| | | | | | | | |
| Name of Subsidiary | | Jurisdiction |
| ATMI International Trading Co. Ltd. | | China |
| CMC Materials Asia Pte. Ltd. | | Singapore |
| CMC Materials B.V. | | The Netherlands |
| CMC Materials EC, Inc. | | Texas |
| CMC Materials EC Pte. Ltd. | | Singapore |
| CMC Materials France SAS | | France |
| CMC Materials Global Corp. | | Delaware |
| CMC Materials Inc. | | Delaware |
| CMC Materials Italia Srl | | Italy |
| CMC Materials Japan KK | | Japan |
| CMC Materials KK | | Japan |
| CMC Materials KMG Corporation | | Texas |
| CMC Materials Korea, LLC | | South Korea |
| CMC Materials Luxembourg Holdings S.a.r.l. | | Luxembourg |
| CMC Materials SDN BHD | | Malaysia |
| CMC Materials Sealweld Canada, Inc. | | Canada |
| CMC Materials Shanghai Co., Ltd. | | China |
| CMC Materials Singapore Pte. Ltd. | | Singapore |
| CMC Materials Taiwan Co., Ltd. | | Taiwan |
| CMC Materials UK Limited | | United Kingdom |
| CMC Materials UPC Limited | | United Kingdom |
| CMC Materials UPS SAS | | France |
| Entegris Canada Limited | | Canada |
| Digital Specialty Chemicals UK Limited | | United Kingdom |
| Entegris Asia LLC | | Delaware |
| Entegris Asia-U.S. LLC | | Delaware |
| Entegris Asia Pte. Ltd. | | Singapore |
| Entegris Ecosys LLC | | Delaware |
| Entegris GmbH | | Germany |
| Entegris GP, Inc. | | Delaware |
| Entegris International Holdings B.V. | | The Netherlands |
| Entegris International Holdings II B.V. | | The Netherlands |
| Entegris International Holdings III B.V. | | The Netherlands |
| Entegris International Holdings IV LLC | | Delaware |
| Entegris International Holdings V LLC | | Delaware |
| Entegris International Holdings VI LLC | | Delaware |
| Entegris International Holdings VII LLC | | The Netherlands |
| Entegris International Holdings VIII LLC | | The Netherlands |
| Entegris International Holdings, Inc. | | Delaware |
| Entegris Ireland Unlimited Company | | Ireland |
| Entegris Israel Ltd. | | Israel |
| Entegris Japan Co. Ltd. | | Japan |
| Entegris Korea Co., Ltd. | | South Korea |
| Entegris Korea II Ltd. | | South Korea |