Exhibit 23.1
Consent of Independent Registered Public Accounting Firm
We consent to the incorporation by reference in the registration statements listed below of our reports dated February 25, 2026, with respect to the consolidated financial statements of Veeco Instruments Inc. and subsidiaries and the effectiveness of internal control over financial reporting.
Registration No. | | Form | | Plan |
333-166852 | | S-8 | | Veeco Instruments Inc. 2010 Stock Incentive Plan |
333-194737 | | S-8 | | Veeco Instruments Inc. 2010 Stock Incentive Plan, Veeco Instruments Inc. 2013 Inducement Stock Incentive Plan |
333-211781 | | S-8 | | Veeco Instruments Inc. Amended and Restated 2010 Stock Incentive Plan, Veeco Instruments Inc. 2016 Employee Stock Purchase Plan |
333-218256 | | S-8 | | Ultratech, Inc. 1993 Stock Option/Stock Issuance Plan as amended and restated May 31, 2017 |
333-231266 | | S-8 | | Veeco Instruments Inc. 2019 Stock Incentive Plan; First Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan |
333-242450 | | S-3 | | Veeco Instruments Inc. Shelf Registration Statement |
333-256004 | | S-8 | | Second Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan |
333-265117 | | S-8 | | Amendment No. 1 to the Veeco Instruments Inc. 2019 Stock Incentive Plan |
333-281439 | | S-8 | | Amendment No. 2 to the Veeco Instruments Inc. 2019 Stock Incentive Plan |
333-287518 | | S-8 | | Third Amendment to the Veeco Instruments Inc. 2016 Employee Stock Purchase Plan |
333-287523 | | S-3 | | Veeco Instruments Inc. Shelf Registration Statement |
/s/ KPMG LLP
Santa Clara, California
February 25, 2026