r824": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r825": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r826": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r827": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r828": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r829": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r83": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "42",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9054-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r830": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r831": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r832": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r833": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r834": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r835": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r836": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(v)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r837": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32687-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r838": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r839": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32621-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r84": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 5.BB)",
   "Topic": "330",
   "URI": "https://asc.fasb.org/extlink&oid=27011343&loc=d3e100047-122729",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r840": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r841": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r842": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.7)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r843": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(2)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r844": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(3)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r845": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5579245-113959",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r846": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5580258-113959",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r847": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(3)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r848": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r849": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123596393&loc=d3e14064-108612",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r85": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r850": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)(3)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r851": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r852": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918701-209980",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r853": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "852",
   "URI": "https://asc.fasb.org/extlink&oid=124433192&loc=SL2890621-112765",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r854": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "852",
   "URI": "https://asc.fasb.org/extlink&oid=124433192&loc=SL2890621-112765",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r855": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r856": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r857": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r858": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r859": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r86": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=6388964&loc=d3e16225-109274",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r860": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r861": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "730",
   "Topic": "912",
   "URI": "https://asc.fasb.org/extlink&oid=6472174&loc=d3e58812-109433",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r862": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(1)(a))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r863": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(2))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r864": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4H",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=116884468&loc=SL65671331-158438",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r865": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(c)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126561865&loc=SL117783719-158441",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r866": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(a)",
   "Publisher": "SEC",
   "Section": "1404",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r87": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r88": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(3)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r89": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r9": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(26)(a))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r90": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(1)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r91": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(2)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r92": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(3)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r93": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "15",
   "SubTopic": "10",
   "Subparagraph": "(b)(2)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=126982154&loc=d3e400-110220",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r94": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=126905981&loc=d3e2510-110228",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r95": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=126905981&loc=d3e2473-110228",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r96": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r97": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r98": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r99": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  }
 },
 "version": "2.2"
}

Document and Entity Information - USD ($)	12 Months Ended
Document and Entity Information - USD ($)	Dec. 31, 2022	Feb. 13, 2023	Jul. 02, 2022
Cover [Abstract]
Document Type	10-K
Document Annual Report	true
Document Period End Date	Dec. 31, 2022
Entity File Number	001-32598
Document Transition Report	false
Entity Registrant Name	Entegris, Inc.
Entity Incorporation, State or Country Code	DE
Entity Tax Identification Number	41-1941551
Entity Address, Address Line One	129 Concord Road
Entity Address, City or Town	Billerica
Entity Address, State or Province	MA
Entity Address, Postal Zip Code	01821
City Area Code	978
Local Phone Number	436-6500
Title of 12(b) Security	Common Stock, $0.01 Par Value
Trading Symbol	ENTG
Security Exchange Name	NASDAQ
Entity Well-known Seasoned Issuer	Yes
Entity Voluntary Filers	No
Entity Current Reporting Status	Yes
Entity Interactive Data Current	Yes
Entity Filer Category	Large Accelerated Filer
Entity Small Business	false
Entity Emerging Growth Company	false
ICFR Auditor Attestation Flag	true
Entity Shell Company	false
Entity Public Float			$ 9,345,493,438
Entity Common Stock, Shares Outstanding		149,381,222
Entity Central Index Key	0001101302
Current Fiscal Year End Date	--12-31
Document Fiscal Year Focus	2022
Document Fiscal Period Focus	FY
Auditor Location	Minneapolis, Minnesota
Auditor Name	KPMG LLP
Amendment Flag	false
Auditor Firm ID	185

Consolidated Balance Sheets - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Current assets:
Cash and cash equivalents	$ 561,559	$ 402,565
Restricted cash	1,880	0
Trade accounts and notes receivable, net	535,485	347,413
Inventories, net	812,815	475,213
Deferred tax charges and refundable income taxes	47,618	35,312
Assets held-for-sale	246,531	0
Other current assets	129,297	52,867
Total current assets	2,335,185	1,313,370
Property, plant and equipment, net	1,393,337	654,098
Other assets:
Right-of-use assets	94,940	66,563
Goodwill	4,408,331	793,702
Intangible assets, net	1,841,955	335,113
Deferred tax assets and other noncurrent tax assets	28,867	17,671
Other noncurrent assets	36,242	11,379
Total assets	10,138,857	3,191,896
Current liabilities:
Short-term debt, including current portion of long-term debt	151,965	0
Accounts payable	172,488	130,734
Accrued payroll and related benefits	142,340	108,818
Accrued interest payable	25,571	6,073
Liabilities held-for-sale	10,637	0
Other accrued liabilities	160,873	84,240
Income taxes payable	98,057	49,136
Total current liabilities	761,931	379,001
Long-term debt, excluding current maturities	5,632,928	937,027
Pension benefit obligations and other liabilities	54,090	37,816
Deferred tax liabilities and other noncurrent tax liabilities	391,192	64,170
Long-term lease liabilities	80,716	60,101
Equity:
Preferred stock, par value $.01; 5,000,000 shares authorized; none issued and outstanding as of December 31, 2022 and December 31, 2021	0	0
Common stock, par value $.01; 400,000,000 shares authorized; issued and outstanding shares as of December 31, 2022: 149,339,486 and 149,137,086, respectively; issued and outstanding shares as of December 31, 2021: 135,719,366 and 135,516,966, respectively	1,493	1,357
Treasury stock, common, at cost: 202,400 shares held as of December 31, 2022 and December 31, 2021	(7,112)	(7,112)
Additional paid-in capital	2,205,325	879,845
Retained earnings	1,031,391	879,776
Accumulated other comprehensive loss	(13,097)	(40,085)
Total equity	3,218,000	1,713,781
Total liabilities and equity	$ 10,138,857	$ 3,191,896

Consolidated Balance Sheets (Parenthetical) - $ / shares	Dec. 31, 2022	Dec. 31, 2021
Preferred stock, par value	$ 0.01	$ 0.01
Preferred stock, shares authorized	5,000,000	5,000,000
Preferred stock, shares issued	0	0
Preferred stock, shares outstanding	0	0
Common stock, par value	$ 0.01	$ 0.01
Common stock, shares authorized	400,000,000	400,000,000
Common stock, shares issued	149,339,486	135,719,366
Common stock, shares outstanding	149,137,086	135,516,966
Treasury Stock, Shares	202,400	202,400

Consolidated Statements Of Operations - USD ($) shares in Thousands, $ in Thousands	12 Months Ended
	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Net sales	$ 3,282,033	$ 2,298,893	$ 1,859,313
Cost of sales	1,885,620	1,239,229	1,009,591
Gross profit	1,396,413	1,059,664	849,722
Selling, general and administrative expenses	543,485	292,408	265,128
Engineering, research and development expenses	228,994	167,632	136,057
Amortization	143,953	47,856	53,092
Operating income	479,981	551,768	395,445
Interest expense	212,669	41,240	48,600
Interest income	(3,694)	(243)	(786)
Other expense (income), net	23,926	31,695	(6,656)
Income before income tax expense	247,080	479,076	354,287
Income tax expense	38,160	69,950	59,318
Net income	$ 208,920	$ 409,126	$ 294,969
Earnings Per Share:
Basic net income per common share	$ 1.47	$ 3.02	$ 2.19
Diluted net income per common share	$ 1.46	$ 3.00	$ 2.16
Weighted average shares outstanding
Basic	142,294	135,411	134,837
Diluted	143,146	136,574	136,266

Consolidated Statements Of Comprehensive Income Paranthetical $ in Thousands	12 Months Ended
	Dec. 31, 2022 USD ($)
Net income	$ 208,920
Other Comprehensive Income (Loss), Tax	10,520
Retained earnings (deficit)
Net income	$ 208,920

Consolidated Statements Of Equity - USD ($) shares in Thousands, $ in Thousands	Total	Common stock	Treasury Stock, Common	Additional paid-in capital	Retained earnings (deficit)	Foreign currency translation adjustments	Defined benefit pension adjustments	Accumulated Gain (Loss), Net, Cash Flow Hedge, Parent [Member]
Balance	$ 1,165,889	$ 1,349	$ (7,112)	$ 842,784	$ 366,127	$ (36,468)	$ (791)	$ 0
Balance (in shares) at Dec. 31, 2019		134,930	202
Shares issued under stock plans (in shares)		997
Shares issued under stock plans	(16,062)	$ 10	$ 0	(16,072)	0	0	0	0
Share-based compensation expense	22,920	$ 0	0	22,920	0	0	0	0
Repurchase and retirement of common stock (in shares)		(778)
Repurchase and retirement of common stock	(44,563)	$ (8)	0	(4,820)	(39,735)	0	0	0
Dividends, Common Stock, Cash	(43,490)	0	0	38	(43,528)	0	0	0
Pension liability adjustment	(49)	0	0	0	0	0	(49)	0
Foreign currency translation	(120)	0	0	0	0	(120)	0	0
Net income	294,969	$ 0	$ 0	0	294,969	0	0	0
Balance (in shares) at Dec. 31, 2020		135,149	202
Balance	1,379,494	$ 1,351	$ (7,112)	844,850	577,833	(36,588)	(840)	0
Shares issued under stock plans (in shares)		1,133
Shares issued under stock plans	8,654	$ 11	0	8,643	0	0	0	0
Share-based compensation expense	29,884	$ 0	0	29,884	0	0	0	0
Repurchase and retirement of common stock (in shares)		(563)
Repurchase and retirement of common stock	(67,109)	$ (5)	0	(3,547)	(63,557)	0	0	0
Dividends, Common Stock, Cash	(43,611)	0	0	15	(43,626)	0	0	0
Pension liability adjustment	(382)	0	0	0	0	0	(382)	0
Foreign currency translation	(2,275)	0	0	0	0	(2,275)	0	0
Net income	409,126	$ 0	$ 0	0	409,126	0	0	0
Balance (in shares) at Dec. 31, 2021		135,719	202
Balance	1,713,781	$ 1,357	$ (7,112)	879,845	879,776	(38,863)	(1,222)	0
Shares issued under stock plans (in shares)		692
Shares issued under stock plans	(6,652)	$ 7	0	(6,659)	0	0	0	0
Share-based compensation expense	66,578	0	0	66,578	0	0	0	0
Repurchase and retirement of common stock	0
Issuance of common stock in connection with CMC Materials acquisition	1,265,690	$ 129	0	1,265,561	0	0	0	0
Issuance of common stock in connection with CMC Materials acquisition		12,928
Dividends, Common Stock, Cash	(57,305)	$ 0	0	0	(57,305)		0	0
Interest Rate Swap - Cash flow hedge	36,069	0	0	0	0	0	0	36,069
Pension liability adjustment	1,139	0	0	0	0	0	1,139	0
Foreign currency translation	(10,220)	0	0	0	0	(10,220)	0	0
Net income	208,920	$ 0	$ 0	0	208,920	0	0	0
Balance (in shares) at Dec. 31, 2022		149,339	202
Balance	$ 3,218,000	$ 1,493	$ (7,112)	$ 2,205,325	$ 1,031,391	$ (49,083)	$ (83)	$ 36,069

Commitments and Contingent Liabilities	12 Months Ended
Commitments and Contingent Liabilities	Dec. 31, 2022
Commitments and Contingencies Disclosure [Abstract]
Commitments and Contingent Liabilities	COMMITMENTS AND CONTINGENT LIABILITIESWe are involved in certain legal actions. The outcomes of these legal actions are not within our complete control and may not be known for prolonged periods of time. In some actions, the claimants seek damages, as well as other relief, that could require significant expenditures or result in lost revenues. We record a liability for these legal actions when a loss is known or considered probable and the amount can be reasonably estimated. If the reasonable estimate of a known or probable loss is a range, and no amount within the range is a better estimate than any other, the minimum amount of the range is accrued.

Subsequent Events	12 Months Ended
Subsequent Events	Dec. 31, 2022
Subsequent Events [Abstract]
Subsequent Events [Text Block]	SUBSEQUENT EVENTS On January 20, 2023, the Company announced a definitive agreement for Quad-C Management to acquire the QED business, which became part of the Company with the recent acquisition of CMC Materials. The selling price is expected to be approximately $135.0 million, subject to customary purchase price adjustments. The sale is currently expected to close in the first quarter of 2023, subject to the satisfaction of certain customary closing conditions, including, among others, receipt of regulatory approval. The Company does not expect a material gain or loss from the sale of the QED business.

Revenues Revenues - Contract Liabilities (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2022	Dec. 31, 2021
Revenue from Contract with Customer [Abstract]
Balance at beginning of year	$ 23,050	$ 13,852
Additions due to acquisition	11,108	0
Revenue recognized that was included in the contract liability balance at the beginning of the period	(30,667)	(13,819)
Increases due to cash received, excluding amounts recognized as revenue during the period	57,490	23,017
Contract liabilities included in asset held-for-sale	(505)	0
Balance at end of year	$ 60,476	$ 23,050

CMC Acquisition (Details) - USD ($) $ / shares in Units, $ in Thousands		3 Months Ended								6 Months Ended	12 Months Ended
	Jul. 06, 2022	Dec. 31, 2022	Oct. 01, 2022	Jul. 02, 2022	Apr. 02, 2022	Dec. 31, 2021	Oct. 02, 2021	Jul. 03, 2021	Apr. 03, 2021	Dec. 31, 2022	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020	Dec. 14, 2021
Business Acquisition
Net sales		$ 946,070	$ 993,828	$ 692,489	$ 649,646	$ 635,204	$ 579,493	$ 571,352	$ 512,844		$ 3,282,033	$ 2,298,893	$ 1,859,313
Long-term Debt, Gross		5,925,000				945,000				$ 5,925,000	5,925,000	945,000
Equity consideration on acquisition of CMC Materials, Inc.											1,265,690	0	0
Total purchase price, net of cash acquired											4,474,925	91,942	111,912
Goodwill		4,408,331				793,702				4,408,331	4,408,331	793,702	748,037
Income tax expense											38,160	69,950	59,318
Business Acquisition, Pro Forma Revenue											3,920,850	3,518,893
Business Acquisition, Pro Forma Net Income (Loss)											$ 308,741	$ (161,756)
Business Acquisition, Pro Forma Earnings Per Share, Basic											$ 2.08	$ (1.09)
Business Acquisition, Pro Forma Earnings Per Share, Diluted											$ 2.05	$ (1.09)
Repayments of Debt											$ 145,000
Charge for fair value mark-up of acquired inventory sold	$ 61,900									61,900	$ 61,932	$ 428	$ 590
Effective Income Tax Rate Reconciliation, at Federal Statutory Income Tax Rate, Percent											22.50%
Senior secured term loan facility due 2025
Business Acquisition
Long-term Debt, Gross	2,495,000	0				145,000				0	$ 0	145,000
Senior unsecured notes due 2030
Business Acquisition
Long-term Debt, Gross	895,000	895,000				0				895,000	895,000	0
Senior unsecured notes due 2029
Business Acquisition
Long-term Debt, Gross		400,000				400,000				400,000	400,000	400,000
Bridge Credit Facility due 2023
Business Acquisition
Bridge Credit Facility due 2023	275,000	135,000				0				135,000	135,000	0
Senior secured notes due 2029
Business Acquisition
Long-term Debt, Gross	1,600,000	1,600,000				$ 0				1,600,000	1,600,000	$ 0
CMC Materials
Business Acquisition
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed	6,000,000
Business Combination, Acquisition Related Costs											39,500
Net sales										581,000
Income (Loss) from Subsidiaries, Net of Tax										75,800
Total purchase price, net of cash acquired	$ 6,021,251	6,021,251								6,021,251	6,021,251			$ 6,021,251
Business Acquisition, Share Price	$ 133.00
Cash paid to CMC Materials’ shareholders											3,836,983
Equity consideration on acquisition of CMC Materials, Inc.											1,265,690
Repayment of CMC Materials’ indebtedness											918,578
Less cash and cash equivalents acquired											280,636
Total purchase price, net of cash acquired											5,740,615
Cash and cash equivalents	$ 280,636	280,636								280,636	280,636
Accounts receivable and other current assets	206,887	205,395								205,395	205,395
Inventories, net	256,598	256,598								256,598	256,598
Property, plant and equipment	534,363	537,386								537,386	537,386
Identifiable intangible assets	1,727,119	1,729,019								1,729,019	1,729,019
Other noncurrent assets	44,149	39,741								39,741	39,741
Current liabilities	(213,089)	(211,046)								(211,046)	(211,046)
Deferred tax liabilities and noncurrent liabilities	(448,550)	(444,935)								(444,935)	(444,935)
Net Assets Acquired	2,388,113	2,392,794								2,392,794	2,392,794
Goodwill	$ 3,633,138	3,628,457								3,628,457	3,628,457
Inventory, Noncurrent, Fair Value Disclosure		256,600								256,600	256,600
Property, Plant, and Equipment, Fair Value Disclosure		537,400								537,400	537,400
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	11 years 1 month 6 days
Goodwill, Fair Value Disclosure		$ 3,628,500								$ 3,628,500	$ 3,628,500
CMC Materials \| Developed Technology
Business Acquisition
Identifiable intangible assets	$ 1,035,600
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	7 years 3 months 18 days
CMC Materials \| Trademarks and Trade names
Business Acquisition
Identifiable intangible assets	$ 236,600
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	14 years 10 months 24 days
CMC Materials \| Customer Relationships
Business Acquisition
Identifiable intangible assets	$ 414,800
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	18 years 8 months 12 days
CMC Materials \| In Process Research and Development
Business Acquisition
Identifiable intangible assets	$ 31,100
CMC Materials \| Other
Business Acquisition
Identifiable intangible assets	$ 10,919
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	1 year 2 months 12 days

Acquisition - Precision Microchemicals (Details) - USD ($) $ in Thousands		12 Months Ended
	Nov. 30, 2021	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020	Apr. 02, 2022
Business Acquisition
Total purchase price, net of cash acquired		$ 4,474,925	$ 91,942	$ 111,912
Goodwill		$ 4,408,331	793,702	$ 748,037
Precision Microchemicals
Business Acquisition
Date of acquisition	Nov. 30, 2021
Acquisition costs			200
Total purchase price, net of cash acquired	$ 89,700
Identifiable intangible assets	44,910				$ 44,910
Inventories, net	967				967
Other current assets	19				19
Right-of-use assets	1,912				1,912
Property, plant and equipment	1,002				1,002
Other noncurrent assets	18				18
Accounts payable and accrued liabilities	(43)				(30)
Short-term lease liability	(170)				(170)
Long-term lease liability	(1,742)				(1,742)
Net Assets Acquired	46,873				46,886
Goodwill	42,819		$ 42,800		42,824
Total purchase price, net of cash acquired	$ 89,692				$ 89,710
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	14 years 1 month 6 days
Precision Microchemicals \| Developed Technology
Business Acquisition
Identifiable intangible assets	$ 9,600
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	9 years
Precision Microchemicals \| Trademarks and Trade names
Business Acquisition
Identifiable intangible assets	$ 3,400
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	15 years
Precision Microchemicals \| Customer Relationships
Business Acquisition
Identifiable intangible assets	$ 31,800
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	15 years 6 months
Precision Microchemicals \| Other
Business Acquisition
Identifiable intangible assets	$ 110

Cash, Cash Equivalents and Restricted Cash (Details) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020	Dec. 31, 2019
Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents [Abstract]
Cash and cash equivalents	$ 561,559	$ 402,565	$ 580,893	$ 351,911
Restricted cash	1,880	0
Total cash, cash equivalents and restricted cash	$ 563,439	$ 402,565	$ 580,893

Assets Held For Sale (Details) - USD ($) $ in Thousands	12 Months Ended
Assets Held For Sale (Details) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Assets Held-for-sale, Not Part of Disposal Group [Abstract]
Income (Loss) from Individually Significant Component Disposed of or Held-for-sale, Excluding Discontinued Operations, before Income Tax	$ 4,800
Accounts Receivable	16,103
Inventory	29,331
Other current assets	633
Property, Plant and Equipment, net	108,036
Intangible assets, net	76,319
Goodwill	8,822
Other assets	7,287
Total assets-held-for sale	246,531
Accounts payable	4,185
Accrued expenses	5,029
Long-term liabilities	1,423
Total liabilities-held-for sale	$ 10,637	$ 0

Trade Accounts and Notes Receivable (Detail) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Accounts, Notes, Loans and Financing Receivable, Gross, Allowance, and Net [Abstract]
Accounts receivable	$ 536,256	$ 347,111
Notes receivable	4,672	2,651
Total trade accounts and notes receivable	540,928	349,762
Less allowance for doubtful accounts	5,443	2,349
Trade accounts and notes receivable, net	$ 535,485	$ 347,413

Inventories Inventories - Additional Detail (Details) - USD ($) $ in Millions	Dec. 31, 2022	Dec. 31, 2021
Inventory Disclosure [Abstract]
Consignment inventory held by customers	$ 46.2	$ 16.0

Intangible Assets (Detail) - USD ($) $ in Thousands	12 Months Ended
Intangible Assets (Detail) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Finite-Lived Intangible Assets
Gross carrying Amount	$ 2,478,827	$ 829,714
Accumulated amortization	636,872	494,601
Net carrying value	$ 1,841,955	$ 335,113
Weighted average life in years	10 years 9 months 18 days	10 years 3 months 18 days
Developed Technology
Finite-Lived Intangible Assets
Gross carrying Amount	$ 1,302,101	$ 293,982
Accumulated amortization	313,876	232,722
Net carrying value	$ 988,225	$ 61,260
Weighted average life in years	7 years 3 months 18 days	7 years 2 months 12 days
Trademarks and Trade names
Finite-Lived Intangible Assets
Gross carrying Amount	$ 250,473	$ 33,553
Accumulated amortization	29,565	20,340
Net carrying value	$ 220,908	$ 13,213
Weighted average life in years	14 years 3 months 18 days	10 years 7 months 6 days
Customer Relationships
Finite-Lived Intangible Assets
Gross carrying Amount	$ 863,947	$ 481,674
Accumulated amortization	273,039	227,350
Net carrying value	$ 590,908	$ 254,324
Weighted average life in years	15 years 4 months 24 days	12 years 4 months 24 days
Other
Finite-Lived Intangible Assets
Gross carrying Amount	$ 31,206	$ 20,505
Accumulated amortization	20,392	14,189
Net carrying value	$ 10,814	$ 6,316
Weighted average life in years	4 years 3 months 18 days	6 years 7 months 6 days
In Process Research and Development
Finite-Lived Intangible Assets
Gross carrying Amount	$ 31,100
Accumulated amortization	0
Net carrying value	$ 31,100

Amortization Expense (Detail) - USD ($) $ in Thousands	12 Months Ended
Amortization Expense (Detail) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Goodwill and Intangible Assets Disclosure [Abstract]
Amortization expense	$ 143,953	$ 47,856	$ 53,092

Estimated Future Amortization Expense (Detail) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Goodwill and Intangible Assets Disclosure [Abstract]
2023	$ 230,469
2024	211,437
2025	204,917
2026	203,373
2027	199,859
Thereafter	791,900
Intangible assets, net	$ 1,841,955	$ 335,113

Debt Summary Table (Details) - USD ($) $ in Thousands	12 Months Ended
Debt Summary Table (Details) - USD ($) $ in Thousands	Dec. 31, 2022	Jul. 06, 2022	Dec. 31, 2021
Debt Instrument
Long-term Debt, Gross	$ 5,925,000		$ 945,000
Unamortized discount and debt issuance costs	140,107		7,973
Total debt, net	5,784,893		937,027
Less short-term debt, including current portion of long-term debt	151,965		0
Total long-term debt, net	5,632,928		937,027
Senior secured term loan facility due 2029
Debt Instrument
Long-term Debt, Gross	2,495,000		0
Senior secured notes due 2029
Debt Instrument
Long-term Debt, Gross	1,600,000	$ 1,600,000	0
Senior unsecured notes due 2030
Debt Instrument
Long-term Debt, Gross	895,000	895,000	0
Senior unsecured notes due 2029
Debt Instrument
Long-term Debt, Gross	400,000		400,000
Senior unsecured notes due 2028
Debt Instrument
Long-term Debt, Gross	400,000		400,000
Senior secured term loan facility due 2025
Debt Instrument
Long-term Debt, Gross	0	2,495,000	145,000
Payments for Loans	145,000
Bridge Credit Facility due 2023
Debt Instrument
Bridge Credit Facility due 2023	135,000	$ 275,000	$ 0
Payments for Loans	$ 140,000

Debt - Maturity Schedule (Details) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Debt Disclosure [Abstract]
2023	$ 153,713
2024	24,950
2025	24,950
2026	24,950
2027	24,950
Thereafter	5,671,487
Long-term Debt, Gross	$ 5,925,000	$ 945,000

Fair Value Measures and Disclosures (Details) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Fair Value, Balance Sheet Grouping, Financial Statement Captions [Line Items]
Total Assets	$ 10,138,857	$ 3,191,896	$ 2,917,696
Long-term Debt, Fair Value	5,428,900	952,500
Total long-term debt	5,784,893	937,027
Fair Value, Inputs, Level 1
Fair Value, Balance Sheet Grouping, Financial Statement Captions [Line Items]
Cash and cash equivalents	561,559	402,565
Restricted cash	1,880	0
Derivative financial instruments - Interest rate swap - cash flow hedge	$ 0	$ 0
Derivative Asset, Current, Statement of Financial Position [Extensible Enumeration]
Total Assets	$ 563,439	$ 402,565
Derivative financial instruments - Forward exchange contracts
Derivative Liability, Statement of Financial Position [Extensible Enumeration]
Fair Value, Inputs, Level 2 [Member]
Fair Value, Balance Sheet Grouping, Financial Statement Captions [Line Items]
Cash and cash equivalents	$ 0	$ 0
Restricted cash	0	0
Derivative financial instruments - Interest rate swap - cash flow hedge	$ 46,589	$ 0
Derivative Asset, Current, Statement of Financial Position [Extensible Enumeration]
Derivative financial instruments -Forward exchange contracts		$ 0
Total Assets	$ 47,315	$ 0
Derivative financial instruments - Forward exchange contracts
Derivative Liability, Statement of Financial Position [Extensible Enumeration]
Fair Value, Inputs, Level 3 [Member]
Fair Value, Balance Sheet Grouping, Financial Statement Captions [Line Items]
Cash and cash equivalents	$ 0	$ 0
Restricted cash	0	0
Derivative financial instruments - Interest rate swap - cash flow hedge	$ 0	$ 0
Derivative Asset, Current, Statement of Financial Position [Extensible Enumeration]
Total Assets	$ 0	$ 0
Derivative financial instruments - Forward exchange contracts
Derivative Liability, Statement of Financial Position [Extensible Enumeration]
Fair Value, Inputs, Level 1, Level 2, and Level 3 [Member]
Fair Value, Balance Sheet Grouping, Financial Statement Captions [Line Items]
Cash and cash equivalents	$ 561,559	$ 402,565
Restricted cash	1,880	0
Derivative financial instruments - Interest rate swap - cash flow hedge	$ 46,589	$ 0
Derivative Asset, Current, Statement of Financial Position [Extensible Enumeration]
Total Assets	$ 610,754	$ 402,565
Derivative financial instruments - Forward exchange contracts
Derivative Liability, Statement of Financial Position [Extensible Enumeration]

Leases - Lease Balances (Details) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Lessee, Lease, Description [Line Items]
Right-of-use assets	$ 94,940	$ 66,563
Long-term lease liabilities	80,716	60,101
Present value of lease liabilities	$ 99,741	$ 70,739
Operating leases	7 years 9 months 18 days	9 years 2 months 12 days
Weighted average discount rate	4.10%	4.20%
Lease renewal options	10 years
Operating Lease, Right-of-Use Asset, Statement of Financial Position [Extensible Enumeration]	Right-of-use assets
Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible Enumeration]	Long-term lease liabilities
Short-term lease liability
Lessee, Lease, Description [Line Items]
Short-term lease liability	$ 19,025	$ 10,638

Lease - Future Minimum Lease Payments (Details) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Leases [Abstract]
One Year	$ 22,817
Two Years	18,252
Three Years	13,990
Four Years	11,919
Five Years	10,455
Beyond Five Years	39,863
Total	117,296
Less: Interest	17,555
Present value of lease liabilities	$ 99,741	$ 70,739

Asset Retirement Obligations (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2022	Dec. 31, 2021
Asset Retirement Obligation [Abstract]
Balance at beginning of year	$ 17,494	$ 14,500
Liabilities assumed in acquisitions	12,531	0
Liabilities settled	(453)	(78)
Liabilities incurred	788	3,274
Accretion expense	213	166
Disposition	(2,815)	0
Revision of estimate	277	(368)
Balance at end of year	$ 28,035	$ 17,494

Income Taxes - Deferred Tax Assets and Deferred Tax Liabilities (Detail) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021
Income Tax Disclosure [Abstract]
Accounts receivable	$ 1,239	$ 397
Inventory	14,862	6,510
Accruals not currently deductible for tax purposes	25,787	19,636
Net operating loss and credit carryforwards	57,760	42,599
Capital loss carryforward	895	485
Equity compensation	15,249	2,630
Other, net	5,670	7,786
Gross deferred tax assets	121,462	80,043
Valuation allowance	(48,047)	(39,383)
Total deferred tax assets	73,415	40,660
Purchased intangible assets	(364,979)	(33,887)
Depreciation	(2,719)	(9,102)
Gross deferred tax liabilities	(367,698)	(42,989)
Total deferred tax liabilities	$ (294,283)	$ (2,329)

Income Taxes Income Taxes - Deferred tax additional information (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2022	Dec. 31, 2021
Income Taxes [Line Items]
Deferred Tax Liabilities, Net	$ 294,283	$ 2,329
Deferred Tax Assets, Valuation Allowance	48,047	39,383
Domestic Tax Authority
Income Taxes [Line Items]
Deferred Tax Liabilities, Net	298,500
Deferred Tax Assets, Valuation Allowance	$ 18,500	16,100
Operating Loss Carryforwards, Expiration Date	Jan. 01, 2022
Deferred Tax Assets, Net		3,000
State and Local Jurisdiction
Income Taxes [Line Items]
Deferred Tax Assets, Operating Loss Carryforwards, State and Local	$ 18,300
Foreign Tax Authority
Income Taxes [Line Items]
Deferred Tax Assets, Valuation Allowance	$ 29,500	23,300
Operating Loss Carryforwards, Expiration Date	Jan. 01, 2023
Deferred Tax Assets, Operating Loss Carryforwards, Foreign	$ 82,700
Deferred Tax Assets, Net	$ 52,300	$ 34,000

Equity - Summary of Options Outstanding (Detail) shares in Thousands	12 Months Ended
	Dec. 31, 2022 $ / shares shares
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range
Number of Options outstanding \| shares	1,839
Options outstanding, Weighted average remaining life in years	4 years
Options outstanding, Weighted-average exercise price	$ 62.59
Number of Options exercisable \| shares	1,386
Options exercisable, Weighted average exercise price	$ 54.53
$— to $31.10
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range
Range of exercise prices, minimum	0
Range of exercise prices, maximum	$ 31.10
Number of Options outstanding \| shares	343
Options outstanding, Weighted average remaining life in years	1 year 10 months 24 days
Options outstanding, Weighted-average exercise price	$ 24.89
Number of Options exercisable \| shares	343
Options exercisable, Weighted average exercise price	$ 24.89
$31.11 to $43.47
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range
Range of exercise prices, minimum	31.11
Range of exercise prices, maximum	$ 43.47
Number of Options outstanding \| shares	222
Options outstanding, Weighted average remaining life in years	3 years 4 months 24 days
Options outstanding, Weighted-average exercise price	$ 34.05
Number of Options exercisable \| shares	149
Options exercisable, Weighted average exercise price	$ 34.40
$43.48 to $55.72
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range
Range of exercise prices, minimum	43.48
Range of exercise prices, maximum	$ 55.72
Number of Options outstanding \| shares	260
Options outstanding, Weighted average remaining life in years	3 years 8 months 12 days
Options outstanding, Weighted-average exercise price	$ 53.83
Number of Options exercisable \| shares	151
Options exercisable, Weighted average exercise price	$ 52.47
$55.73 to $80.00
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range
Range of exercise prices, minimum	55.73
Range of exercise prices, maximum	$ 80.00
Number of Options outstanding \| shares	663
Options outstanding, Weighted average remaining life in years	4 years 6 months
Options outstanding, Weighted-average exercise price	$ 70.29
Number of Options exercisable \| shares	663
Options exercisable, Weighted average exercise price	$ 70.29
$80.01 to $128.44
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range
Range of exercise prices, minimum	80.01
Range of exercise prices, maximum	$ 128.44
Number of Options outstanding \| shares	351
Options outstanding, Weighted average remaining life in years	5 years 7 months 6 days
Options outstanding, Weighted-average exercise price	$ 109.43
Number of Options exercisable \| shares	80
Options exercisable, Weighted average exercise price	$ 92.50

Equity - Additional Information (Detail) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended													6 Months Ended	12 Months Ended
	Apr. 01, 2023 $ / shares	Dec. 31, 2022 USD ($) $ / shares shares	Oct. 01, 2022 $ / shares	Jul. 02, 2022 $ / shares	Apr. 02, 2022 $ / shares	Dec. 31, 2021 USD ($) $ / shares shares	Oct. 02, 2021 $ / shares	Jul. 03, 2021 $ / shares	Apr. 03, 2021 $ / shares	Dec. 31, 2020 $ / shares shares	Sep. 26, 2020 $ / shares	Jun. 27, 2020 $ / shares	Mar. 28, 2020 $ / shares	Dec. 31, 2022 USD ($) $ / shares shares	Dec. 31, 2022 USD ($) $ / shares shares	Dec. 31, 2021 USD ($) $ / shares shares	Dec. 31, 2020 USD ($) $ / shares shares	Jul. 06, 2022 shares
Equity [Line Items]
Dividends, Common Stock, Cash															$ (57,305)	$ (43,611)	$ (43,490)
Dividends declared per share \| $ / shares		$ 0.10	$ 0.10	$ 0.10	$ 0.10	$ 0.08	$ 0.08	$ 0.08	$ 0.08	$ 0.08	$ 0.08	$ 0.08	$ 0.08
Common Stock, Dividends, Per Share, Declared \| $ / shares															$ 0.40	$ 0.32	$ 0.32
Stock Repurchase Program, Authorized Amount						$ 125,000										$ 125,000
Stock Repurchased and Retired During Period, Value															$ 0	$ (67,109)	$ (44,563)
Term of plan, in years															10 years
Share-Based Compensation Arrangement by Share-Based Payment Award, Non-Option Equity Instruments, Granted \| shares															3,900
Ratio of Options exchanged		1.82												1.82	1.82
Options exchanged \| shares														600
Common Stock exchanged for Options \| shares														1,200
Ratio of common stock exchanged															1.82
RSU exchanged \| shares		100												100	100
Common Stock exchanged for RSU \| shares																		200
Shares available for future grants \| shares		10,900				8,700				9,000				10,900	10,900	8,700	9,000
Weighted average remaining contractual term option outstanding															4 years
Weighted average remaining contractual term option exercisable															3 years 8 months 12 days
Total pre-tax intrinsic value of stock options exercised															$ 11,400	$ 54,700
Total pre-tax intrinsic value based on the closing stock price \| $ / shares		$ 65.59												$ 65.59	$ 65.59
Intrinsic value of stock options outstanding		$ 25,700												$ 25,700	$ 25,700
Intrinsic value of stock options exercisable		22,300												22,300	$ 22,300
Number of shares, Granted \| shares															146	167	216
Contractual term of stock options (in years)															7 years
performance shares granted \| shares															100	100	100
Share-based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Period for Recognition															2 years 6 months
Employee Benefits and Share-Based Compensation															$ 15,300
share based compensation modification amount															$ 6,200
Subsequent Event [Member]
Equity [Line Items]
Common Stock, Dividends, Per Share, Declared \| $ / shares	$ 0.10
Maximum
Equity [Line Items]
Vesting period, in years															4 years
Restricted Stock
Equity [Line Items]
Total compensation cost not yet recognized		43,400												43,400	$ 43,400
Unvested Stock Options
Equity [Line Items]
Total compensation cost not yet recognized		3,700												3,700	3,700
Performance Stock
Equity [Line Items]
Total compensation cost not yet recognized		$ 2,800												$ 2,800	$ 2,800
Employee Stock Purchase Plan
Equity [Line Items]
Shares available for future grants \| shares		1,300												1,300	1,300
Weighted-average price per share paid by the employees \| $ / shares		$ 65.25				$ 90.89				$ 46.58				$ 65.25	$ 65.25	$ 90.89	$ 46.58
Percentage of employee contribution from compensation															10.00%
Rate of discount from the fair market value															15.00%
Shares purchase by employees \| shares															200	100	200

Expected Contribution and Benefit Payments (Detail) $ in Thousands	Dec. 31, 2022 USD ($)
Defined Benefit Plans and Other Postretirement Benefit Plans Disclosures [Abstract]
Payments in Year 2023	$ 735
Payments in Year 2024	779
Payments in Year 2025	1,264
Payments in Year 2026	1,127
Payments in year 2027	922
Payments in years 2028-2032	$ 5,940

Segment Information - Summary of Property, Plant and Equipment Attributed to Significant Countries (Detail) - USD ($) $ in Thousands	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Segment Reporting Information
Property, plant and equipment	$ 1,393,337	$ 654,098	$ 525,367
NORTH AMERICA
Segment Reporting Information
Property, plant and equipment	776,913	417,549	348,363
SOUTH KOREA
Segment Reporting Information
Property, plant and equipment	84,253	58,725	55,404
JAPAN
Segment Reporting Information
Property, plant and equipment	104,282	56,357	41,044
MALAYSIA
Segment Reporting Information
Property, plant and equipment	46,703	29,443	32,727
CHINA
Segment Reporting Information
Property, plant and equipment	253,285	32,133	29,528
TAIWAN
Segment Reporting Information
Property, plant and equipment	31,592	58,444	17,050
All Other Segments
Segment Reporting Information
Property, plant and equipment	$ 96,309	$ 1,447	$ 1,251