Exhibit 21.1
SUBSIDIARIES OF ASYST TECHNOLOGIES, INC.
     
    STATE/COUNTRY OF
NAME   INCORPORATION
Asyst Technologies Europe, Ltd.
  U.K.
Asyst Technologies GmbH
  Germany
Asyst Technologies (Far East) Pte. Ltd.
  Singapore
Asyst Technologies (Taiwan) Ltd.
  R.O.C.
Asyst Technologies Malaysia Sdn. Bhd.
  Malaysia
SMIF Equipment (Tianjin) Co., Ltd.
  P.R.C.
Korea Asyst Ltd.
  Korea
Asyst Japan, Inc.
  Japan
Asyst Shinko, Inc.
  Japan